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1. 发明授权

US09837779B2 Laser apparatus and laser apparatus manufacturing method 有权
公开(公告)号：US09837779B2
公开(公告)日：2017-12-05
申请号：US14455719
申请日：2014-08-08
申请人： GIGAPHOTON INC.
发明人： Yasufumi Kawasuji , Hideo Hoshino
IPC分类号： H01S3/02 , F16B5/02 , F16B7/18 , F16B41/00 , G03F7/20 , H05G2/00 , H01S3/23
CPC分类号： H01S3/02 , F16B5/02 , F16B7/18 , F16B41/002 , G03F7/70008 , G03F7/70025 , G03F7/70833 , G03F7/70975 , H01S3/2316 , H05G2/005 , H05G2/008
摘要： A laser apparatus may include, a first frame and a second frame, a sleeve through-hole provided in the second frame, a sleeve insertion hole provided in the first frame, a bolt, a positioning sleeve that is formed in an approximately cylindrical shape into which the bolt can be inserted and that positions the first frame and the second frame by passing through the sleeve through-hole and being inserted into the sleeve insertion hole, a nut that is provided in the first frame and into which the bolt is screwed, and a fall prevention unit that is provided in the second frame and that prevents the bolt and the positioning sleeve from falling.

2. 发明申请

US20130202003A1 WAVELENGTH CONVERTER, WAVELENGTH CONVERTING DEVICE, SOLID STATE LASER DEVICE, AND LASER SYSTEM 有权
标题翻译：波长转换器，波长转换器件，固态激光器件和激光系统
公开(公告)号：US20130202003A1
公开(公告)日：2013-08-08
申请号：US13710658
申请日：2012-12-11
申请人： Gigaphoton Inc.
发明人： Kouji KAKIZAKI , Takashi Onose , Hideo Hoshino
IPC分类号： G02F1/35 , H01S3/10
CPC分类号： G02F1/353 , G02F1/3544 , G02F1/37 , G02F2001/3503 , H01S3/0092 , H01S3/10007 , H01S3/1625 , H01S3/2251 , H01S3/2333 , H01S3/2375
摘要： A wavelength converter may include a non-linear optical crystal, and an optical member bonded to a region of a contact surface of the non-linear optical crystal, located a predetermined distance or more on an inner side from an outer periphery of the contact surface. The wavelength converter may receive laser light and stably output light having a wavelength different from that of the laser light.
摘要翻译：波长转换器可以包括非线性光学晶体，以及结合到非线性光学晶体的接触表面的区域中的光学部件，其位于距接触表面的外周的内侧一定距离以上。波长转换器可以接收激光并稳定地输出具有与激光波长不同的波长的光。

3. 发明授权

US08804902B2 Collector mirror exchanging apparatus and method for extreme ultraviolet light source apparatus 有权
标题翻译：用于极紫外光源装置的集光镜交换装置和方法
公开(公告)号：US08804902B2
公开(公告)日：2014-08-12
申请号：US13846894
申请日：2013-03-18
申请人： Gigaphoton, Inc.
发明人： Hiroshi Someya , Tamotsu Abe , Takashi Suganuma , Hideo Hoshino , Akira Sumitani
IPC分类号： G21K1/06 , G03F1/00 , G02B15/14 , G21K1/10 , G03F7/20 , B82Y10/00 , G03F1/22 , G02B13/14 , G02B15/173
CPC分类号： G21K1/06 , B82Y10/00 , G02B7/18 , G02B7/183 , G02B13/14 , G02B15/14 , G02B15/173 , G03F1/146 , G03F1/22 , G03F7/70175 , G03F7/702 , G03F7/70975 , G21K1/10 , G21K2201/067 , H05G2/001 , Y10T29/49895 , Y10T29/53087 , Y10T29/53539
摘要： A collector mirror exchanging apparatus capable of safely and easily exchanging a collector mirror for collecting extreme ultra violet light emitted from plasma generated within a chamber of an extreme ultra violet light source apparatus. The collector mirror exchanging apparatus includes: a supporting base for supporting a collector mirror or a collector mirror structure; and a guiding rail disposed on the supporting base and regulating a moving direction of the collector mirror or the collector mirror structure; wherein at least the collector mirror is taken out of the chamber by moving the collector mirror or the collector mirror structure along the guiding rail on the supporting base.
摘要翻译：一种集电镜交换装置，能够安全且容易地交换用于收集从极紫外光源装置的室内产生的等离子体发出的极紫外光的集光镜。集电镜更换装置包括：支撑集电镜或收集镜结构的支撑基座; 以及导轨，其设置在所述支撑基座上并且调节所述集光镜或所述集光镜结构的移动方向; 其特征在于，通过使所述集光镜或所述集光镜结构沿着所述支撑基座上的导轨移动，至少将所述集光镜从所述室取出。

