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    • 3. 发明申请
    • Rocking Actuator and Laser Machining Apparatus
    • 摇动执行器和激光加工设备
    • US20080036309A1
    • 2008-02-14
    • US11833695
    • 2007-08-03
    • Souichi ToyamaKounosuke KitamuraAkira DoiHiromu HiraiKenta SekiYoshiaki Kano
    • Souichi ToyamaKounosuke KitamuraAkira DoiHiromu HiraiKenta SekiYoshiaki Kano
    • H02K33/00
    • H02K26/00H02K33/16
    • A rocking actuator and a laser machining apparatus which can suppress a temperature rise of a permanent magnet in a moving-magnet actuator. Even when a steerable mirror is positioned by rapid and continuous motions, highly reliable machining can be performed without degrading machining throughput or hole position accuracy. A cooling jacket for cooling a casing and heat transfer units brought into contact with a coil and the casing are provided. Heat generated in the coil is introduced to the casing through the heat transfer bypass units. Thus, the temperature rise of the coil is suppressed. Radial grooves are provided in the permanent magnet opposed to the coil so as to prevent an eddy current from appearing therein. Groove depth is made not smaller than skin depth expressed by a function of volume resistivity and permeability of the permanent magnet and a fundamental frequency of a current applied to the coil.
    • 可以抑制移动磁体致动器中的永磁体的温度升高的摆动致动器和激光加工装置。 即使通过快速连续的运动来定位可转向的镜子,也可以在不降低加工吞吐量或孔位置精度的情况下执行高度可靠的加工。 提供了用于冷却壳体的冷却套和与线圈和壳体接触的传热单元。 在线圈中产生的热量通过传热旁路单元引入壳体。 因此,线圈的温度上升被抑制。 在与线圈相对的永磁体中设置有径向槽,以防止其中出现涡流。 凹槽深度不小于由永磁体的体积电阻率和磁导率函数表示的皮肤深度以及施加到线圈的电流的基频。
    • 5. 发明授权
    • Rocking actuator and laser machining apparatus
    • 摇摆执行器和激光加工设备
    • US07629714B2
    • 2009-12-08
    • US11833695
    • 2007-08-03
    • Souichi ToyamaKounosuke KitamuraAkira DoiHiromu HiraiKenta SekiYoshiaki Kano
    • Souichi ToyamaKounosuke KitamuraAkira DoiHiromu HiraiKenta SekiYoshiaki Kano
    • H02K33/00
    • H02K26/00H02K33/16
    • A rocking actuator and a laser machining apparatus which can suppress a temperature rise of a permanent magnet in a moving-magnet actuator. Even when a steerable mirror is positioned by rapid and continuous motions, highly reliable machining can be performed without degrading machining throughput or hole position accuracy. A cooling jacket for cooling a casing and heat transfer units brought into contact with a coil and the casing are provided. Heat generated in the coil is introduced to the casing through the heat transfer bypass units. Thus, the temperature rise of the coil is suppressed. Radial grooves are provided in the permanent magnet opposed to the coil so as to prevent an eddy current from appearing therein. Groove depth is made not smaller than skin depth expressed by a function of volume resistivity and permeability of the permanent magnet and a fundamental frequency of a current applied to the coil.
    • 可以抑制移动磁体致动器中的永磁体的温度升高的摆动致动器和激光加工装置。 即使通过快速连续的运动来定位可转向的镜子,也可以在不降低加工吞吐量或孔位置精度的情况下执行高度可靠的加工。 提供了用于冷却壳体的冷却套和与线圈和壳体接触的传热单元。 在线圈中产生的热量通过传热旁路单元引入壳体。 因此,线圈的温度上升被抑制。 在与线圈相对的永磁体中设置有径向槽,以防止其中出现涡流。 凹槽深度不小于由永磁体的体积电阻率和磁导率函数表示的皮肤深度以及施加到线圈的电流的基频。
    • 7. 发明授权
    • Positioning control system for moving element and laser drilling machine
    • 移动元件和激光钻孔机定位控制系统
    • US08872064B2
    • 2014-10-28
    • US11707153
    • 2007-02-16
    • Takashi OnoSouichi ToyamaYaichi OkuboHiromu Hirai
    • Takashi OnoSouichi ToyamaYaichi OkuboHiromu Hirai
    • B23K26/00G05B13/02G05B11/18G05B19/23
    • G05B19/231G05B2219/41029G05B2219/41127G05B2219/45139
    • A positioning control system for positioning a moving element on a basis of position command data is provided with a feedback loop. The system is also provided with a loop gain modifier for determining a loop gain, which is to be used in a following positioning operation, on a basis of a difference between an amount of overshoot measured in a current positioning operation and a predetermined tolerance or on a basis of a difference between an amount of overshoot measured in a current positioning operation and a first predetermined tolerance and a difference between an amount of undershoot measured in the current positioning operation and a second predetermined tolerance. The first and second tolerances may preferably be the same in absolute value. The moving element may specifically be a steerable mirror for drilling holes in a work by reflecting a laser beam. Also disclosed is a laser drilling machine including the system.
    • 基于位置指令数据定位移动元件的定位控制系统具有反馈回路。 该系统还设置有环路增益修正器,用于基于在当前定位操作中测量的过冲量与预定公差之间的差异或者在预定公差上基于在随后的定位操作中使用的环路增益来确定环路增益, 在当前定位操作中测量的过冲量与第一预定公差之间的差异与在当前定位操作中测量的下冲量之差与第二预定公差之间的差的基础。 第一和第二公差可以优选地具有相同的绝对值。 移动元件可以具体地是用于通过反射激光束在工件中钻孔的可操纵镜。 还公开了一种包括该系统的激光钻孔机。