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    • 5. 发明申请
    • MEMS PITON-TUBE CAPACITIVE FORCE SENSOR
    • MEMS PITON-TUBE电容式传感器
    • US20160216165A1
    • 2016-07-28
    • US15091259
    • 2016-04-05
    • Faez BA-TISRidha BEN-MRAD
    • Faez BA-TISRidha BEN-MRAD
    • G01L1/14
    • G01L1/146H02N1/006
    • A highly sensitive MEMS capacitive force sensor offering a wide force measurement range is disclosed. The force sensor utilizes a piston-tube electrode configuration that enables the use of a wide area of the electrodes. Therefore, a high sensitivity for force detection is achieved. The force sensor consists of a lower structure, an upper structure, and a force contact platform. The lower structure contains a plurality of fixed electrodes that are attached to the base and have a plurality of teeth (pistons). Those teeth form the fixed sensing electrodes of the force sensor. The upper structure comprises of a moving section that has a plurality of apertures. The moving section is attached to the substrate via restoring mechanical springs. A force contact platform is attached to the moving electrode and provides the foundation for the force to be applied. The force sensor is able to measure concentrated and distributed force (mechanical pressure).12
    • 公开了一种具有广泛力测量范围的高灵敏度MEMS电容力传感器。 力传感器利用能够使用广泛的电极的活塞管电极配置。 因此,实现了对力检测的高灵敏度。 力传感器由下部结构,上部结构和力接触平台构成。 下部结构包括多个固定电极,其附接到基座并具有多个齿(活塞)。 这些齿形成力传感器的固定感测电极。 上部结构包括具有多个孔的移动部分。 移动部分通过恢复机械弹簧连接到基板上。 力接触平台连接到移动电极,并为施加的力提供基础。 力传感器能够测量集中和分布的力(机械压力)。 12