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1. 发明授权

US08228601B2 Scanning microscopy using inhomogeneous polarization 有权
标题翻译：扫描显微镜使用不均匀的极化
公开(公告)号：US08228601B2
公开(公告)日：2012-07-24
申请号：US12464761
申请日：2009-05-12
申请人： Doron Meshulach , Kobi Kan , Haim Feldman , Ido Dolev , Ori Sarfaty
发明人： Doron Meshulach , Kobi Kan , Haim Feldman , Ido Dolev , Ori Sarfaty
IPC分类号： G02B27/28
CPC分类号： G02B21/0092 , G02B21/0068
摘要： Apparatus for imaging a surface, including an acousto-optic (AO) system. The AO system includes an AO element having a radiation input surface and a radiation output surface. The element is configured to receive radio-frequency (RF) pulses and a radiation input at the radiation input surface and to generate traveling beams from the radiation output surface. The AO system also includes an inhomogeneous polarization generator, positioned relative to the AO element so that the AO system outputs traveling inhomogeneously polarized beams. The apparatus includes objective optics which are configured to focus the inhomogeneously polarized beams onto the surface so as to form respective traveling spots thereon; collection optics, which are configured to collect scattered radiation from the traveling spots and to focus the scattered radiation to form respective image spots; and a detector which is arranged to receive the respective image spots and to generate a signal in response thereto.
摘要翻译：用于对表面进行成像的装置，包括声光（AO）系统。 AO系统包括具有辐射输入表面和辐射输出表面的AO元件。该元件被配置为在辐射输入表面处接收射频（RF）脉冲和辐射输入并且产生来自辐射输出表面的行进光束。 AO系统还包括相对于AO元件定位的不均匀偏振发生器，使得AO系统输出行进的非均匀偏振光束。该装置包括被配置为将不均匀偏振光束聚焦到表面上以在其上形成相应的行进点的物镜光学元件; 收集光学器件，其被配置为从所述行进点收集散射的辐射并且聚焦所述散射的辐射以形成相应的图像斑点; 以及检测器，其被布置成接收相应的图像点并响应于此产生信号。

2. 发明授权

US07576348B2 One-dimensional phase contrast microscopy with a traveling lens generated by a step function change 有权
标题翻译：一维相位显微镜与通过阶跃函数变化产生的行走镜
公开(公告)号：US07576348B2
公开(公告)日：2009-08-18
申请号：US11853329
申请日：2007-09-11
申请人： Haim Feldman , Doron Meshulach , Eyal Angel
发明人： Haim Feldman , Doron Meshulach , Eyal Angel
IPC分类号： G01N21/88
CPC分类号： G01D5/38
摘要： A method for imaging a surface includes generating a traveling lens in an acousto-optic material and incorporating a traveling mask into a portion of the traveling lens so as to produce a composite traveling lens. The method further includes irradiating the composite traveling lens so as to produce a composite focused beam having a spatial variation across the composite focused beam. The composite focused beam is directed onto a region of the surface so as to generate radiation characteristic of the region from the region. The radiation is imaged onto a detector so as to generate a signal characteristic of the region, responsively to the spatial variation.
摘要翻译：一种用于对表面进行成像的方法包括在声光材料中生成行进透镜并将行进掩模结合到移动透镜的一部分中以产生复合行进透镜。该方法还包括照射复合移动透镜，以便产生具有横跨复合聚焦光束的空间变化的复合聚焦光束。复合聚焦光束被引导到表面的一个区域上，以便从该区域产生该区域的辐射特性。辐射被成像到检测器上，以响应于空间变化产生该区域的信号特征。

