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1. 发明授权

US5488865A Wide-band servo accelerometer with flat leaf flexure suspension 失效
标题翻译：宽带伺服加速度计，带平叶弯曲悬架
公开(公告)号：US5488865A
公开(公告)日：1996-02-06
申请号：US290051
申请日：1994-08-15
申请人： Rex B. Peters
发明人： Rex B. Peters
IPC分类号： G01P15/125 , G01P15/13
CPC分类号： G01P15/125 , G01P15/132
摘要： A servo accelerometer includes a proof mass suspended by way of a flat leaf flexure suspended between upper and lower excitation rings. Electrically conductive material forming pick-off capacitance plates is disposed on opposing sides of the proof mass to form capacitive elements with respect to the excitation rings which, in turn, forms a position detector. In response to a force or acceleration along a sensitive axis (i.e., generally normal to the plane of the proof mass), the proof mass is displaced relative to the excitation rings causing a change in the capacitance of the capacitive elements. A servo system, which includes one or more electromagnets, returns the proof mass to its null or at rest position. In order to compensate for the transverse bending of the flat leaf flexure which results in the proof mass having two degrees of freedom, the accelerometer is configured such that the two degrees of freedom respond like a single degree of freedom with respect to the servo system. In particular, the accelerometer is configured such that the centroid of the position detector is disposed as near as possible to the center of percussion, which minimizes the dynamic sensitivity of the accelerometer to the location of the center of force which, in turn, allows the center of force to be moved near the center of mass for optimized static performance. By moving the center of force close to the center of mass and, therefore, near the center of percussion, sensitivity of the accelerometer to production variations in the position of the centroid of the position detector is minimized.
摘要翻译：伺服加速度计包括通过在上下激励环之间悬挂的平叶弯曲而悬挂的检验质量块。导电材料形成的拾取电容板设置在证明块的相对侧上，以形成相对于激励环的电容元件，这又构成位置检测器。响应于沿着敏感轴的力或加速度（即，通常垂直于检验质量平面），证明物质相对于激励环移位，引起电容元件的电容变化。包括一个或多个电磁铁的伺服系统将证明质量块返回到其零位或静止位置。为了补偿导致证明质量具有两个自由度的扁平叶片挠曲的横向弯曲，加速度计被构造成使得两个自由度相对于伺服系统具有单独的自由度。特别地，加速度计被配置为使得位置检测器的质心尽可能地靠近敲击中心，这最小化加速度计对力中心的位置的动态灵敏度，这反过来又允许靠近质心移动的力中心，以优化静态性能。通过将力的中心移动到靠近质心并且因此在撞击中心附近，加速度计对位置检测器的重心的位置的生产变化的敏感度被最小化。

2. 发明授权

US5165279A Monolithic accelerometer with flexurally mounted force transducer 失效
标题翻译：具有弯曲安装力传感器的单片加速度计
公开(公告)号：US5165279A
公开(公告)日：1992-11-24
申请号：US544221
申请日：1989-07-06
申请人： Brian L. Norling , Rex B. Peters
发明人： Brian L. Norling , Rex B. Peters
IPC分类号： G01P1/00 , G01P15/08 , G01P15/097 , G01P15/10
CPC分类号： G01P15/097 , G01P1/003 , G01P15/0802 , G01P2015/0828 , Y10S73/01
摘要： An accelerometer comprising a monolithic crystalline substrate, the substrate comprising a support, a proof mass, and a force transducer. The proof mass is connected to the support by one or more proof mass flexures that permit the proof mass to rotate with respect to the support about a hinge axis. One end of the force transducer is connected to the support, and the other end is connected to the proof mass by a transducer flexure. The transducer flexure has a thickness substantially less than the thickness of the transducer, such that when the proof mass rotates, the transducer rotates with respect to the proof mass about a transducer axis that passes through the transducer flexure. Preferably, the transducer axis is offset from the hinge axis in a manner so as to cancel nonlinearities in the force transducer, and the length of the proof mass along the pendulous axis is less than half the length of the transducer. Damping plates are positioned above and below the proof mass, and provide shock stops and damping.
摘要翻译：一种包括单片晶体衬底的加速度计，所述衬底包括支撑体，校验块和力传感器。证明物质通过一个或多个证明物质弯曲物连接到支撑体，其允许证明物质相对于支撑件围绕铰链轴线旋转。力传感器的一端连接到支撑件，另一端通过传感器弯曲连接到检验质量块。换能器挠曲具有基本上小于换能器厚度的厚度，使得当证明质量块旋转时，换能器围绕围绕换能器弯曲的换能器轴线相对于检验质量块旋转。优选地，换能器轴线以一种方式偏离铰链轴线，以抵消力换能器中的非线性，并且沿着下摆轴线的校验质量块的长度小于换能器长度的一半。阻尼板位于检测质量块的上方和下方，并提供冲击停止和阻尼。