4. 发明授权

US08698114B2 Extreme ultraviolet light source device, laser light source device for extreme ultraviolet light source, and method of adjusting laser light source device for extreme ultraviolet light source device 有权
标题翻译：极紫外光源装置，极紫外光源用激光光源装置及极紫外光源装置的激光光源装置调整方法
公开(公告)号：US08698114B2
公开(公告)日：2014-04-15
申请号：US13759970
申请日：2013-02-05
申请人： Gigaphoton Inc.
发明人： Masato Moriya , Hideo Hoshino , Hakaru Mizoguchi , Osamu Wakabayashi
IPC分类号： G21K5/00
CPC分类号： H01S3/10 , H01S3/005 , H01S3/0064 , H01S3/034 , H01S3/1061 , H01S3/1307 , H01S3/136 , H01S3/2232 , H01S3/2316 , H05G2/003 , H05G2/005 , H05G2/008
摘要： An EUV light source device properly compensates the wave front of laser beam which is changed by heat. A wave front compensator and a sensor are provided in an amplification system which amplifies laser beam. The sensor detects and outputs changes in the angle (direction) of laser beam and the curvature of the wave front thereof. A wave front compensation controller outputs a signal to the wave front compensator based on the measurement results from the sensor. The wave front compensator corrects the wave front of the laser beam to a predetermined wave front according to an instruction from the wave front compensation controller.
摘要翻译： EUV光源装置适当地补偿由热量改变的激光束的波前。在放大激光束的放大系统中提供波前补偿器和传感器。传感器检测并输出激光束的角度（方向）和其波前的曲率的变化。波前补偿控制器根据传感器的测量结果向波前补偿器输出信号。波前补偿器根据波前补偿控制器的指令将激光束的波前校正到预定的波前。

5. 发明授权

US10122145B2 Laser apparatus and extreme ultraviolet light generation system 有权
公开(公告)号：US10122145B2
公开(公告)日：2018-11-06
申请号：US15651253
申请日：2017-07-17
申请人： GIGAPHOTON INC.
发明人： Yoshiaki Kurosawa , Hideo Hoshino
IPC分类号： H01S3/10 , H01S3/00 , H01S3/034 , H01S3/08 , H01S3/095 , H01S3/23 , H05G2/00 , H01S3/097
摘要： A laser apparatus may include a master oscillator, a plurality of amplifiers, a photodetector device configured to detect a light beam traveling back along a laser beam path, and a controller. The photodetector device may include a first photodetector configured to detect energy of a light beam traveling back along the laser beam path and a second photodetector configured to detect power of the light beam traveling back along the laser beam path. The controller may be configured to determine that a return beam is generated when the intensity of the energy detection signal exceeds a first threshold. The controller may be configured to determine that a self-oscillation beam is generated when the intensity of the power detection signal exceeds a second threshold.

6. 发明授权

US10141186B2 Target image-capture device, extreme-ultraviolet-light generation device, and extreme-ultraviolet-light generation system 有权
公开(公告)号：US10141186B2
公开(公告)日：2018-11-27
申请号：US15671691
申请日：2017-08-08
申请人： Gigaphoton Inc.
发明人： Hirokazu Hosoda , Takayuki Yabu , Hideo Hoshino
IPC分类号： G03B27/52 , H01L21/027 , G03F7/20 , H05G2/00
摘要： A target image-capture device may be configured to capture an image of a target that is made into plasma when irradiated with laser light and generates extreme-ultraviolet-light. The target image-capture device may include a droplet detector configured to detect passage of a droplet output as the target, and output a detection signal, an illumination light source, an image capturing element, a shutter device, and a controller configured to output, to the image capturing element, an exposure signal allowing the image capturing element to perform image capturing, and output, to the shutter device, a shutter open/close signal allowing a shutter to perform an open and close operation upon input of the detection signal. The controller may output the shutter open/close signal to the shutter device to make the shutter closed during when the droplet is irradiated with the laser light so that the plasma is generated.

7. 发明授权

US09362703B2 Optical device, laser apparatus, and extreme ultraviolet light generation system 有权
标题翻译：光学装置，激光装置和极紫外光发生系统
公开(公告)号：US09362703B2
公开(公告)日：2016-06-07
申请号：US14485355
申请日：2014-09-12
申请人： GIGAPHOTON INC.
发明人： Hakaru Mizoguchi , Takashi Suganuma , Hideo Hoshino , Osamu Wakabayashi
IPC分类号： G01C1/00 , H01S3/00 , H05G2/00 , H01S3/10 , H01S3/13
CPC分类号： H01S3/0071 , H01S3/0014 , H01S3/10061 , H01S3/1305 , H05G2/008
摘要： An optical device may include: an optical module disposed in a beam delivery path of a laser beam; a beam adjusting unit disposed in the beam delivery path for adjusting the beam delivery path of the laser beam; a measuring unit disposed in the beam delivery path for detecting the beam delivery path; and a control unit for controlling the beam adjusting unit based on a detection result of the beam delivery path of the laser beam detected by the measuring unit.
摘要翻译：光学装置可以包括：设置在激光束的光束输送路径中的光学模块; 设置在所述光束传送路径中用于调节所述激光束的光束传送路径的光束调节单元; 设置在所述光束传送路径中用于检测所述光束传送路径的测量单元; 以及控制单元，用于基于由测量单元检测到的激光束的光束传递路径的检测结果来控制光束调节单元。

