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    • 1. 发明申请
    • MAGNETORESISTIVE SENSOR DEVICE AND METHOD OF FABRICATING SUCH MAGNETORESISTIVE SENSOR DEVICE
    • 磁传感器装置及制造这种磁传感器装置的方法
    • US20090058413A1
    • 2009-03-05
    • US12278981
    • 2007-02-13
    • Arne KraemerReinhard Buchhold
    • Arne KraemerReinhard Buchhold
    • G01R33/09H01L21/00
    • G01R33/09B82Y25/00G01R33/093G01R33/096
    • In order to further develop a magnetoresistive sensor device (100; 100′; 100″) comprising at least one substrate or wafer (10), in particular at least one silicon wafer, and at least one sensing element (30), in particular at least one A[nisotropic]M[agneto]R[esistive] sensing element and/or—at least one G[iant]M[agneto]R[esistive] sensing element, for example at least one multi-layer G[iant]M[agneto]R[esistive] sensing element, said sensing element (30) being arranged on and/or under the substrate or wafer (10), as well as a corresponding method of fabricating such magnetoresistive sensor device (100; 100′; 100″) in such way that an external or extra bias magnetic field to preset the sensing element (10) and/or the magnetoresistive sensor device (100; 100′; 100″) can be dispensed with, it is proposed to arrange at least one magnetic layer (20t, 20b) on (20t) and/or under (20b) the substrate or wafer (10) and at least partially on (20t) and/or under (20b) the sensing element (30), said magnetic layer (20t, 20b) providing at least one bias magnetic field.
    • 为了进一步开发包括至少一个衬底或晶片(10),特别是至少一个硅晶片和至少一个感测元件(30)的磁阻传感器设备(100; 100'; 100“),特别是 至少一个A [各向异性] M [Agneto] R [隐蔽]感测元件和/或至少一个G [A] M [Agneto] R [无知]感测元件,例如至少一个多层G 所述感测元件(30)布置在衬底或晶片(10)上和/或下方,以及制造这种磁阻传感器装置(100; 100')的相应方法, ; 100“),使得可以省略用于预设感测元件(10)和/或磁阻传感器装置(100; 100'; 100”)的外部或额外偏置磁场, 在(20t)和/或(20b)基底或晶片(10)下方并且至少部分地在传感元件(30)上的(20t)和/或(20b)下方布置至少一个磁性层(20t,20b) ,s 辅助提供至少一个偏置磁场的磁性层(20t,20b)。
    • 2. 发明授权
    • Magnetoresistive sensor device and method of fabricating such magnetoresistive sensor device
    • 磁阻传感器装置及其制造方法
    • US09304175B2
    • 2016-04-05
    • US12278981
    • 2007-02-13
    • Arne KraemerReinhard Buchhold
    • Arne KraemerReinhard Buchhold
    • G01R33/09H01L21/00B82Y25/00
    • G01R33/09B82Y25/00G01R33/093G01R33/096
    • In order to further develop a magnetoresistive sensor device (100; 100′; 100″) comprising at least one substrate or wafer (10), in particular at least one silicon wafer, and at least one sensing element (30), in particular at least one A[nisotropic]M[agneto]R[esistive] sensing element and/or—at least one G[iant]M[agneto]R[esistive] sensing element, for example at least one multilayer G[iant]M[agneto]R[esistive] sensing element, said sensing element (30) being arranged on and/or under the substrate or wafer (10), as well as a corresponding method of fabricating such magnetoresistive sensor device (100; 100′; 100″) in such way that an external or extra bias magnetic field to preset the sensing element (10) and/or the magnetoresistive sensor device (100; 100′; 100″) can be dispensed with, it is proposed to arrange at least one magnetic layer (20t, 20b) on (20t) and/or under (20b) the substrate or wafer (10) and at least partially on (20t) and/or under (20b) the sensing element (30), said magnetic layer (20t, 20b) providing at least one bias magnetic field.
