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1. 发明授权

US08810892B2 Micro-mirror system and associated control method 有权
标题翻译：微镜系统及相关控制方法
公开(公告)号：US08810892B2
公开(公告)日：2014-08-19
申请号：US13431202
申请日：2012-03-27
申请人： Mohamad Iyad Al Dibs , Axel Wenzler , Oliver Krayl
发明人： Mohamad Iyad Al Dibs , Axel Wenzler , Oliver Krayl
IPC分类号： G02B26/00 , G02B26/02 , G02F1/00
CPC分类号： G02B26/0833 , G09G3/3466 , G09G2320/041
摘要： A micro-mirror system having a micro-mirror actuator, a sensor for detecting the position of the micro-mirror actuator, a light module having at least one light source and an associated control system via which a light intensity of the light source is controllable, and an evaluation and control unit which is designed to control the micro-mirror actuator as a function of an output signal of the sensor. The system provides that the evaluation and control unit includes a compensation routine in which an offset voltage of the output signal of the sensor is settable as a function of the light intensity of the light source to be expected at the point in time that the micro-mirror actuator is activated.
摘要翻译：具有微反射镜致动器，用于检测微反射镜致动器的位置的传感器的微镜系统，具有至少一个光源的光模块和相关联的控制系统，光源的光强度可通过该控制系统控制以及评估和控制单元，其被设计成根据传感器的输出信号来控制微镜致动器。该系统提供评估和控制单元包括补偿程序，其中传感器的输出信号的偏移电压可设置为在微时刻的时间点期望的光源的光强度的函数，反光镜驱动器被激活。

2. 发明申请

US20140117888A1 MECHANICAL COMPONENT, MECHANICAL SYSTEM, AND METHOD FOR OPERATING A MECHANICAL COMPONENT 有权
标题翻译：机械部件，机械系统和操作机械部件的方法
公开(公告)号：US20140117888A1
公开(公告)日：2014-05-01
申请号：US14060887
申请日：2013-10-23
申请人： Mohamad IYAD AL DIBS , Frederic NJIKAM NJIMONZIE , Joerg MUCHOW
发明人： Mohamad IYAD AL DIBS , Frederic NJIKAM NJIMONZIE , Joerg MUCHOW
IPC分类号： H02P25/02
CPC分类号： B81C99/003 , G02B26/0833
摘要： A mechanical component has: a mount; an adjustable part selectively set at least into a first vibration mode having a first natural frequency and into a second vibration mode having a second natural frequency; a first sensor unit providing a first sensor signal; and a second sensor unit providing a second sensor signal. The first and second sensor units are interconnected in such a way that an overall signal is generated with the aid of at least the first and second sensor signals, the overall signal having an overall ratio of a first maximum absolute value which arises in the event of an excitation of the first vibration mode, and a second maximum absolute value which arises in the event of an excitation of the second vibration mode.
摘要翻译：机械部件有：安装座; 可调部分至少选择性地设置为具有第一固有频率的第一振动模式和具有第二固有频率的第二振动模式; 提供第一传感器信号的第一传感器单元; 和提供第二传感器信号的第二传感器单元。第一传感器单元和第二传感器单元以至少第一和第二传感器信号产生总体信号的方式相互连接，整个信号具有在下列情况下产生的第一最大绝对值的总比：第一振动模式的激励和在第二振动模式的激发的情况下产生的第二最大绝对值。

