专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明授权

US09948273B1 Temperature stable MEMS resonator 有权
公开(公告)号：US09948273B1
公开(公告)日：2018-04-17
申请号：US15387375
申请日：2016-12-21
申请人： SiTime Coporation
发明人： Paul M. Hagelin , Charles I. Grosjean
IPC分类号： H03B5/30 , H03H3/013 , H03H9/02 , H03H9/125 , H03H9/24 , H03H3/007 , H03H9/15
CPC分类号： H03H9/02448 , H01L41/22 , H01L41/253 , H02N1/00 , H03B5/30 , H03B5/32 , H03H3/0072 , H03H3/0073 , H03H3/0076 , H03H9/02244 , H03H9/02433 , H03H9/125 , H03H9/21 , H03H9/2405 , H03H9/2468 , H03H9/2484 , H03H2009/02251 , H03H2009/02283 , H03H2009/02291 , H03H2009/02299 , H03H2009/02322 , H03H2009/0233 , H03H2009/02496 , H03H2009/155 , Y10T29/42 , Y10T29/49002 , Y10T29/49005 , Y10T29/4902 , Y10T29/4908
摘要： A resonant member of a MEMS resonator oscillates in a mechanical resonance mode that produces non-uniform regional stresses such that a first level of mechanical stress in a first region of the resonant member is higher than a second level of mechanical stress in a second region of the resonant member. A plurality of openings within a surface of the resonant member are disposed more densely within the first region than the second region and at least partly filled with a compensating material that reduces temperature dependence of the resonant frequency corresponding to the mechanical resonance mode.

2. 发明申请

US20180006585A1 CAPACITIVE ACTUATOR MOTOR, CAPACITIVE ACTUATOR, AND CAPACITIVE ACTUATOR UNIT 审中-公开
公开(公告)号：US20180006585A1
公开(公告)日：2018-01-04
申请号：US15702357
申请日：2017-09-12
申请人： SUMITOMO HEAVY INDUSTRIES, LTD.
发明人： Shinichiro Tsukahara
IPC分类号： H02N2/04 , H02N1/00
CPC分类号： H02N2/043 , H02N1/00 , H02N1/006 , H02N2/02
摘要： A capacitive actuator motor according to an embodiment of the present invention includes a capacitive actuator having six actuator units and a motor output cam having a periodic shape portion. Each of the six actuator units includes a buckling displacement expansion mechanism configured to convert an output of a piezoelectric element and urge an output joint in a predetermined output direction and a preload adjustment spring configured to urge an output joint with a certain characteristic in a direction in which the periodic shape portion and the output joint come into contact with each other.

3. 发明授权

US09859819B2 MEMS structure and method of forming same 有权
公开(公告)号：US09859819B2
公开(公告)日：2018-01-02
申请号：US14745696
申请日：2015-06-22
申请人： Taiwan Semiconductor Manufacturing Company, Ltd.
发明人： Yi Heng Tsai , Chia-Hua Chu , Kuei-Sung Chang
IPC分类号： H02N1/00 , G01P15/125 , B81B3/00 , G01P15/08
CPC分类号： H02N1/006 , B81B3/0005 , B81B3/0008 , B81B3/001 , B81B2201/0235 , G01P15/125 , G01P2015/0871 , H02N1/00 , Y10T29/49002
摘要： A microelectromechanical system (MEMS) device includes a substrate and a movable element at least partially suspended above the substrate and having at least one degree of freedom. The MEMS device further includes a protrusion extending from the substrate and configured to contact the movable element when the movable element moves in the at least one degree of freedom, wherein the protrusion comprises a surface having a water contact angle of higher than about 15° measured in air.

