会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 6. 发明授权
    • Ionic additives for extreme low dielectric constant chemical formulations
    • 用于极低介电常数化学配方的离子添加剂
    • US06896955B2
    • 2005-05-24
    • US10219164
    • 2002-08-13
    • Robert P. MandalAlexandros T. DemosTimothy WeidmanMichael P. NaultNikolaos BekiarisScott J. WeigelLee A. SenecalJames E. MacDougalHareesh Thridandam
    • Robert P. MandalAlexandros T. DemosTimothy WeidmanMichael P. NaultNikolaos BekiarisScott J. WeigelLee A. SenecalJames E. MacDougalHareesh Thridandam
    • B05D5/12B05D7/24C01B33/16C09D5/25C09D183/02H01L21/20H01L21/314H01L21/316H01L21/768H01L23/522B32B3/00
    • H01L21/02126C01B33/16H01L21/02203H01L21/02216H01L21/02282H01L21/31695Y10S438/96Y10T428/249953Y10T428/249969
    • A process for depositing porous silicon oxide-based films using a sol-gel approach utilizing a precursor solution formulation which includes a purified nonionic surfactant and an additive among other components, where the additive is either an ionic additive or an amine additive which forms an ionic ammonium type salt in the acidic precursor solution. Using this precursor solution formulation enables formation of a film having a dielectric constant less than 2.5, appropriate mechanical properties, and minimal levels of alkali metal impurities. In one embodiment, this is achieved by purifying the surfactant and adding ionic or amine additives such as tetraalkylammonium salts and amines to the stock precursor solution. In some embodiments, the ionic additive is a compound chosen from a group of cationic additives of the general composition [NR(CH3)3]+A−, where R is a hydrophobic ligand of chain length 1 to 24, including tetramethylammonium and cetyltrimethylammonium, and A− is an anion, which may be chosen from the group consisting essentially of formate, nitrate, oxalate, acetate, phosphate, carbonate, and hydroxide and combinations thereof. Tetramethylammonium salts, or more generally tetraalkylammonium salts, or tetraorganoammonium salts or organoamines in acidic media are added to surfactant templated porous oxide precursor formulations to increase the ionic content, replacing alkali ion impurities (sodium and potassium) removed during surfactant purification, but which are found to exhibit beneficial effects in promoting the formation of the resulting dielectric.
    • 一种使用溶胶 - 凝胶方法沉积多孔氧化硅基膜的方法,该方法使用前体溶液制剂,其包含纯化的非离子表面活性剂和其它组分中的添加剂,其中添加剂是形成离子的离子添加剂或胺添加剂 铵型盐在酸性前体溶液中。 使用这种前体溶液制剂可以形成介电常数小于2.5,适当的机械性能和最低水平的碱金属杂质的薄膜。 在一个实施方案中,这通过纯化表面活性剂并将离子或胺添加剂例如四烷基铵盐和胺添加到原料前体溶液中来实现。 在一些实施方案中,离子添加剂是选自一般组成的阳离子添加剂组合物[NR(CH 3)3) 其中R是链长1至24的疏水性配体,包括四甲基铵和十六烷基三甲基铵,并且A是一种阴离子,其可以选自下组: 基本上由甲酸盐,硝酸盐,草酸盐,乙酸盐,磷酸盐,碳酸盐和氢氧化物组成。 在表面活性剂模板化的多孔氧化物前体制剂中加入四甲基铵盐或更一般的四烷基铵盐或四官能铵盐或有机胺,以增加离子含量,代替在表面活性剂纯化过程中除去的碱离子杂质(钠和钾),但发现 以促进所形成的电介质的形成。