3. 发明申请

US20120086367A1 ACTUATING DEVICE, MICROSYSTEM DEVICE, AND METHOD FOR CONTROLLING A MICROMECHANICAL ACTUATOR 审中-公开
标题翻译：致动器件，微结构器件和控制微机电致动器的方法
公开(公告)号：US20120086367A1
公开(公告)日：2012-04-12
申请号：US13247510
申请日：2011-09-28
申请人： Mohamad IYAD AL DIBS , Axel WENZLER
发明人： Mohamad IYAD AL DIBS , Axel WENZLER
IPC分类号： H02N1/00
CPC分类号： H02N1/006 , H02N2/001
摘要： A method, actuating device, and microsystem device are described for controlling a micromechanical actuator, which has a rechargeable capacitor for generating a mechanical motion of the micromechanical actuator, a memory having a lookup table containing previously computed data of signal shapes for controlling the micromechanical actuator, and a driver circuit having a driver circuit control unit for processing the previously computed data, a power stage for generating the signal shapes, and an output for outputting the signal shapes, corresponding to previously computed data, to the micromechanical actuator's rechargeable capacitor. The micromechanical actuator has a limiting device, between the output of the driver circuit and the micromechanical actuator, which is for limiting a voltage excursion of the signal shapes output by the driver circuit, which are usable for generating the mechanical motion by recharging the micromechanical actuator's rechargeable capacitor. The micromechanical actuator's power consumption is reducible by limiting the voltage excursion.
摘要翻译：描述了一种用于控制微机械致动器的方法，致动装置和微系统装置，微机械致动器具有用于产生微机械致动器的机械运动的可再充电电容器，具有查找表的存储器，该查找表包含用于控制微机械致动器的先前计算的信号形状数据以及具有用于处理先前计算的数据的驱动电路控制单元的驱动器电路，用于产生信号形状的功率级，以及用于将对应于先前计算的数据的信号形状输出到微机械致动器的可再充电电容器的输出。微机械致动器在驱动电路的输出和微机械致动器之间具有限制装置，该限制装置用于限制由驱动电路输出的信号形状的电压偏移，可用于通过对微机械致动器的再充电来产生机械运动可充电电容。微机械执行器的功耗可以通过限制电压偏移来减少。

4. 发明申请

US20150062681A1 METHOD FOR ADAPTING THE PARAMETERS OF A CONTROLLER FOR MICROMECHANICAL ACTUATORS, AND DEVICE 有权
标题翻译：适用于微机电致动器的控制器和装置的参数的方法
公开(公告)号：US20150062681A1
公开(公告)日：2015-03-05
申请号：US14471896
申请日：2014-08-28
申请人： Mohamad IYAD AL DIBS
发明人： Mohamad IYAD AL DIBS
IPC分类号： G02B26/08
CPC分类号： G02B26/0833 , B81B3/00 , B81C99/003
摘要： A method for adapting the parameters of a controller for micromechanical actuators, including the following steps: acting on the micromechanical actuator with a test signal which has a step, detecting a test signal response of the micromechanical actuator to the test signal, identifying an absolute position of at least one mode in the detected test signal response, and adapting at least one of the parameters of the controller based on the identified absolute position of the at least one mode. Moreover, a corresponding device is described.
摘要翻译：一种用于调整用于微机械致动器的控制器的参数的方法，包括以下步骤：利用具有步骤的测试信号作用于微机械致动器，检测微机械致动器对测试信号的测试信号响应，识别绝对位置在所检测的测试信号响应中的至少一个模式，以及基于所识别的所述至少一个模式的绝对位置来适配所述控制器的至少一个参数。此外，描述了相应的装置。

5. 发明申请

US20130293161A1 DIGITAL CONTROL FOR A MICROELECTROMECHANICAL ELEMENT 有权
标题翻译：微电子元件数字控制
公开(公告)号：US20130293161A1
公开(公告)日：2013-11-07
申请号：US13988457
申请日：2011-10-13
申请人： Mohamad Iyad Al Dibs , Axel Wenzler , Oliver Krayl
发明人： Mohamad Iyad Al Dibs , Axel Wenzler , Oliver Krayl
IPC分类号： H02P13/00
CPC分类号： H02P13/00 , G02B26/0833 , H02N1/002
摘要： A control circuit for a microelectromechanical element includes: a waveform generator, which is designed to generate a digital trigger signal for the microelectromechanical element, a modulator, which is designed to oversample the digital trigger signal, to subject the signal to a noise shaping, and to output the oversampled and noise-shaped digital trigger signal; and a digital driver device, which is designed to drive the microelectromechanical element using the oversampled and noise-shaped digital trigger signal.
摘要翻译：用于微机电元件的控制电路包括：波形发生器，其被设计为产生用于微机电元件的数字触发信号;调制器，被设计为过采样数字触发信号，以对信号进行噪声整形;以及输出过采样和噪声形状的数字触发信号; 以及数字驱动器装置，其被设计成使用过采样和噪声形状的数字触发信号驱动微机电元件。

