专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明申请

US20170016834A1 SYSTEMS AND METHODS FOR INSPECTING AN OBJECT 有权
标题翻译：用于检查对象的系统和方法
公开(公告)号：US20170016834A1
公开(公告)日：2017-01-19
申请号：US14800625
申请日：2015-07-15
申请人： Applied Materials Israel, Ltd.
发明人： Haim Feldman , Ido Dolev , Ido Almog
IPC分类号： G01N21/95 , G02B26/12
CPC分类号： G01N21/9501 , G01N21/956 , G01N2021/95676 , G02B26/123 , G02B26/124 , G03F1/84
摘要： A system, including an illumination module that comprises (a) a first traveling lens acousto-optic device; (b) a light source for illuminating the first traveling lens to provide an input beam that propagates along a first direction; (c) illumination optics for outputting an output beam that scans the object at a second direction; a detection unit; and a collection module for collecting a collected beam from the object, wherein the collected beam propagates along a third direction; and optically manipulating the collected beam to provide a counter-scan beam is directed towards the detection unit and has a focal point that is positioned at a same location regardless of the propagation of the collected beam along the third direction.
摘要翻译：一种系统，包括照明模块，该照明模块包括：（a）第一行进透镜声光装置; （b）用于照亮第一移动透镜以提供沿着第一方向传播的输入光束的光源; （c）用于输出在第二方向扫描物体的输出光束的照明光学器件; 检测单元; 以及收集模块，用于从所述物体收集收集的光束，其中所述收集的光束沿着第三方向传播; 并且将所收集的光束光学操纵以提供反向扫描光束指向检测单元，并且具有位于相同位置的焦点，而不管收集的光束沿着第三方向的传播。

2. 发明授权

US11035803B1 Multi-perspective examination of a specimen 有权
公开(公告)号：US11035803B1
公开(公告)日：2021-06-15
申请号：US16802480
申请日：2020-02-26
申请人： Applied Materials Israel Ltd.
发明人： Ido Almog , Ori Golani
IPC分类号： G01N21/95 , G06T7/00
摘要： There is provided a system and a method comprising obtaining data representative of potential defects in at least one image of a semiconductor specimen, for each potential defect of at least a first subset of potential defects of the semiconductor specimen, obtaining pixel values representative of the potential defect in multiple images of the specimen which differ from each other by at least one parameter, classifying the potential defects into a plurality of first clusters, for each first cluster, building, based on pixel values representative of potential defects, at least one first matching filter for the first cluster, for at least a given potential defect not belonging to the first subset, determining whether it corresponds to a defect based on the first matching filters associated with the plurality of first clusters.

3. 发明申请

US20220012862A1 METHODS AND SYSTEMS FOR EXPEDITING MULTI-PERSPECTIVE WAFER ANALYSIS 有权
公开(公告)号：US20220012862A1
公开(公告)日：2022-01-13
申请号：US16923882
申请日：2020-07-08
申请人： Applied Materials Israel Ltd.
发明人： Doron Korngut , Ido Almog
IPC分类号： G06T7/00 , G06T7/62
摘要： Disclosed herein is method for multi-perspective-based wafer analysis. The method includes (i) scanning a plurality of pages, or portions thereof, one after the other, wherein each page, or a portion thereof, is successively scanned, in each of a multiplicity of perspectives, and (ii) analyzing scan data of a last scanned page while scanning a next page from the plurality of pages. At least some of the pages include multiple slices of the wafer. The analysis of the scan data includes identifying defects in the scanned pages, based on an integrated analysis combining scan data from each of the multiplicity of perspectives. Further disclosed is a computerized system configured to implement the method.

