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1. 发明授权

US06639713B2 Silicon micromachined optical device 失效
公开(公告)号：US06639713B2
公开(公告)日：2003-10-28
申请号：US09843024
申请日：2001-04-25
申请人： Chen-Wei Chiu , Aramais Avakian , Tom Tsao , Fukang Jiang , Jeff Dickson , Yu-Chong Tai
发明人： Chen-Wei Chiu , Aramais Avakian , Tom Tsao , Fukang Jiang , Jeff Dickson , Yu-Chong Tai
IPC分类号： G02F129
CPC分类号： G02B6/3566 , B81B3/0051 , B81B2201/031 , B81B2201/045 , B81B2203/0118 , B81B2203/058 , B81C1/00214 , G02B6/3518 , G02B6/3546 , G02B6/3572 , G02B6/3576 , G02B6/3584 , G02B6/3594
摘要： An apparatus at least partially intercepts a plurality of light beams propagating along a respective plurality of beam paths. The apparatus includes a single crystal silicon substrate and an array including a plurality of modules. Each module includes a reflector comprising single crystal silicon and a reflector surface lying in a reflector plane substantially perpendicular to the substrate surface. Each module further includes a reflector support which mounts the reflector to move substantially within the reflector plane with a displacement component along the surface normal direction of the substrate surface. Each module further includes a reflector driver responsive to electrical current to selectively move the reflector between a first position and a second position.

2. 发明申请

US20070008634A1 IMAGE SYSTEM AND MINIATURE DEFORMABLE MIRROR THEREOF 失效
标题翻译：图像系统和微型可逆镜像
公开(公告)号：US20070008634A1
公开(公告)日：2007-01-11
申请号：US11423617
申请日：2006-06-12
申请人： Chen-Wei Chiu
发明人： Chen-Wei Chiu
IPC分类号： G02B5/08
CPC分类号： G02B17/0816 , G02B17/0896 , G02B26/0825
摘要： A miniature deformable mirror includes an upper portion, a lower portion, and a spacer. The upper portion includes a frame, an organic thin film, and a reflecting layer. The organic thin film is used as a deformed element and supported by the frame. The reflecting layer is disposed on the organic thin film used for reflecting incident light. The lower portion includes a conductive substrate. The conductive layer is disposed on the substrate and used for conducting the driving voltage. The spacer is sandwiched between the upper portion and the lower portion. While voltages are applied, electrostatic forces are generated to deform the organic thin film and reflecting layer. Therefore, a miniature deformable mirror with continuously variable focuses is realized.
摘要翻译：小型可变形反射镜包括上部，下部和间隔件。上部包括框架，有机薄膜和反射层。有机薄膜用作变形元件并由框架支撑。反射层设置在用于反射入射光的有机薄膜上。下部包括导电基板。导电层设置在基板上，用于传导驱动电压。间隔件夹在上部和下部之间。当施加电压时，产生静电力以使有机薄膜和反射层变形。因此，实现了具有连续可变聚焦的微型可变形反射镜。

