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1. 发明申请

US20220333740A1 CRYOGENIC COOLING SYSTEM WITH VENT 有权
公开(公告)号：US20220333740A1
公开(公告)日：2022-10-20
申请号：US17636801
申请日：2020-07-10
申请人： OXFORD INSTRUMENTS NANOTECHNOLOGY TOOLS LIMITED
发明人： Tim Foster , Neil Clarke
IPC分类号： F17C3/08 , F25D3/10
摘要： A cryogenic cooling system is provided having a vessel, the vessel comprising extending along a longitudinal axis and configured to receive a sample probe movable along the longitudinal axis. One or more cooling members are thermally coupled to the vessel so as to produce a thermal gradient along the longitudinal axis of the vessel. A vent extends along the outside of the vessel and is configured to provide a pathway for a flow of gas from an inlet of the vent to an outlet of the vent. The inlet is in gaseous communication with the inside of the vessel and the outlet is in gaseous communication an environment external to the vessel. The inlet is arranged at a position along the vessel configured to obtain a temperature below 63 kelvin during operation of the one or more cooling members, and the outlet is arranged at a position configured to maintain a temperature above 273 kelvin when the outlet has a temperature below 63 kelvin. The vent further comprises a pressure relief element configured to open and close said pathway in dependence on the pressure within the vessel such that, when the pressure of a gas inside the vessel exceeds a safety threshold, the pressure relief element is opened so as to enable a flow of said gas from the inside of the vessel to the environment external to the vessel.

2. 发明授权

US11333404B2 Cryogenic cooling system 有权
公开(公告)号：US11333404B2
公开(公告)日：2022-05-17
申请号：US16441560
申请日：2019-06-14
申请人： Oxford Instruments Nanotechnology Tools Limited
发明人： Anthony Matthews , Mark Patton
IPC分类号： F25B9/02 , F25B9/10 , F25B9/14 , F25D19/00 , F25B49/02 , G05D23/00 , F28F13/00
摘要： A cryogenic cooling system is provided comprising: a mechanical refrigerator, a heat pipe and a heat switch assembly. The mechanical refrigerator has a first cooled stage and a second cooled stage. The heat pipe has a first part coupled thermally to the second cooled stage and a second part coupled thermally to a target assembly. The heat pipe is adapted to contain a condensable gaseous coolant when in use. The heat switch assembly comprises one or more gas gap heat switches, a first end coupled thermally to the second cooled stage and a second end coupled thermally to the target assembly. The cryogenic cooling system is adapted to be operated in a heat pipe cooling mode in which the temperature of the second cooled stage is lower than the first cooled stage and wherein the temperature of the target assembly causes the coolant within the second part of the heat pipe to be gaseous and the temperature of the second cooled stage causes the coolant in the first part of the heat pipe to condense. The target assembly is cooled by the movement of the condensed liquid coolant from the first part of the heat pipe to the second part of the heat pipe during the heat pipe cooling mode. The cryogenic cooling system is further adapted to be operated in a gas gap cooling mode in which the temperature of the second cooled stage causes freezing of the coolant. The heat switch assembly is adapted to provide cooling from the second cooled stage to the target assembly during the gas gap cooling mode via the one or more gas gap heat switches.

3. 发明申请

US20200321192A1 SURFACE PROCESSING APPARATUS 审中-公开
公开(公告)号：US20200321192A1
公开(公告)日：2020-10-08
申请号：US16837262
申请日：2020-04-01
申请人： Oxford Instruments Nanotechnology Tools Limited
发明人： Michael Cooke , Andrew Goodyear
IPC分类号： H01J37/32 , H05H1/46 , H01L21/02
摘要： This disclosure relates to a surface processing apparatus for use in the surface processing of a substrate. The surface processing apparatus comprises a plasma source including a wall defining a plasma chamber and an excitation source adjacent the wall and a processing chamber in which a substrate having a predetermined maximum lateral dimension is mounted in use, the processing chamber being operatively connected to the plasma source. A transmission plate for the transmission of plasma in use is arranged between the plasma source and processing chamber, the transmission plate comprising a plurality of apertures. The apertures follow a non-rectilinear path through the transmission plate such that there is no line of sight in use between a substrate with the predetermined maximum lateral dimension mounted in the processing chamber and the most intense region of the plasma in the plasma chamber.

