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1. 发明申请

US20190095742A1 IMAGE PROCESSING APPARATUS, METHOD, AND NON-TRANSITORY COMPUTER-READABLE STORAGE MEDIUM 审中-公开
公开(公告)号：US20190095742A1
公开(公告)日：2019-03-28
申请号：US16139553
申请日：2018-09-24
申请人： CANON KABUSHIKI KAISHA
发明人： Tomotaka Fujimori , Yusuke Mitarai , Masafumi Takimoto , Hiroshi Okuda
IPC分类号： G06K9/32 , G06T7/73 , G06T7/50 , G01N21/88 , G01N21/89
摘要： This invention makes it possible to properly detect a detection object region in an image. For this purpose, an image processing apparatus according to this invention includes an image input unit configured to input an object image and a reference image different in pixel value component type from the object image, a detection unit configured to detect a detection object candidate region from the object image, an extraction unit configured to extract at least one feature amount from the detection object candidate region by using at least the reference image, and a selection unit configured to select the detection object candidate region based on the feature amount.

2. 发明申请

US20170052462A1 MEASUREMENT APPARATUS, LITHOGRAPHY APPARATUS, AND METHOD OF MANUFACTURING ARTICLE 审中-公开
标题翻译：测量装置，光刻设备及其制造方法
公开(公告)号：US20170052462A1
公开(公告)日：2017-02-23
申请号：US15231003
申请日：2016-08-08
申请人： CANON KABUSHIKI KAISHA
发明人： Hiroshi Okuda
IPC分类号： G03F7/20 , G01S7/481 , G01S17/06
CPC分类号： G03F7/70775 , G01B9/02018 , G01B9/02019 , G01B9/02028 , G01B9/02058 , G01B9/02061 , G02B5/136 , G03F7/7085
摘要： The present invention provides a measurement apparatus for measuring a position of an object, comprising a reflecting portion provided on the object and having a surface on which reflectors configured to retroreflect light are arrayed, an optical system configured to cause first light to be incident on the surface, receive second light as reflected light of the first light, cause third light generated from the second light to be incident on the surface, and receive fourth light as reflected light of the third light, and a processor configured to determine the position of the object based on a detection result of the forth light, wherein the optical system is configured such that a displacement between optical paths of the first light and the second light is corrected by a displacement between optical paths of the third light and the fourth light.
摘要翻译：本发明提供了一种用于测量物体位置的测量装置，包括设置在物体上的反射部分，并且具有其上排列有用于回射反射光的反射器的表面，被配置为使第一光入射到其上的光学系统接收第二光作为第一光的反射光，使得从第二光产生的第三光入射到表面上，并且接收第四光作为第三光的反射光，并且处理器被配置为确定第二光的位置基于所述第四光的检测结果，所述光学系统被配置为使得所述第一光和所述第二光的光路之间的位移通过所述第三光和所述第四光的光路之间的位移被校正。

3. 发明授权

US10891508B2 Image processing apparatus, method, and non-transitory computer-readable storage medium 有权
公开(公告)号：US10891508B2
公开(公告)日：2021-01-12
申请号：US16139553
申请日：2018-09-24
申请人： CANON KABUSHIKI KAISHA
发明人： Tomotaka Fujimori , Yusuke Mitarai , Masafumi Takimoto , Hiroshi Okuda
IPC分类号： G06K9/32 , G06T7/73 , G06T7/50 , G01N21/89 , G01N21/88 , G06K9/00 , G06K9/34 , G06T5/00
摘要： This invention makes it possible to properly detect a detection object region in an image. For this purpose, an image processing apparatus according to this invention includes an image input unit configured to input an object image and a reference image different in pixel value component type from the object image, a detection unit configured to detect a detection object candidate region from the object image, an extraction unit configured to extract at least one feature amount from the detection object candidate region by using at least the reference image, and a selection unit configured to select the detection object candidate region based on the feature amount.