3. 发明授权

US06709886B2 Method of fabricating micromachined devices 失效
标题翻译：制造微加工装置的方法
公开(公告)号：US06709886B2
公开(公告)日：2004-03-23
申请号：US09843025
申请日：2001-04-25
申请人： Chen-Wei Chiu , Tom Tsao , Fukang Jiang
发明人： Chen-Wei Chiu , Tom Tsao , Fukang Jiang
IPC分类号： H01L2100
CPC分类号： G02B6/3566 , B81B3/0072 , B81B2201/042 , B81C1/0015 , B81C1/00182 , G02B6/3512 , G02B6/3518 , G02B6/3546 , G02B6/356 , G02B6/3572 , G02B6/3576 , G02B6/3584 , G02B6/3594 , G02B26/0833 , G02B26/085 , G02B26/0866
摘要： A method for fabricating a module for at least partially intercepting a light beam propagating along a beam path includes providing a single crystal silicon substrate with a first substrate surface and a second substrate surface. The method further includes forming a reflector support layer on the first substrate surface. The method further includes forming a support frame and at least one reflector by etching the substrate from the second substrate surface. The method further includes forming at least one electrical conduit on the reflector support layer. The method further includes forming a reflector support by etching the reflector support layer from the first substrate surface, the reflector support mechanically coupled to the support frame and the reflector, the reflector support movable such that the reflector is movable substantially perpendicularly to the first substrate surface.
摘要翻译：一种用于制造用于至少部分地截取沿着光束路径传播的光束的模块的方法包括：提供具有第一衬底表面和第二衬底表面的单晶硅衬底。该方法还包括在第一衬底表面上形成反射器支撑层。该方法还包括通过从第二衬底表面蚀刻衬底来形成支撑框架和至少一个反射器。该方法还包括在反射器支撑层上形成至少一个电导管。该方法还包括通过从第一衬底表面蚀刻反射器支撑层来形成反射器支撑件，反射器支撑件机械地联接到支撑框架和反射器，反射器支撑件可移动，使得反射器可基本上垂直于第一衬底表面移动。

4. 发明授权

US07679811B2 Image system and miniature deformable mirror thereof 失效
标题翻译：图像系统及其微型可变形反射镜
公开(公告)号：US07679811B2
公开(公告)日：2010-03-16
申请号：US11423617
申请日：2006-06-12
申请人： Chen-Wei Chiu
发明人： Chen-Wei Chiu
IPC分类号： G02B26/00
CPC分类号： G02B17/0816 , G02B17/0896 , G02B26/0825
摘要： A miniature deformable mirror includes an upper portion, a lower portion, and a spacer. The upper portion includes a frame, an organic thin film, and a reflecting layer. The organic thin film is used as a deformed element and is supported by the frame. The reflecting layer is disposed on the organic thin film used for reflecting incident light. The lower portion includes a conductive substrate. The conductive layer is disposed on the substrate and is used for conducting the driving voltage. The spacer is sandwiched between the upper portion and the lower portion. While voltages are applied, electrostatic forces are generated to deform the organic thin film and reflecting layer. Therefore, a miniature deformable mirror with continuously variable focuses is realized.
摘要翻译：小型可变形反射镜包括上部，下部和间隔件。上部包括框架，有机薄膜和反射层。有机薄膜用作变形元件并被框架支撑。反射层设置在用于反射入射光的有机薄膜上。下部包括导电基板。导电层设置在基板上，用于传导驱动电压。间隔件夹在上部和下部之间。当施加电压时，产生静电力以使有机薄膜和反射层变形。因此，实现了具有连续可变聚焦的微型可变形反射镜。

5. 发明申请

US20070109667A1 Optical focus system and zoom system including at least one deformable mirror therein 审中-公开
标题翻译：光学对焦系统和变焦系统，其中至少包括一个可变形反射镜
公开(公告)号：US20070109667A1
公开(公告)日：2007-05-17
申请号：US11467048
申请日：2006-08-24
申请人： Chen-Wei Chiu
发明人： Chen-Wei Chiu
IPC分类号： G02B17/00
CPC分类号： G02B17/0812 , G02B15/177 , G02B26/0825
摘要： An optical zoom system for imaging an object on an image-sensing element comprises at least one first passive optical element disposed on a light traveling path for changing the light direction, at least two deformable mirrors having variable focal lengths and disposed on the light traveling path, and at least one passive optical element disposed on the light traveling path for collecting and correcting the light to image the object on the image-sensing element.
摘要翻译：用于对图像感测元件上的物体进行成像的光学变焦系统包括设置在用于改变光线方向的光行进路径上的至少一个第一无源光学元件，至少两个具有可变焦距的可变形反射镜，并设置在光行进路径以及设置在光行进路径上的至少一个无源光学元件，用于收集和校正光以在图像感测元件上成像物体。

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