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1. 发明授权

US09689888B2 In-plane vibrating beam accelerometer 有权
公开(公告)号：US09689888B2
公开(公告)日：2017-06-27
申请号：US14542323
申请日：2014-11-14
申请人： Honeywell International Inc.
发明人： Stephen F. Becka
IPC分类号： G01P15/097 , G01P15/08 , G01P15/10 , G01P15/03 , G01P15/09
CPC分类号： G01P15/032 , G01P15/0802 , G01P15/0922 , G01P15/097 , G01P2015/0817
摘要： A device is described that includes a pendulous proof mass, a support base, a flexure, and at least two resonators. The support base defines a plane and supports the pendulous proof mass. The flexure flexibly connects the pendulous proof mass to the support base, suspends the pendulous proof mass within the support base, and in response to an acceleration of the device, the pendulous proof mass rotates about the flexure in the plane defined by the support base. The at least two resonators flexibly connect the pendulous proof mass to the support base and flex based on the rotation of the pendulous proof mass about the flexure, wherein each of the at least two resonators resonate at a respective resonant frequency.

2. 发明授权

US09354246B2 MEMS resonant accelerometer having improved electrical characteristics 有权
公开(公告)号：US09354246B2
公开(公告)日：2016-05-31
申请号：US13952503
申请日：2013-07-26
申请人： STMicroelectronics S.r.I.
发明人： Barbara Simoni , Claudia Comi , Alberto Corigliano
IPC分类号： G01P15/097 , G01P15/10
CPC分类号： G01P15/097 , G01P15/10
摘要： A MEMS resonant accelerometer is disclosed, having: a proof mass coupled to a first anchoring region via a first elastic element so as to be free to move along a sensing axis in response to an external acceleration; and a first resonant element mechanically coupled to the proof mass through the first elastic element so as to be subject to a first axial stress when the proof mass moves along the sensing axis and thus to a first variation of a resonant frequency. The MEMS resonant accelerometer is further provided with a second resonant element mechanically coupled to the proof mass through a second elastic element so as to be subject to a second axial stress when the proof mass moves along the sensing axis, substantially opposite to the first axial stress, and thus to a second variation of a resonant frequency, opposite to the first variation.

3. 发明申请

US20150013456A1 ACCELERATION SENSOR 有权
标题翻译：加速传感器
公开(公告)号：US20150013456A1
公开(公告)日：2015-01-15
申请号：US14499324
申请日：2014-09-29
申请人： Murata Manufacturing Co., Ltd.
发明人： Takuo HADA , Katsumi FUJIMOTO , Hideya HORIUCHI , Toshimaro YONEDA
IPC分类号： G01P15/10 , G01P15/09
CPC分类号： G01P15/10 , G01P15/09 , G01P15/097 , G01P2015/0828
摘要： An acceleration sensor includes a fixation member, a weight member including a plate with two opposing sides parallel or substantially parallel to an X-direction and two opposing sides parallel to a Y-axis direction in a plan view, the weight member including a cutout extending in a direction about 45° relative to the X and Y axis directions, a vibrating beam linearly extending in the direction about 45° relative to the X and Y axis directions in the plan view, and one end portion is connected to the fixation member and the other end portion is connected to the weight member, the vibrating beam is partly arranged within the cutout and supporting the weight member to be displaceable in a Z-axis direction, a driver disposed on the vibrating beam and vibrating the vibrating beam, and a detector disposed on the vibrating beam and outputting a detection signal that is changed depending on deformation of the vibrating beam.
摘要翻译：加速度传感器包括固定构件，配重构件，其包括具有平行于或基本上平行于X方向的两个相对侧的平板和平行于Y轴方向平行的两个相对侧的板，所述配重构件包括：在相对于X和Y轴方向大约45°的方向上，在俯视图中相对于X和Y轴方向在大约45°的方向上线性地延伸的振动束，并且一个端部连接到固定构件，所述另一端部与所述配重构件连接，所述振动梁部分地设置在所述切口内并且支撑所述配重构件以在Z轴方向上移动，所述振动梁设置在所述振动梁上并使所述振动梁振动，检测器设置在振动束上并输出根据振动束的变形而改变的检测信号。