3. 发明授权

US4881408A Low profile accelerometer 失效
标题翻译：低调加速度计
公开(公告)号：US4881408A
公开(公告)日：1989-11-21
申请号：US313289
申请日：1989-02-16
申请人： Rand H. Hulsing, II , Rex B. Peters , Brian L. Norling
发明人： Rand H. Hulsing, II , Rex B. Peters , Brian L. Norling
IPC分类号： G01P15/097 , G01P15/10
CPC分类号： G01P15/097 , G01P2015/0828
摘要： A compact, low g range accelerometer comprising a support (22), a proof mass (20), flexures (24, 26) for mounting the proof mass to the support, and a force sensing element (40). The proof mass has a single rotational degree of freedom about a hinge axis (H) perpendicular to the accelerometer's sensitive axis (S). The force sensing element is positioned along a line that is normal to the hinge axis and that lies in a plane that is normal to the hinge axis and that passes through the center of gravity (46) of the proof mass. The perpendicular distance between the hinge axis and the force sensing element is less than the distance between the hinge axis and the center of the proof mass. The force sensing element may be parallel to the pendulous axis, to produce an extremely compact accelerometer, or may be oriented at an acute angle with respect to the pendulous axis, such that the line along which the force sensing element is positioned passes through the center of percussion of the proof mass.
摘要翻译：一种紧凑的低g范围加速度计，包括支撑件（22），用于将证明物质安装到支撑件的检测质量块（20），挠曲件（24,26）以及力感测元件（40）。相对于垂直于加速度传感器的敏感轴（S）的铰链轴（H），证明物质具有单一的旋转自由度。力感测元件沿着垂直于铰链轴线的线定位，并且位于与铰链轴线垂直的平面中，并且穿过该质量块的重心（46）。铰链轴和力感测元件之间的垂直距离小于铰链轴与检验质量中心之间的距离。力感测元件可以平行于下摆轴线，以产生非常紧凑的加速度计，或者可以相对于下摆轴线以锐角定向，使得力感测元件所位于的线穿过中心打击乐的质量。

4. 发明授权

US4799385A Angular rate sensor with phase shift correction 失效
标题翻译：具有相移校正的角速率传感器
公开(公告)号：US4799385A
公开(公告)日：1989-01-24
申请号：US72235
申请日：1987-07-10
申请人： Rand H. Hulsing , Rex B. Peters
发明人： Rand H. Hulsing , Rex B. Peters
IPC分类号： G01C19/5726 , G01P9/04
CPC分类号： G01C19/5726
摘要： A Coriolis rate sensor comprising first and second accelerometers mounted with their force sensing axes parallel to a common sensing axis. The accelerometers are vibrated along arcs in response to a periodic drive signal at a first frequency, each arc being tangent to a vibration axis normal to the sensing axis. The accelerometer output signals are demodulated to determine angular rate, as well as to detect the phase shift between the drive signal and the periodic compounds of the output signals. In one arrangement, the detected phase shifts are used to drive a phase servo that tends to reduce the bias error caused by interaction between the phase shifts and misalignments of the accelerometers with respect to the sensing axis. In another arrangement, the phase shifts are used to calculate a bias term for correcting the measured angular rate. A single accelerometer embodiment is also described.
摘要翻译：科里奥利速率传感器包括第一和第二加速度计，其安装有其感测轴平行于公共传感轴。响应于第一频率的周期性驱动信号，加速度计沿弧线振动，每个弧与垂直于感测轴的振动轴相切。加速度计输出信号被解调以确定角速率，以及检测驱动信号和输出信号的周期性化合物之间的相移。在一种布置中，检测到的相移被用于驱动相位伺服，该相位伺服倾向于减小由加速度计相对于感测轴的相移和不对准之间的相互作用引起的偏移误差。在另一种布置中，使用相移来计算用于校正测量的角速率的偏差项。还描述了单个加速度计实施例。

