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1. 发明申请

US20170062694A1 FLEXIBLE MICROMACHINED TRANSDUCER DEVICE AND METHOD FOR FABRICATING SAME 审中-公开
标题翻译：柔性微型传感器装置及其制造方法
公开(公告)号：US20170062694A1
公开(公告)日：2017-03-02
申请号：US15353695
申请日：2016-11-16
申请人： Dimitre Latev , Arman Hajati , Darren Todd Imai , Ut Tran
发明人： Dimitre Latev , Arman Hajati , Darren Todd Imai , Ut Tran
IPC分类号： H01L41/04 , B32B37/12 , H01L41/29 , B06B1/06 , H01L41/047 , H01L41/09
摘要： Techniques and structures for providing flexibility of a micromachined transducer array. In an embodiment, a transducer array includes a plurality of transducer elements each comprising a piezoelectric element and one or more electrodes disposed in or on a support layer. The support layer is bonded to a flexible layer including a polymer material, wherein flexibility of the transducer array results in part from a total thickness of a flexible layer. In another embodiment, flexibility of the transducer array results in part from one or more flexural structures formed therein.
摘要翻译：提供微机械传感器阵列的灵活性的技术和结构。在一个实施例中，换能器阵列包括多个换能器元件，每个换能器元件包括压电元件和设置在支撑层中或支撑层上的一个或多个电极。支撑层结合到包括聚合物材料的柔性层，其中换能器阵列的灵活性部分地来自柔性层的总厚度。在另一个实施例中，换能器阵列的灵活性部分地由其中形成的一个或多个弯曲结构导致。

2. 发明授权

US08797686B1 Magnetic recording transducer with short effective throat height and method of fabrication 有权
标题翻译：磁记录传感器具有短的喉部高度和制造方法
公开(公告)号：US08797686B1
公开(公告)日：2014-08-05
申请号：US12978242
申请日：2010-12-23
申请人： Zhigang Bai , Peng Luo , Shaoping Li , Ut Tran
发明人： Zhigang Bai , Peng Luo , Shaoping Li , Ut Tran
IPC分类号： G11B5/31 , G11B5/23
CPC分类号： G11B5/3163 , G11B5/1278 , G11B5/232 , G11B5/235 , G11B5/3116 , G11B5/315
摘要： A magnetic recording transducer for use in a data storage device includes a writer pole with a ABS surface, trailing edge bevel and a trailing shield. The effective throat height of the writer main pole is reduced by the use two gap layers between the writer main pole and the trailing shield. A first gap layer is on and in contact with the writer pole trailing surface, and a second gap layer is on a section of the first gap layer on the writer pole trailing edge bevel, from a point removed from the ABS surface and absent from a part on a section of the first gap layer on the writer pole trailing edge bevel nearest the ABS. A method of fabricating the transducer is also provided.
摘要翻译：用于数据存储装置的磁记录传感器包括具有ABS表面的写入极，后缘斜面和后屏蔽。通过使用写主机和后盾之间的两个间隙层，减小了作者主极的有效喉部高度。第一间隙层与写入器极后表面接触并接触，并且第二间隙层位于写入器极后缘斜面上的第一间隙层的一部分上，从从ABS表面移除的点不在部分位于最靠近ABS的作者极后缘的第一间隙层的一部分。还提供了制造换能器的方法。

3. 发明授权

US08786983B1 Magnetic writer having a low aspect ratio two layer coil 有权
标题翻译：具有低纵横比的两层线圈的磁性写入器
公开(公告)号：US08786983B1
公开(公告)日：2014-07-22
申请号：US13532658
申请日：2012-06-25
申请人： Feng Liu , Zhanjie Li , Zhigang Bai , Ut Tran , Kevin K. Lin
发明人： Feng Liu , Zhanjie Li , Zhigang Bai , Ut Tran , Kevin K. Lin
IPC分类号： G11B5/17
CPC分类号： G11B5/17 , G11B5/3123
摘要： A method and system provide a magnetic transducer having an air-bearing surface (ABS). The magnetic transducer includes a write pole and at least one coil. The write pole has a pole tip and a yoke. The coil(s) energize the write pole. The coil(s) include a plurality of turns a first distance from the pole and at least one additional turn a second distance from the pole. The first distance is different from the second distance. The at least one additional turn extends over at least part of two of the plurality of turns, has a length in a stripe height direction perpendicular to the ABS and has a height in a down track direction. The length is greater than the height.
摘要翻译：一种方法和系统提供具有空气轴承表面（ABS）的磁换能器。磁换能器包括写极和至少一个线圈。写极具有极尖和轭。线圈使写入极点通电。所述线圈包括与所述极点第一距离的多个匝和距离所述极点至少一个第二距离的至少一个附加匝。第一距离与第二距离不同。所述至少一个附加转弯在所述多个匝中的两个匝中的至少一部分上延伸，具有垂直于所述ABS的条带高度方向上的长度，并且具有向下轨道方向的高度。长度大于高度。