4. 发明授权

US10527563B2 Analysis with preliminary survey 有权
公开(公告)号：US10527563B2
公开(公告)日：2020-01-07
申请号：US16099638
申请日：2017-05-09
申请人： OXFORD INSTRUMENTS NANOTECHNOLOGY TOOLS LIMITED
发明人： Christian Lang , James Corrin
IPC分类号： G01N23/00 , G01N23/2252 , G06K9/00
摘要： A method and apparatus for analysis of a specimen in a microscope are provided. A first survey is performed that collects analytical data from a region of interest on the specimen surface using a first set of conditions. A second survey is performed that collects additional analytical data from selected parts of the region of interest on the specimen surface using a second set of conditions, different from the first set of conditions. The analytical data from the first survey is used to select the parts used for data collection in the second survey and to decide the order in which they are used.

5. 发明授权

US10162023B2 Apparatus for reducing vibrations in a pulse tube refrigerator such as for magnetic resonance imaging systems 有权
公开(公告)号：US10162023B2
公开(公告)日：2018-12-25
申请号：US14403359
申请日：2013-04-19
申请人： Oxford Instruments Nanotechnology Tools Limited
发明人： Matthias Buehler , Theo Hertrich , John Garside , Dieter Jedamzik
IPC分类号： F25B9/14 , G01R33/34
摘要： A pulse tube refrigerator (PTR) comprising a pedestal head and a regenerator tube assembly is provided having particular application in cooling a Magnetic Resonance Imaging system. The PTR comprises a pedestal head and at least one cooled stage, the at least one cooled stage being mounted to a distal end, with respect to the pedestal head, of each of an associated regenerator tube and an associated pulse tube, the associated regenerator tube and associated pulse tube together providing pressurized coolant gas to the at least one cooled stage, wherein the associated regenerator tube and the associated pulse tube are elongate along substantially parallel axes; and further arranged, wherein, the displacements of the distal ends of each of the associated regenerator tube and the associated pulse tube in response to the cyclical changes in coolant pressure, are substantially the same when the pulse tube refrigerator is in use.

6. 发明申请

US20170167760A1 METHOD OF ACCELERATING COOL DOWN 审中-公开
公开(公告)号：US20170167760A1
公开(公告)日：2017-06-15
申请号：US15378671
申请日：2016-12-14
申请人： Oxford Instruments Nanotechnology Tools Limited
发明人： NEIL CLARKE
IPC分类号： F25B9/14 , G01R33/3815 , G01R33/38 , F25B25/00
CPC分类号： F25B9/14 , F25B9/10 , F25B25/005 , F25B2500/09 , F25D19/006 , G01R33/3804 , G01R33/3815 , H01F6/04
摘要： The present invention provides a method of accelerating cool down of a target member of a cryogenic system to a cryogenic operating temperature. The method comprises the steps of cooling a target region of a cryogenic system with a first cooling apparatus, the first cooling apparatus being adapted to cool the target region to a first temperature by thermal conduction between the first apparatus and the target member, and having a first cooling power at the first temperature; and cooling the target member of the cryogenic system from the first temperature to an operating temperature using a cryocooler, where the first cooling power of the first cooling apparatus at the first temperature is greater than the cooling power of the cryocooler at the first temperature. This allows a target member of a cryogenic system to be cooled more rapidly than when conventional methods are used.

7. 发明申请

US20150011088A1 METHODS AND APPARATUS FOR DEPOSITING AND/OR ETCHING MATERIAL ON A SUBSTRATE 有权
标题翻译：在基材上沉积和/或蚀刻材料的方法和装置
公开(公告)号：US20150011088A1
公开(公告)日：2015-01-08
申请号：US14381508
申请日：2013-02-27
申请人： Oxford Instruments Nanotechnology Tools Limited
发明人： Mark Edward McNie , Michael Joseph Cooke , Leslie Michael Lea
IPC分类号： H01J37/32 , G05B19/418 , H01L21/306 , C23C16/52 , C23C16/50
CPC分类号： H01J37/32926 , C23C16/50 , C23C16/52 , G05B19/418 , G05B2219/34198 , H01J37/32449 , H01J37/32816 , H01J37/32834 , H01J37/32917 , H01J2237/24564 , H01J2237/24585 , H01J2237/248 , H01J2237/3321 , H01J2237/334 , H01L21/306 , H01L21/30655 , H01L22/12 , H01L22/26
摘要： Methods are disclosed for depositing material onto and/or etching material from a substrate in a surface processing tool having a processing chamber, a controller and one or more devices for adjusting the process parameters within the chamber. The method comprises: the controller instructing the one or more devices according to a series of control steps, each control step specifying a defined set of process parameters that the one or more devices are instructed to implement, wherein at least one of the control steps comprises the controller instructing the one or more devices to implement a defined set of constant process parameters for the duration of the step, including at least a chamber pressure and gas flow rate through the chamber, which duration is less than the corresponding gas residence time (Tgr) of the processing chamber for the step.
摘要翻译：公开了用于在具有处理室，控制器和用于调节室内的工艺参数的一个或多个装置的表面处理工具中从衬底上沉积材料和/或蚀刻材料的方法。该方法包括：控制器根据一系列控制步骤指示一个或多个设备，每个控制步骤指定一个或多个设备被指示实现的一组定义的过程参数，其中至少一个控制步骤包括所述控制器指示所述一个或多个设备在所述步骤的持续时间内实现一组定义的恒定过程参数，包括至少通过所述室的腔室压力和气体流速，所述持续时间小于相应的气体停留时间（Tgr ）的步骤处理室。

