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    • 9. 发明申请
    • LIGHT EMITTING DIODE HAVING ALGAN BUFFER LAYER AND METHOD OF FABRICATING THE SAME
    • 具有ALGAN缓冲层的发光二极管及其制造方法
    • US20100032650A1
    • 2010-02-11
    • US12571981
    • 2009-10-01
    • Ki Bum NAM
    • Ki Bum NAM
    • H01L33/00H01L21/20
    • H01L33/007H01L21/0242H01L21/02458H01L21/02505H01L21/0251H01L21/0254H01L21/0262H01L33/12
    • The present invention relates to a light emitting diode having an AlxGa1-xN buffer layer and a method of fabricating the same, and more particularly, to a light emitting diode having an AlxGa1-xN buffer layer, wherein between a substrate and a GaN-based semiconductor layer, the AlxGa1-xN (0≦x≦1) buffer layer having the composition ratio x of Al decreasing from the substrate to the GaN-based semiconductor layer is interposed to reduce lattice mismatch between the substrate and the GaN-based semiconductor layer, and a method of fabricating the same. To this end, the present invention provides a light emitting diode comprising a substrate; a first conductive semiconductor layer positioned on the substrate; and an AlxGa1-xN (0≦x≦1) buffer layer interposed between the substrate and the first conductive semiconductor layer and having a composition ratio x of Al decreasing from the substrate to the first conductive semiconductor layer.
    • 本发明涉及具有Al x Ga 1-x N缓冲层的发光二极管及其制造方法,更具体地说,涉及具有Al x Ga 1-x N缓冲层的发光二极管,其中在基板和GaN基 半导体层插入从衬底到GaN基半导体层的组成比x为Al的Al x Ga 1-x N(0 <= x <= 1)缓冲层以减小衬底和GaN基半导体层之间的晶格失配 半导体层及其制造方法。 为此,本发明提供一种包括基板的发光二极管; 位于所述基板上的第一导电半导体层; 以及插入在所述基板和所述第一导电半导体层之间并且从所述基板到所述第一导电半导体层的Al的组成比x为Al的Al x Ga 1-x N(0 <= x <= 1)缓冲层。
    • 10. 发明申请
    • METHOD OF FORMING P-TYPE COMPOUND SEMICONDUCTOR LAYER
    • 形成P型复合半导体层的方法
    • US20100003810A1
    • 2010-01-07
    • US12560891
    • 2009-09-16
    • Ki Bum NAMHwa Mok KIMJames S. SPECK
    • Ki Bum NAMHwa Mok KIMJames S. SPECK
    • H01L21/20
    • H01L33/007H01L21/0254H01L21/02579H01L21/0262
    • A method of forming a p-type compound semiconductor layer includes increasing a temperature of a substrate loaded into a reaction chamber to a first temperature. A source gas of a Group III element, a source gas of a p-type impurity, and a source gas of nitrogen containing hydrogen are supplied into the reaction chamber to grow the p-type compound semiconductor layer. Then, the supply of the source gas of the Group III element and the source gas of the p-type impurity is stopped and the temperature of the substrate is lowered to a second temperature. The supply of the source gas of nitrogen containing hydrogen is stopped and drawn out at the second temperature, and the temperature of the substrate is lowered to room temperature using a cooling gas. Accordingly, hydrogen is prevented from bonding to the p-type impurity in the p-type compound semiconductor layer.
    • 形成p型化合物半导体层的方法包括将装载到反应室中的基板的温度升高到第一温度。 将III族元素的源气体,p型杂质的源气体和含氮气的源气体供给到反应室中以使p型化合物半导体层生长。 然后,停止供给III族元素的源气体和p型杂质的源气体,并将基板的温度降低到第二温度。 供给含氮氢气的源气体在第二温度下停止并排出,并且使用冷却气体将基板的温度降至室温。 因此,防止氢与p型化合物半导体层中的p型杂质结合。