4. 发明授权

US08749790B1 Structure and method to measure waveguide power absorption by surface plasmon element 有权
标题翻译：用表面等离子体元素测量波导功率吸收的结构和方法
公开(公告)号：US08749790B1
公开(公告)日：2014-06-10
申请号：US13314962
申请日：2011-12-08
申请人： Shawn M. Tanner , Yufeng Hu , Ut Tran , Zhongyan Wang , Zhong Shi , Sergei Sochava
发明人： Shawn M. Tanner , Yufeng Hu , Ut Tran , Zhongyan Wang , Zhong Shi , Sergei Sochava
IPC分类号： G01N21/55
CPC分类号： G01N21/553 , G01N21/7703
摘要： A structure for measuring energy absorption by a surface plasmon receptor or NFT on a waveguide comprises a first waveguide, a first input grating for coupling light comprising a first wavelength into the first waveguide, a first output grating for coupling light out of the first waveguide, a first plurality of surface plasmon receptors in cooperation with the first waveguide to receive light energy and located between the first input grating and the first output grating. The structure may further comprise a second waveguide, a second input grating for coupling light into the second waveguide, a second output grating for coupling light out of the second waveguide, a second plurality of surface plasmon receptors between the second input grating and the second output grating and in cooperation with the second waveguide to receive light energy, wherein the second plurality may be less than or greater than the first plurality.
摘要翻译：用于测量波导上的表面等离子体激元受体或NFT的能量吸收的结构包括：第一波导，用于将包含第一波长的光引入第一波导的第一输入光栅，用于将光从第一波导耦合的第一输出光栅，与第一波导协作以接收光能并位于第一输入光栅和第一输出光栅之间的第一多个表面等离子体激元受体。该结构还可以包括第二波导，用于将光耦合到第二波导中的第二输入光栅，用于将光从第二波导耦合的第二输出光栅，在第二输入光栅和第二输出之间的第二多个表面等离子体激元光栅并与第二波导配合以接收光能，其中第二多个可以小于或大于第一多个。

5. 发明授权

US08491801B1 Method and system for providing an NFT using a sacrificial NFT structure 有权
标题翻译：使用牺牲NFT结构提供NFT的方法和系统
公开(公告)号：US08491801B1
公开(公告)日：2013-07-23
申请号：US13291702
申请日：2011-11-08
申请人： Shawn M. Tanner , Yufeng Hu , Ut Tran , Zhongyan Wang
发明人： Shawn M. Tanner , Yufeng Hu , Ut Tran , Zhongyan Wang
IPC分类号： B44C1/22 , G11B5/127
CPC分类号： G11B5/3133 , G11B5/6088 , G11B2005/0021 , Y10T29/49032 , Y10T29/49048
摘要： A method and system provides a near-field transducer (NFT) for an energy assisted magnetic recording (EAMR) transducer. The method and system include forming a sacrificial NFT structure having a shape a location corresponding to the NFT. A dielectric layer is deposited. A portion of the dielectric layer resides on the sacrificial NFT structure. At least this portion of the dielectric layer on the sacrificial structure is removed. The sacrificial NFT structure is removed, exposing an NFT trench in the dielectric layer. At least one conductive layer for the NFT is deposited. A first portion of the conductive layer(s) reside in the NFT trench. A second portion of the conductive layer(s) external to the NFT trench is removed to form the NFT.
摘要翻译：一种方法和系统为能量辅助磁记录（EAMR）传感器提供近场换能器（NFT）。该方法和系统包括形成具有对应于NFT的位置的形状的牺牲NFT结构。沉积介电层。电介质层的一部分位于牺牲NFT结构上。至少该牺牲结构上介电层的这一部分被去除。去除牺牲NFT结构，暴露电介质层中的NFT沟槽。沉积至少一个用于NFT的导电层。导电层的第一部分驻留在NFT沟槽中。除去NFT沟槽外部的导电层的第二部分以形成NFT。

