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    • 6. 发明申请
    • Method for chemical analysis and apparatus for chemical analysis
    • 化学分析方法和化学分析仪器
    • US20110266437A1
    • 2011-11-03
    • US12926461
    • 2010-11-18
    • Seong Chan Park
    • Seong Chan Park
    • H01J49/00G01N23/00
    • H01J49/142
    • There are provided a method for chemical analysis and an apparatus for chemical analysis. The method for chemical analysis includes: dosing a targeted sample with ionizing gas; irradiating ion beams on the targeted sample; and analyzing the mass of fragment ions and molecular ions sputtered from the targeted sample by the collisional impact of the ion beams . The apparatus for chemical analysis includes: an ionizing gas doser that adds ionizing gas onto a targeted sample disposed in a vacuum chamber; an ion beam source that generates ion beams and irradiates them onto the targeted sample; and a mass spectrometer that analyzes the mass of fragment ions and molecular ions sputtered from the targeted sample by the collisional impact of the ion beams.
    • 提供了化学分析方法和化学分析装置。 化学分析方法包括:用电离气体给定目标样品; 在目标样品上照射离子束; 并通过离子束的碰撞冲击来分析从目标样品溅射的碎片离子和分子离子的质量。 用于化学分析的装置包括:电离气体加料器,其将电离气体添加到设置在真空室中的目标样品上; 产生离子束并将其照射到目标样品上的离子束源; 以及质谱仪,其通过离子束的碰撞冲击分析从目标样品溅射的碎片离子和分子离子的质量。