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    • 10. 发明申请
    • NON-CONFORMAL MASKS, SEMICONDUCTOR DEVICE STRUCTURES INCLUDING THE SAME, AND METHODS
    • 非一致性掩模,包括其的半导体器件结构和方法
    • US20100308438A1
    • 2010-12-09
    • US12477551
    • 2009-06-03
    • David H. Wells
    • David H. Wells
    • H01L21/027H01L23/58
    • H01L21/3083H01L21/0334H01L21/0337H01L21/3086H01L21/31144H01L21/76224
    • A method for fabricating semiconductor device structures includes forming a non-conformal mask over a surface of a substrate. Non-conformal mask material with a planar or substantially planar upper surface is formed on the surface of the substrate. The planarity or substantial planarity of the non-conformal material eliminates or substantially eliminates distortion in a “mask” formed thereover and, thus, eliminates or substantially eliminates distortion in any mask that is subsequently formed using the pattern of the mask. In some embodiments, mask material of the non-conformal mask does not extend into recesses in the upper surface of the substrate; instead it “bridges” the recesses. Semiconductor device structures that include non-conformal masks and semiconductor device structures that have been fabricated with non-conformal masks are also disclosed.
    • 一种制造半导体器件结构的方法包括在衬底的表面上形成非共形掩模。 在基板的表面上形成具有平面或基本平坦的上表面的非保形掩模材料。 非保形材料的平面度或实质平面度消除或基本上消除了在其上形成的“掩模”中的失真,并因此消除或基本上消除随后使用掩模图案形成的任何掩模中的畸变。 在一些实施例中,非保形掩模的掩模材料不延伸到衬底的上表面中的凹槽中; 而是“桥”了凹槽。 还公开了包括使用非保形掩模制造的非共形掩模和半导体器件结构的半导体器件结构。