6. 发明授权

US08307540B1 Method for providing an energy assisted magnetic recording (EAMR) transducer 有权
标题翻译：提供能量辅助磁记录（EAMR）传感器的方法
公开(公告)号：US08307540B1
公开(公告)日：2012-11-13
申请号：US13045433
申请日：2011-03-10
申请人： Ut Tran , Kevin K. Lin , Yufeng Hu
发明人： Ut Tran , Kevin K. Lin , Yufeng Hu
IPC分类号： G11B5/127 , H04R31/00
CPC分类号： G11B5/314 , G11B5/6088 , G11B2005/0021 , Y10T29/49032 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A method provides an EAMR transducer. A sacrificial post is provided on an NFT distal from the ABS. This post has an edge proximate and substantially parallel to the ABS. A sacrificial mask is provided on the NFT between the post and the ABS. Optical material(s) are provided. The post is between the optical material(s) and the ABS. The post is removed. A heat sink post corresponding to the post is provided. The heat sink post has a bottom thermally coupled with the NFT and an edge proximate and substantially parallel to the ABS. Part of the heat sink post is removed, forming a heat sink having a top surface at an acute angle from the ABS. Nonmagnetic material(s) are provided on the optical material(s). A pole having a bottom surface thermally coupled with the heat sink and coil(s) are provided.
摘要翻译：一种方法提供一种EAMR传感器。在远离ABS的NFT上提供牺牲柱。该柱具有靠近并且基本上平行于ABS的边缘。在NFT之间在柱和ABS之间提供牺牲掩模。提供光学材料。该柱位于光学材料和ABS之间。该帖子被删除。提供对应于该柱的散热片。散热柱具有与NFT热耦合的底部和靠近并且基本上平行于ABS的边缘。去除部分散热片，形成散热片，其顶面与ABS呈锐角。在一些或多个光学材料上提供非磁性材料。提供具有与散热器和线圈热耦合的底表面的极。

7. 发明申请

US20100296773A1 METHOD AND APPARATUS TO GENERATE AND MONITOR OPTICAL SIGNALS AND CONTROL POWER LEVELS THEREOF IN A PLANAR LIGHTWAVE CIRCUIT 有权
标题翻译：用于生成和监视光信号的方法和装置，并控制其在平面照明电路中的功率水平
公开(公告)号：US20100296773A1
公开(公告)日：2010-11-25
申请号：US12847117
申请日：2010-07-30
申请人： Achintya K. Bhowmik , Nagesh K. Vodrahalli , Gennady Farber , Hai-Feng Liu , Hamid Eslampour , Ut Tran , William B. Wong , Ruolin Lin , Jesper Arentoft Jayaswal
发明人： Achintya K. Bhowmik , Nagesh K. Vodrahalli , Gennady Farber , Hai-Feng Liu , Hamid Eslampour , Ut Tran , William B. Wong , Ruolin Lin , Jesper Arentoft Jayaswal
IPC分类号： G02B6/36 , H01L31/18
CPC分类号： H01S5/141 , H01L2224/48091 , H01L2224/73265 , H01S5/02248 , H01S5/0268 , H01S5/0683 , H01S5/4062 , H01S5/4087 , H01L2924/00014
摘要： Embodiments of an optical detection apparatus are disclosed which may include one or more of a waveguide, a trench formed in the waveguide, a reflective surface, and a photodetector. The waveguide may be formed in a semiconductor substrate to propagate an optical signal received at a first end of the waveguide. The trench may also be formed in the waveguide having a first sidewall and a second sidewall, the first and second sidewalls forming first and second angles with the waveguide's propagation direction. The second sidewall may include a reflective surface formed thereon. The photodetector may be configured to receive an optical signal propagated in the waveguide, through the first sidewall and reflected from the reflective surface on the second sidewall.
摘要翻译：公开了一种光学检测装置的实施例，其可以包括波导，在波导中形成的沟槽，反射表面和光电检测器中的一个或多个。波导可以形成在半导体衬底中，以传播在波导的第一端处接收的光信号。沟槽也可以形成在具有第一侧壁和第二侧壁的波导中，第一和第二侧壁与波导的传播方向形成第一和第二角度。第二侧壁可以包括形成在其上的反射表面。光电检测器可以被配置为接收在波导中传播的光信号，通过第一侧壁并从第二侧壁上的反射表面反射。

