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    • 4. 发明授权
    • Positioning control system for moving element and laser drilling machine
    • 移动元件和激光钻孔机定位控制系统
    • US08872064B2
    • 2014-10-28
    • US11707153
    • 2007-02-16
    • Takashi OnoSouichi ToyamaYaichi OkuboHiromu Hirai
    • Takashi OnoSouichi ToyamaYaichi OkuboHiromu Hirai
    • B23K26/00G05B13/02G05B11/18G05B19/23
    • G05B19/231G05B2219/41029G05B2219/41127G05B2219/45139
    • A positioning control system for positioning a moving element on a basis of position command data is provided with a feedback loop. The system is also provided with a loop gain modifier for determining a loop gain, which is to be used in a following positioning operation, on a basis of a difference between an amount of overshoot measured in a current positioning operation and a predetermined tolerance or on a basis of a difference between an amount of overshoot measured in a current positioning operation and a first predetermined tolerance and a difference between an amount of undershoot measured in the current positioning operation and a second predetermined tolerance. The first and second tolerances may preferably be the same in absolute value. The moving element may specifically be a steerable mirror for drilling holes in a work by reflecting a laser beam. Also disclosed is a laser drilling machine including the system.
    • 基于位置指令数据定位移动元件的定位控制系统具有反馈回路。 该系统还设置有环路增益修正器,用于基于在当前定位操作中测量的过冲量与预定公差之间的差异或者在预定公差上基于在随后的定位操作中使用的环路增益来确定环路增益, 在当前定位操作中测量的过冲量与第一预定公差之间的差异与在当前定位操作中测量的下冲量之差与第二预定公差之间的差的基础。 第一和第二公差可以优选地具有相同的绝对值。 移动元件可以具体地是用于通过反射激光束在工件中钻孔的可操纵镜。 还公开了一种包括该系统的激光钻孔机。
    • 7. 发明授权
    • Optical scanner and laser machining apparatus
    • 光学扫描仪和激光加工设备
    • US07023598B2
    • 2006-04-04
    • US10758287
    • 2004-01-16
    • Souichi ToyamaAtsushi SakamotoHaruaki OtsukiYaichi Okubo
    • Souichi ToyamaAtsushi SakamotoHaruaki OtsukiYaichi Okubo
    • G02B26/08
    • G02B26/105
    • An optical scanner which can realize target trajectory tracking machining at a high speed and with a high accuracy. In a servo control circuit controlling the operation of an X-axis scanner for positioning a mirror and the operation of a Y-axis scanner for positioning another mirror, sine wave response is performed at a specific frequency on feedback control for each axis so that the gain characteristic and the phase characteristic of the feedback control are estimated. This arithmetic operation processing is performed by a microprocessor prior to machining, and the results of estimation of the two axes are stored as data for each frequency. In the stage of machining, the results of estimation in terms of the gain characteristic and the phase characteristic are used for correcting the amplitude and phase of a sine wave of a target trajectory in order to cancel each characteristic.
    • 一种可以高速,高准确地实现目标轨迹跟踪加工的光学扫描仪。 在控制用于定位反射镜的X轴扫描仪的操作的伺服控制电路以及用于定位另一镜的Y轴扫描器的操作中,在每个轴的反馈控制上以特定频率执行正弦波响应,使得 估计反馈控制的增益特性和相位特性。 这种算术运算处理在加工之前由微处理器执行,并且两轴的估计结果作为每个频率的数据被存储。 在加工阶段,根据增益特性和相位特性的估计结果,用于校正目标轨迹的正弦波的振幅和相位,以消除每个特性。
    • 8. 发明申请
    • Scanner system
    • 扫描仪系统
    • US20050128553A1
    • 2005-06-16
    • US10927082
    • 2004-08-27
    • Souichi ToyamaHaruaki OtsukiAtsushi SakamotoKenta SekiYaichi Okubo
    • Souichi ToyamaHaruaki OtsukiAtsushi SakamotoKenta SekiYaichi Okubo
    • B23K26/08G02B26/10H05K3/00B23K26/06
    • G02B26/105B23K26/08B23K26/082H05K3/0026
    • A scanner system includes a servo control unit. A rotation angle of a rotating shaft supporting a mirror is detected, and an error of the detected value with respect to a commanded value is integrated by an integral compensator so that the detected value is able to track the commanded value. A tracking error proportional compensator is disposed in parallel with the integral compensator so as to add a correction value proportional to the error to the integrated value of the error. A plurality of gains are prepared for each of the integral compensator, the tracking error proportional compensator, a detected value proportional compensator and a detected value differential compensator of the servo control unit. Each gain is changed in accordance with a travel angle of the commanded value. Thus, the mirror can be positioned quickly so that the machining speed can be improved.