4. 发明授权

US10902582B2 Computerized system and method for obtaining information about a region of an object 有权
公开(公告)号：US10902582B2
公开(公告)日：2021-01-26
申请号：US16250980
申请日：2019-01-17
申请人： Applied Materials Israel, Ltd.
发明人： Haim Feldman , Eyal Neistein , Harel Ilan , Shahar Arad , Ido Almog
IPC分类号： G06T7/00 , G06T7/11
摘要： A method, system and computer readable medium for providing information about a region of a sample. The method includes (i) obtaining, by an imager, multiple images of the region; wherein the multiple images differ from each other by at least one parameter (ii) receiving or generating multiple reference images; (iii) generating multiple difference images that represent differences between the multiple images and the multiple reference images; (iv) calculating a set of region pixel attributes, (v) calculating a set of noise attributes, based on multiple sets of region pixels attributes of the multiple region pixels; and (vi) determining for each region pixel, whether the region pixel represents a defect based on a relationship between the set of noise attributes and the set of region pixel attributes of the pixel.

5. 发明授权

US09535014B1 Systems and methods for inspecting an object 有权
标题翻译：用于检查物体的系统和方法
公开(公告)号：US09535014B1
公开(公告)日：2017-01-03
申请号：US14800625
申请日：2015-07-15
申请人： Applied Materials Israel, Ltd.
发明人： Haim Feldman , Ido Dolev , Ido Almog
IPC分类号： G01N21/00 , G01N21/95 , G02B26/12
CPC分类号： G01N21/9501 , G01N21/956 , G01N2021/95676 , G02B26/123 , G02B26/124 , G03F1/84
摘要： A system, including an illumination module that comprises (a) a first traveling lens acousto-optic device; (b) a light source for illuminating the first traveling lens to provide an input beam that propagates along a first direction; (c) illumination optics for outputting an output beam that scans the object at a second direction; a detection unit; and a collection module for collecting a collected beam from the object, wherein the collected beam propagates along a third direction; and optically manipulating the collected beam to provide a counter-scan beam is directed towards the detection unit and has a focal point that is positioned at a same location regardless of the propagation of the collected beam along the third direction.
摘要翻译：一种系统，包括照明模块，该照明模块包括：（a）第一行进透镜声光装置; （b）用于照亮第一移动透镜以提供沿着第一方向传播的输入光束的光源; （c）用于输出在第二方向扫描物体的输出光束的照明光学器件; 检测单元; 以及收集模块，用于从所述物体收集收集的光束，其中所述收集的光束沿着第三方向传播; 并且将所收集的光束光学操纵以提供反向扫描光束指向检测单元，并且具有位于相同位置的焦点，而不管收集的光束沿着第三方向的传播。

6. 发明申请

US20230040995A1 DEPTH PROFILING OF SEMICONDUCTOR STRUCTURES USING PICOSECOND ULTRASONICS 有权
公开(公告)号：US20230040995A1
公开(公告)日：2023-02-09
申请号：US17970054
申请日：2022-10-20
申请人： Applied Materials Israel Ltd.
发明人： Ori Golani , Ido Almog
IPC分类号： G01B11/22 , G01B11/06
摘要： Disclosed herein is a method for depth-profiling of samples including a target region including a lateral structural feature. The method includes projecting an optical pump pulse on a semiconductor device comprising a target region, such as to produce an acoustic pulse which propagates within the target region of the semiconductor device, wherein a wavelength of the pump pulse is at least two times greater than a lateral extent of a lateral structural feature of the semiconductor device along at least one lateral direction, projecting an optical probe pulse on the semiconductor device, such that the probe pulse undergoes Brillouin scattering off the acoustic pulse within the target region, detecting a scattered component of the probe pulse to obtain a measured signal, and analyzing the measured signal to obtain a depth-dependence of at least one parameter characterizing the lateral structural feature.

7. 发明授权

US11519720B2 Depth profiling of semiconductor structures using picosecond ultrasonics 有权
公开(公告)号：US11519720B2
公开(公告)日：2022-12-06
申请号：US17068693
申请日：2020-10-12
申请人： Applied Materials Israel, Ltd.
发明人： Ori Golani , Ido Almog
IPC分类号： G01B11/22 , G01B11/06
摘要： Disclosed herein is a method for depth-profiling of samples including a target region including a lateral structural feature. The method includes obtaining measured signals of the sample and analyzing thereof to obtain a depth-dependence of at least one parameter characterizing the lateral structural feature. The measured signals are obtained by repeatedly: projecting a pump pulse on the sample, thereby producing an acoustic pulse propagating within the target region; Brillouin-scattering a probe pulse off the acoustic pulse within the target region; and detecting a scattered component of the probe pulse to obtain a measured signal. In each repetition the respective probe pulse is scattered off the acoustic pulse at a respective depth within the target region, thereby probing the target region at a plurality of depths. A wavelength of the pump pulse is at least about two times greater than a lateral extent of the lateral structural feature.