4. 发明申请

US20160155026A1 CLASSIFYING METHOD, STORAGE MEDIUM, INSPECTION METHOD, AND INSPECTION APPARATUS 审中-公开
标题翻译：分类方法，储存介质，检验方法和检验装置
公开(公告)号：US20160155026A1
公开(公告)日：2016-06-02
申请号：US14943512
申请日：2015-11-17
申请人： CANON KABUSHIKI KAISHA
发明人： Hidenori Hashiguchi , Hiroshi Okuda
IPC分类号： G06K9/62 , G06T5/40 , G06T7/00
CPC分类号： G06K9/6255 , G06K9/6267 , G06T7/001 , G06T2207/20081
摘要： The present invention provides a classifying method of classifying an article into one of a plurality of groups based on an image of the article, comprising determining an evaluation method for obtaining an evaluation value of an image by using at least some of sample images, obtaining evaluation values for the sample images by the determined evaluation method, changing a group to which a sample of at least one sample image having a singular evaluation value among the sample images belongs, changing the evaluation method using the sample images after changing the group to which the sample of the at least one sample image belongs, obtaining an evaluation value for the image of the article using the changed evaluation method, and classifying the article into one of the plurality of groups based on the evaluation value for the image of the article.
摘要翻译：本发明提供了一种基于物品的图像将物品分类为多个组中的一个的分类方法，包括：通过使用至少一些样本图像来确定用于获得图像的评估值的评估方法，获得评估通过确定的评估方法对样本图像的值进行改变，改变样本图像中具有单个评估值的至少一个样本图像的样本的组属于改变使用样本图像的评估方法，所述至少一个样本图像的样本属于，使用所述改变的评估方法获得所述文章的图像的评估值，并且基于所述物品的图像的评估值将所述文章分类为所述多个组中的一个。

5. 发明授权

US10248888B2 Classifying method, storage medium, inspection method, and inspection apparatus 有权
公开(公告)号：US10248888B2
公开(公告)日：2019-04-02
申请号：US14943512
申请日：2015-11-17
申请人： CANON KABUSHIKI KAISHA
发明人： Hidenori Hashiguchi , Hiroshi Okuda
IPC分类号： G06K9/62 , G06T7/00
摘要： The present invention provides a classifying method of classifying an article into one of a plurality of groups based on an image of the article, comprising determining an evaluation method for obtaining an evaluation value of an image by using at least some of sample images, obtaining evaluation values for the sample images by the determined evaluation method, changing a group to which a sample of at least one sample image having a singular evaluation value among the sample images belongs, changing the evaluation method using the sample images after changing the group to which the sample of the at least one sample image belongs, obtaining an evaluation value for the image of the article using the changed evaluation method, and classifying the article into one of the plurality of groups based on the evaluation value for the image of the article.

6. 发明申请

US20170069075A1 CLASSIFIER GENERATION APPARATUS, DEFECTIVE/NON-DEFECTIVE DETERMINATION METHOD, AND PROGRAM 审中-公开
标题翻译：分类器生成装置，有缺陷/非有缺陷的确定方法和程序
公开(公告)号：US20170069075A1
公开(公告)日：2017-03-09
申请号：US15232700
申请日：2016-08-09
申请人： CANON KABUSHIKI KAISHA
发明人： Hiroshi Okuda
IPC分类号： G06T7/00 , G06K9/52 , G06T11/60 , G06K9/62 , G06K9/66
CPC分类号： G06T7/0004 , G06K9/2027 , G06K9/6284 , G06T11/60 , G06T2207/10152 , G06T2207/20016 , G06T2207/20081 , G06T2207/30148 , G06T2207/30164
摘要： In order to determine whether an appearance of an inspection target object is defective or non-defective, a classifier generation apparatus extracts feature amounts from each of at least two images based on images captured under at least two different imaging conditions with respect to a target object having a known defective or non-defective appearance. The classifier generation apparatus selects a feature amount for determining whether the target object is defective or non-defective from feature amounts that comprehensively include the extracted feature amounts, and generates a classifier for determining whether the target object is defective or non-defective based on the selected feature amount. The determination whether appearance of the target object is defective or non-defective is based on the extracted feature amount and the classifier.
摘要翻译：为了确定检查目标对象的外观是有缺陷的还是无缺陷的，分类器生成装置基于至少两个不同的成像条件下相对于目标对象捕获的图像，从至少两个图像中的每一个提取特征量具有已知的有缺陷或无缺陷的外观。分类器生成装置从综合地包含所提取的特征量的特征量中选择用于确定目标对象是缺陷还是不缺陷的特征量，并且基于该特征量生成用于确定目标对象是有缺陷还是不缺陷的分类器选择特征量。基于所提取的特征量和分类器，确定目标对象的外观是有缺陷还是不缺陷。