3. 发明授权

US07684048B2 Scanning microscopy 有权
标题翻译：扫描显微镜
公开(公告)号：US07684048B2
公开(公告)日：2010-03-23
申请号：US11559741
申请日：2006-11-14
申请人： Doron Meshulach , Haim Feldman
发明人： Doron Meshulach , Haim Feldman
IPC分类号： G01B11/02
CPC分类号： G01N21/47 , G01N21/21 , G01N21/95623 , G01N2021/4709 , G01N2021/4792
摘要： Apparatus for imaging a surface, including scanning optics, which are configured to scan and focus one or more traveling beams onto the surface so as to form one or more traveling spots thereon. The apparatus also includes collection optics, which are arranged to collect radiation scattered from the one or more traveling spots and to focus the radiation to form one or more image spots traveling along a line. The apparatus also has a detecting assembly, which consists of a detector which is configured to generate a signal in response to the one or more traveling image spots, and a detector entry port interposed between the collection optics and the detector, which is coincident with the line. The apparatus also includes phase and/or polarization altering elements for the traveling beams.
摘要翻译：用于对包括扫描光学元件在内的表面进行成像的装置，其被配置为将一个或多个行进光束扫描并聚焦到所述表面上，以便在其上形成一个或多个行进光点。该装置还包括收集光学器件，其被布置成收集从一个或多个行进点散射的辐射并且聚焦辐射以形成沿着一行行进的一个或多个图像斑点。该装置还具有检测组件，该检测组件由检测器构成，该检测器被配置为响应于一个或多个行进图像点产生信号，以及插入在收集光学器件和检测器之间的检测器入口，其与线。该装置还包括用于行进梁的相位和/或极化改变元件。

4. 发明申请

US20090284835A1 SCANNING MICROSCOPY USING INHOMOGENEOUS POLARIZATION 有权
标题翻译：扫描显微镜使用非均匀偏振
公开(公告)号：US20090284835A1
公开(公告)日：2009-11-19
申请号：US12464761
申请日：2009-05-12
申请人： Doron Meshulach , Kobi Kan , Haim Feldman , Ido Dolev , Ori Sarfaty
发明人： Doron Meshulach , Kobi Kan , Haim Feldman , Ido Dolev , Ori Sarfaty
IPC分类号： G02B27/28
CPC分类号： G02B21/0092 , G02B21/0068
摘要： Apparatus for imaging a surface, including an acousto-optic (AO) system. The AO system includes an AO element having a radiation input surface and a radiation output surface. The element is configured to receive radio-frequency (RF) pulses and a radiation input at the radiation input surface and to generate traveling beams from the radiation output surface. The AO system also includes an inhomogeneous polarization generator, positioned relative to the AO element so that the AO system outputs traveling inhomogeneously polarized beams. The apparatus includes objective optics which are configured to focus the inhomogeneously polarized beams onto the surface so as to form respective traveling spots thereon; collection optics, which are configured to collect scattered radiation from the traveling spots and to focus the scattered radiation to form respective image spots; and a detector which is arranged to receive the respective image spots and to generate a signal in response thereto.
摘要翻译：用于对表面进行成像的装置，包括声光（AO）系统。 AO系统包括具有辐射输入表面和辐射输出表面的AO元件。该元件被配置为在辐射输入表面处接收射频（RF）脉冲和辐射输入并且产生来自辐射输出表面的行进光束。 AO系统还包括相对于AO元件定位的不均匀偏振发生器，使得AO系统输出行进的非均匀偏振光束。该装置包括被配置为将不均匀偏振光束聚焦到表面上以在其上形成相应的行进点的物镜光学元件; 收集光学器件，其被配置为从所述行进点收集散射的辐射并且聚焦所述散射的辐射以形成相应的图像斑点; 以及检测器，其被布置成接收相应的图像点并响应于此产生信号。

5. 发明申请

US20080116362A1 ONE-DIMENSIONAL PHASE CONTRAST MICROSCOPY 有权
标题翻译：一维相对显微镜
公开(公告)号：US20080116362A1
公开(公告)日：2008-05-22
申请号：US11853329
申请日：2007-09-11
申请人： Haim Feldman , Doron Meshulach , Eyal Angel
发明人： Haim Feldman , Doron Meshulach , Eyal Angel
IPC分类号： G01D5/34
CPC分类号： G01D5/38
摘要： A method for imaging a surface includes generating a traveling lens in an acousto-optic material and incorporating a traveling mask into a portion of the traveling lens so as to produce a composite traveling lens. The method further includes irradiating the composite traveling lens so as to produce a composite focused beam having a spatial variation across the composite focused beam. The composite focused beam is directed onto a region of the surface so as to generate radiation characteristic of the region from the region. The radiation is imaged onto a detector so as to generate a signal characteristic of the region, responsively to the spatial variation.
摘要翻译：一种用于对表面进行成像的方法包括在声光材料中生成行进透镜并将行进掩模结合到移动透镜的一部分中以产生复合行进透镜。该方法还包括照射复合移动透镜，以便产生具有横跨复合聚焦光束的空间变化的复合聚焦光束。复合聚焦光束被引导到表面的一个区域上，以便从该区域产生该区域的辐射特性。辐射被成像到检测器上，以响应于空间变化产生该区域的信号特征。

