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1. 发明申请

US20220329170A1 VOLTAGE CLAMP AND CURRENT CLAMP SYSTEMS WITH POWER RECOVERY 有权
公开(公告)号：US20220329170A1
公开(公告)日：2022-10-13
申请号：US17229858
申请日：2021-04-13
申请人： Advanced Energy Industries, Inc.
发明人： Gideon Van Zyl
IPC分类号： H02M3/335 , H02M1/32 , H01J37/32
摘要： Various embodiments are directed to a voltage clamp system comprising: a rectifier; a protected node, a reference node, and one or more internal nodes, coupled to the rectifier; a power converter, coupled to the rectifier via the one or more internal nodes; and one or more output nodes coupled to the power converter and configured to couple to a power sink. The rectifier and the power converter are configured to output power via one or more output nodes coupled to the rectifier, and to limit a component of the voltage between the protected node and the reference node.

2. 发明授权

US11374565B2 System and apparatus with low power pin diode drivers 有权
公开(公告)号：US11374565B2
公开(公告)日：2022-06-28
申请号：US17155928
申请日：2021-01-22
申请人： Advanced Energy Industries, Inc.
发明人： Gideon Van Zyl
IPC分类号： H03H11/28 , H01L29/868 , H03K17/74 , H04W52/00
摘要： This disclosure relates to apparatus and methods for radio-frequency (RF) switching circuits, and more particularly for a PIN diode driver circuit for high speed, high repetition rate and/or high power applications. The PIN diode driver may include a dual voltage reverse bias provided to the PIN diode, which dual voltage reverse bias may be provided by a first, relatively lower voltage, power supply and a second, relatively higher voltage, power supply. The relatively lower voltage is to discharge an intrinsic layer of the PIN diode at a lower voltage than during reverse bias of the PIN diode at the second relatively higher bias voltage in order to reduce overall power consumption.

3. 发明申请

US20220181121A1 MATCH EFFICIENCY-VARIATION COMPENSATION 有权
公开(公告)号：US20220181121A1
公开(公告)日：2022-06-09
申请号：US17524659
申请日：2021-11-11
申请人： Advanced Energy Industries, Inc.
发明人： Denis Shaw , Holger Philipp Kley , Suryan Emani , Gideon Van Zyl
IPC分类号： H01J37/32 , H03H7/38
摘要： This disclosure describes systems, methods, and apparatus for identifying and compensating for variances between match networks. Each match network can be calibrated at the factory against a golden load and a reference load to turn a generalized model of the match network into an operation model. The operation model can be stored with the match network or shipped with the match network, and used by an operator to determine a correction factor during processing. This correction factor can be used to adjust a generator setpoint, frequency, or aspects of the match network.

4. 发明授权

US10074518B2 Apparatus for controlled overshoot in a RF generator 有权
公开(公告)号：US10074518B2
公开(公告)日：2018-09-11
申请号：US15415597
申请日：2017-01-25
申请人： Advanced Energy Industries, Inc.
发明人： Gideon Van Zyl
IPC分类号： H01J7/44 , H01J37/32 , H02M3/155 , H03F3/20 , H03F3/19 , H03F3/189 , H02J9/00
CPC分类号： H01J37/32146 , H01J37/32183 , H02J9/00 , H02M3/155 , H03F1/0244 , H03F3/189 , H03F3/20 , H03F3/245 , H03F2200/451
摘要： A radio-frequency (RF) generator is provided that produces a controlled overshoot. One embodiment includes a RF power amplifier and a direct-current (DC) power supply that includes a primary DC power supply, an auxiliary DC power supply, a half-bridge circuit, and a control circuit. The half-bridge circuit, in a first switching state, electrically connects, in series, the auxiliary DC power supply with the primary DC power supply and, in a second switching state, electrically disconnects the auxiliary DC power supply from the primary DC power supply. The control circuit places the half-bridge circuit in the first switching state for a first period of time and places the half-bridge circuit in the second switching state for a second period of time to produce a controlled overshoot in the power produced by the RF generator throughout the first period of time.

5. 发明申请

US20170330731A1 SYSTEM AND METHOD FOR CONTROL OF HIGH EFFICIENCY GENERATOR SOURCE IMPEDANCE 审中-公开
公开(公告)号：US20170330731A1
公开(公告)日：2017-11-16
申请号：US15664646
申请日：2017-07-31
申请人： Advanced Energy Industries, Inc.
发明人： Gideon Van Zyl
IPC分类号： H01J37/32
CPC分类号： H01J37/32183 , H01J37/32146
摘要： Systems and methods for adjusting the source impedance of a generator are disclosed. An exemplary method includes generating a first signal and applying the first signal to a first input of a combiner, generating a second signal and applying the second signal to a second input of said combiner, and combining the first and second signals with the combiner at an output of the combiner to produce power that is delivered to the plasma load. A controllable variable impedance is provided to an isolation port of the combiner, and the controllable variable impedance is adjusted to vary the source impedance of the generator.