8. 发明授权

US08934510B2 Wavelength converter, wavelength converting device, solid state laser device, and laser system 有权
标题翻译：波长转换器，波长转换装置，固态激光装置和激光系统
公开(公告)号：US08934510B2
公开(公告)日：2015-01-13
申请号：US13710658
申请日：2012-12-11
申请人： Gigaphoton Inc.
发明人： Kouji Kakizaki , Takashi Onose , Hideo Hoshino
IPC分类号： H01S3/10 , G02F1/35 , H01S3/23 , G02F1/37 , H01S3/225 , H01S3/00 , H01S3/16
CPC分类号： G02F1/353 , G02F1/3544 , G02F1/37 , G02F2001/3503 , H01S3/0092 , H01S3/10007 , H01S3/1625 , H01S3/2251 , H01S3/2333 , H01S3/2375
摘要： A wavelength converter may include a non-linear optical crystal, and an optical member bonded to a region of a contact surface of the non-linear optical crystal, located a predetermined distance or more on an inner side from an outer periphery of the contact surface. The wavelength converter may receive laser light and stably output light having a wavelength different from that of the laser light.
摘要翻译：波长转换器可以包括非线性光学晶体，以及结合到非线性光学晶体的接触表面的区域中的光学部件，其位于距接触表面的外周的内侧一定距离以上。波长转换器可以接收激光并稳定地输出具有与激光波长不同的波长的光。

9. 发明授权

US08811438B2 Temperature controller for gas laser 有权
公开(公告)号：US08811438B2
公开(公告)日：2014-08-19
申请号：US13936734
申请日：2013-07-08
申请人： Gigaphoton Inc.
发明人： Yukio Watanabe , Hideyuki Hayashi , Kouji Kakizaki , Michio Shinozaki , Hideo Hoshino
IPC分类号： H01S3/04 , H01S3/22 , H01S3/223 , H01S3/03 , F25D17/02 , H01S3/041
CPC分类号： H01S3/0407 , F25B2400/06 , F25D17/02 , H01S3/03 , H01S3/041 , H01S3/22
摘要： A temperature controller for a gas laser which controls temperatures of a plurality of temperature-controlled apparatuses including a first temperature-controlled portion requiring a high-precision temperature-control and a second temperature-controlled portion requiring a low-precision temperature-control as compared with the first temperature-controlled portion and allowing a temperature-control with a low or high temperature as compared with the first temperature-controlled portion, comprises a first temperature control portion generating a cooling agent or a heating agent for adjusting a temperature of each first temperature-controlled portion, a second temperature control portion generating a cooling agent or a heating agent for adjusting a temperature of each second temperature-controlled portion, a first piping system connecting the first temperature control portion and each first temperature-controlled portion in parallel, and a second piping system connecting the second temperature control portion and each second temperature-controlled portion in parallel.

10. 发明授权

US08787413B2 Temperature controller for gas laser 有权
标题翻译：气体激光器温度控制器
公开(公告)号：US08787413B2
公开(公告)日：2014-07-22
申请号：US13936819
申请日：2013-07-08
申请人： Gigaphoton Inc.
发明人： Yukio Watanabe , Hideyuki Hayashi , Kouji Kakizaki , Michio Shinozaki , Hideo Hoshino
IPC分类号： H01S3/04
CPC分类号： H01S3/0407 , F25B2400/06 , F25D17/02 , H01S3/03 , H01S3/041 , H01S3/22
摘要： A temperature controller for a gas laser which controls temperatures of a plurality of temperature-controlled apparatuses including a first temperature-controlled portion requiring a high-precision temperature-control and a second temperature-controlled portion requiring a low-precision temperature-control as compared with the first temperature-controlled portion and allowing a temperature-control with a low or high temperature as compared with the first temperature-controlled portion, comprises a first temperature control portion generating a cooling agent or a heating agent for adjusting a temperature of each first temperature-controlled portion, a second temperature control portion generating a cooling agent or a heating agent for adjusting a temperature of each second temperature-controlled portion, a first piping system connecting the first temperature control portion and each first temperature-controlled portion in parallel, and a second piping system connecting the second temperature control portion and each second temperature-controlled portion in parallel.
摘要翻译：一种用于气体激光器的温度控制器，其控制多个温度控制装置的温度，包括需要高精度温度控制的第一温度控制部分和需要低精度温度控制的第二温度控制部分与第一温度控制部分相比，第一温度控制部分与低温或高温的温度控制相比，包括产生冷却剂的第一温度控制部分或用于调节每个第一温度控制部分的温度的加热剂温度控制部分，产生冷却剂的第二温度控制部分或用于调节每个第二温度控制部分的温度的加热剂，将第一温度控制部分和第一温度控制部分并联连接的第一管道系统，以及连接第二回火的第二管道系统所述控制部分和每个第二温度控制部分并联。

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