6. 发明申请

US20070109546A1 Scanning Microscopy 有权
标题翻译：扫描显微镜
公开(公告)号：US20070109546A1
公开(公告)日：2007-05-17
申请号：US11559741
申请日：2006-11-14
申请人： Doron Meshulach , Haim Feldman
发明人： Doron Meshulach , Haim Feldman
IPC分类号： G01N21/55
CPC分类号： G01N21/47 , G01N21/21 , G01N21/95623 , G01N2021/4709 , G01N2021/4792
摘要： Apparatus for imaging a surface, including scanning optics, which are configured to scan and focus one or more traveling beams onto the surface so as to form one or more traveling spots thereon. The apparatus also includes collection optics, which are arranged to collect radiation scattered from the one or more traveling spots and to focus the radiation to form one or more image spots traveling along a line. The apparatus also has a detecting assembly, which consists of a detector which is configured to generate a signal in response to the one or more traveling image spots, and a detector entry port interposed between the collection optics and the detector, which is coincident with the line. The apparatus also includes phase and/or polarization altering elements for the traveling beams.
摘要翻译：用于对包括扫描光学元件在内的表面进行成像的装置，其被配置为将一个或多个行进光束扫描并聚焦到所述表面上，以便在其上形成一个或多个行进光点。该装置还包括收集光学器件，其被布置成收集从一个或多个行进点散射的辐射并且聚焦辐射以形成沿着一行行进的一个或多个图像斑点。该装置还具有检测组件，该检测组件由检测器构成，该检测器被配置为响应于一个或多个行进图像点产生信号，以及插入在收集光学器件和检测器之间的检测器入口，其与线。该装置还包括用于行进梁的相位和/或极化改变元件。

7. 发明申请

US20140299790A1 INSPECTION METHOD AND AN INSPECTION SYSTEM EXHIBITING SPECKLE REDUCTION CHARACTERISTICS 有权
标题翻译：检验方法和检验系统展示品种减少特性
公开(公告)号：US20140299790A1
公开(公告)日：2014-10-09
申请号：US14009869
申请日：2011-04-07
申请人： Amir Shoham , Haim Feldman , Doron Shoham
发明人： Amir Shoham , Haim Feldman , Doron Shoham
IPC分类号： G01N21/88
CPC分类号： G01N21/8806 , G01N21/33 , G01N2021/8822 , G01N2201/0697
摘要： A method and an inspection system that exhibiting speckle reduction characteristics includes a light source arranged to generate input light pulses, and diffuser-free speckle reduction optics that include a beam splitter, for splitting an input light pulse from the light source into multiple light pulses that are oriented at angles in relation to each other when exiting the beam splitter, and at least one optical element for directing the multiple light pulses to impinge on an inspected object at different angles.
摘要翻译：具有斑点减少特性的方法和检查系统包括布置成产生输入光脉冲的光源和包括分束器的无漫射器散斑光学器件，用于将来自光源的输入光脉冲分成多个光脉冲，在离开分束器时相对于彼此的角度定向，并且至少一个光学元件用于引导多个光脉冲以不同的角度撞击在被检查物体上。