    • 为了进一步开发包括至少一个衬底或晶片(10),特别是至少一个硅晶片和至少一个感测元件(30)的磁阻传感器设备(100; 100'; 100“),特别是在 至少一个A [各向异性] M [Agneto] R [无意义]感测元件和/或至少一个G [i] M [agneto] R [无知]感测元件,例如至少一个多层G [ 所述感测元件(30)布置在衬底或晶片(10)上和/或下方,以及制造这种磁阻传感器装置(100; 100'; 100“)的相应方法, ),使得可以省略用于预设感测元件(10)和/或磁阻传感器装置(100; 100'; 100“)的外部或额外偏置磁场,建议将至少一个磁性 (20t)和/或在(20b)下方的衬底或晶片(10)上并且至少部分地在(20t)和/或(20b)下的感测电极上的层(20t,20b) nt(30),所述磁性层(20t,20b)提供至少一个偏置磁场。
    • 3. 发明授权
    • Angle sensor for measuring magnetic field strength
    • 用于测量磁场强度的角度传感器
    • US06853179B2
    • 2005-02-08
    • US10221818
    • 2002-01-29
    • Reinhard Buchhold
    • Reinhard Buchhold
    • G01R33/038G01D5/14G01D5/16G01R15/20G01R19/00G01R19/08G01R33/09
    • G01D5/142G01R15/205
    • An arrangement is provided for measuring the field strength of a magnetic field, or measuring field, by an angle sensor. The angle sensor is aligned with the field lines of the measuring field at the position of the field strength of the measuring field, or measuring position. A device for generating a magnetic auxiliary field at the measuring position is also included. The angle sensor can be impressed with the magnetic auxiliary field in a predeterminable field strength and in a direction deviating from that of the field lines of the measuring field at the measuring position, forming a resultant magnetic field with a field line direction. The field line direction is measured by the angle sensor as a measure of the field strength of the measuring field. The arrangement is reliable, suitable for measuring high magnetic field strengths, has no reactive effects, and permits measurements with magnetoresistive angle sensors.
    • 提供了一种通过角度传感器测量磁场或测量场的场强的装置。 角度传感器与测量场的场强或测量位置位置处的测量场的场线对齐。 还包括用于在测量位置产生磁辅助场的装置。 角度传感器可以以可预定的场强和与测量位置处的测量场的场线的方向偏离的方向施加磁辅助场,从而形成具有场线方向的合成磁场。 通过角度传感器测量场线方向作为测量场的场强的量度。 该装置可靠,适用于测量高磁场强度,无反应效应,并允许使用磁阻角度传感器进行测量。
    • 4. 发明申请
    • Circuit Arrangement Method for Obtaining an Output Signal, and Rotational Speed Measurement Device Comprising Such a Circuit Arrangement
    • US20080143322A1
    • 2008-06-19
    • US10560451
    • 2004-06-03
    • Reinhard Buchhold
    • Reinhard Buchhold
    • G01P3/42
    • G01P3/4802G01P3/481G01P3/489H03K5/007H03K5/082
    • A circuit arrangement for obtaining an output signal (Va) form a signal (Vs) containing at least one alternating component comprises a signal source (1) that supplies this signal (Vs), a first peak value detection device (2) for determining a maximum value (Vmax) of the signal (Vs), a second peak value detection device (3) for determining a minimum value (Vmin) of the signal (Vs), a first signal linking device (4, 5, 6, 71) for obtaining a first resulting signal (V1) by additive linking of the signal (Vs), the maximum value (Vmax) and the minimum value (Vmin) in accordance with the rule: V1=K1*{Vs−(Vmax+Vmin)/2}, in which K1 is a freely selectable first constant factor, a second signal linking device (7, 72) for obtaining a second resulting signal (V2) by additive linking of the maximum value (Vmax) and a minimum value (Vmin) in accordance with the rule: V2=(Vmax−Vmin)*K2, in which K2 is a freely selectable second factor, a first squaring device (8) for squaring the first resulting signal (V1), a second squaring device (9) for squaring the second resulting signal (V2) and a third signal linking device (100, 11, 101) for obtaining the output signal (Va) by additive linking of the squared first resulting signal ((V1)2) and the squared second resulting signal ((V2)2) in accordance with the rule: Va=K3*{(⅛)*(K1/K2)2*(V2)2−(V1)2}, in which K3 is a freely selectable third constant factor. By means of the invention, which furthermore includes a rotational speed measurement device comprising such a circuit arrangement and also a method of obtaining an output signal, an unchanged or increased resolution of the output signal can be achieved from the signal containing an alternating component having a restricted resolution.
