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    • 3. 发明授权
    • Data readout circuit of phase change memory
    • 相变存储器的数据读出电路
    • US08947924B2
    • 2015-02-03
    • US13202963
    • 2011-06-24
    • Xi LiHoupeng ChenZhitang SongDaolin Cai
    • Xi LiHoupeng ChenZhitang SongDaolin Cai
    • G11C13/00
    • G11C13/004G11C13/0004G11C13/0026G11C2013/0054
    • A data readout circuit of phase change memory, relating to one or more phase change memory cells, wherein each phase change memory cell is connected to the control circuit by bit line and word line; said data readout circuit comprises: a clamp voltage generating circuit, used to generate a clamp voltage; a precharge circuit, used to fast charge bit line under the control of a clamp voltage; a clamped current generating circuit, used to generate a clamped current to keep bit line at clamped state under the control of a clamp voltage; a clamped current operation circuit, used to perform subtraction and multiplication on clamped current to increase the difference of clamped current between high resistance state and low resistance state; a sense amplifier circuit, used to compare the operated clamped current and the reference current and output the readout result. Compared with the prior art, the data readout circuit of phase change memory provided by the present invention can effectively enhance the data readout speed, decrease the misreading window between high resistance state and low resistance state, reduce the crosstalk of data readout, and improve the reliability of data readout.
    • 一种相变存储器的数据读出电路,涉及一个或多个相变存储单元,其中每个相变存储单元通过位线和字线连接到控制电路; 所述数据读出电路包括:钳位电压发生电路,用于产生钳位电压; 预充电电路,用于在钳位电压的控制下快速充电位线; 夹紧电流产生电路,用于产生钳位电流,以在钳位电压的控制下将位线保持在钳位状态; 钳位电流运行电路,用于对钳位电流进行减法和乘法,以增加高电阻状态和低电阻状态之间的钳位电流差; 一个读出放大器电路,用于比较工作钳位电流和参考电流,并输出读出结果。 与现有技术相比,本发明提供的相变存储器的数据读出电路可以有效提高数据读出速度,减少高电阻状态和低电阻状态之间的误读窗口,减少数据读出的串扰, 数据读出的可靠性。
    • 7. 发明申请
    • TRENCH MEMORY WITH SELF-ALIGNED STRAP FORMED BY SELF-LIMITING PROCESS
    • 通过自限制过程形成自对准带的TRENCH存储器
    • US20100102373A1
    • 2010-04-29
    • US12651608
    • 2010-01-04
    • Xi LiKangguo ChengJohnathan Faltermeier
    • Xi LiKangguo ChengJohnathan Faltermeier
    • H01L27/108
    • H01L29/945H01L21/32137H01L21/76232H01L21/84H01L27/1087H01L29/66181
    • A semiconductor structure is described. The structure includes a trench opening formed in a semiconductor substrate having a semiconductor-on-insulator (SOI) layer and a buried insulating (BOX) layer; and a filling material formed in the trench opening, the filling material forming a “V” shape within the trench memory cell, wherein the “V” shape includes a top portion substantially adjacent to a top surface of the BOX layer. A method of fabricating the semiconductor structure is also described. The method includes forming a trench opening in a semiconductor substrate having an SOI layer and a BOX layer; laterally etching the BOX layer such that a portion of the trench opening associated with the BOX layer is substantially greater than a portion of the trench opening associated with the SOI layer; filling the trench opening with a filling material; and recessing the filling material.
    • 描述半导体结构。 该结构包括形成在具有绝缘体上半导体(SOI)层和掩埋绝缘(BOX)层的半导体衬底中的沟槽开口; 以及形成在所述沟槽开口中的填充材料,所述填充材料在所述沟槽存储单元内形成“V”形,其中所述“V”形包括基本上邻近所述BOX层的顶表面的顶部。 还描述了制造半导体结构的方法。 该方法包括在具有SOI层和BOX层的半导体衬底中形成沟槽开口; 横向蚀刻BOX层,使得与BOX层相关联的沟槽开口的一部分基本上大于与SOI层相关联的沟槽开口的一部分; 用填充材料填充沟槽开口; 并使填充材料凹陷。
    • 8. 发明申请
    • TRENCH MEMORY WITH SELF-ALIGNED STRAP FORMED BY SELF-LIMITING PROCESS
    • 通过自限制过程形成自对准带的TRENCH存储器
    • US20090230471A1
    • 2009-09-17
    • US12048263
    • 2008-03-14
    • Xi LiKangguo ChengJohnathan Faltermeier
    • Xi LiKangguo ChengJohnathan Faltermeier
    • H01L29/94H01L21/20
    • H01L29/945H01L21/32137H01L21/76232H01L21/84H01L27/1087H01L29/66181
    • A semiconductor structure is described. The structure includes a trench opening formed in a semiconductor substrate having a semiconductor-on-insulator (SOI) layer and a buried insulating (BOX) layer; and a filling material formed in the trench opening, the filling material forming a “V” shape within the trench memory cell, wherein the “V” shape includes a top portion substantially adjacent to a top surface of the BOX layer. A method of fabricating the semiconductor structure is also described. The method includes forming a trench opening in a semiconductor substrate having an SOI layer and a BOX layer; laterally etching the BOX layer such that a portion of the trench opening associated with the BOX layer is substantially greater than a portion of the trench opening associated with the SOI layer; filling the trench opening with a filling material; and recessing the filling material.
    • 描述半导体结构。 该结构包括形成在具有绝缘体上半导体(SOI)层和掩埋绝缘(BOX)层的半导体衬底中的沟槽开口; 以及形成在所述沟槽开口中的填充材料,所述填充材料在所述沟槽存储单元内形成“V”形,其中所述“V”形包括基本上邻近所述BOX层的顶表面的顶部。 还描述了制造半导体结构的方法。 该方法包括在具有SOI层和BOX层的半导体衬底中形成沟槽开口; 横向蚀刻BOX层,使得与BOX层相关联的沟槽开口的一部分基本上大于与SOI层相关联的沟槽开口的一部分; 用填充材料填充沟槽开口; 并使填充材料凹陷。
    • 10. 发明申请
    • POST STI TRENCH CAPACITOR
    • POST STI TRENCH电容器
    • US20080173977A1
    • 2008-07-24
    • US11624385
    • 2007-01-18
    • Anil K. ChinthakindiDeok-Kee KimXi Li
    • Anil K. ChinthakindiDeok-Kee KimXi Li
    • H01L21/02H01L29/92
    • H01L29/94H01L27/0805H01L28/91H01L29/66181
    • A capacitor having a suitably large value for decoupling applications is formed in a trench defined by isolation structures such as recessed isolation or shallow trench isolation. The capacitor provides a contact area coextensive with an active area and can be reliably formed individually or in small numbers. Plate contacts are preferably made through implanted regions extending to or between dopant diffused regions forming a capacitor plate. The capacitor can be formed by a process subsequent to formation of isolation structures such that preferred soft mask processes can be used to form the isolation structures and process commonality and compatibility constraint are avoided while the capacitor forming processes can be performed in common with processing for other structures.
    • 在由诸如凹陷隔离或浅沟槽隔离的隔离结构限定的沟槽中形成具有用于去耦应用的适当大值的电容器。 电容器提供与有源区域共同延伸的接触区域,并且可以单独或少量可靠地形成。 板触点优选通过延伸到形成电容器板的掺杂剂扩散区域之间或之间的注入区域制成。 可以通过形成隔离结构之后的过程形成电容器,使得可以使用优选的软掩模工艺来形成隔离结构和工艺共同性,并避免兼容性约束,同时电容器形成过程可以与其他处理共同执行 结构。