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1. 发明授权

US07723706B2 Horizontal and vertical beam angle measurement technique 有权
标题翻译：水平和垂直光束角度测量技术
公开(公告)号：US07723706B2
公开(公告)日：2010-05-25
申请号：US12142553
申请日：2008-06-19
申请人： George Michael Gammel , Peter Kellerman
发明人： George Michael Gammel , Peter Kellerman
IPC分类号： H01J37/317 , H01J37/244
CPC分类号： H01L21/26513 , H01J37/244 , H01J37/3171 , H01J2237/2446 , H01J2237/2449 , H01J2237/24507 , H01J2237/24528
摘要： A system and method of quickly determining the parameters of an ion beam are disclosed. An ion beam, having a width and height dimension, is made up of a number of individual beamlets. By using a plurality of detectors, deployed over the entire beam, it is possible to quickly determine the mean angle of the beam at various locations. This information can then be used to adjust the beamline components. The detector allows a small portion of the beam to enter through a narrow slit. Varying voltages are applied to a set of electrostatic deflection plates, which enable rapid determination of the incoming beam angle. By positioning a plurality of these detectors along one or both dimensions of an ion beam, a profile of the beam can be quickly generated. This profile can then be used to adjust the various beam line components so as to improve the spread of the ion beam. This adjustment can either be made manually, or via an automated controller.
摘要翻译：公开了一种快速确定离子束参数的系统和方法。具有宽度和高度尺寸的离子束由多个单独的子束组成。通过使用多个检测器，部署在整个波束上，可以快速地确定波束在各个位置处的平均角度。然后可以使用该信息来调整光束线组件。检测器允许光束的一小部分通过狭窄的狭缝进入。不同的电压被施加到一组静电偏转板，这使得能够快速确定入射光束的角度。通过沿着离子束的一个或两个尺寸定位多个这些检测器，可以快速地产生光束的轮廓。然后，该轮廓可用于调整各种束线分量，以便改善离子束的扩散。此调整可以手动进行，也可以通过自动控制器进行。

2. 发明申请

US20090314959A1 HORIZONTAL AND VERTICAL BEAM ANGLE MEASUREMENT TECHNIQUE 有权
标题翻译：水平和垂直波束角度测量技术
公开(公告)号：US20090314959A1
公开(公告)日：2009-12-24
申请号：US12142553
申请日：2008-06-19
申请人： George Michael Gammel , Peter Kellerman
发明人： George Michael Gammel , Peter Kellerman
IPC分类号： A61N5/00
CPC分类号： H01L21/26513 , H01J37/244 , H01J37/3171 , H01J2237/2446 , H01J2237/2449 , H01J2237/24507 , H01J2237/24528
摘要： A system and method of quickly determining the parameters of an ion beam are disclosed. An ion beam, having a width and height dimension, is made up of a number of individual beamlets. By using a plurality of detectors, deployed over the entire beam, it is possible to quickly determine the mean angle of the beam at various locations. This information can then be used to adjust the beamline components. The detector allows a small portion of the beam to enter through a narrow slit. Varying voltages are applied to a set of electrostatic deflection plates, which enable rapid determination of the incoming beam angle. By positioning a plurality of these detectors along one or both dimensions of an ion beam, a profile of the beam can be quickly generated. This profile can then be used to adjust the various beam line components so as to improve the spread of the ion beam. This adjustment can either be made manually, or via an automated controller.
摘要翻译：公开了一种快速确定离子束参数的系统和方法。具有宽度和高度尺寸的离子束由多个单独的子束组成。通过使用多个检测器，部署在整个波束上，可以快速地确定波束在各个位置处的平均角度。然后可以使用该信息来调整光束线组件。检测器允许光束的一小部分通过狭窄的狭缝进入。不同的电压被施加到一组静电偏转板，这使得能够快速确定入射光束的角度。通过沿着离子束的一个或两个尺寸定位多个这些检测器，可以快速地产生光束的轮廓。然后，该轮廓可用于调整各种束线分量，以便改善离子束的扩散。此调整可以手动进行，也可以通过自动控制器进行。

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