    • 扫描仪系统包括伺服控制单元。 检测支撑反射镜的旋转轴的旋转角度,并且通过积分补偿器将检测值相对于指令值的误差积分,使得检测值能够跟踪指令值。 跟踪误差比例补偿器与积分补偿器并联设置,以便将误差成比例的校正值与误差的积分值相加。 为积分补偿器,跟踪误差比例补偿器,检测值比例补偿器和伺服控制单元的检测值差分补偿器中的每一个准备多个增益。 每个增益根据指令值的行进角度而改变。 因此,可以快速地定位镜子,从而可以提高加工速度。
    • 9. 发明授权
    • Rocking actuator and laser machining apparatus
    • 摇摆执行器和激光加工设备
    • US07629714B2
    • 2009-12-08
    • US11833695
    • 2007-08-03
    • Souichi ToyamaKounosuke KitamuraAkira DoiHiromu HiraiKenta SekiYoshiaki Kano
    • Souichi ToyamaKounosuke KitamuraAkira DoiHiromu HiraiKenta SekiYoshiaki Kano
    • H02K33/00
    • H02K26/00H02K33/16
    • A rocking actuator and a laser machining apparatus which can suppress a temperature rise of a permanent magnet in a moving-magnet actuator. Even when a steerable mirror is positioned by rapid and continuous motions, highly reliable machining can be performed without degrading machining throughput or hole position accuracy. A cooling jacket for cooling a casing and heat transfer units brought into contact with a coil and the casing are provided. Heat generated in the coil is introduced to the casing through the heat transfer bypass units. Thus, the temperature rise of the coil is suppressed. Radial grooves are provided in the permanent magnet opposed to the coil so as to prevent an eddy current from appearing therein. Groove depth is made not smaller than skin depth expressed by a function of volume resistivity and permeability of the permanent magnet and a fundamental frequency of a current applied to the coil.
    • 可以抑制移动磁体致动器中的永磁体的温度升高的摆动致动器和激光加工装置。 即使通过快速连续的运动来定位可转向的镜子,也可以在不降低加工吞吐量或孔位置精度的情况下执行高度可靠的加工。 提供了用于冷却壳体的冷却套和与线圈和壳体接触的传热单元。 在线圈中产生的热量通过传热旁路单元引入壳体。 因此,线圈的温度上升被抑制。 在与线圈相对的永磁体中设置有径向槽,以防止其中出现涡流。 凹槽深度不小于由永磁体的体积电阻率和磁导率函数表示的皮肤深度以及施加到线圈的电流的基频。
    • 10. 发明授权
    • Digital servo control unit and laser machining apparatus
    • 数字伺服控制单元和激光加工设备
    • US07496415B2
    • 2009-02-24
    • US11442155
    • 2006-05-30
    • Souichi ToyamaYaichi Okubo
    • Souichi ToyamaYaichi Okubo
    • G06F19/00
    • G05B19/21G05B2219/41144G05B2219/41186G05B2219/41232G05B2219/45165
    • A digital servo control unit which uses a D/A converter, which suppresses the spike-like pulsation superimposed on a current error signal inside a current control circuit, and which has control performance not lower than that in the background art even when a low-voltage and low-price power supply circuit is used. A first-order low pass filter acts on an analog signal output by the D/A converter, and a stabilizing compensation occurs for a phase delay caused by the first-order low pass filter. The first-order low pass filter is formed as a low pass filter having a cut-off frequency which is lower than a sampling frequency. The first-order low pass filter may be replaced by a notch filter having a cut-off frequency which is equal to a sampling frequency or which is equal to an integer multiple of a Nyquist frequency.
    • 一种数字伺服控制单元,其使用D / A转换器,其抑制叠加在电流控制电路内的电流误差信号上的尖状脉动,并且其控制性能不低于背景技术的控制性能, 使用电压和低价电源电路。 一阶低通滤波器作用于由D / A转换器输出的模拟信号,并且由一阶低通滤波器引起的相位延迟发生稳定补偿。 一阶低通滤波器形成为具有低于采样频率的截止频率的低通滤波器。 一阶低通滤波器可以由具有等于采样频率或等于奈奎斯特频率的整数倍的截止频率的陷波滤波器代替。