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    • 9. 发明申请
    • Supporting bar for substrate cassette
    • 衬底盒支撑杆
    • US20060011507A1
    • 2006-01-19
    • US11138248
    • 2005-05-26
    • Daisuke UchidaShinichi TakemuraKenichi AoyagiYi-Kuang ChenToshiyuki Takahashi
    • Daisuke UchidaShinichi TakemuraKenichi AoyagiYi-Kuang ChenToshiyuki Takahashi
    • B65D85/00
    • H01L21/67343B65D85/48
    • A plate cassette support bar that suppresses the increase in weight of the plate or substrate cassette that increases in size and lessens substrate or plate cassette vibration at the time of loading/unloading the substrates or plates to improve workability. The substrate or plate cassette has the end support parts that support the ends of the substrates or plates stored on both the right and left side of the substrate loading opening and the support bars that are fixed at the opposite side of the substrate loading opening, that have free ends on the substrate loading opening side, that are allotted in one line or multiple lines in the vertical direction, and that support the substrates to be stored between the above-mentioned end support parts of the cassette, and which stores multiple substrates horizontally in multiple levels in the vertical direction, the above-mentioned support bars are formed by the carbon fiber reinforced composite material containing 30% or more of highly elastic carbon fibers having a tensile modulus of 490-950 GPa, and are formed preferably into the shape of a hollow pipe, or more preferably into the shape of a taper that the tip part side becomes narrower.
    • 一种板盒支撑杆,其抑制板或基板盒的重量的增加,其尺寸增大并且在装载/卸载基板或板时降低基板或板盒的振动,以提高可加工性。 基板或板盒具有端部支撑部分,其支撑存储在基板装载开口的右侧和左侧的基板或板的端部以及固定在基板装载开口的相对侧的支撑杆, 在基板装载开口侧具有自由端,其在垂直方向上被分配成一行或多行,并且支撑要存储在盒的上述端部支撑部分之间并且水平地存储多个基板的基板 上述支撑杆由含有30%以上的拉伸弹性模量为490〜950GPa的高弹性碳纤维的碳纤维增强复合材料形成,优选为形状 或者更优选为尖端部侧变窄的锥形。