7. 发明授权

US10095125B2 Measurement apparatus, lithography apparatus, and method of manufacturing article 有权
公开(公告)号：US10095125B2
公开(公告)日：2018-10-09
申请号：US15231003
申请日：2016-08-08
申请人： CANON KABUSHIKI KAISHA
发明人： Hiroshi Okuda
IPC分类号： G03F7/20 , G01B9/02 , G02B5/136
摘要： The present invention provides a measurement apparatus for measuring a position of an object, comprising a reflecting portion provided on the object and having a surface on which reflectors configured to retroreflect light are arrayed, an optical system configured to cause first light to be incident on the surface, receive second light as reflected light of the first light, cause third light generated from the second light to be incident on the surface, and receive fourth light as reflected light of the third light, and a processor configured to determine the position of the object based on a detection result of the forth light, wherein the optical system is configured such that a displacement between optical paths of the first light and the second light is corrected by a displacement between optical paths of the third light and the fourth light.

8. 发明申请

US20160155023A1 CLASSIFYING METHOD, STORAGE MEDIUM, INSPECTION METHOD, AND INSPECTION APPARATUS 有权
标题翻译：分类方法，储存介质，检验方法和检验装置
公开(公告)号：US20160155023A1
公开(公告)日：2016-06-02
申请号：US14945780
申请日：2015-11-19
申请人： CANON KABUSHIKI KAISHA
发明人： Takanori Uemura , Hiroshi Okuda
IPC分类号： G06K9/62
CPC分类号： G06K9/4614 , G06K9/6234 , G06K9/627 , G06K2209/19
摘要： The present invention provides a classifying method of classifying an article into one of a plurality of groups based on an image of the article, comprising determining an evaluation method for obtaining an evaluation value of an image by using at least some of sample images, obtaining evaluation values for the sample images by the determined evaluation method, changing the evaluation method so as to increase a degree of dissimilarity in an evaluation value range for sample images between the plurality of groups by changing a evaluation value of at least one sample image having a singular evaluation value among the sample images, obtaining an evaluation value for the image of the article using the changed evaluation method, and classifying the article into one of the plurality of groups based on the evaluation value for the image of the article.
摘要翻译：本发明提供了一种基于物品的图像将物品分类为多个组中的一个的分类方法，包括：通过使用至少一些样本图像来确定用于获得图像的评估值的评估方法，获得评估通过确定的评估方法对样本图像的值进行改变，改变评估方法，以通过改变具有单个的至少一个样本图像的评估值来增加多个组之间的样本图像的评估值范围中的不相似度评估值，使用改变的评估方法获得用于图像的评估值，并且基于物品的图像的评估值将该物品分类为多个组中的一个。

9. 发明授权

US09959482B2 Classifying method, storage medium, inspection method, and inspection apparatus 有权
公开(公告)号：US09959482B2
公开(公告)日：2018-05-01
申请号：US14945780
申请日：2015-11-19
申请人： CANON KABUSHIKI KAISHA
发明人： Takanori Uemura , Hiroshi Okuda
IPC分类号： G06K9/46 , G06K9/62
CPC分类号： G06K9/4614 , G06K9/6234 , G06K9/627 , G06K2209/19
摘要： The present invention provides a classifying method of classifying an article into one of a plurality of groups based on an image of the article, comprising determining an evaluation method for obtaining an evaluation value of an image by using at least some of sample images, obtaining evaluation values for the sample images by the determined evaluation method, changing the evaluation method so as to increase a degree of dissimilarity in an evaluation value range for sample images between the plurality of groups by changing a evaluation value of at least one sample image having a singular evaluation value among the sample images, obtaining an evaluation value for the image of the article using the changed evaluation method, and classifying the article into one of the plurality of groups based on the evaluation value for the image of the article.

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