4. 发明授权

US08528405B2 Flexure assemblies and methods for manufacturing and using the same 有权
标题翻译：弯曲组件及其制造和使用方法
公开(公告)号：US08528405B2
公开(公告)日：2013-09-10
申请号：US12631398
申请日：2009-12-04
申请人： Lyle J. Jenkins , Jonathan J. Bernstein , Donald C. Fyler
发明人： Lyle J. Jenkins , Jonathan J. Bernstein , Donald C. Fyler
IPC分类号： G01P15/10
CPC分类号： G01P15/125 , G01P15/0802 , G01P2015/0817 , G01P2015/0857
摘要： In one embodiment, an accelerometer includes a suspension frame, a proof mass, and a plurality of flexures suspending the proof mass from the suspension frame. The flexures allow the proof mass to deflect in response to an acceleration along a sensitive axis of the accelerometer. Each flexure exhibits an initial spring rate along the sensitive axis of substantially zero.
摘要翻译：在一个实施例中，加速度计包括悬挂框架，检验质量块和从悬架框架悬挂校验物质的多个挠曲件。挠曲件允许检测质量响应于沿着加速度计的敏感轴的加速度而偏转。每个挠曲物呈现出基本为零的敏感轴的初始弹簧刚度。

5. 发明授权

US08516889B2 MEMS resonant accelerometer having improved electrical characteristics 有权
标题翻译： MEMS谐振加速度计具有改善的电气特性
公开(公告)号：US08516889B2
公开(公告)日：2013-08-27
申请号：US12875000
申请日：2010-09-02
申请人： Barbara Simoni , Claudia Comi , Alberto Corigliano
发明人： Barbara Simoni , Claudia Comi , Alberto Corigliano
IPC分类号： G01P15/097 , G01P15/10
CPC分类号： G01P15/097 , G01P15/10
摘要： A MEMS resonant accelerometer is disclosed, having: a proof mass coupled to a first anchoring region via a first elastic element so as to be free to move along a sensing axis in response to an external acceleration; and a first resonant element mechanically coupled to the proof mass through the first elastic element so as to be subject to a first axial stress when the proof mass moves along the sensing axis and thus to a first variation of a resonant frequency. The MEMS resonant accelerometer is further provided with a second resonant element mechanically coupled to the proof mass through a second elastic element so as to be subject to a second axial stress when the proof mass moves along the sensing axis, substantially opposite to the first axial stress, and thus to a second variation of a resonant frequency, opposite to the first variation.
摘要翻译：公开了一种MEMS谐振加速度计，其具有：经由第一弹性元件耦合到第一锚定区域的检测质量，以便响应于外部加速度沿感测轴线自由移动; 以及第一谐振元件，其通过所述第一弹性元件机械耦合到所述检验质量块，以便当所述检测质量沿着所述感测轴线移动并且因此达到谐振频率的第一变化时，经受第一轴向应力。 MEMS谐振加速度计进一步设置有第二谐振元件，其通过第二弹性元件机械耦合到校准物质，以便当检测质量沿着感测轴线移动时受到第二轴向应力，基本上与第一轴向应力相反，从而达到与第一变化相反的谐振频率的第二变化。

6. 发明授权

US08082790B2 Solid-state inertial sensor on chip 失效
标题翻译：固态惯性传感器芯片
公开(公告)号：US08082790B2
公开(公告)日：2011-12-27
申请号：US12365535
申请日：2009-02-04
申请人： Gaston Dube , Alfredo Riviere
发明人： Gaston Dube , Alfredo Riviere
IPC分类号： G01C19/56 , G01P15/10
CPC分类号： G01P15/097 , G01C19/5621 , G01P15/0915 , G01P15/18
摘要： Monolithic solid-state inertial sensor. The sensor detects rotation rate about three orthogonal axes and includes a micromachined monolithic piezoelectric crystalline structure including an equal number of vibratory drive and detection tines on each side of an axis of symmetry of the sensor, the tines being synchronized to have alternate actuation movements inward and outward.
摘要翻译：单片固态惯性传感器。传感器检测围绕三个正交轴的旋转速率，并且包括微机械加工的单片压电晶体结构，其包括在传感器的对称轴的每一侧上具有相等数量的振动驱动和检测尖齿，所述齿同步以具有向内的交替致动运动，向外。

7. 发明授权

US08028580B2 Inertial measurement unit with enhanced acceleration withstand capability 失效
标题翻译：具有增强加速承受能力的惯性测量单元
公开(公告)号：US08028580B2
公开(公告)日：2011-10-04
申请号：US12305215
申请日：2007-06-22
申请人： Hervé Millet
发明人： Hervé Millet
IPC分类号： G01P15/10
CPC分类号： G01C21/16 , G01C19/56
摘要： The present invention relates to an inertial measurement unit with enhanced resistance to acceleration, and it is characterized in that it comprises at least five accelerometers (Acc1 to Acc5), the sensing axes of which are arranged at various positions on the generatrix of a conical surface, and in that they comprise a device for detecting saturation of the accelerometers and a device for detecting abnormal biases.
摘要翻译：本发明涉及具有增强的抗加速性的惯性测量单元，其特征在于，其包括至少五个加速度计（Acc1至Acc5），其感测轴布置在锥形表面的母线上的各个位置并且它们包括用于检测加速度计的饱和度的装置和用于检测异常偏差的装置。

