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1. 发明申请

US20170016834A1 SYSTEMS AND METHODS FOR INSPECTING AN OBJECT 有权
标题翻译：用于检查对象的系统和方法
公开(公告)号：US20170016834A1
公开(公告)日：2017-01-19
申请号：US14800625
申请日：2015-07-15
申请人： Applied Materials Israel, Ltd.
发明人： Haim Feldman , Ido Dolev , Ido Almog
IPC分类号： G01N21/95 , G02B26/12
CPC分类号： G01N21/9501 , G01N21/956 , G01N2021/95676 , G02B26/123 , G02B26/124 , G03F1/84
摘要： A system, including an illumination module that comprises (a) a first traveling lens acousto-optic device; (b) a light source for illuminating the first traveling lens to provide an input beam that propagates along a first direction; (c) illumination optics for outputting an output beam that scans the object at a second direction; a detection unit; and a collection module for collecting a collected beam from the object, wherein the collected beam propagates along a third direction; and optically manipulating the collected beam to provide a counter-scan beam is directed towards the detection unit and has a focal point that is positioned at a same location regardless of the propagation of the collected beam along the third direction.
摘要翻译：一种系统，包括照明模块，该照明模块包括：（a）第一行进透镜声光装置; （b）用于照亮第一移动透镜以提供沿着第一方向传播的输入光束的光源; （c）用于输出在第二方向扫描物体的输出光束的照明光学器件; 检测单元; 以及收集模块，用于从所述物体收集收集的光束，其中所述收集的光束沿着第三方向传播; 并且将所收集的光束光学操纵以提供反向扫描光束指向检测单元，并且具有位于相同位置的焦点，而不管收集的光束沿着第三方向的传播。

2. 发明申请

US20220058784A1 INSPECTION OF A THREE DIMENSIONAL STRUCTURE OF A SAMPLE USING A PHASE SHIFT MASK 有权
公开(公告)号：US20220058784A1
公开(公告)日：2022-02-24
申请号：US17001194
申请日：2020-08-24
申请人： Applied Materials Israel Ltd.
发明人： Haim Feldman , Yoav Shechtman
IPC分类号： G06T7/00 , G01N21/95 , G01B11/24
摘要： A method for inspecting a three dimensional structure of a microscopic scale of a sample, the method may include obtaining an image of the three dimensional structure; obtaining a reference image of a reference three dimensional structure, the reference three dimensional structure and the three dimensional structure are ideally identical to each other; wherein each one of the image and the reference image was generated using optics that includes a phase mask, wherein the phase mask virtually expands a depth of field of the optics by encoding depth information over a depth range that exceeds the depth of field; generating a difference image that represents a difference between the image and the reference image; determining, based on the difference image, whether there is at least one defect in the three dimensional structure; wherein when determining that there is the at least one defect then providing a depth of the at least one defect

3. 发明授权

US10902582B2 Computerized system and method for obtaining information about a region of an object 有权
公开(公告)号：US10902582B2
公开(公告)日：2021-01-26
申请号：US16250980
申请日：2019-01-17
申请人： Applied Materials Israel, Ltd.
发明人： Haim Feldman , Eyal Neistein , Harel Ilan , Shahar Arad , Ido Almog
IPC分类号： G06T7/00 , G06T7/11
摘要： A method, system and computer readable medium for providing information about a region of a sample. The method includes (i) obtaining, by an imager, multiple images of the region; wherein the multiple images differ from each other by at least one parameter (ii) receiving or generating multiple reference images; (iii) generating multiple difference images that represent differences between the multiple images and the multiple reference images; (iv) calculating a set of region pixel attributes, (v) calculating a set of noise attributes, based on multiple sets of region pixels attributes of the multiple region pixels; and (vi) determining for each region pixel, whether the region pixel represents a defect based on a relationship between the set of noise attributes and the set of region pixel attributes of the pixel.