8. 发明申请

US20100188658A1 HIGH RESOLUTION WAFER INSPECTION SYSTEM 失效
标题翻译：高分辨率波浪检测系统
公开(公告)号：US20100188658A1
公开(公告)日：2010-07-29
申请号：US12752995
申请日：2010-04-01
申请人： Dan Grossman , Moshe Langer , Roman Kris , Silviu Reinhorn , Ron Naftali , Haim Feldman
发明人： Dan Grossman , Moshe Langer , Roman Kris , Silviu Reinhorn , Ron Naftali , Haim Feldman
IPC分类号： G01N21/88 , G01N21/00
CPC分类号： G01N21/17 , G01N21/1717 , G01N21/9501 , G01N2021/1719
摘要： A method for inspecting a region, including irradiating the region via an optical system with a pump beam at a pump wavelength. A probe beam at a probe wavelength irradiates the region so as to generate returning probe beam radiation from the region. The beams are scanned across the region at a scan rate. A detector receives the returning probe radiation, and forms an image of the region that corresponds to a resolution better than pump and probe Abbe limits of the optical system. Roles of the pump and probe beams may be alternated, and a modulation frequency of the pump beam may be changed, to produce more information. Information extracted from the probe signal can also differentiate between different materials on the region
摘要翻译：一种用于检查区域的方法，包括通过具有泵浦波长的泵浦光束的光学系统照射该区域。在探测波长处的探测光束照射该区域，以产生从该区域返回的探测光束辐射。以扫描速率跨越该区域扫描光束。检测器接收返回的探针辐射，并且形成对应于分辨率的区域的图像优于光学系统的泵浦和探针阿贝限制。泵和探针光束的作用可以交替变化，并且可以改变泵浦光束的调制频率，以产生更多的信息。从探测信号中提取的信息也可以区分该区域上的不同材料

9. 发明申请

US20100097680A1 ILLUMINATION SYSTEM FOR OPTICAL INSPECTION 有权
标题翻译：光学检测用照明系统
公开(公告)号：US20100097680A1
公开(公告)日：2010-04-22
申请号：US12626592
申请日：2009-11-25
申请人： Ron Naftali , Avishay Guetta , Haim Feldman , Doron Shoham
发明人： Ron Naftali , Avishay Guetta , Haim Feldman , Doron Shoham
IPC分类号： G02B27/48 , G02B26/10
CPC分类号： G01N21/8806 , G01N21/47 , G01N21/4788 , G01N21/94 , G01N21/9501 , G01N21/95607 , G01N21/95623 , G01N2021/1772 , G01N2021/4711 , G01N2021/4735 , G01N2021/479 , G01N2021/4792 , G01N2021/8822 , G01N2021/8845 , G01N2201/0697
摘要： Apparatus for generating optical radiation includes a laser, which is configured to operate in multiple transverse modes simultaneously so as to generate an input beam, which is characterized by a first speckle contrast. The transverse modes of the input beam are optically mixed so as to generate an output beam have a second speckle contrast, which is substantially less than the first speckle contrast.
摘要翻译：用于产生光辐射的装置包括激光器，其被配置为同时以多个横向模式操作，以便产生以第一散斑对比为特征的输入光束。输入光束的横向模式被光学混合，以便产生输出光束具有基本上小于第一散斑对比度的第二散斑对比度。

10. 发明授权

US07620932B2 Simulation of aerial images 有权
标题翻译：空中图像的模拟
公开(公告)号：US07620932B2
公开(公告)日：2009-11-17
申请号：US11966630
申请日：2007-12-28
申请人： Haim Feldman
发明人： Haim Feldman
IPC分类号： G06F17/50
CPC分类号： G03F1/84 , G03F1/36 , G03F7/705 , G03F7/706
摘要： A method for generating a simulated aerial image of a mask projected by an optical system includes determining a coherence characteristic of the optical system. A coherent decomposition of the optical system is computed based on the coherence characteristic. The decomposition includes a series of expansion functions having angular and radial components that are expressed as explicit functions. The expansion functions are convolved with a transmission function of the mask in order to generate the simulated aerial image.
摘要翻译：用于产生由光学系统投影的掩模的模拟空间图像的方法包括确定光学系统的相干特性。基于相干特性计算光学系统的相干分解。分解包括一系列扩展函数，其具有表示为显式函数的角度和径向分量。扩展功能与掩模的传输功能一起卷积，以便产生模拟的航空图像。

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