4. 发明授权

US09602026B2 Temperature compensation for MEMS devices 有权
公开(公告)号：US09602026B2
公开(公告)日：2017-03-21
申请号：US14029927
申请日：2013-09-18
申请人： Silicon Laboratories Inc.
发明人： Emmanuel P. Quevy , Daniel N. Koury, Jr.
IPC分类号： H02N1/00 , H03B5/30 , H03L1/02 , H03H3/013 , H03H9/02 , B81B3/00 , H03L1/04 , H03H7/00 , H03H9/24
CPC分类号： H02N1/00 , B81B3/0081 , H03B5/30 , H03H3/013 , H03H9/02259 , H03H2007/006 , H03H2009/02291 , H03H2009/02385 , H03H2009/0248 , H03H2009/2442 , H03L1/02 , H03L1/04 , Y10T29/49005 , Y10T29/49117
摘要： A microelectromechanical system (MEMS) device includes a temperature compensating structure including a first beam suspended from a substrate and a second beam suspended from the substrate. The first beam is formed from a first material having a first Young's modulus temperature coefficient. The second beam is formed from a second material having a second Young's modulus temperature coefficient. The body may include a routing spring suspended from the substrate. The routing spring may be coupled to the first beam and the second beam. The routing spring may be formed from the second material. The first beam and the second beam may have lower spring compliance than the routing spring. The MEMS device may be a resonator and the temperature compensating structure may have dimensions and a location such that the temperature compensation structure modifies a temperature coefficient of frequency of the resonator independent of a mode shape of the resonator.

5. 发明授权

US09548720B1 Temperature stable MEMS resonator 有权
标题翻译：温度稳定的MEMS谐振器
公开(公告)号：US09548720B1
公开(公告)日：2017-01-17
申请号：US14863337
申请日：2015-09-23
申请人： SiTime Corporation
发明人： Paul M. Hagelin , Charles I. Grosjean
IPC分类号： H01L41/253 , H03B5/30 , H03H9/02 , H03H9/24 , H03H3/007 , H03H9/21 , H01L41/22 , H03H9/15
CPC分类号： H03H9/02448 , H01L41/22 , H01L41/253 , H02N1/00 , H03B5/30 , H03B5/32 , H03H3/0072 , H03H3/0073 , H03H3/0076 , H03H9/02244 , H03H9/02433 , H03H9/125 , H03H9/21 , H03H9/2405 , H03H9/2468 , H03H9/2484 , H03H2009/02251 , H03H2009/02283 , H03H2009/02291 , H03H2009/02299 , H03H2009/02322 , H03H2009/0233 , H03H2009/02496 , H03H2009/155 , Y10T29/42 , Y10T29/49002 , Y10T29/49005 , Y10T29/4902 , Y10T29/4908
摘要： A resonant member of a MEMS resonator oscillates in a mechanical resonance mode that produces non-uniform regional stresses such that a first level of mechanical stress in a first region of the resonant member is higher than a second level of mechanical stress in a second region of the resonant member. A plurality of openings within a surface of the resonant member are disposed more densely within the first region than the second region and at least partly filled with a compensating material that reduces temperature dependence of the resonant frequency corresponding to the mechanical resonance mode.
摘要翻译： MEMS谐振器谐振元件以机械谐振模式振荡，产生不均匀的区域应力，使得谐振元件的第一区域中的第一级机械应力高于第二区域中的机械应力的第二水平共振构件。谐振元件的表面内的多个开口比第二区域更密集地设置在第一区域内，并且至少部分地填充有减少对应于机械谐振模式的谐振频率的温度依赖性的补偿材料。

6. 发明授权

US09444404B2 MEMS device front-end charge amplifier 有权
标题翻译： MEMS器件前端电荷放大器
公开(公告)号：US09444404B2
公开(公告)日：2016-09-13
申请号：US13857349
申请日：2013-04-05
申请人： Fairchild Semiconductor Corporation
发明人： Ion Opris , Hai Tao , Shungneng Lee
IPC分类号： H03F1/00 , H03F1/34 , H03F3/45 , H03F3/70 , G01C19/56 , H02N1/00 , G01C19/5776
CPC分类号： H03F1/00 , G01C19/5776 , G01P9/04 , H02N1/00 , H03F1/34 , H03F3/45475 , H03F3/70 , H03F2200/294
摘要： This document discusses, among other things, apparatus and methods for a front-end charge amplifier. In certain examples, a front-end charge amplifier for a microelectromechanical system (MEMS) device can include a charge amplifier configured to couple to the MEMS device and to provide sense information of a proof mass of the MEMS device, a feedback circuit configured to receive the sense information and to provide feedback to an input of the charge amplifier, and wherein the charge amplifier includes a transfer function having a first pole at a first frequency, a second pole at a second frequency, and one zero at a third frequency.
摘要翻译：本文件尤其讨论了前端电荷放大器的装置和方法。在某些示例中，用于微机电系统（MEMS）器件的前端电荷放大器可以包括配置成耦合到MEMS器件并且提供MEMS器件的校验质量的感测信息的电荷放大器，被配置为接收所述感测信息并且向所述电荷放大器的输入端提供反馈，并且其中所述电荷放大器包括传递函数，所述传递函数具有在第一频率具有第一极点，在第二频率具有第二极点，在第三频率处具有一个零点的传递函数。