6. 发明申请

US20120262775A1 Micro-Mirror System And Associated Control Method 有权
标题翻译：微镜系统及相关控制方法
公开(公告)号：US20120262775A1
公开(公告)日：2012-10-18
申请号：US13431202
申请日：2012-03-27
申请人： Mohamad Iyad Al Dibs , Axel Wenzler , Olliver Krayl
发明人： Mohamad Iyad Al Dibs , Axel Wenzler , Olliver Krayl
IPC分类号： G02B26/00
CPC分类号： G02B26/0833 , G09G3/3466 , G09G2320/041
摘要： A micro-mirror system having a micro-mirror actuator, a sensor for detecting the position of the micro-mirror actuator, a light module having at least one light source and an associated control system via which a light intensity of the light source is controllable, and an evaluation and control unit which is designed to control the micro-mirror actuator as a function of an output signal of the sensor. The system provides that the evaluation and control unit includes a compensation routine in which an offset voltage of the output signal of the sensor is settable as a function of the light intensity of the light source to be expected at the point in time that the micro-mirror actuator is activated.
摘要翻译：具有微反射镜致动器，用于检测微反射镜致动器的位置的传感器的微镜系统，具有至少一个光源的光模块和相关联的控制系统，光源的光强度可通过该控制系统控制以及评估和控制单元，其被设计成根据传感器的输出信号来控制微镜致动器。该系统提供评估和控制单元包括补偿程序，其中传感器的输出信号的偏移电压可设置为在微时刻的时间点期望的光源的光强度的函数，反光镜驱动器被激活。

7. 发明授权

US09354441B2 Method for adapting the parameters of a controller for micromechanical actuators, and device 有权
标题翻译：用于适应微机械致动器的控制器的参数的方法和装置
公开(公告)号：US09354441B2
公开(公告)日：2016-05-31
申请号：US14471896
申请日：2014-08-28
申请人： Mohamad Iyad Al Dibs
发明人： Mohamad Iyad Al Dibs
IPC分类号： G02B26/08 , B81B3/00 , B81C99/00
CPC分类号： G02B26/0833 , B81B3/00 , B81C99/003
摘要： A method for adapting the parameters of a controller for micromechanical actuators, including the following steps: applying on the micromechanical actuator a test signal which has a step, detecting a test signal response of the micromechanical actuator to the test signal, identifying an absolute position of at least one mode in the detected test signal response, and adapting at least one of the parameters of the controller based on the identified absolute position of the at least one mode. Moreover, a corresponding device is described.
摘要翻译：一种用于适应微机械致动器的控制器的参数的方法，包括以下步骤：在微机械致动器上施加具有步骤的测试信号，检测微机械致动器对测试信号的测试信号响应，识别绝对位置在检测到的测试信号响应中的至少一个模式，以及基于所识别的至少一个模式的绝对位置来调整控制器的至少一个参数。此外，描述了相应的装置。

8. 发明申请

US20150062684A1 CONTROLLER FOR ACTUATING A MICROMECHANICAL ACTUATOR, ACTUATING SYSTEM FOR ACTUATING A MICROMECHANICAL ACTUATOR, MICRO-MIRROR SYSTEM AND METHOD FOR ACTUATING A MICROMECHANICAL ACTUATOR 有权
标题翻译：用于致动微机械致动器的控制器，用于致动微机械致动器的致动器系统，微镜系统和用于致动微机械致动器的方法
公开(公告)号：US20150062684A1
公开(公告)日：2015-03-05
申请号：US14471765
申请日：2014-08-28
申请人： Axel WENZLER , Mohamad IYAD AL DIBS
发明人： Axel WENZLER , Mohamad IYAD AL DIBS
IPC分类号： G02B26/08
CPC分类号： G02B26/0841
摘要： A controller for actuating a micromechanical actuator, including a first signal input which is designed to receive a reference signal, a second signal input which is designed to receive a measuring signal which denotes a recorded response by the micromechanical actuator to a control signal, a first controller element which is designed to filter and/or to attenuate predefined frequency modes and/or predefined frequency components in the received reference signal and to output a filtered and/or attenuated reference signal, a second controller element which is designed to modify the received measuring signal in order to minimize the quality of the first mode of the received measuring signal and to output a modified measuring signal, a third controller element which is designed to minimize the deviation between the filtered and/or attenuated reference signal and the received measuring signal and to output a minimized reference signal, a fourth controller element which is designed to modify the bandwidth of the received measuring signal and to subtract it from the minimized reference signal, which makes up the control signal. Furthermore, a corresponding actuating system, a corresponding micro-mirror system and a corresponding method are described.
摘要翻译：一种用于致动微机械致动器的控制器，包括被设计为接收参考信号的第一信号输入，被设计为接收表示由微机械致动器对控制信号的记录响应的测量信号的第二信号输入端，第一控制器元件，其被设计为过滤和/或衰减所接收的参考信号中的预定频率模式和/或预定义的频率分量，并输出滤波和/或衰减的参考信号;第二控制器元件，被设计为修改所接收的测量信号，以便最小化所接收的测量信号的第一模式的质量并输出修改的测量信号;第三控制器元件，其被设计为最小化滤波和/或衰减的参考信号与接收的测量信号之间的偏差;以及以输出最小化的参考信号，被设计为修改的第四控制器元件接收到的测量信号的带宽，并将其从构成控制信号的最小化参考信号中减去。此外，描述了相应的致动系统，相应的微镜系统和相应的方法。

