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1. 发明申请

US20090323083A1 STAGE WITH DISPLACEMENT MAGNIFICATION MECHANISM FOR MEASURING 有权
标题翻译：具有位移放大机制的测量步骤
公开(公告)号：US20090323083A1
公开(公告)日：2009-12-31
申请号：US12373460
申请日：2006-12-12
申请人： Jung Woo Park , Deug Woo Lee , Soo Chang Choi
发明人： Jung Woo Park , Deug Woo Lee , Soo Chang Choi
IPC分类号： G01B11/14
CPC分类号： G01B11/024 , G01B11/26
摘要： The present invention relates to a stage with a displacement measuring means capable of measuring a displacement, and more particularly, to a stage provided with a displacement magnification means capable of magnifying a displacement so as to precisely measure a minute displacement on the order of nanometers. A stage according to an aspect of the present invention comprises a fixed base, a movable table, a first elastic support, a first actuator, a first displacement converting means and a first displacement measuring means. The movable table is installed to be movable with respect to the fixed base. The first elastic support supports the movable table with respect to the fixed base, and the first actuator generates a displacement of the movable table in one direction. The first displacement converting means is connected to the movable table and the fixed base so as to convert the unidirectional displacement of the movable table into a rotational displacement about a point thereof connected to the movable table. The first displacement measuring means measures the displacement converted by the first displacement converting means. The present invention provides a stage provided with a device capable of magnifying and measuring a displacement generated in a feeding table, thereby implementing a high measurement precision using a measurement device with a low precision.
摘要翻译：本发明涉及具有能够测量位移的位移测量装置的平台，更具体地说，涉及一种设置有能够放大位移的位移放大装置的台，以精确地测量大约数量级的微小位移。根据本发明的一个方面的平台包括固定基座，可动台，第一弹性支撑件，第一致动器，第一位移转换装置和第一位移测量装置。可移动台被安装成可相对于固定底座移动。第一弹性支撑件相对于固定基座支撑可移动台，并且第一致动器在一个方向上产生可移动台的位移。第一位移转换装置连接到可移动工作台和固定底座，以将可移动工作台的单向位移转换成围绕其连接到活动工作台的点的旋转位移。第一位移测量装置测量由第一位移转换装置转换的位移。本发明提供了一种设置有能够放大和测量在馈送台中产生的位移的装置的台，从而使用低精度的测量装置实现高测量精度。

2. 发明授权

US08089638B2 Stage with displacement magnification mechanism for measuring 有权
标题翻译：用于测量的位移放大机构的阶段
公开(公告)号：US08089638B2
公开(公告)日：2012-01-03
申请号：US12373460
申请日：2006-12-22
申请人： Deug Woo Lee , Soo Chang Choi , Jung Woo Park
发明人： Deug Woo Lee , Soo Chang Choi , Jung Woo Park
IPC分类号： G01B11/14
CPC分类号： G01B11/024 , G01B11/26
摘要： The present invention relates to a stage with a displacement measuring means capable of measuring a displacement, and more particularly, to a stage provided with a displacement magnification means capable of magnifying a displacement so as to precisely measure a minute displacement on the order of nanometers. A stage according to an aspect of the present invention comprises a fixed base, a movable table, a first elastic support, a first actuator, a first displacement converting means and a first displacement measuring means. The movable table is installed to be movable with respect to the fixed base. The first elastic support supports the movable table with respect to the fixed base, and the first actuator generates a displacement of the movable table in one direction. The first displacement converting means is connected to the movable table and the fixed base so as to convert the unidirectional displacement of the movable table into a rotational displacement about a point thereof connected to the movable table. The first displacement measuring means measures the displacement converted by the first displacement converting means. The present invention provides a stage provided with a device capable of magnifying and measuring a displacement generated in a feeding table, thereby implementing a high measurement precision using a measurement device with a low precision.
摘要翻译：本发明涉及具有能够测量位移的位移测量装置的平台，更具体地说，涉及一种设置有能够放大位移的位移放大装置的台，以精确地测量大约数量级的微小位移。根据本发明的一个方面的平台包括固定基座，可动台，第一弹性支撑件，第一致动器，第一位移转换装置和第一位移测量装置。可移动台被安装成可相对于固定底座移动。第一弹性支撑件相对于固定基座支撑可移动台，并且第一致动器在一个方向上产生可移动台的位移。第一位移转换装置连接到可移动工作台和固定底座，以将可移动工作台的单向位移转换成围绕其连接到活动工作台的点的旋转位移。第一位移测量装置测量由第一位移转换装置转换的位移。本发明提供了一种设置有能够放大和测量在馈送台中产生的位移的装置的台，从而使用低精度的测量装置实现高测量精度。

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