7. 发明授权

US09148073B1 Temperature stable MEMS resonator 有权
标题翻译：温度稳定的MEMS谐振器
公开(公告)号：US09148073B1
公开(公告)日：2015-09-29
申请号：US14191939
申请日：2014-02-27
申请人： SiTime Corporation
发明人： Paul M. Hagelin , Charles I. Grosjean
IPC分类号： H01L41/253 , H03B5/32 , H03H9/02 , H02N1/00 , H03H9/24 , H03H9/15
CPC分类号： H03H9/02448 , H01L41/22 , H01L41/253 , H02N1/00 , H03B5/30 , H03B5/32 , H03H3/0072 , H03H3/0073 , H03H3/0076 , H03H9/02244 , H03H9/02433 , H03H9/125 , H03H9/21 , H03H9/2405 , H03H9/2468 , H03H9/2484 , H03H2009/02251 , H03H2009/02283 , H03H2009/02291 , H03H2009/02299 , H03H2009/02322 , H03H2009/0233 , H03H2009/02496 , H03H2009/155 , Y10T29/42 , Y10T29/49002 , Y10T29/49005 , Y10T29/4902 , Y10T29/4908
摘要： In a microelectromechanical system (MEMS) resonator having a reduced magnitude of thermal coefficient of frequency (TCF), a resonant member has first and second surfaces and an opening in the first surface that extends toward the second surface. A compensating material is disposed within the opening and characterized by a temperature coefficient of Young's Modulus (TCE) having a sign opposite that of a TCE of the resonant member.
摘要翻译：在具有减小的频率热系数（TCF）的微机电系统（MEMS）谐振器中，共振构件具有第一和第二表面以及在第一表面中朝向第二表面延伸的开口。补偿材料设置在开口内，其特征在于具有与共振构件的TCE相反的符号的杨氏模量（TCE）的温度系数。

8. 发明授权

US09035533B2 Paste and polymer transducer including coating film formed from same as electrolyte film or electrode films 有权
标题翻译：浆料和聚合物换能器，包括与电解质膜或电极膜形成的涂膜
公开(公告)号：US09035533B2
公开(公告)日：2015-05-19
申请号：US13825727
申请日：2011-09-21
申请人： Toshinori Kato , Katsuei Takahashi , Takashi Yamashita
发明人： Toshinori Kato , Katsuei Takahashi , Takashi Yamashita
IPC分类号： H01G9/025 , C09D5/24 , C09D7/00 , C09D7/12 , H02N1/00 , H01B1/12 , H01B1/22 , H01B1/24 , C08F8/36 , C09J153/02
CPC分类号： H01G9/025 , C08F8/36 , C09D5/24 , C09D7/20 , C09D7/69 , C09D7/70 , C09J153/025 , H01B1/122 , H01B1/22 , H01B1/24 , H02N1/00 , Y10S310/80
摘要： Paste which is prepared by any solid concentration and is excellent in terms of handleability, applicability, and storage stability; an electrolyte film or electrode film which is an even and highly flexible coating film formed in a desired thickness from the paste through a few repetitions of an application/drying step; and a polymer transducer which can be industrially and economically produced and shows excellent performance. The paste comprises: a solid polyelectrolyte (A) consisting of a block copolymer containing; a polymer block (a-1) which is represented by chemical formula (1) and a polymer block (a-2) which has substantially no ionic group and is rubbery at room temperature; an organic solvent (B) having a boiling point at 150° C. or higher; and non-dissociable particles (C) which are insoluble in the organic solvent (B) and have a major-axis length of 1-100 μm and an aspect ratio of 5 or less. The polymer transducer comprises an electrolyte film and a pair of electrode films between which the electrolyte film is sandwiched, wherein the electrolyte film or the pair of electrode films has been formed by drying and solidifying the paste into a film shape.
摘要翻译：通过任何固体浓度制备并且在可操作性，适用性和储存稳定性方面优异的浆料; 电解质膜或电极膜，其是通过几次重复的施加/干燥步骤，从浆料形成具有所需厚度的均匀且高度柔性的涂膜; 以及可在工业上和经济地制造并显示出优异性能的聚合物换能器。该糊状物包括：由嵌段共聚物组成的固体聚电解质（A）由化学式（1）表示的聚合物嵌段（a-1）和在室温下基本上不具有离子性基团且为橡胶状的聚合物嵌段（a-2）沸点在150℃以上的有机溶剂（B）和不溶解的有机溶剂（B）中的长度比为1〜100μm，长径比为5以下的非离解性粒子（C）。聚合物换能器包括电解质膜和一对电极膜，在该对电极膜之间夹有电解质膜，其中电解质膜或一对电极膜通过干燥并固化成胶片形成。