9. 发明申请

US20140118005A1 MECHANICAL COMPONENT AND MANUFACTURING METHOD FOR A MECHANICAL COMPONENT 审中-公开
标题翻译：机械部件的机械部件和制造方法
公开(公告)号：US20140118005A1
公开(公告)日：2014-05-01
申请号：US14060879
申请日：2013-10-23
申请人： Wolfgang HEINZELMANN , Mohamad IYAD AL DIBS , Rainer STRAUB , Stefan PINTER , Frederic NJIKAM NJIMONZIE , Joerg MUCHOW , Helmut GRUTZECK , Simon ARMBRUSTER , Sebastian REISS
发明人： Wolfgang HEINZELMANN , Mohamad IYAD AL DIBS , Rainer STRAUB , Stefan PINTER , Frederic NJIKAM NJIMONZIE , Joerg MUCHOW , Helmut GRUTZECK , Simon ARMBRUSTER , Sebastian REISS
IPC分类号： G01R29/26 , G01R3/00
CPC分类号： B81B7/008 , B81B2203/0109 , B81B2203/056 , B81B2203/058 , G02B26/0858 , Y10T29/49002
摘要： A mechanical component has: a mounting; a movable part which, with the aid of at least one first spring and one second spring, is connected to the mounting in such a way that the movable part is movable about a rotational axis extending through a first anchoring area of the first spring on the mounting and a second anchoring area of the second spring on the mounting; a first sensor device with at least one first resistor which is situated on and/or in the first spring; and a second sensor device with at least one second resistor situated on and/or in the second spring. The first sensor device includes a first Wheatstone half bridge and the second sensor device includes a second Wheatstone half bridge. The first and second Wheatstone half bridges are connected to form a Wheatstone full bridge.
摘要翻译：机械部件具有：安装件; 借助于至少一个第一弹簧和一个第二弹簧的可移动部件以这样的方式连接到所述安装件，使得所述可移动部件可以围绕延伸穿过所述第一弹簧的第一锚固区域的旋转轴线移动并且所述第二弹簧的第二锚定区域在所述安装件上; 第一传感器装置，其具有位于第一弹簧和/或第一弹簧中的至少一个第一电阻器; 以及具有位于第二弹簧上和/或第二弹簧中的至少一个第二电阻器的第二传感器装置。第一传感器装置包括第一惠斯通半桥，第二传感器装置包括第二惠斯通半桥。第一个和第二个惠斯通半桥连接起来形成一个惠斯通电桥。

10. 发明授权

US09722521B2 Digital control for a microelectromechanical element 有权
公开(公告)号：US09722521B2
公开(公告)日：2017-08-01
申请号：US13988457
申请日：2011-10-13
申请人： Mohamad Iyad Al Dibs , Axel Wenzler , Oliver Krayl
发明人： Mohamad Iyad Al Dibs , Axel Wenzler , Oliver Krayl
IPC分类号： H01L41/04 , H02P13/00 , H02N1/00 , G02B26/08
CPC分类号： H02P13/00 , G02B26/0833 , H02N1/002
摘要： A control circuit for a microelectromechanical element includes: a waveform generator, which is designed to generate a digital trigger signal for the microelectromechanical element, a modulator, which is designed to oversample the digital trigger signal, to subject the signal to a noise shaping, and to output the oversampled and noise-shaped digital trigger signal; and a digital driver device, which is designed to drive the microelectromechanical element using the oversampled and noise-shaped digital trigger signal.

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