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    • 6. 发明授权
    • Method of fabricating integrated circuit with small pitch
    • 制造小间距集成电路的方法
    • US08211806B2
    • 2012-07-03
    • US11846900
    • 2007-08-29
    • Chia-Wei WuLing-Wu Yang
    • Chia-Wei WuLing-Wu Yang
    • H01L21/302
    • H01L21/76816H01L21/0337H01L21/0338H01L21/31144
    • A method of manufacturing an integrated circuit with a small pitch comprises providing a second material layer patterned to form at least two features with an opening between the features. The second material layer is formed over a first material layer and the first material layer is over a substrate. The method also comprises providing a first oxide layer to form a first sidewall surrounding each of the features, and providing a second oxide layer over the first sidewalls and the first material layer. A second sidewall is formed surrounding each of the features. The method further comprises providing a conductive layer over the second oxide layer and removing the conductive layer, the second sidewalls and the first material underneath the second sidewalls.
    • 制造具有小间距的集成电路的方法包括提供图案化以形成具有特征之间的开口的至少两个特征的第二材料层。 第二材料层形成在第一材料层上并且第一材料层在衬底之上。 该方法还包括提供第一氧化物层以形成围绕每个特征的第一侧壁,以及在第一侧壁和第一材料层之上提供第二氧化物层。 形成围绕每个特征的第二侧壁。 该方法还包括在第二氧化物层上提供导电层,并移除第二侧壁下方的导电层,第二侧壁和第一材料。
    • 9. 发明授权
    • Memory and manufacturing method thereof
    • 其记忆及其制造方法
    • US07879706B2
    • 2011-02-01
    • US11979101
    • 2007-10-31
    • Erh-Kun LaiYen-Hao ShihLing-Wu YangChun-Min Cheng
    • Erh-Kun LaiYen-Hao ShihLing-Wu YangChun-Min Cheng
    • H01L21/3205H01L21/4763
    • H01L21/28282H01L27/11568H01L29/66545H01L29/66583H01L29/7923
    • A memory having isolated dual memory cells is provided. A first isolation wall and a second isolation wall are separately disposed between a source and a drain on a substrate. An isolation bottom layer and a polysilicon layer are orderly disposed on the substrate between the first and the second isolation walls. A first charge storage structure and a first gate are orderly disposed on the substrate between the first isolation wall and the source. A second charge storage structure and a second gate are orderly disposed on the substrate between the second isolation wall and the drain. A word line disposed on the polysilicon layer, the first gate, the second gate, the first isolation wall and the second isolation wall is electrically connected to the first gate, the second gate and the polysilicon layer.
    • 提供具有隔离双存储单元的存储器。 第一隔离壁和第二隔离壁分别设置在基板上的源极和漏极之间。 隔离底层和多晶硅层有序地设置在第一和第二隔离壁之间的衬底上。 第一电荷存储结构和第一栅极有序地设置在第一隔离壁和源极之间的衬底上。 第二电荷存储结构和第二栅极有序地设置在第二隔离壁和漏极之间的衬底上。 布置在多晶硅层上的字线,第一栅极,第二栅极,第一隔离壁和第二隔离壁电连接到第一栅极,第二栅极和多晶硅层。