4. 发明申请

US20180209915A1 ASYMMETRICAL MAGNIFICATION INSPECTION SYSTEM AND ILLUMINATION MODULE 审中-公开
公开(公告)号：US20180209915A1
公开(公告)日：2018-07-26
申请号：US15412879
申请日：2017-01-23
申请人： APPLIED MATERIALS ISRAEL LTD.
发明人： Haim Feldman , Boris Golberg , Ido Dolev
IPC分类号： G01N21/88 , G02B5/04 , G02B23/16 , G02B26/08 , G02B26/10 , G06T7/00 , H04N5/225 , G01N21/95
CPC分类号： G01N21/8806 , G01N21/8851 , G01N21/9501 , G02B21/0016 , G02B21/06 , G02B26/0891 , G02B27/0911 , G02B27/0972
摘要： An illumination module that includes a pair of anamorphic prisms that comprises a first anamorphic prism and a second anamorphic prism; wherein the pair of anamorphic prisms is configured to (a) receive a first radiation beam that propagates along a first optical axis, and (b) asymmetrically magnify the first radiation beam to provide a second radiation beam that propagates along a second optical axis that is parallel to the first optical axis; and a rectangular prism that is configured to receive the second radiation beam and perform a lateral shift of the second radiation beam to provide a third radiation beam; and a rotating mechanism that is configured to change an asymmetrical magnification of the pair of anamorphic prisms by rotating at least one of the first anamorphic prism and the second anamorphic prism.

5. 发明授权

US09535014B1 Systems and methods for inspecting an object 有权
标题翻译：用于检查物体的系统和方法
公开(公告)号：US09535014B1
公开(公告)日：2017-01-03
申请号：US14800625
申请日：2015-07-15
申请人： Applied Materials Israel, Ltd.
发明人： Haim Feldman , Ido Dolev , Ido Almog
IPC分类号： G01N21/00 , G01N21/95 , G02B26/12
CPC分类号： G01N21/9501 , G01N21/956 , G01N2021/95676 , G02B26/123 , G02B26/124 , G03F1/84
摘要： A system, including an illumination module that comprises (a) a first traveling lens acousto-optic device; (b) a light source for illuminating the first traveling lens to provide an input beam that propagates along a first direction; (c) illumination optics for outputting an output beam that scans the object at a second direction; a detection unit; and a collection module for collecting a collected beam from the object, wherein the collected beam propagates along a third direction; and optically manipulating the collected beam to provide a counter-scan beam is directed towards the detection unit and has a focal point that is positioned at a same location regardless of the propagation of the collected beam along the third direction.
摘要翻译：一种系统，包括照明模块，该照明模块包括：（a）第一行进透镜声光装置; （b）用于照亮第一移动透镜以提供沿着第一方向传播的输入光束的光源; （c）用于输出在第二方向扫描物体的输出光束的照明光学器件; 检测单元; 以及收集模块，用于从所述物体收集收集的光束，其中所述收集的光束沿着第三方向传播; 并且将所收集的光束光学操纵以提供反向扫描光束指向检测单元，并且具有位于相同位置的焦点，而不管收集的光束沿着第三方向的传播。

6. 发明申请

US20160077016A1 EVALUATION SYSTEM AND A METHOD FOR EVALUATING A SUBSTRATE 有权
标题翻译：评估系统和评估基板的方法
公开(公告)号：US20160077016A1
公开(公告)日：2016-03-17
申请号：US14946693
申请日：2015-11-19
申请人： APPLIED MATERIALS ISRAEL LTD.
发明人： Yoram Uziel , Ron Naftali , Ofer Adan , Haim Feldman , Ofer Shneyour , Ron Bar-Or
IPC分类号： G01N21/88 , G01Q60/24 , G01Q20/02
CPC分类号： G01N21/88 , G01Q10/065 , G01Q20/02 , G01Q60/06 , G01Q60/24 , G01Q70/06
摘要： There may be provided an evaluation system that may include spatial sensors that include atomic force microscopes (AFMs) and a solid immersion lens. The AFMs are arranged to generate spatial relationship information that is indicative of a spatial relationship between the solid immersion lens and a substrate. The controller is arranged to receive the spatial relationship information and to send correction signals to the at least one location correction element for introducing a desired spatial relationship between the solid immersion lens and the substrate.
摘要翻译：可以提供可以包括包括原子力显微镜（AFM）和固体浸没透镜的空间传感器的评估系统。 AFM布置成产生表示固体浸没透镜和基底之间的空间关系的空间关系信息。所述控制器被布置为接收所述空间关系信息，并且向所述至少一个位置校正元件发送校正信号，以在所述固体浸没透镜和所述基板之间引入期望的空间关系。