5. 发明授权

US4783742A Apparatus and method for gravity correction in borehole survey systems 失效
标题翻译：钻孔测量系统中重力校正的装置和方法
公开(公告)号：US4783742A
公开(公告)日：1988-11-08
申请号：US948100
申请日：1986-12-31
申请人： Rex B. Peters
发明人： Rex B. Peters
IPC分类号： E21B47/022 , E21B47/00 , G01C9/08
CPC分类号： E21B47/022
摘要： Disclosed is an inertial navigation borehole survey system wherein the signals supplied by accelerometers (40) that are contained within the borehole survey system probe (10) are corrected for gravitational gradients encountered as the probe (10) travels through a borehole (12). The gravity correction is effected in the survey system signal processor (24) and is based on a gravity gradient signal that mathematically corresponds to: ##EQU1## where f represents the specific force due to gravity; f.sub.o represents the specific force of gravity at wellhead (20) of borehole (12); R.sub.o represents the average radius of the earth; .rho.(H) represents the local density of the geological formation penetrated by the borehole as a function of depth H; and .rho..sub.ave represents the means density of the earth. In utilizing the gravitational gradient to generate a gravity correction signal, the signal processor (24) effects a summation process that mathematically corresponds to: ##EQU2## where (.DELTA.H).sub.i represents the depth change between the "ith" signal processing cycle and the nextmost antecedent processing cycle, and, the summation range extends from the first signal processing cycle performed during the borehole survey through the final signal processing cycle of the borehole survey operation.
摘要翻译：公开了一种惯性导航钻孔测量系统，其中由探测器（10）行进通过钻孔（12）所遇到的重力梯度校正了包含在钻孔测量系统探头（10）内的由加速度计（40）提供的信号。重力校正在测量系统信号处理器（24）中实现，并且基于数学上对应于：的重力梯度信号，其中f表示由重力引起的特定力; fo表示井眼（20）的井口（20）的比重力; Ro代表地球的平均半径; rho（H）表示作为深度H的函数的钻孔渗透的地质构造的局部密度; 而rho ave代表地球的平均密度。在利用重力梯度来产生重力校正信号的情况下，信号处理器（24）实现数学上对应于以下的求和过程：其中（DELTA H）i表示“第i”个信号处理周期与最后的前期处理周期，总和范围从钻孔测量期间执行的第一个信号处理周期延伸到井眼测量操作的最终信号处理周期。

6. 发明授权

US4510802A Angular rate sensor utilizing two vibrating accelerometers secured to a parallelogram linkage 失效
标题翻译：角速率传感器利用两个固定在平行四边形连杆上的振动加速度计
公开(公告)号：US4510802A
公开(公告)日：1985-04-16
申请号：US528774
申请日：1983-09-02
申请人： Rex B. Peters
发明人： Rex B. Peters
IPC分类号： G01P7/00 , G01C19/5776 , G01C19/56 , G01C23/00 , G01P15/08
CPC分类号： G01P15/14 , G01C19/5776
摘要： In an inertial system for sensing the angular rotation and translational motion of a structure utilizing a pair of accelerometers in a back-to-back arrangement vibrating substantially linearly along an axis normal to their force sensing axes, a mechanism utilizing a parallelogram structure is used to impart the vibratory motion to the accelerometers.
摘要翻译：在用于感测利用一对加速度计的结构的角度旋转和平移运动的惯性系统中，所述结构沿着垂直于其力感测轴线的轴线大致线性振动地进行背对背布置，利用平行四边形结构的机构被用于将振动运动传递给加速度计。