9. 发明申请

US20150091411A1 METHOD OF MANUFACTURING A DEVICE WITH A CAVITY 有权
标题翻译：用CAVITY制造器件的方法
公开(公告)号：US20150091411A1
公开(公告)日：2015-04-02
申请号：US14562859
申请日：2014-12-08
申请人： Taiwan Semiconductor Manufacturing Company, Ltd.
发明人： Greja Johanna Adriana Maria Verheijden , Roel Daamen , Gerhard Koops
IPC分类号： H02N1/00 , H01L21/768
CPC分类号： H02N1/00 , B81C1/00476 , H01L21/02 , H01L21/02126 , H01L21/31116 , H01L21/50 , H01L21/7688 , H01L29/84
摘要： A micro-device includes a substrate with a cavity. The cavity is covered with a porous layer that is permeable to vapor hydrofluoric acid (HF) etchant. The micro-device comprises a Microelectromechanical Systems (MEMS) device with a component that is moveable in operational use of the MEMS device. The component is arranged within the cavity.
摘要翻译：微器件包括具有空腔的衬底。空腔被可渗透蒸气氢氟酸（HF）蚀刻剂的多孔层覆盖。微型器件包括具有可在MEMS器件的操作使用中移动的部件的微机电系统（MEMS）器件。部件布置在腔内。

10. 发明申请

US20150076930A1 LINEAR SOLENOID AND MANUFACTURING METHOD OF THE SAME 有权
标题翻译：线性电磁阀及其制造方法
公开(公告)号：US20150076930A1
公开(公告)日：2015-03-19
申请号：US14486247
申请日：2014-09-15
申请人： DENSO CORPORATION
发明人： Jiro KONDO
IPC分类号： H02K41/035 , B29C45/14
CPC分类号： H02K41/035 , B29C45/14065 , B29C45/14467 , B29C45/14491 , B29C2045/14131 , B29K2101/00 , B29K2995/0008 , B29L2031/34 , H01F7/1607 , H01F2007/086 , H02K2213/12 , H02N1/00
摘要： An inner diameter of a third stator core is greater than an inner diameter of a second stator core. When a first stator core, the second stator core, and the third stator core are placed in an inner periphery of a coil, a jig is inserted from an inner-periphery opening of a first end side of the third stator core into the third stator core to directly position the first stator core, the second stator core, and the third stator core in a radial direction. Therefore, a side force generated by an axis deviation between the first stator core, the second stator core, and the third stator core can be reduced.
摘要翻译：第三定子铁心的内径大于第二定子铁芯的内径。当第一定子铁心，第二定子铁心和第三定子铁芯放置在线圈的内周中时，夹具从第三定子铁芯的第一端侧的内周开口插入第三定子在第一定子铁芯，第二定子铁芯和第三定子铁心的径向方向上直接定位。因此，可以减小由第一定子铁芯，第二定子铁心和第三定子铁心之间的轴线偏离产生的侧向力。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式