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    • 3. 发明授权
    • VCSEL semiconductor device
    • VCSEL半导体器件
    • US08189642B1
    • 2012-05-29
    • US12710173
    • 2010-02-22
    • Nein-Yi LiChuan XieChun LeiRichard F. Carson
    • Nein-Yi LiChuan XieChun LeiRichard F. Carson
    • H01S5/00
    • H01S5/18352H01S5/0021H01S5/18313H01S5/18327H01S5/1833H01S2301/176
    • A vertical surface emitting laser having a mesa structure formed with sloping side walls. A passivation layer including at least two sublayers at least partially covers the mesa structure. The at least two sublayers have differing stress components arranged to at least partially counter each other. By making the mesa structure with sloping side walls, the deposition of the passivation layer in such a way as to minimize the net stress of the passivation layer is facilitated. In addition, the mesa structure has a first stack of mirror layers comprising a semiconductor material doped with a first dopant and having first peripheral oxidized portions extending a first distance into said first stack, and a second stack of mirror layers comprising a semiconductor material doped with a second dopant and having second peripheral oxidized portions extending a second distance into said second stack, wherein the first distance is different from the second distance. By controlling the first distance and the second distance appropriately, the internal stress in the mesa structure can be reduced.
    • 具有形成有倾斜侧壁的台面结构的垂直表面发射激光器。 包括至少两个子层的钝化层至少部分地覆盖台面结构。 至少两个子层具有不同的应力分量,其布置成至少部分地相互对抗。 通过使具有倾斜侧壁的台面结构,钝化层的沉积以使钝化层的净应力最小化的方式变得容易。 此外,台面结构具有包括掺杂有第一掺杂剂的半导体材料的第一层反射镜层,并且具有第一距离延伸到所述第一堆叠中的第一外围氧化部分,以及第二层反射镜层,其包括掺杂有 第二掺杂剂并且具有将第二距离延伸到所述第二堆叠中的第二外围氧化部分,其中所述第一距离与所述第二距离不同。 通过适当地控制第一距离和第二距离,可以减小台面结构中的内部应力。