8. 发明授权

US07780360B2 Method and apparatus to generate and monitor optical signals and control power levels thereof in a planar lightwave circuit 有权
标题翻译：在平面光波电路中产生和监测光信号并控制其功率水平的方法和装置
公开(公告)号：US07780360B2
公开(公告)日：2010-08-24
申请号：US12176758
申请日：2008-07-21
申请人： Achintya K. Bhowmik , Nagesh K. Vodrahalli , Gennady Farber , Hai-Feng Liu , Hamid Eslampour , Ut Tran , William B. Wong , Ruolin Li , Jesper Arentoft Jayaswal
发明人： Achintya K. Bhowmik , Nagesh K. Vodrahalli , Gennady Farber , Hai-Feng Liu , Hamid Eslampour , Ut Tran , William B. Wong , Ruolin Li , Jesper Arentoft Jayaswal
IPC分类号： G02B6/36 , H01S3/13
CPC分类号： H01S5/141 , H01L2224/48091 , H01L2224/73265 , H01S5/02248 , H01S5/0268 , H01S5/0683 , H01S5/4062 , H01S5/4087 , H01L2924/00014
摘要： Embodiments of an optical detection apparatus are disclosed which may include one or more of a waveguide, a trench formed in the waveguide, a reflective surface, and a photodetector. The waveguide may be formed in a semiconductor substrate to propagate an optical signal received at a first end of the waveguide. The trench may also be formed in the waveguide having a first sidewall and a second sidewall, the first and second sidewalls forming first and second angles with the waveguide's propagation direction. The second sidewall may include a reflective surface formed thereon. The photodetector may be configured to receive an optical signal propagated in the waveguide, through the first sidewall and reflected from the reflective surface on the second sidewall.
摘要翻译：公开了一种光学检测装置的实施例，其可以包括波导，在波导中形成的沟槽，反射表面和光电检测器中的一个或多个。波导可以形成在半导体衬底中，以传播在波导的第一端处接收的光信号。沟槽也可以形成在具有第一侧壁和第二侧壁的波导中，第一和第二侧壁与波导的传播方向形成第一和第二角度。第二侧壁可以包括形成在其上的反射表面。光电检测器可以被配置为接收在波导中传播的光信号，通过第一侧壁并从第二侧壁上的反射表面反射。

9. 发明授权

US07146086B2 Constructing well structures for hybrid optical waveguides 有权
标题翻译：构建混合光波导的井结构
公开(公告)号：US07146086B2
公开(公告)日：2006-12-05
申请号：US10609803
申请日：2003-06-30
申请人： Ut Tran , David A. G. Deacon , Shing Man Lee
发明人： Ut Tran , David A. G. Deacon , Shing Man Lee
IPC分类号： G02B6/10 , G02B6/00
CPC分类号： G02B6/136 , G02B6/1221 , G02B2006/12097 , G02B2006/12176
摘要： A well may be formed for access to an optical waveguide core by a process that results in an L-shaped well. The L-shaped well may then be filled with a polymer. By controlling the size of each portion of well, the occurrence of bubbles within the well and cuts to the core may be reduced.
摘要翻译：可以形成用于通过导致L形阱的工艺来访问光波导芯的阱。然后可以用聚合物填充L形孔。通过控制井的每个部分的尺寸，可以减少井内气泡的发生以及对芯的切割。

10. 发明授权

US07071492B2 Thermo-optical device 失效
标题翻译：热光器件
公开(公告)号：US07071492B2
公开(公告)日：2006-07-04
申请号：US10609839
申请日：2003-06-30
申请人： Ruolin Li , Ut Tran
发明人： Ruolin Li , Ut Tran
IPC分类号： H01L27/15
CPC分类号： G02F1/065 , G02F1/0147 , G02F2201/066
摘要： A polymer well may be formed over a thermal oxide formed over a semiconductor substrate in one embodiment. The well may include a waveguide and a pair of heaters adjacent the waveguide. Each heater may be mounted on a platform of insulating material to reduce heat loss through the substrate and the thermal oxide, in one embodiment.
摘要翻译：在一个实施例中，聚合物阱可以形成在半导体衬底上形成的热氧化物上。阱可以包括波导和邻近波导的一对加热器。在一个实施例中，每个加热器可以安装在绝缘材料的平台上，以减少通过基底和热氧化物的热损失。

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