6. 发明申请

US20160111259A1 NOISE BASED FREQUENCY TUNING AND IDENTIFICATION OF PLASMA CHARACTERISTICS 有权
标题翻译：基于噪声的频率调谐和等离子体特征的识别
公开(公告)号：US20160111259A1
公开(公告)日：2016-04-21
申请号：US14885444
申请日：2015-10-16
申请人： Advanced Energy Industries, Inc.
发明人： Gideon Van Zyl
IPC分类号： H01J37/32
CPC分类号： H05H1/46 , H01J37/32082 , H01J37/32155 , H01J37/32174 , H01J37/32935 , H05H2001/4682
摘要： This disclosure describes systems, methods, and apparatus for frequency tuning a power source so as to optimize power delivery to a plasma load as well as systems, methods, and apparatus for identifying characteristics and/or changes in characteristics of a plasma load. In particular, a secondary power signal can be applied concurrently with a primary power signal, the secondary power signal having a substantially lower power level, so as to tune for a global optimum of a measure of performance and/or identifying characteristics and/or changes in characteristics of a plasma load. The secondary power signal can comprise a low level signal that is jointly generated with or combined with the primary power signal, or it can comprise noise either inherent to the primary power signal or added to the primary power signal.
摘要翻译：本公开描述了用于频率调谐电源的系统，方法和装置，以便优化对等离子体负载的功率传递以及用于识别等离子体负载的特性和/或特性变化的系统，方法和装置。特别地，次级功率信号可以与主要功率信号同时应用，次级功率信号具有基本上较低的功率水平，以便调整性能测量和/或识别特性和/或变化的全局最优在等离子体负载的特性。次级功率信号可以包括与主功率信号共同生成或与主功率信号组合的低电平信号，或者它可以包括主功率信号固有或添加到主功率信号的噪声。

7. 发明申请

US20230140703A1 TWO STAGE PIN DIODE DRIVER WITH ENERGY RECOVERY 有权
公开(公告)号：US20230140703A1
公开(公告)日：2023-05-04
申请号：US17978158
申请日：2022-10-31
申请人： Advanced Energy Industries, Inc.
发明人： Gideon Van Zyl
IPC分类号： H03H7/40 , H01J37/32
摘要： This disclosure describes systems, methods, and apparatus for a two-stage PIN diode driver. The first stage can charge and discharge the PIN diode via a resonant circuit, for instance via a power supply in series with switches and an inductor or other inductive component, while the second stage, or holding stage includes both a first holding supply for maintaining a forward bias current through the PIN diode and a second holding supply for maintaining a reverse bias voltage over the PIN diode.

8. 发明授权

US11615943B2 Inter-period control for passive power distribution of multiple electrode inductive plasma source 有权
公开(公告)号：US11615943B2
公开(公告)日：2023-03-28
申请号：US17174375
申请日：2021-02-12
申请人： Advanced Energy Industries, Inc.
发明人： Gideon Van Zyl
IPC分类号： H01J37/32 , H03H7/40
摘要： A generator produces output such as delivered power, voltage, current, forward power etc. that follows a prescribed pattern of output versus time where the pattern repeats with a repetition period by controlling sections of the pattern based on measurements taken one or more repetition periods in the past. A variable impedance match network may control the impedance presented to a radio frequency generator while the generator produces the output that follows the prescribed pattern of output versus time where the pattern repeats with a repetition period by controlling variable impedance elements in the match during sections of the pattern based on measurements taken one or more repetition periods in the past.

9. 发明授权

US11610763B2 Inter-period control system for plasma power delivery system and method of operating the same 有权
公开(公告)号：US11610763B2
公开(公告)日：2023-03-21
申请号：US17333764
申请日：2021-05-28
申请人： Advanced Energy Industries, Inc.
发明人： Gideon Van Zyl
IPC分类号： H01J37/32 , H03H7/40
摘要： A generator produces output such as delivered power, voltage, current, forward power etc. that follows a prescribed pattern of output versus time where the pattern repeats with a repetition period by controlling sections of the pattern based on measurements taken one or more repetition periods in the past. A variable impedance match network may control the impedance presented to a radio frequency generator while the generator produces the output that follows the prescribed pattern of output versus time where the pattern repeats with a repetition period by controlling variable impedance elements in the match during sections of the pattern based on measurements taken one or more repetition periods in the past.

10. 发明申请

US20220329169A1 SERIES STACK SWITCH CIRCUIT WITH VOLTAGE CLAMPING AND POWER RECOVERY 有权
公开(公告)号：US20220329169A1
公开(公告)日：2022-10-13
申请号：US17560397
申请日：2021-12-23
申请人： Advanced Energy Industries, Inc.
发明人： Gideon Van Zyl
IPC分类号： H02M3/335 , H02M1/32 , H03H7/38
摘要： Various embodiments are directed to a switch circuit comprising: two terminal nodes, comprising an upper node and a lower node; a plurality of switch modules, connected in series between the upper node and the lower node, wherein each of the switch modules comprises a switch, a rectifier, and a capacitor; a connecting circuit, coupled to the switch modules; and a power converter, coupled to the connecting circuit and to a power sink. The switch circuit is configured to limit a voltage or a component of a voltage in the switch circuit, and to recover power from the limiting of the voltage, wherein recovering the power comprises diverting power from the switch modules via the connecting circuit to the power converter, and the power converter outputting the power to the power sink.

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