    • 5. 发明授权
    • Circuit arrangement method for obtaining an output signal, and rotational speed measurement device comprising such a circuit arrangement
    • US07492150B2
    • 2009-02-17
    • US10560451
    • 2004-06-03
    • Reinhard Buchhold
    • Reinhard Buchhold
    • G01R33/09G01B7/30
    • G01P3/4802G01P3/481G01P3/489H03K5/007H03K5/082
    • A circuit arrangement for obtaining an output signal (Va) form a signal (Vs) containing at least one alternating component comprises a signal source (1) that supplies this signal (Vs), a first peak value detection device (2) for determining a maximum value (Vmax) of the signal (Vs), a second peak value detection device (3) for determining a minimum value (Vmin) of the signal (Vs), a first signal linking device (4, 5, 6, 71) for obtaining a first resulting signal (V1) by additive linking of the signal (Vs), the maximum value (Vmax) and the minimum value (Vmin) in accordance with the rule: V1=K1*{Vs−(Vmax+Vmin)/2}, in which K1 is a freely selectable first constant factor, a second signal linking device (7, 72) for obtaining a second resulting signal (V2) by additive linking of the maximum value (Vmax) and a minimum value (Vmin) in accordance with the rule: V2=(Vmax−Vmin)*K2, in which K2 is a freely selectable second factor, a first squaring device (8) for squaring the first resulting signal (V1), a second squaring device (9) for squaring the second resulting signal (V2) and a third signal linking device (100, 11, 101) for obtaining the output signal (Va) by additive linking of the squared first resulting signal ((V1)2) and the squared second resulting signal ((V2)2) in accordance with the rule: Va=K3*{(⅛)*(K1/K2)2*(V2)2−(V1)2}, in which K3 is a freely selectable third constant factor. By means of the invention, which furthermore includes a rotational speed measurement device comprising such a circuit arrangement and also a method of obtaining an output signal, an unchanged or increased resolution of the output signal can be achieved from the signal containing an alternating component having a restricted resolution.
    • 6. 发明申请
    • Electronic sensing circuit
    • 电子感应电路
    • US20070059936A1
    • 2007-03-15
    • US10572106
    • 2004-09-09
    • Jacobus Van OevelenStefan ButzmannReinhard BuchholdThomas StorkHendrik Boezen
    • Jacobus Van OevelenStefan ButzmannReinhard BuchholdThomas StorkHendrik Boezen
    • C03C15/00H01L21/306H01L21/302H01L21/461
    • G01D3/02
    • A sensor (10) has an output coupled to a first comparator input. A control circuit (18) is arranged to switch from an upward tracking mode to a downward relative level detection mode, to a downward tracking mode, to an upward relative level detection mode and back to the upward tracking mode successively. A first and second digital to analog conversion circuit (14a,b) receive a first and second digital control value from the control circuit (18) respectively. A controllable combiner circuit (16) has inputs coupled to outputs of the first and second digital to analog conversion circuits (14a,b) and an output coupled to the second comparator input, the control circuit (18) having first output coupled to controllable combiner circuit (16) to cause the combiner circuit (16) to supply first and second combiner output signals determined by the first and second digital to analog conversion circuit (14a,b) to the second comparator input in the upward and downward tracking mode respectively, and to supply a third combiner output signal corresponding to an average of the first and second combiner output signals to the second comparator input in the relative level detection modes. The control circuit (18) has an input coupled to the output of the comparator (12), the control circuit (18) controlling one directional upward tracking by the first digital to analog conversion circuit (14a) of upward changes of the sensing signal in the upward tracking mode, and controlling one directional downward tracking by the second digital to analog conversion circuit (14b) Of downward changes of the sensing signal in the upward tracking mode.
