会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 3. 发明申请
    • OPTICAL GRATING INCLUDING A SMOOTHING LAYER
    • 光学包括一个平滑层
    • US20140118830A1
    • 2014-05-01
    • US13660585
    • 2012-10-25
    • Ulrich MuellerJay Daniel
    • Ulrich MuellerJay Daniel
    • G02B5/18B05D5/06
    • G21K1/062G02B5/1814G02B5/1838G02B5/1861G21K2201/067
    • An apparatus and method pertaining to an optical grating are disclosed herein. In one embodiment, in response to a light incident on the optical grating, a first component of the light at a first wavelength is selectively reflected while a second component of the light at a second wavelength is selectively rejected. A reflectance efficiency corresponding to the selective reflection of the first component of the light being a function of a surface roughness of an intermediate layer included in the optical grating. And outputting the selective reflection of the first component of the light at the first wavelength to an optical component included in an extreme ultra violet (EUV) lithography system. The first wavelength being an EUV wavelength and the reflectance efficiency maximized at the first wavelength.
    • 本文公开了与光栅相关的装置和方法。 在一个实施例中,响应入射在光栅上的光,选择性地反射第一波长的光的第一分量,而选择性地拒绝第二波长的光的第二分量。 对应于光的第一分量的选择反射的反射率效率是包括在光栅中的中间层的表面粗糙度的函数。 并将第一波长的光的第一分量的选择反射输出到极紫外(EUV)光刻系统中的光学部件。 第一波长是EUV波长,反射率效率在第一波长处最大化。