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    • 1. 发明授权
    • Array substrate for liquid crystal display device and method of fabricating the same
    • 液晶显示装置用阵列基板及其制造方法
    • US07989242B2
    • 2011-08-02
    • US12318047
    • 2008-12-19
    • Byung-Geol KimGee-Sung ChaeJae-Seok HeoWoong-Gi Jun
    • Byung-Geol KimGee-Sung ChaeJae-Seok HeoWoong-Gi Jun
    • H01L21/336
    • H01L27/1214G02F2001/136231G02F2001/136295G02F2202/38H01L27/1255H01L29/4908
    • An array substrate for a liquid crystal display device includes: a gate line and a gate electrode on a substrate, the gate electrode connected to the gate line; a gate insulating layer on the gate line and the gate electrode, the gate insulating layer including an organic insulating material such that a radical of carbon chain has a composition ratio of about 8% to about 11% by weight; a semiconductor layer on the gate insulating layer over the gate electrode; a data line crossing the gate line to define a pixel region; source and drain electrodes on the semiconductor layer, the source electrode connected to the data line and the drain electrode spaced apart from the source electrode; a passivation layer on the data line, the source electrode and the drain electrode, the passivation layer having a drain contact hole exposing the drain electrode; and a pixel electrode on the passivation layer, the pixel electrode connected to the drain electrode through the drain contact hole.
    • 液晶显示装置的阵列基板包括:栅极线和衬底上的栅电极,栅电极连接到栅极线; 栅极线上的栅极绝缘层和栅电极,所述栅极绝缘层包括有机绝缘材料,使得碳链的基团的组成比为约8%至约11%重量; 位于栅电极上的栅极绝缘层上的半导体层; 与栅极线交叉以限定像素区域的数据线; 源电极和漏电极,源极连接到数据线,漏电极与源电极间隔开; 数据线上的钝化层,源电极和漏电极,钝化层具有暴露漏电极的漏极接触孔; 以及钝化层上的像素电极,所述像素电极通过漏极接触孔连接到漏电极。
    • 5. 发明授权
    • Method for fabricating a thin film transistor with an organic passivation layer
    • 制造具有有机钝化层的薄膜晶体管的方法
    • US08551825B2
    • 2013-10-08
    • US13155972
    • 2011-06-08
    • Bo Hyun LeeJae Seok HeoWoong Gi Jun
    • Bo Hyun LeeJae Seok HeoWoong Gi Jun
    • H01L21/00
    • H01L27/1248G02F1/136227
    • A thin film transistor (TFT) array substrate and a method for fabricating the thin film transistor (TFT) array substrate is disclosed, wherein a passivation layer is directly subjected to exposing and patterning processes without using any photoresist, thereby simplifying the fabrication process and ensuring reduced preparation costs. In particular, the method comprises a thin film transistor (TFT) array comprising: forming a gate line and a gate electrode on a substrate; forming a semiconductor layer to be insulated from the gate electrode, and overlapped with a portion of the gate electrode; forming a source electrode and a drain electrode on both sides of the semiconductor layer, respectively, while forming a data line intersecting with the gate line; forming a passivation layer over an entire upper surface of the substrate including the source electrode and the drain electrode using a sol compound of a metal alkoxide having a photosensitive group X and a silicon alkoxide having a photosensitive group Y; light-exposing and developing the passivation layer to form a contact hole through which the drain electrode is exposed; and forming a pixel electrode to be in contact with the drain electrode through the contact hole.
    • 公开了薄膜晶体管(TFT)阵列基板和制造薄膜晶体管(TFT)阵列基板的方法),其中钝化层直接进行曝光和图案化处理,而不使用任何光致抗蚀剂,从而简化制造工艺并确保 降低准备成本。 特别地,该方法包括薄膜晶体管(TFT)阵列,其包括:在基板上形成栅极线和栅电极; 形成与所述栅电极绝缘的半导体层,并与所述栅电极的一部分重叠; 在形成与栅极线相交的数据线的同时分别在半导体层的两侧形成源电极和漏电极; 使用具有感光性基团X的金属醇盐和具有感光性基团Y的硅醇盐的溶胶化合物,在包含源电极和漏电极的基板的整个上表面上形成钝化层; 曝光和显影钝化层以形成漏电极暴露的接触孔; 以及通过接触孔形成与漏电极接触的像素电极。
    • 10. 发明授权
    • Array substrate for liquid crystal display device and method of fabricating the same
    • 液晶显示装置用阵列基板及其制造方法
    • US08659094B2
    • 2014-02-25
    • US13113922
    • 2011-05-23
    • Byung-Geol KimGee-Sung ChaeJae-Seok HeoWoong-Gi Jun
    • Byung-Geol KimGee-Sung ChaeJae-Seok HeoWoong-Gi Jun
    • H01L29/786H01L27/105
    • H01L27/1214G02F2001/136231G02F2001/136295G02F2202/38H01L27/1255H01L29/4908
    • An array substrate for a liquid crystal display device includes: a gate line and a gate electrode on a substrate, the gate electrode connected to the gate line; a gate insulating layer on the gate line and the gate electrode, the gate insulating layer including an organic insulating material such that a radical of carbon chain has a composition ratio of about 8% to about 11% by weight; a semiconductor layer on the gate insulating layer over the gate electrode; a data line crossing the gate line to define a pixel region; source and drain electrodes on the semiconductor layer, the source electrode connected to the data line and the drain electrode spaced apart from the source electrode; a passivation layer on the data line, the source electrode and the drain electrode, the passivation layer having a drain contact hole exposing the drain electrode; and a pixel electrode on the passivation layer, the pixel electrode connected to the drain electrode through the drain contact hole.
    • 液晶显示装置的阵列基板包括:栅极线和衬底上的栅电极,栅电极连接到栅极线; 栅极线上的栅极绝缘层和栅电极,所述栅极绝缘层包括有机绝缘材料,使得碳链的基团的组成比为约8%至约11%重量; 位于栅电极上的栅极绝缘层上的半导体层; 与栅极线交叉以限定像素区域的数据线; 源电极和漏电极,源极连接到数据线,漏电极与源电极间隔开; 数据线上的钝化层,源电极和漏电极,钝化层具有暴露漏电极的漏极接触孔; 以及钝化层上的像素电极,所述像素电极通过漏极接触孔连接到漏电极。