8. 发明授权

US11195267B1 Multi-perspective wafer analysis using an acousto-optic deflector 有权
公开(公告)号：US11195267B1
公开(公告)日：2021-12-07
申请号：US16926395
申请日：2020-07-10
申请人： Applied Materials Israel Ltd.
发明人： Harel Ilan , Doron Korngut , Ori Golani , Ido Almog
IPC分类号： G06T7/00 , G01N21/95
摘要： Disclosed herein is a computerized system including scanning equipment configured to obtain multi-perspective scan data of a slice on a sample. The scanning equipment includes: (i) a light source configured to generate a light beam; (ii) an acousto-optic deflector (AOD) configured to focus the light beam such as to generate a beam train scanned along consecutive lines on the slice, in groups of n≥2 successively scanned lines, along each of which the beam train forms at least one illumination spot, respectively; and (iii) one or more detectors configured to sense light returned from the slice. The n≥2 lines are scanned different perspectives, respectively. The consecutive lines may be longitudinally displaced relative to one another, such as to overlap in 100·(n−1)/n % of widths thereof, so that the slice may be fully scanned in each of the perspectives.

9. 发明授权

US11250560B2 Methods and systems for expediting multi-perspective wafer analysis 有权
公开(公告)号：US11250560B2
公开(公告)日：2022-02-15
申请号：US16923882
申请日：2020-07-08
申请人： Applied Materials Israel Ltd.
发明人： Doron Korngut , Ido Almog
IPC分类号： G06K9/32 , G06T7/00 , G06T7/62
摘要： Disclosed herein is method for multi-perspective-based wafer analysis. The method includes (i) scanning a plurality of pages, or portions thereof, one after the other, wherein each page, or a portion thereof, is successively scanned, in each of a multiplicity of perspectives, and (ii) analyzing scan data of a last scanned page while scanning a next page from the plurality of pages. At least some of the pages include multiple slices of the wafer. The analysis of the scan data includes identifying defects in the scanned pages, based on an integrated analysis combining scan data from each of the multiplicity of perspectives. Further disclosed is a computerized system configured to implement the method.

10. 发明授权

US09784689B2 Method and system for inspecting an object with an array of beams 有权
公开(公告)号：US09784689B2
公开(公告)日：2017-10-10
申请号：US14797040
申请日：2015-07-10
申请人： APPLIED MATERIALS ISRAEL LTD.
发明人： Ido Almog , Ron Naftali
IPC分类号： G01N21/00 , G01N21/88 , G01N21/95
CPC分类号： G01N21/8806 , G01N21/9501 , G01N2201/0638
摘要： According to an embodiment of the invention there may be provided a system for inspecting an object, the system may include a traveling lens acousto-optic device that is configured to generate a sequence of traveling lenses that propagate through an active region of the traveling lens acousto-optic device; an illumination unit that that is configured to illuminate the sequence of traveling lenses to provide a sequence of input beams; a first beam splitter that is configured to split the sequence of input beams to an intermediate array of intermediate beams, the intermediate array comprises multiple sequences of intermediate beams, the sequences of intermediate beams are spaced apart from each other; a masking unit that is configured to mask first beams of the intermediate array and unmask output beams of the intermediate array in an alternating manner; multiple detectors; and an objective lens that is configured to receive the output beams, direct the output beams towards multiple areas of the object, receive collected beams from the multiple areas of the object, and direct the collected beams towards the multiple detectors; and wherein each detector is associated with an area of the multiple areas.

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式