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    • 3. 发明授权
    • Method of forming fine patterns using double patterning process
    • 使用双重图案化工艺形成精细图案的方法
    • US07531449B2
    • 2009-05-12
    • US11730264
    • 2007-03-30
    • Sang-joon ParkYong-hyun KwonJun SeoSung-il ChoChang-jin KangJae-kyu Ha
    • Sang-joon ParkYong-hyun KwonJun SeoSung-il ChoChang-jin KangJae-kyu Ha
    • H01L21/4763
    • H01L21/0337H01L21/0338H01L21/31144H01L21/76816H01L21/76897
    • A double pattern method of forming a plurality of contact holes in a material layer formed on a substrate is disclosed. The method forms a parallel plurality of first hard mask patterns separated by a first pitch in a first direction on the material layer, a self-aligned parallel plurality of second hard mask patterns interleaved with the first hard mask patterns and separated from the first hard mask patterns by a buffer layer to form composite mask patterns, and a plurality of upper mask patterns in a second direction intersecting the first direction to mask selected portions of the buffer layer in conjunction with the composite mask patterns. The method then etches non-selected portions of the buffer layer using the composite hard mask patterns and the upper mask patterns as an etch mask to form a plurality of hard mask holes exposing selected portions of the material layer, and then etches the selected portions of the material layer to form the plurality of contact holes.
    • 公开了一种在形成在基板上的材料层中形成多个接触孔的双重图案方法。 该方法形成在材料层上沿第一方向以第一间距分开的平行多个第一硬掩模图案,与第一硬掩模图案交错并与第一硬掩模分离的自对准并行多个第二硬掩模图案 通过缓冲层形成图案以形成复合掩模图案,以及与第一方向相交的第二方向的多个上掩模图案,以与复合掩模图案一起掩蔽缓冲层的选定部分。 然后,该方法使用复合硬掩模图案和上掩模图案作为蚀刻掩模蚀刻缓冲层的未选择部分,以形成暴露材料层的选定部分的多个硬掩模孔,然后蚀刻所选择的部分 所述材料层形成所述多个接触孔。
    • 8. 发明申请
    • Methods of Forming Semiconductor Devices
    • 形成半导体器件的方法
    • US20080113515A1
    • 2008-05-15
    • US11874267
    • 2007-10-18
    • Hyun-Chul KimSung-Il ChoEun-Young KangYong-Hyun KwonJae-Seung Hwang
    • Hyun-Chul KimSung-Il ChoEun-Young KangYong-Hyun KwonJae-Seung Hwang
    • H01L21/302
    • H01L21/3086H01L21/3088H01L21/823437H01L27/105H01L29/66621
    • A method of forming a semiconductor device is provided. The method includes preparing a semiconductor substrate to include a cell region and a peripheral region and forming a first mask layer on the semiconductor substrate. First hard mask patterns that are configured to expose the first mask layer are formed on the first mask layer in the cell region. A second mask layer that is configured to conformably cover the first hard mask patterns is formed. A second hard mask pattern is formed between the first hard mask patterns, wherein the second hard mask pattern is configured to contact a lateral surface of the second mask layer. The second mask layer interposed between the first hard mask patterns and the second hard mask pattern is removed. A plurality of trenches are etched in the semiconductor substrate of the cell region using the first hard mask patterns and the second hard mask pattern as a mask.
    • 提供一种形成半导体器件的方法。 该方法包括制备半导体衬底以包括单元区域和外围区域,并在半导体衬底上形成第一掩模层。 配置为暴露第一掩模层的第一硬掩模图案形成在单元区域中的第一掩模层上。 形成被构造为顺应地覆盖第一硬掩模图案的第二掩模层。 在第一硬掩模图案之间形成第二硬掩模图案,其中第二硬掩模图案被配置为接触第二掩模层的侧表面。 插入在第一硬掩模图案和第二硬掩模图案之间的第二掩模层被去除。 使用第一硬掩模图案和第二硬掩模图案作为掩模,在单元区域的半导体衬底中蚀刻多个沟槽。
    • 9. 发明授权
    • Bread maker
    • 面包机
    • US07360480B2
    • 2008-04-22
    • US10805352
    • 2004-03-22
    • Jae-ryong ParkYong-hyun KwonChul KimTae-uk LeeHan-jun SungJang-woo LeeDong-bin Lim
    • Jae-ryong ParkYong-hyun KwonChul KimTae-uk LeeHan-jun SungJang-woo LeeDong-bin Lim
    • A47J37/01A21B1/00
    • A21B7/005
    • A bread maker comprising: a main body; an oven having a surface coated with a ceramic material, and being accommodated in the main body; a door provided in a front of the main body to open and close the oven; and upper heaters and lower heaters respectively disposed in upper and lower parts of the oven and the door. The oven is coated with a ceramic material so that an inner surface of the oven does not become deformed due to a high temperatures, and so that an inner surface of the oven that is stained or coated with bread ingredients can be easily cleaned. The upper heaters are inclined downward, thereby enhancing heating efficiency. Further, the oven components are detachable so that a damaged part of the oven can be separately replaced.
    • 一种面包机,包括:主体; 具有涂覆有陶瓷材料的表面的烤箱,并且容纳在主体中; 设置在主体前部以打开和关闭烤箱的门; 以及分别设置在烤箱和门的上部和下部的上部加热器和下部加热器。 烘箱用陶瓷材料涂覆,使得烘箱的内表面不会由于高温而变形,并且可以容易地清洁被烘烤或涂覆有面包成分的烤箱的内表面。 上部加热器向下倾斜,从而提高加热效率。 此外,烤箱部件是可拆卸的,使得烤箱的损坏部分可以分开更换。