7. 发明授权

US4399692A Borehole survey apparatus utilizing accelerometers and probe joint measurements 失效
标题翻译：利用加速度计和探头接头测量的钻孔测量装置
公开(公告)号：US4399692A
公开(公告)日：1983-08-23
申请号：US224789
申请日：1981-01-13
申请人： Rand H. Hulsing, II , Rex B. Peters
发明人： Rand H. Hulsing, II , Rex B. Peters
IPC分类号： G01V1/40 , E21B47/022 , G01B5/12 , G01B5/20 , G01B5/28 , G01B7/13 , G01B21/20 , G01C9/00 , G01C15/00 , E21B47/00
CPC分类号： E21B47/022
摘要： To provide for accurate determination of azimuth in a borehole survey apparatus, a downhole probe is provided with two or more sections connected by torsionally rigid, flexible joint assemblies with provisions for generating signals that represent the relative inclination and azimuth of one probe section from another. These signals are combined with inclination signals obtained from a set of accelerometers in one of the probe sections in a signal processing unit to generate signals that represent the direction and depth of the borehole.
摘要翻译：为了准确地确定钻孔测量装置中的方位角，井下探针设置有两个或多个通过扭转刚性的柔性接头组件连接的部分，其具有用于产生表示一个探针部分相对于另一探针部分的相对倾斜度和方位角的信号。这些信号与在信号处理单元中的一个探测部分中的一个加速度计获得的倾斜信号组合，以产生表示井眼的方向和深度的信号。

8. 发明授权

US5407868A Method of making an electrode tip for a tunnel current sensing device 失效
标题翻译：制造隧道电流检测装置的电极头的方法
公开(公告)号：US5407868A
公开(公告)日：1995-04-18
申请号：US988591
申请日：1992-12-08
申请人： Rex B. Peters , James R. Woodruff
发明人： Rex B. Peters , James R. Woodruff
IPC分类号： C25F3/12 , H01L21/306
CPC分类号： C25F3/12
摘要： A method for selectively etching a semiconductor wafer in the presence of an electrochemical etchant wherein the electrical potential of the area that is selectively etched is automatically changed to a potential at which the etching is inhibited once the desired etching in the area is completed. The method is described with respect to making an electrode tip for a tunnel current sensing device.
摘要翻译：一种在电化学蚀刻剂存在下选择性地蚀刻半导体晶片的方法，其中当该区域中所需的蚀刻完成后，被选择性蚀刻的区域的电势被自动地改变为蚀刻被抑制的电位。关于制造用于隧道电流检测装置的电极头来描述该方法。

9. 发明授权

US4872342A Translational accelerometer and accelerometer assembly method 失效
标题翻译：平移加速度计和加速度计组装方法
公开(公告)号：US4872342A
公开(公告)日：1989-10-10
申请号：US222680
申请日：1988-07-21
申请人： Richard A. Hanson , Rex B. Peters , Brian L. Norling , Edward A. Urbach
发明人： Richard A. Hanson , Rex B. Peters , Brian L. Norling , Edward A. Urbach
IPC分类号： G01P15/08 , G01P15/097 , G01P15/10
CPC分类号： G01P15/097 , G01P15/0888 , G01P2015/0828 , Y10T29/49007
摘要： An accelerometer comprising a body (10, 16, 12), a proof mass (18, 30, 32), a mounting strucutre comprising flexures (20, 22) for mounting the proof mass to the body, and force sensing elements (34, 38). The flexures permit translational motion of the proof mass with respect to the body along a sensitive axis SA and rotation of the proof mass with respect to the body about a hinge axis HA that is perpendicular to the sensitive axis. Acceleration of the accelerometer along the sensitive axis results in translational motion of the proof mass along the sensitive axis. The force sensing elements reacts to such translational motion by producing a signal indicative of acceleration along the sensitive axis. In a preferred embodiment, the mounting structure comprises a pair of fused quartz flexures that are oppositely directed with respect to one another, and the force sensing elements comprise a pair of vibrating beam force transducers that are connected to the proof mass on opposite sides of the hinge axis from one another. The described assembly method for accelerometers comprises forming bridges between the proof mass and body, the bridges being removed after attachment of the force sensing elements.
摘要翻译： 1.一种加速度计，包括主体（10,16,12），检验质量块（18,30,32），安装结构，其包括用于将所述证明物质安装到所述主体的挠曲件（20,22），以及力传感元件（34， 38）。挠曲件允许检测质量体沿着敏感轴线SA相对于身体的平移运动，并且证明物质相对于身体围绕垂直于敏感轴线的铰链轴线HA旋转。加速度传感器沿着敏感轴的加速导致检测质量沿着敏感轴的平移运动。力感测元件通过产生指示沿着敏感轴的加速度的信号来对这种平移运动做出反应。在优选实施例中，安装结构包括相对于彼此相对地指向的一对熔融石英弯曲部，并且力感测元件包括一对振动梁力传感器，其连接到在铰链轴彼此。所描述的用于加速度计的装配方法包括在检验质量块和本体之间形成桥，桥接件在附接力感测元件之后被移除。

