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    • 1. 发明授权
    • Stage with displacement magnification mechanism for measuring
    • 用于测量的位移放大机构的阶段
    • US08089638B2
    • 2012-01-03
    • US12373460
    • 2006-12-22
    • Deug Woo LeeSoo Chang ChoiJung Woo Park
    • Deug Woo LeeSoo Chang ChoiJung Woo Park
    • G01B11/14
    • G01B11/024G01B11/26
    • The present invention relates to a stage with a displacement measuring means capable of measuring a displacement, and more particularly, to a stage provided with a displacement magnification means capable of magnifying a displacement so as to precisely measure a minute displacement on the order of nanometers. A stage according to an aspect of the present invention comprises a fixed base, a movable table, a first elastic support, a first actuator, a first displacement converting means and a first displacement measuring means. The movable table is installed to be movable with respect to the fixed base. The first elastic support supports the movable table with respect to the fixed base, and the first actuator generates a displacement of the movable table in one direction. The first displacement converting means is connected to the movable table and the fixed base so as to convert the unidirectional displacement of the movable table into a rotational displacement about a point thereof connected to the movable table. The first displacement measuring means measures the displacement converted by the first displacement converting means. The present invention provides a stage provided with a device capable of magnifying and measuring a displacement generated in a feeding table, thereby implementing a high measurement precision using a measurement device with a low precision.
    • 本发明涉及具有能够测量位移的位移测量装置的平台,更具体地说,涉及一种设置有能够放大位移的位移放大装置的台,以精确地测量大约数量级的微小位移。 根据本发明的一个方面的平台包括固定基座,可动台,第一弹性支撑件,第一致动器,第一位移转换装置和第一位移测量装置。 可移动台被安装成可相对于固定底座移动。 第一弹性支撑件相对于固定基座支撑可移动台,并且第一致动器在一个方向上产生可移动台的位移。 第一位移转换装置连接到可移动工作台和固定底座,以将可移动工作台的单向位移转换成围绕其连接到活动工作台的点的旋转位移。 第一位移测量装置测量由第一位移转换装置转换的位移。 本发明提供了一种设置有能够放大和测量在馈送台中产生的位移的装置的台,从而使用低精度的测量装置实现高测量精度。
    • 2. 发明申请
    • STAGE WITH DISPLACEMENT MAGNIFICATION MECHANISM FOR MEASURING
    • 具有位移放大机制的测量步骤
    • US20090323083A1
    • 2009-12-31
    • US12373460
    • 2006-12-12
    • Jung Woo ParkDeug Woo LeeSoo Chang Choi
    • Jung Woo ParkDeug Woo LeeSoo Chang Choi
    • G01B11/14
    • G01B11/024G01B11/26
    • The present invention relates to a stage with a displacement measuring means capable of measuring a displacement, and more particularly, to a stage provided with a displacement magnification means capable of magnifying a displacement so as to precisely measure a minute displacement on the order of nanometers. A stage according to an aspect of the present invention comprises a fixed base, a movable table, a first elastic support, a first actuator, a first displacement converting means and a first displacement measuring means. The movable table is installed to be movable with respect to the fixed base. The first elastic support supports the movable table with respect to the fixed base, and the first actuator generates a displacement of the movable table in one direction. The first displacement converting means is connected to the movable table and the fixed base so as to convert the unidirectional displacement of the movable table into a rotational displacement about a point thereof connected to the movable table. The first displacement measuring means measures the displacement converted by the first displacement converting means. The present invention provides a stage provided with a device capable of magnifying and measuring a displacement generated in a feeding table, thereby implementing a high measurement precision using a measurement device with a low precision.