8. 发明授权

US08026771B2 Driver device, physical quantity measuring device, and electronic instrument 有权
标题翻译：驱动装置，物理量测量装置和电子仪器
公开(公告)号：US08026771B2
公开(公告)日：2011-09-27
申请号：US11984984
申请日：2007-11-26
申请人： Masahiro Kanai , Naoki Yoshida , Eitaro Otsuka
发明人： Masahiro Kanai , Naoki Yoshida , Eitaro Otsuka
IPC分类号： G01P15/10 , H03B5/06 , H03B5/30 , H03B5/32 , H03B5/36
CPC分类号： G01C19/56 , G01C19/5776 , H03K3/0231 , H03L5/00
摘要： A driver device that forms an oscillation loop with a vibrator and causes the vibrator to produce driving vibrations includes a current-voltage converter that converts a current that flows through the vibrator into a voltage, an output circuit that causes the vibrator to produce the driving vibrations based on a signal that is converted into a voltage with respect to a given voltage, and a high-pass filter that is provided in the oscillation loop between the current-voltage converter and the output circuit. The driver device causes the vibrator to produce the driving vibrations while changing a reference potential of the high-pass filter, and then causes the vibrator to produce the driving vibrations while fixing the reference potential.
摘要翻译：用振动器形成振荡回路并使振动器产生驱动振动的驱动器装置包括将流过振动器的电流转换为电压的电流 - 电压转换器，使振动器产生驱动振动的输出电路基于相对于给定电压转换为电压的信号，以及设置在电流 - 电压转换器和输出电路之间的振荡环路中的高通滤波器。驱动装置使振动器在改变高通滤波器的参考电位的同时产生驱动振动，然后使振动器产生驱动振动同时固定参考电位。

9. 发明授权

US07997133B2 Temperature compensating sensor 有权
标题翻译：温度补偿传感器
公开(公告)号：US07997133B2
公开(公告)日：2011-08-16
申请号：US12088325
申请日：2006-10-11
申请人： Andrew Paul Cook , Norton G. Kinsley
发明人： Andrew Paul Cook , Norton G. Kinsley
IPC分类号： G01P15/10 , G01P15/08
CPC分类号： G01P15/0922 , G01P1/006 , G01P15/123
摘要： An acceleration sensor for measuring an acceleration comprises a housing including a measuring-plate, which has a first surface. The measuring plate has a second surface in parallel with and opposite to the first surface. A post is bonded via a post-bonding-face to the first surface. A temperature-compensating-element for compensating a temperature-effect caused by a temperature acting on the measuring-plate, is bonded via an element-bonding-face to the second surface of the measuring-plate. In addition, a sensor as described above is in a measuring device.
摘要翻译：用于测量加速度的加速度传感器包括具有第一表面的测量板的壳体。测量板具有与第一表面平行并相对的第二表面。柱通过后粘合面粘合到第一表面。用于补偿由作用在测量板上的温度引起的温度效应的温度补偿元件通过元件接合面接合到测量板的第二表面。此外，如上所述的传感器在测量装置中。

10. 发明申请

US20110132088A1 FLEXURE ASSEMBLIES AND METHODS FOR MANUFACTURING AND USING THE SAME 有权
标题翻译：挠性组件及其制造和使用方法
公开(公告)号：US20110132088A1
公开(公告)日：2011-06-09
申请号：US12631398
申请日：2009-12-04
申请人： Lyle J. Jenkins , Jonathan J. Bernstein , Donald C. Fyler
发明人： Lyle J. Jenkins , Jonathan J. Bernstein , Donald C. Fyler
IPC分类号： G01P15/10 , G01P15/125 , H01L21/302
CPC分类号： G01P15/125 , G01P15/0802 , G01P2015/0817 , G01P2015/0857
摘要： In one embodiment, an accelerometer includes a suspension frame, a proof mass, and a plurality of flexures suspending the proof mass from the suspension frame. The flexures allow the proof mass to deflect in response to an acceleration along a sensitive axis of the accelerometer. Each flexure exhibits an initial spring rate along the sensitive axis of substantially zero.
摘要翻译：在一个实施例中，加速度计包括悬挂框架，检验质量块和从悬架框架悬挂校验物质的多个挠曲件。挠曲件允许检测质量响应于沿着加速度计的敏感轴的加速度而偏转。每个挠曲物呈现出基本为零的敏感轴的初始弹簧刚度。

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