10. 发明授权

US4665748A Automatic continuous nulling of angular rate sensor 失效
标题翻译：自动连续归零角速度传感器
公开(公告)号：US4665748A
公开(公告)日：1987-05-19
申请号：US789655
申请日：1985-10-21
申请人： Rex B. Peters
发明人： Rex B. Peters
IPC分类号： G01C19/56 , G01C19/574 , G01C19/5776 , G01P3/46
CPC分类号： G01C19/574 , G01C19/56 , G01C19/5776
摘要： An angular rate sensor comprising a pair of accelerometers that includes means for continuously nulling error signals resulting from misalignment of the accelerometers. The first accelerometer (10) has a first force sensing axis and produces a first output signal (a.sub.1) indicating acceleration along the first force sensing axis. The second accelerometer (12) has a second force sensing axis and produces a second output signal (a.sub.2) indicating acceleration along the second force sensing axis. The accelerometers are mounted by mounting means such that their force sensing axes are both parallel to a common sensing axis and such that the accelerometers can be moved along a vibration axis normal to the sensing axis. A signal generator (76) produces a periodic deive signal having a predetermined frequency, and drive means (80, 82, 84) connected to the mounting means is responsive to the drive signal for vibrating the first and second accelerometers along the vibration axis at the predetermined frequency. Signal processing means (104) receives the first and second output signals and generates a Coriolis signal representing the Coriolis acceleration along the sensing axis resulting from movement of the accelerometers along the vibration axis and rotation of the body about a rate axis normal to the vibration axis and to the sensing axis. The signal processing means includes the detection means (92) that receives the Coriolis signal and produces a feedback signal that is a function of those components of the Coriolis signal that are in phase with respect to the drive signal. The drive means includes means (80) for combining the feedback signal with the drive signal, such that the in phase components are continuously driven towards a null value.
摘要翻译：角速率传感器包括一对加速度计，其包括用于连续归零由加速度计的未对准产生的误差信号的装置。第一加速度计（10）具有第一力感测轴并且产生指示沿着第一力感测轴的加速度的第一输出信号（a1）。第二加速度计（12）具有第二力感测轴，并产生指示沿着第二力感测轴的加速度的第二输出信号（a2）。加速度计通过安装装置安装，使得它们的力感测轴线都平行于共同的感测轴线，并且使得加速度计可以沿着垂直于感测轴线的振动轴线移动。信号发生器（76）产生具有预定频率的周期性去除信号，并且连接到安装装置的驱动装置（80,82,84）响应于驱动信号，用于在第一和第二加速度计沿着振动轴振动第一和第二加速度计预定频率。信号处理装置（104）接收第一和第二输出信号，并且产生科里奥利信号，其表示沿加速度传感器沿着振动轴的运动产生的沿感测轴的科里奥利加速度，并且主体围绕与振动轴垂直的速率轴线的旋转和传感轴。信号处理装置包括接收科里奥利信号并产生与相对于驱动信号同相的科里奥利信号的那些分量的函数的反馈信号的检测装置（92）。驱动装置包括用于将反馈信号与驱动信号组合的装置（80），使得同相分量被连续地朝向空值驱动。

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