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1. 发明申请

US20230114599A1 SEMICONDUCTOR LASER ELEMENT, SEMICONDUCTOR LASER DEVICE, AND METHOD FOR MANUFACTURING SEMICONDUCTOR LASER ELEMENT 有权
公开(公告)号：US20230114599A1
公开(公告)日：2023-04-13
申请号：US17960281
申请日：2022-10-05
申请人： HAMAMATSU PHOTONICS K.K.
发明人： Atsushi SUGIYAMA , Kousuke SHIBATA
IPC分类号： H01S5/042 , H01S5/22 , H01S5/34 , H01S5/02
摘要： A semiconductor laser element includes: a semiconductor substrate; a semiconductor laminate; a first electrode in which a ridge portion of the semiconductor laminate is embedded; and a second electrode. A first region of a side surface of the first electrode is separated from a first end surface in such a manner to extend away from the first end surface as the first region extends away from the ridge portion to both sides. A shortest distance between a first side surface and the first region is smaller than each of a shortest distance between a third side surface and a third region and a shortest distance between a fourth side surface and a fourth region. The first region does not include a corner in a range satisfying D1 ≤ S1 and D1 ≤ S2.

2. 发明申请

US20180248338A1 WAVELENGTH VARIABLE LIGHT SOURCE 审中-公开
公开(公告)号：US20180248338A1
公开(公告)日：2018-08-30
申请号：US15901155
申请日：2018-02-21
申请人： HAMAMATSU PHOTONICS K.K.
发明人： Atsushi SUGIYAMA , Tadataka EDAMURA , Naota AKIKUSA
IPC分类号： H01S5/06 , H01S5/183 , H01S5/14 , H01S5/024 , H01S5/04 , H01S5/022 , H01S5/18 , H01S5/042
CPC分类号： H01S5/0607 , H01S5/0071 , H01S5/02212 , H01S5/02252 , H01S5/02296 , H01S5/02415 , H01S5/02469 , H01S5/041 , H01S5/0425 , H01S5/143 , H01S5/18 , H01S5/183 , H01S5/18366
摘要： A wavelength variable light source includes a housing, a heat sink disposed in the housing, an excitation light source disposed on the heat sink and configured to output excitation light, a gain medium disposed on the heat sink and including an active layer and a lower DBR, a MEMS mechanism including a movable film facing the gain medium via a gap, disposed on the gain medium, and configured to control the gap, an upper DBR provided in the movable film and configuring a resonator together with the lower DBR, a reflector configured to reflect the excitation light output from the excitation light source toward the gain medium in the housing, and a window formed in the housing and configured to transmit light output from the gain medium.

3. 发明申请

US20180062350A1 MOVABLE DIFFRACTION GRATING, METHOD OF MANUFACTURING THE SAME, AND EXTERNAL RESONATOR TYPE LASER MODULE 审中-公开
公开(公告)号：US20180062350A1
公开(公告)日：2018-03-01
申请号：US15687637
申请日：2017-08-28
申请人： HAMAMATSU PHOTONICS K.K.
发明人： Atsushi SUGIYAMA , Tadataka EDAMURA
IPC分类号： H01S5/14 , H01S5/34 , H01S5/12 , H01S5/06
CPC分类号： H01S5/141 , H01S3/1055 , H01S5/0607 , H01S5/12 , H01S5/3401 , H01S2302/00
摘要： A movable diffraction grating includes: a support portion; a movable portion swingably connected to the support portion; a coil buried in the movable portion; a magnetic field generator configured to apply a magnetic field to the coil; an insulation layer provided on a surface of the movable portion; a resin layer provided on the insulation layer and provided with a diffraction grating pattern; and a reflection layer formed of a metal and provided on the resin layer to follow the diffraction grating pattern.

