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    • 4. 发明授权
    • Nonvolative memory with filament
    • 非线性记忆与细丝
    • US09082964B2
    • 2015-07-14
    • US14141478
    • 2013-12-27
    • GLOBALFOUNDRIES Singapore Pte. Ltd.
    • Yang HongYong Wee Francis PohTze Ho Simon Chan
    • H01L47/00H01L45/00H01L27/24
    • H01L45/1226H01L27/2436H01L45/04H01L45/06H01L45/12H01L45/1233H01L45/126H01L45/144H01L45/146H01L45/1608H01L45/1675H01L45/1691
    • An embodiment, relates to a phase changeable memory cell. The phase changeable memory cell is formed with an ultra small contact area formed by filament conductive path. This contact area between a heating electrode and phase changeable material layer is determined by the forming of filament path, which is conductive and much smaller in cross-sectional area than the minimum area that can be achieved by lithography. This leads to high heating efficiency and ultra-low programming current. As the disclosed structure has no requirement on endurance for the formed filament and use phase changeable material rather than filament-forming material to provide high on/off resistance ratio, drawbacks of filament-forming material on low endurance and low sensing margin are avoided in the proposed cell structure. Therefore, by using ReRAM-related filament-forming materials to get sub-litho-dimension conductive path as heating electrode and using high on/off ratio phase changeable material as the storage media, it is possible to reduce the power consumption of phase changeable memory dramatically without the drawbacks of filament-forming materials that are shown in ReRAM.
    • 实施例涉及可相变存储单元。 相变存储单元形成有由细丝导电路径形成的超小接触面积。 加热电极和相变材料层之间的该接触区域是通过形成导电的细丝线路的形成而确定的,并且比通过光刻可以获得的最小面积小得多的横截面面积。 这导致高的加热效率和超低的编程电流。 由于所公开的结构对成形的长丝的耐久性没有要求,并且使用相变材料而不是长丝形成材料来提供高的开/关电阻比,所以在低耐久性和低感测裕度的长丝形成材料的缺点在 提出细胞结构。 因此,通过使用与ReRAM相关的成丝材料来获得作为加热电极的亚光刻尺寸导电路径并使用高开/关比相变材料作为存储介质,可以降低相变存储器的功耗 显着地没有ReRAM所示的成丝材料的缺点。
    • 6. 发明授权
    • Nonvolative memory
    • 非积极记忆
    • US09076962B2
    • 2015-07-07
    • US14162721
    • 2014-01-23
    • GLOBALFOUNDRIES Singapore Pte. Ltd.
    • Yang HongYong Wee Francis PohTze Ho Simon Chan
    • H01L45/00H01L27/24
    • H01L45/1226H01L27/2436H01L45/04H01L45/06H01L45/12H01L45/126H01L45/144H01L45/146H01L45/1608H01L45/1691
    • A phase changeable memory cell is disclosed. In an embodiment of the invention, a phase changeable memory cell is formed with an ultra-small contact area to reduce the programming current. This contact area between heater electrode and phase changeable material is limited by the thickness of thin films rather than lithographic critical dimension in one dimension. As a result, the contact area is much less than the square of lithographic critical dimension for almost every technology node, which is helps in reducing current. To further reduce the current and improve the heating efficiency, heater electrode is horizontally put with its length being tunable so as to minimize the heat loss flowing through the heater to the terminal that connects to the front end switch device. In addition, above and below the heater layer, low-thermal-conductivity material (LTCM) is used to minimize heat dissipation. This results in reduced power consumption of the phase changeable memory cell with improved reliability.
    • 公开了一种相变存储器单元。 在本发明的一个实施例中,形成具有超小接触面积的相变存储单元以减少编程电流。 加热器电极和相变材料之间的接触面积受到薄膜厚度的限制,而不是在一个维度上的光刻临界尺寸。 因此,对于几乎每个技术节点,接触面积远小于光刻关键尺寸的平方,这有助于减少电流。 为了进一步降低电流并提高加热效率,加热器电极被水平放置,其长度是可调的,以便使流过加热器的热损失最小化到连接到前端开关装置的端子。 此外,在加热器层的上方和下方,使用低热导率材料(LTCM)来最小化散热。 这导致相位可变的存储单元的功率消耗降低了可靠性。