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    • 8. 发明申请
    • SEMICONDUCTOR DEVICE
    • 半导体器件
    • US20120075029A1
    • 2012-03-29
    • US13191076
    • 2011-07-26
    • Yasushi SEKINETadato Yamagata
    • Yasushi SEKINETadato Yamagata
    • H03B5/12H01L25/00H01C7/00
    • H01L28/24H01L27/016H01L27/0802H01L2924/0002H01L2924/00
    • There is provided a semiconductor device having resistance elements small in temperature dependence of the resistance value. The semiconductor device has metal resistance element layers. The metal resistance element layer includes a resistance film layer. The other metal resistance element layer includes another metal resistance film layer. The metal resistance film layer is one of titanium nitride resistance and tantalum nitride resistance. The other metal resistance film layer is the other of the titanium nitride resistance and the tantalum nitride resistance. The resistance value of titanium nitride resistance has a positive temperature coefficient. Whereas, the resistance value of tantalum nitride resistance has a negative temperature coefficient. A contact plug electrically couples the metal resistance film layer with the other metal resistance film layer. Therefore, the temperature coefficient of the titanium nitride resistance and the temperature coefficient of the tantalum nitride resistance cancel each other. This can reduce the temperature coefficient.
    • 提供了具有电阻值温度依赖性小的电阻元件的半导体器件。 半导体器件具有金属电阻元件层。 金属电阻元件层包括电阻膜层。 另一个金属电阻元件层包括另一金属电阻膜层。 金属电阻膜层是氮化钛电阻和氮化钽电阻之一。 另一个金属电阻膜层是氮化钛电阻和氮化钽电阻中的另一个。 氮化钛电阻的电阻值为正温度系数。 而氮化钽电阻的电阻值为负温度系数。 接触插塞将金属电阻膜层与另一金属电阻膜层电耦合。 因此,氮化钛电阻的温度系数和氮化钽电阻的温度系数相互抵消。 这可以降低温度系数。