4. 发明申请

US20230133283A1 QUANTUM CASCADE LASER ELEMENT, QUANTUM CASCADE LASER DEVICE, AND METHOD FOR MANUFACTURING QUANTUM CASCADE LASER DEVICE 有权
公开(公告)号：US20230133283A1
公开(公告)日：2023-05-04
申请号：US17914819
申请日：2021-03-25
申请人： HAMAMATSU PHOTONICS K.K.
发明人： Atsushi SUGIYAMA , Kousuke SHIBATA , Kazuue FUJITA , Masahiro HITAKA
IPC分类号： H01S5/028 , H01S5/34 , H01S5/042 , H01S5/22
摘要： A quantum cascade laser element includes: a semiconductor substrate; a semiconductor laminate having a first end surface and a second end surface; a first electrode; a second electrode; and an anti-reflection film formed on the first end surface. The semiconductor laminate is configured to oscillate laser light having a center wavelength of 7.5 μm or more. The anti-reflection film includes an insulating film being a CeO2 film formed on the first end surface, a first refractive index film being a YF3 film or a CeF3 film disposed on a side opposite the first end surface with respect to the insulating film, and a second refractive index film formed on the first refractive index film on a side opposite the first end surface with respect to the first refractive index film and having a refractive index of larger than 1.8.

5. 发明申请

US20210057875A1 SINTERED BODY, SPUTTERING TARGET, FILM, QUANTUM CASCADE LASER, AND METHOD OF FILM FORMATION 有权
公开(公告)号：US20210057875A1
公开(公告)日：2021-02-25
申请号：US16985916
申请日：2020-08-05
申请人： HAMAMATSU PHOTONICS K.K.
发明人： Atsushi SUGIYAMA , Akio ITO , Tadataka EDAMURA
IPC分类号： H01S5/028 , H01S5/34 , G02B1/113 , H01J37/34
摘要： A sintered body of the present invention includes cerium oxide and cerium fluoride or yttrium fluoride.

6. 发明申请

US20190052058A1 EXTERNAL RESONANCE TYPE LASER MODULE, ANALYSIS APPARATUS, METHOD OF DRIVING EXTERNAL RESONANCE TYPE LASER MODULE, AND NON-TRANSITORY COMPUTER READABLE MEDIUM 审中-公开
公开(公告)号：US20190052058A1
公开(公告)日：2019-02-14
申请号：US16051547
申请日：2018-08-01
申请人： HAMAMATSU PHOTONICS K.K.
发明人： Tadataka EDAMURA , Atsushi SUGIYAMA , Tatsuo DOUGAKIUCHI
IPC分类号： H01S5/14 , H01S5/34 , H01S5/0625
摘要： An external resonance type laser module includes a quantum cascade laser, a MEMS diffraction grating configured to include a diffraction/reflection portion configured to diffract and reflect light emitted from the quantum cascade laser and return a part of the light to the quantum cascade laser by swinging the diffraction/reflection portion, and a controller configured to control driving of the quantum cascade laser. The controller is configured to pulse-drive the quantum cascade laser such that pulsed light of a second frequency higher than a first frequency at which the diffraction/reflection portion swings is emitted from the quantum cascade laser and a phase of the pulsed light changes each time the diffraction/reflection portion reciprocates m times (m: an integer of 1 or more).

7. 发明申请

US20130322479A1 QUANTUM CASCADE LASER 有权
标题翻译：量子CASCADE激光
公开(公告)号：US20130322479A1
公开(公告)日：2013-12-05
申请号：US13909611
申请日：2013-06-04
申请人： HAMAMATSU PHOTONICS K.K.
发明人： Atsushi SUGIYAMA , Naota AKIKUSA , Tadataka EDAMURA
IPC分类号： H01S5/34
CPC分类号： H01S5/3401 , B82Y20/00 , H01S5/0071 , H01S5/028 , H01S5/0282 , H01S5/0287 , H01S5/12 , H01S5/141 , H01S5/3402
摘要： A quantum cascade laser includes a semiconductor substrate, and an active layer that is provided on the substrate, and has a cascade structure in which emission layers and injection layers are alternately laminated by multistage-laminating unit laminate structures each consisting of the quantum well emission layer and the injection layer, the active layer generates light by intersubband transition in a quantum well structure. Further, in a laser cavity structure for light with a predetermined wavelength to be generated in the active layer, reflection control films including at least one layer of CeO2 film are formed on a first end face and a second end face facing each other. Thereby, it is possible to realize a quantum cascade laser capable of preferably realizing reflectance control for light within a mid-infrared wavelength region on the laser device end face.
摘要翻译：量子级联激光器包括半导体衬底和设置在衬底上的有源层，并且具有级联结构，其中发射层和注入层通过多级层压单元层叠结构交替层叠，每个层叠结构由量子阱发射层和注入层，有源层通过量子阱结构中的子带间跃迁产生光。此外，在有源层中产生具有预定波长的光的激光腔结构中，在彼此相对的第一端面和第二端面上形成包括至少一层CeO 2膜的反射控制膜。由此，能够实现能够优选实现激光装置端面的中红外波长区域内的光的反射率控制的量子级联激光器。