8. 发明申请

US20230088083A1 GAS GAP HEAT SWITCH CONFIGURATION 有权
公开(公告)号：US20230088083A1
公开(公告)日：2023-03-23
申请号：US17798862
申请日：2021-02-16
申请人： Oxford Instruments Nanotechnology Tools Limited
发明人： Anthony Matthews
IPC分类号： F25B9/12 , F25B9/10 , F25B9/14 , F25D19/00 , F28D15/02
摘要： A cryogenic cooling system is provided comprising: a cooled plate (2) thermally coupled to a cryogenic refrigerator (9), a heat switch assembly and a target assembly (5). The target assembly (5) comprises a target refrigerator (12) configured to obtain a lower base temperature than the cryogenic refrigerator (9). The heat switch assembly (18) comprises one or more gas gap heat switches, the heat switch assembly (18) having a first end thermally coupled to the cooled plate (2) and a second end thermally coupled to the target assembly (5). A sorption pump (22) is provided for controlling the thermal conductivity across the heat switch assembly (18) in accordance with the temperature of the sorption pump (22) The sorption pump (22) is thermally coupled to the cryogenic refrigerator (9), by a thermal link (46) extending from the cooled plate (2) to the heat switch assembly (18). The sorption pump (22) is arranged at a position along the thermal link (46) between the heat switch assembly 18 and the cooled plate (2).

9. 发明申请

US20210310710A1 NOISE REDUCTION METHOD 有权
公开(公告)号：US20210310710A1
公开(公告)日：2021-10-07
申请号：US17266664
申请日：2019-08-07
申请人： OXFORD INSTRUMENTS NANOTECHNOLOGY TOOLS LIMITED
发明人： Anthony J. Matthews , Mark Patton , Jeremy White
IPC分类号： F25B49/02 , F25B9/14
摘要： There is provided a method of reducing noise in a cryogenic cooling system associated with a mechanical refrigerator forming part of said cooling system. The method comprises: monitoring vibrations in the cooling system during operation of the mechanical refrigerator; and modulating an operating frequency of the mechanical refrigerator based on the monitored vibrations so as to reduce the amplitude of said vibrations. This allows noise within the cooling system to be reduced.

10. 发明申请

US20210151287A1 NAVIGATION FOR ELECTRON MICROSCOPY 有权
公开(公告)号：US20210151287A1
公开(公告)日：2021-05-20
申请号：US16632835
申请日：2018-07-19
申请人： OXFORD INSTRUMENTS NANOTECHNOLOGY TOOLS LIMITED
发明人： Anthony Hyde , James Holland , Simon Burgess , Peter Statham , Philippe Pinard , James Corrin
IPC分类号： H01J37/28
摘要： A method and system for analyzing a specimen in a microscope are disclosed. The method comprises: acquiring a series of compound image frames using a first detector and a second detector, different from the first detector, wherein acquiring a compound image frame comprises: causing a charged particle beam to impinge upon a plurality of locations within a region of a specimen, the region corresponding to a configured field of view of the microscope, the microscope being configured with a set of microscope conditions, monitoring, in accordance with the configured microscope conditions, a first set of resulting particles generated within the specimen at the plurality of locations using the first detector so as to obtain a first image frame, monitoring, in accordance with the configured microscope conditions, a second set of resulting particles generated within the specimen at the plurality of locations using the second detector, so as to obtain a second image frame, wherein each image frame comprises a plurality of pixels corresponding to, and derived from the monitored particles generated at, the plurality of locations within the region, for each pixel of the second image frame, if the configured microscope conditions are the same as those for a stored second image frame of an immediately preceding acquired compound frame in the series, and if the respective pixel corresponds to a location within the region to which a stored pixel comprised by said stored second image frame corresponds, combining said stored pixel with the pixel so as to increase the signal-to-noise ratio for the pixel, and combining the first image frame and second image frame so as to produce the compound image frame, such that the compound image frame provides data derived from, for each of the plurality of pixels, the particles generated at the corresponding location within the region and monitored by each of the first detector and second detector; and displaying the series of compound image frames in real-time on a visual display.

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