    • 本发明涉及具有能够测量位移的位移测量装置的平台,更具体地说,涉及一种设置有能够放大位移的位移放大装置的台,以精确地测量大约数量级的微小位移。 根据本发明的一个方面的平台包括固定基座,可动台,第一弹性支撑件,第一致动器,第一位移转换装置和第一位移测量装置。 可移动台被安装成可相对于固定底座移动。 第一弹性支撑件相对于固定基座支撑可移动台,并且第一致动器在一个方向上产生可移动台的位移。 第一位移转换装置连接到可移动工作台和固定底座,以将可移动工作台的单向位移转换成围绕其连接到活动工作台的点的旋转位移。 第一位移测量装置测量由第一位移转换装置转换的位移。 本发明提供了一种设置有能够放大和测量在馈送台中产生的位移的装置的台,从而使用低精度的测量装置实现高测量精度。
    • 9. 发明授权
    • Method for fabricating semiconductor device having vertical-type channel
    • 制造具有垂直型通道的半导体器件的方法
    • US07749844B2
    • 2010-07-06
    • US11479439
    • 2006-06-29
    • Jung Woo Park
    • Jung Woo Park
    • H01L21/336
    • H01L29/7827H01L27/10873
    • A semiconductor device includes an active region including a surface region and a first recess formed below the surface region, the active region extending along a first direction; a device isolation structure provided on an edge of the active region; a gate line traversing over the surface region of the active region along a second direction orthogonal to the first direction; a second recess formed in the device isolation structure to receive a given portion of the gate line into the second recess; a first junction region formed in the active region beneath the first recess and on a first side of the gate line; and a second junction region formed on a second side of the gate line and above the first junction region, wherein the first and second junction regions define a vertical-type channel that extends along lateral and vertical directions.
    • 半导体器件包括有源区,该有源区包括表面区域和形成在该表面区域下方的第一凹部,该有源区域沿第一方向延伸; 设置在所述有源区域的边缘上的器件隔离结构; 栅极线沿着与第一方向正交的第二方向横越有源区域的表面区域; 形成在所述器件隔离结构中以将栅极线的给定部分接收到第二凹部中的第二凹部; 形成在第一凹部下方的有源区域和栅极线的第一侧上的第一接合区域; 以及形成在所述栅极线的第二侧上并且在所述第一接合区域上方的第二接合区域,其中所述第一和第二接合区域限定沿着横向和垂直方向延伸的垂直型通道。
    • 10. 发明授权
    • Nauta operational transconductance amplifier
    • Nauta运算跨导放大器
    • US07616056B2
    • 2009-11-10
    • US11942935
    • 2007-11-20
    • Jung Woo ParkCheon Soo Kim
    • Jung Woo ParkCheon Soo Kim
    • H03F3/45
    • H03F3/45475H03F3/45183H03F2203/45138
    • Provided is an operational transconductance amplifier (OTA). An existing Nauta transconductor used to implement a high frequency Gm-C filter integrated circuit (IC) is analyzed by a new method and from a new perspective to remove extra components and divide roles of remaining inverters for more simple and efficient circuit structure. In an existing Nauta transconductor, a common mode signal from an input terminal is amplified and appears at an output terminal, while in the inventive Nauta transconductor the common mode signal from an input terminal does not appear at the output terminal and is effectively eliminated. These enhanced characteristics can be achieved with a smaller number of inverters than an existing Nauta transconductor. Frequency characteristics of the filter can be effectively enhanced by independently controlling the quality factor without affecting the transconductance value required for frequency characteristics of the filter.
    • 提供了一种运算跨导放大器(OTA)。 用于实现高频Gm-C滤波器集成电路(IC)的现有Nauta跨导体通过新的方法和从新的角度分析,以消除额外的部件,并将剩余逆变器的角色分为更简单和更有效的电路结构。 在现有的Nauta跨导器中,来自输入端的共模信号被放大并出现在输出端,而在本发明的Nauta跨导器中,来自输入端的共模信号不出现在输出端并被有效地消除。 这些增强特性可以用比现有的Nauta跨导体更少数量的逆变器来实现。 通过独立地控制质量因子而不影响过滤器的频率特性所需的跨导值,可以有效地提高滤波器的频率特性。