8. 发明申请

US20230092813A1 EXTERNAL RESONANT LASER MODULE AND METHOD OF MANUFACTURING EXTERNAL RESONANT LASER MODULE 有权
公开(公告)号：US20230092813A1
公开(公告)日：2023-03-23
申请号：US17945271
申请日：2022-09-15
申请人： HAMAMATSU PHOTONICS K.K.
发明人： Atsushi SUGIYAMA , Tadataka EDAMURA
IPC分类号： H01S5/14 , H01S5/02326 , H01S5/34
摘要： The laser module includes a QCL element, a diffraction grating unit, a first lens holder, a second lens holder, and a mount member. The fourth mounting portion of the mount member is provided with a placement hole into which the protruding portion of the diffraction grating unit is inserted. The placement hole is longer than the protruding portion so that the protruding portion can be slid in the X-axis direction relative to the placement hole. A wall surface for positioning the diffraction grating unit is provided between the third mounting portion and the fourth mounting portion. The diffraction grating unit includes a positioning surface facing the wall surface. The diffraction grating unit is fixed to the fourth mounting portion in a state where the protruding portion is inserted into the placement hole and the positioning surface is in surface contact with the wall surface.

9. 发明申请

US20220337033A1 EXTERNAL RESONANCE-TYPE LASER MODULE 有权
公开(公告)号：US20220337033A1
公开(公告)日：2022-10-20
申请号：US17675197
申请日：2022-02-18
申请人： HAMAMATSU PHOTONICS K.K.
发明人： Atsushi SUGIYAMA , Tadataka EDAMURA , Naota AKIKUSA
IPC分类号： H01S5/14 , H01S5/34 , H01S3/08
摘要： An external resonance-type laser module includes: a quantum cascade laser; a MEMS diffraction grating including a movable portion capable of swinging around an axis and a diffraction grating portion formed on the movable portion; and a lens. The diffraction grating portion includes a plurality of lattice grooves arranged in a first direction and each of the plurality of lattice grooves extends in a second direction perpendicular to the first direction. The MEMS diffraction grating is disposed such that a normal line of the diffraction grating portion is inclined with respect to an end surface and the first direction is along a lamination direction of a laminated structure when viewed in a direction perpendicular to the end surface. A length of the diffraction grating portion in the first direction exceeds a length of the diffraction grating portion in the second direction.

10. 发明申请

US20220271504A1 EXTERNAL RESONANT LASER MODULE AND METHOD OF MANUFACTURING EXTERNAL RESONANT LASER MODULE 有权
公开(公告)号：US20220271504A1
公开(公告)日：2022-08-25
申请号：US17672758
申请日：2022-02-16
申请人： HAMAMATSU PHOTONICS K.K.
发明人： Atsushi SUGIYAMA , Tadataka EDAMURA , Takahide OCHIAI , Naota AKIKUSA
IPC分类号： H01S5/14 , H01S5/34 , H01S5/12
摘要： The laser module includes a QCL element, a MEMS diffraction grating, a first lens holder disposed on a side opposite to a side on which the MEMS diffraction grating is disposed with respect to the QCL element, a second lens holder disposed between the QCL element and the MEMS diffraction grating, a package, an electrode terminal disposed along an inner wall surface of the package, and a wire for electrically connecting the electrode terminal and the QCL element. An end portion of the wire on a side where the QCL element is disposed is disposed at a position between the first lens holder and the second lens holder when viewed from a direction orthogonal to a facing direction in which the first lens holder and the second lens holder face each other.

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