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    • 3. 发明申请
    • SEMICONDUCTOR DEVICE
    • 半导体器件
    • US20160329323A1
    • 2016-11-10
    • US15029583
    • 2014-07-17
    • Shinya IwasakiSatoru Kameyama
    • Shinya IwasakiSatoru Kameyama
    • H01L27/07H01L29/32H01L29/10H01L29/423H01L29/739H01L29/08
    • H01L27/0727H01L21/3223H01L29/0804H01L29/0821H01L29/1095H01L29/32H01L29/4236H01L29/7397
    • A small semiconductor device having a diode forward voltage less likely to change due to a gate potential is provided. An anode and an upper IGBT structure (emitter and body) are provided in a range in the substrate exposed at the upper surface. A trench, a gate insulating film, and a gate electrode extend along a border of the anode and the upper IGBT structure. Cathode and collector are provided in a range in the substrate exposed at the lower surface. A drift is provided between an upper structure and a lower structure. A crystal defect region extends across the drift above the cathode and the drift above the collector. When a thickness of the substrate is defined as x [μm] and a width of a portion of the crystal defect region that protrudes above the cathode is defined as y [μm], y≧0.007x2−1.09x+126 is satisfied.
    • 提供了具有由于栅极电位而不太可能改变的二极管正向电压的小型半导体器件。 阳极和上部IGBT结构(发射体和主体)设置在暴露在上表面的衬底的范围内。 沟槽,栅极绝缘膜和栅极电极沿着阳极和上部IGBT结构的边界延伸。 阴极和集电体设置在暴露在下表面的基板的范围内。 在上部结构和下部结构之间提供漂移。 晶体缺陷区域延伸穿过阴极上方的漂移物,并且在集电极上方漂移。 当衬底的厚度被定义为x [μm],并且在阴极上方突出的晶体缺陷区域的一部分的宽度被定义为y [μm]时,满足y≥0.007x2-1.09x+ 126。
    • 4. 发明申请
    • SEMICONDUCTOR DEVICE
    • 半导体器件
    • US20160247808A1
    • 2016-08-25
    • US15027846
    • 2013-11-05
    • Yuki HORIUCHISatoru KAMEYAMA
    • Yuki HORIUCHISatoru KAMEYAMA
    • H01L27/105H01L29/08H01L29/739
    • H01L27/105H01L29/0696H01L29/0821H01L29/0834H01L29/0839H01L29/407H01L29/7391H01L29/7397H01L29/78H01L29/8613
    • Provided is a technology for further reducing a loss in a semiconductor device including a semiconductor substrate in which an IGBT region and a diode region are provided. This semiconductor device includes a semiconductor substrate in which at least one IGBT region and at least one diode region are provided. The IGBT region and the diode region are adjacent to each other in a predetermined direction in a plan view of the semiconductor substrate. In the plan view of the semiconductor substrate, a first boundary plane where the collector region and the cathode region are adjacent is shifted from a second boundary plane where the IGBT region and the diode region are adjacent on the front surface side of the semiconductor substrate either in a direction from the cathode region toward the collector region or in a direction from the collector region toward the cathode region.
    • 提供了一种用于进一步减少包括其中设置有IGBT区域和二极管区域的半导体衬底的半导体器件的损耗的技术。 该半导体器件包括其中设置有至少一个IGBT区域和至少一个二极管区域的半导体衬底。 在半导体衬底的平面图中,IGBT区域和二极管区域在预定方向上彼此相邻。 在半导体衬底的平面图中,集电极区域和阴极区域相邻的第一边界面从半导体衬底的前表面侧的IGBT区域和二极管区域相邻的第二边界面偏移 在从阴极区域朝向集电极区域的方向或从集电极区域朝向阴极区域的方向上。
    • 5. 发明申请
    • SEMICONDUCTOR DEVICE
    • 半导体器件
    • US20160005844A1
    • 2016-01-07
    • US14767370
    • 2013-02-13
    • Keisuke KIMURASatoru KAMEYAMAMasaki KOYAMASachiko AOI
    • Keisuke KIMURASatoru KAMEYAMAMasaki KOYAMASachiko AOI
    • H01L29/739H01L27/06H01L29/10
    • H01L29/7397H01L27/0629H01L27/0664H01L29/0696H01L29/0834H01L29/1095
    • A semiconductor device in which an IGBT region and a diode region are formed on one semiconductor substrate is disclosed. The IGBT region includes: a body layer of a first conductivity type that is formed on a front surface of the semiconductor substrate; a body contact layer of the first conductivity type that is partially formed on a front surface of the body layer and has a higher impurity concentration of the first conductivity type than the body layer; an emitter layer of a second conductivity type that is partially formed on the front surface of the body layer; a drift layer; a collector layer; and a gate electrode. In the semiconductor device, a part of the body contact layer placed at a long distance from the diode region is made larger than a part of the body contact layer placed at a short distance from the diode region.
    • 公开了在一个半导体衬底上形成IGBT区域和二极管区域的半导体器件。 IGBT区域包括:形成在半导体衬底的前表面上的第一导电类型的主体层; 所述第一导电类型的体接触层部分地形成在所述主体层的前表面上,并且具有比所述主体层更高的第一导电类型的杂质浓度; 第二导电类型的发射极层,部分地形成在所述主体层的前表面上; 漂移层 收集层; 和栅电极。 在半导体器件中,与二极管区域长距离放置的身体接触层的一部分被制成大于放置在与二极管区域相距很短距离的身体接触层的一部分。
    • 8. 发明授权
    • Semiconductor device
    • 半导体器件
    • US09379225B2
    • 2016-06-28
    • US14767370
    • 2013-02-13
    • Keisuke KimuraSatoru KameyamaMasaki KoyamaSachiko Aoi
    • Keisuke KimuraSatoru KameyamaMasaki KoyamaSachiko Aoi
    • H01L29/739H01L29/06H01L29/08H01L29/10H01L27/06
    • H01L29/7397H01L27/0629H01L27/0664H01L29/0696H01L29/0834H01L29/1095
    • A semiconductor device in which an IGBT region and a diode region are formed on one semiconductor substrate is disclosed. The IGBT region includes: a body layer of a first conductivity type that is formed on a front surface of the semiconductor substrate; a body contact layer of the first conductivity type that is partially formed on a front surface of the body layer and has a higher impurity concentration of the first conductivity type than the body layer; an emitter layer of a second conductivity type that is partially formed on the front surface of the body layer; a drift layer; a collector layer; and a gate electrode. In the semiconductor device, a part of the body contact layer placed at a long distance from the diode region is made larger than a part of the body contact layer placed at a short distance from the diode region.
    • 公开了在一个半导体衬底上形成IGBT区域和二极管区域的半导体器件。 IGBT区域包括:形成在半导体衬底的前表面上的第一导电类型的主体层; 所述第一导电类型的体接触层部分地形成在所述主体层的前表面上,并且具有比所述主体层更高的第一导电类型的杂质浓度; 第二导电类型的发射极层,部分地形成在所述主体层的前表面上; 漂移层 收集层; 和栅电极。 在半导体器件中,与二极管区域长距离放置的身体接触层的一部分被制成大于放置在与二极管区域相距很短距离的身体接触层的一部分。