7. 发明申请

US20150300913A1 ON-TOOL WAVEFRONT ABERRATIONS MEASUREMENT SYSTEM AND METHOD 有权
标题翻译：工具波形测量系统和方法
公开(公告)号：US20150300913A1
公开(公告)日：2015-10-22
申请号：US14560932
申请日：2014-12-04
申请人： APPLIED MATERIALS ISRAEL LTD.
发明人： Boris Golberg , Amir Moshe Sagiv , Haim Feldman , Uriel Malul , Adam Baer
IPC分类号： G01M11/02
CPC分类号： G01M11/00 , G01N21/8806 , G01N21/9501 , G01N2021/95676 , G02B21/125
摘要： An on-tool measurement system and a method for measuring optical system's wavefront (WF) aberrations are disclosed. The on-tool measurement system includes an optical setup comprising a moveable deflection element further comprising a highly transparent region. The deflection element includes a first surface configured to project a first image of at least one object onto a sensor and the highly transparent region includes a second surface configured to project a second image of the at least one object onto the sensor. The on-tool measurement system includes a sensor configured to capture the first and second images and a controller configured to measure differential displacements between the first and second images at each deflection element position and to calculate the optical setup local WF gradients that depend on the measured differential displacements.
摘要翻译：公开了一种工具测量系统和用于测量光学系统的波前（WF）像差的方法。工具测量系统包括光学装置，其包括还包括高度透明区域的可移动偏转元件。偏转元件包括被配置为将至少一个物体的第一图像突出到传感器上的第一表面，并且高透明区域包括配置成将至少一个物体的第二图像投影到传感器上的第二表面。工具测量系统包括被配置为捕获第一和第二图像的传感器和被配置为测量在每个偏转元件位置处的第一和第二图像之间的差分位移的控制器，并且计算取决于被测量的光学设置局部WF梯度差分位移。

8. 发明授权

US11385188B1 System and method for defect detection using multi-spot scanning 有权
公开(公告)号：US11385188B1
公开(公告)日：2022-07-12
申请号：US16544889
申请日：2019-08-19
申请人： Applied Materials Israel, Ltd.
发明人： Amir Shoham , Yoav Berlatzky , Haim Feldman
IPC分类号： G01N21/956
摘要： A system that may include a radiation source to generate a beam of coherent radiation; traveling lens optics to focus the beam to generate multiple spots on a surface of a sample and to scan the spots together over the surface; collection optics to collect the radiation scattered from the multiple spots and to focus the collected radiation to generate a pattern of interference fringes; and a detection unit to detect changes in the pattern of interference fringes.

9. 发明授权

US10386311B1 System and method for defect detection using multi-spot scanning 有权
公开(公告)号：US10386311B1
公开(公告)日：2019-08-20
申请号：US15803789
申请日：2017-11-05
申请人： Applied Materials Israel, Ltd.
发明人： Amir Shoham , Yoav Berlatzky , Haim Feldman
IPC分类号： G01B11/30 , G01N21/956
摘要： A system that may include a radiation source to generate a beam of coherent radiation; traveling lens optics to focus the beam so as to generate multiple spots on a surface of a sample and to scan the spots together over the surface; collection optics to collect the radiation scattered from the multiple spots and to focus the collected radiation so as to generate a pattern of interference fringes; and a detection unit to detect changes in the pattern of interference fringes.

10. 发明申请

US20130342893A1 INSPECTION SYSTEM AND METHOD FOR FAST CHANGES OF FOCUS 有权
标题翻译：检验系统和方法快速变化
公开(公告)号：US20130342893A1
公开(公告)日：2013-12-26
申请号：US13923086
申请日：2013-06-20
申请人： APPLIED MATERIALS ISRAEL, LTD.
发明人： Haim Feldman , Boris Morgenstein , Roman Naidis , Adam Baer
IPC分类号： G02F1/29
CPC分类号： G02F1/29 , G01N21/8806 , G01N21/9501 , G02F1/11 , G02F2001/294
摘要： An inspection system includes a first focusing unit configured to perform fast focus changes to a first focusing function applied to an incident light beam. A traveling lens acousto-optic device is arranged to receive the light beam focused by the first focusing function and produce focused spots using a plurality of traveling lenses generated in response to radio frequency signals. The traveling lenses apply a second focusing function and the traveling lens acousto-optic device is arranged to alter the second focusing function at a fast rate. The inspection system also includes optics arranged to direct the focused spots onto an inspected object and to direct radiation from the inspected object to a sensor.
摘要翻译：检查系统包括被配置为对应用于入射光束的第一聚焦功能执行快速聚焦改变的第一聚焦单元。移动透镜声光装置被布置成接收由第一聚焦功能聚焦的光束，并且使用响应于射频信号产生的多个行进透镜产生聚焦点。行进透镜应用第二聚焦功能，并且行进透镜声光装置被布置成以快速的速度改变第二聚焦功能。检查系统还包括被布置成将聚焦点引导到被检查对象并将来自被检查对象的辐射引导到传感器的光学系统。

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