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    • 2. 发明授权
    • Broadband microspectro-reflectometer
    • 宽带显微光谱仪
    • US5747813A
    • 1998-05-05
    • US227482
    • 1994-04-14
    • Adam E. NortonChester L. MalloryHung V. PhamPaul Rasmussen
    • Adam E. NortonChester L. MalloryHung V. PhamPaul Rasmussen
    • G01B11/06G01N21/55G03F7/20G01N21/33
    • G03F7/70483G01B11/0625G01N21/55
    • An improved method and apparatus for measuring the relative reflectance spectra of an observed sample (3) and method and apparatus for autofocussing the sample (3). A broadband visible and ultraviolet beam (42) is split into a sample beam (46) and a reference beam (48). The sample beam (46) is reflected off the surface of the sample (3), and the spectrum of the reflected sample beam (46) is compared to the spectrum of the reference beam (48) to determine the relative reflectance spectrum of the sample (3). A video camera (96) is provided for viewing the sample (3). The autofocus system has a course-focus mode and a fine-focus mode. In the course-focus mode, the sample (3) is focused when the centroid of the sample image is centered on a position sensitive detector (99). In the fine-focus mode, the sample is focused when the intensity of light reaching the detector (99) is minimized.
    • 用于测量观察样品(3)的相对反射光谱的改进的方法和装置以及用于自动聚焦样品(3)的方法和装置。 宽带可见光和紫外光束(42)被分成样本光束(46)和参考光束(48)。 样品光束(46)从样品(3)的表面反射,并将反射样品光束(46)的光谱与参考光束(48)的光谱进行比较,以确定样品的相对反射光谱 (3)。 提供用于观察样品(3)的摄像机(96)。 自动对焦系统具有课程对焦模式和精细对焦模式。 在对焦模式中,当样本图像的质心以位置敏感检测器(99)为中心时,样本(3)被聚焦。 在微调模式中,当到达检测器(99)的光的强度最小时,样品被聚焦。