    • 传感器(10)具有耦合到第一比较器输入的输出。 控制电路(18)被布置成从向上跟踪模式向下相对电平检测模式切换到向下跟踪模式,向上相对电平检测模式并且依次返回到向上跟踪模式。 第一和第二数模转换电路(14a,b)分别从控制电路(18)接收第一和第二数字控制值。 可控组合器电路(16)具有耦合到第一和第二数模转换电路(14a,b)的输出和耦合到第二比较器输入的输出的输入,该控制电路(18)具有耦合到可控制 组合器电路(16)使得组合器电路(16)以上下跟踪模式将第一和第二数模转换电路(14a,b)确定的第一和第二组合器输出信号提供给第二比较器输入端 并且在相对电平检测模式中将与第一和第二组合器输出信号的平均值对应的第三组合器输出信号提供给第二比较器输入。 控制电路(18)具有耦合到比较器(12)的输出端的输入端,控制电路(18)控制第一数模转换电路(14a)向感测信号向上变化的一个方向向上跟踪 在向上跟踪模式中,并且通过第二数模转换电路(14b)控制向上跟踪模式中感测信号的向下变化的一个方向向下跟踪。
    • 7. 发明授权
    • Arrangement for detecting motion of an encoder
    • US06744248B2
    • 2004-06-01
    • US10308658
    • 2002-12-03
    • Reinhard BuchholdMichael Doescher
    • Reinhard BuchholdMichael Doescher
    • G01B730
    • G01D5/145G01D5/2451G01P3/488
    • An arrangement is described for detecting motion of an encoder which comprises magnetically active areas arranged along a main surface subtended at least substantially by a second spatial co-ordinate aligned in the direction of movement of the encoder and by a first spatial co-ordinate aligned at least substantially perpendicularly to the direction of movement of the encoder, which magnetically active areas are subdivided in a predetermined sequence along the second spatial co-ordinate, the arrangement comprising a magnetoresistive sensor element arranged in front of the main surface of the encoder in the direction of a third spatial co-ordinate aligned at least substantially perpendicularly to the main surface of the encoder, and a magnetic field-generating device for generating a magnetic field which permeates the magnetoresistive sensor element with field lines which are aligned at least substantially in a plane subtended by the first and the third spatial co-ordinate, the arrangement being adapted to generate a field line deflection, determined by the position of the encoder with respect to the magnetoresistive sensor element and the magnetic field-generating device, of the magnetic field generated by the magnetic field-generating device in the direction of the second spatial co-ordinate with a periodical recurrence determined by the predetermined sequence of the magnetically active areas and to supply an output signal having signal edges which rise and fall with said periodical recurrence and are produced by the magnetoresistive sensor element on the basis of the influence by this field line deflection, the arrangement being further adapted to generate a field line deflection, likewise determined by the position of the encoder, of the magnetic field also in the direction of the first spatial co-ordinate in said periodical recurrence, and a signal-processing circuit for detecting the slopes of consecutive signal edges in the output signal and for supplying a motion direction signal in dependence upon the values and/or the sequence of values of the slopes of consecutive signal edges.
    • 8. 发明授权
    • Electronic sensing circuit that compensates for reference voltage drift
    • 补偿参考电压漂移的电子感应电路
    • US07301330B2
    • 2007-11-27
    • US10572106
    • 2004-09-09
    • Jacobus Adrianus Van OevelenStefan ButzmannReinhard BuchholdThomas StorkHendrik Boezen
    • Jacobus Adrianus Van OevelenStefan ButzmannReinhard BuchholdThomas StorkHendrik Boezen
    • G01B7/30
    • G01D3/02
    • A sensor (10) has an output coupled to a first comparator input. A control circuit (18) is arranged to switch from an upward tracking mode to a downward relative level detection mode, to a downward tracking mode, to an upward relative level detection mode and back to the upward tracking mode successively. A first and second digital to analog conversion circuit (14a,b) receive a first and second digital control value from the control circuit (18) respectively. A controllable combiner circuit (16) has inputs coupled to outputs of the first and second digital to analog conversion circuits (14a,b) and an output coupled to the second comparator input, the control circuit (18) having first output coupled to controllable combiner circuit (16) to cause the combiner circuit (16) to supply first and second combiner output signals determined by the first and second digital to analog conversion circuit (14a,b) to the second comparator input in the upward and downward tracking mode respectively, and to supply a third combiner output signal corresponding to an average of the first and second combiner output signals to the second comparator input in the relative level detection modes. The control circuit (18) has an input coupled to the output of the comparator (12), the control circuit (18) controlling one directional upward tracking by the first digital to analog conversion circuit (14a) of upward changes of the sensing signal in the upward tracking mode, and controlling one directional downward tracking by the second digital to analog conversion circuit (14b) Of downward changes of the sensing signal in the upward tracking mode.
    • 传感器(10)具有耦合到第一比较器输入的输出。 控制电路(18)被布置成从向上跟踪模式向下相对电平检测模式切换到向下跟踪模式,向上相对电平检测模式并且依次返回到向上跟踪模式。 第一和第二数模转换电路(14a,b)分别从控制电路(18)接收第一和第二数字控制值。 可控组合器电路(16)具有耦合到第一和第二数模转换电路(14a,b)的输出和耦合到第二比较器输入的输出的输入,该控制电路(18)具有耦合到可控制 组合器电路(16)使得组合器电路(16)以上下跟踪模式将第一和第二数模转换电路(14a,b)确定的第一和第二组合器输出信号提供给第二比较器输入端 并且在相对电平检测模式中将与第一和第二组合器输出信号的平均值对应的第三组合器输出信号提供给第二比较器输入。 控制电路(18)具有耦合到比较器(12)的输出端的输入端,控制电路(18)控制第一数模转换电路(14a)向感测信号向上变化的一个方向向上跟踪 在向上跟踪模式中,并且通过第二数模转换电路(14b)控制向上跟踪模式中感测信号的向下变化的一个方向向下跟踪。
    • 10. 发明授权
    • Circuit configuration for a gradometric current sensor with a bridge circuit for measuring gradients of magnetic field strength and a sensor equipped with this circuit configuration
    • 具有用于测量磁场强度梯度的桥接电路的测量电流传感器的电路配置和配备该电路配置的传感器
    • US07030601B2
    • 2006-04-18
    • US10489122
    • 2002-09-11
    • Reinhard Buchhold
    • Reinhard Buchhold
    • G01R31/02
    • G01R33/022G01R15/205
    • In order to create a circuit configuration for a gradiometric current sensor with a bridge circuit in the form of a Wheatstone bridge for measuring gradients of the magnetic field strength of a current-carrying conductor, with four magnetoresistive resistors, two of which resistors form a sub-bridge in each case, while the sub-bridges are arranged symmetrically in relation to sub-conductors of the current-carrying conductor, and with a compensating circuit associated with the bridge circuit, which compensating circuit comprises compensating conductors associated with the magnetoresistive resistors, to which compensating conductors a compensating current can be applied, by means of which circuit configuration mounting tolerances can be compensated in a simple manner, it is provided that the sub-bridges (22, 24) can each have a separate compensating current (Icomp1, Icomp2) applied to them.
    • 为了创建具有惠斯通电桥形式的桥接电路的梯度电流传感器的电路配置,用于测量载流导体的磁场强度的梯度,具有四个磁阻电阻器,其中两个电阻器形成子 在每个情况下,桥接器相对于载流导体的分导体对称地布置,并且与桥接电路相关联的补偿电路,该补偿电路包括与磁阻电阻器相关联的补偿导体, 补偿导体可以施加补偿电流,通过其可以以简单的方式补偿电路配置安装公差,只要子桥(22,24)可各自具有单独的补偿电流(I' SUB> comp1 ,I comp2 )。