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    • 2. 发明申请
    • SEMICONDUCTOR POWER DEVICE
    • 半导体功率器件
    • US20150048418A1
    • 2015-02-19
    • US14256733
    • 2014-04-18
    • HUGA OPTOTECH INC.EPISTAR CORPORATION
    • Heng-Kuang LINYih-Ting KUOTsung-Cheng CHANG
    • H01L29/778
    • H01L29/778H01L29/1075H01L29/2003H01L29/66462H01L29/7787
    • A semiconductor power device, comprising: a substrate; a first semiconductor layer with a first lattice constant formed on the substrate, wherein the first semiconductor layer comprises a first group III element; a first grading layer formed on the first semiconductor layer and comprising a first portion; a second semiconductor layer with a second lattice constant formed on the first grading layer, wherein the second semiconductor layer comprises a second group III element; and a first interlayer formed in the first grading layer and adjacent to the first portion of the first grading layer, wherein a composition of the first interlayer is different from that of the first portion, and the first grading layer comprises the first group III element and the second group III element, and concentrations of both the first group III element and the second group III element in the first grading layer are gradually changed.
    • 一种半导体功率器件,包括:衬底; 在所述基板上形成具有第一晶格常数的第一半导体层,其中所述第一半导体层包括第一III族元素; 形成在所述第一半导体层上并包括第一部分的第一分级层; 形成在所述第一分级层上的具有第二晶格常数的第二半导体层,其中所述第二半导体层包括第二组III元素; 以及形成在第一分级层中并与第一分级层的第一部分相邻的第一中间层,其中第一中间层的组成与第一层的组成不同,第一分级层包含第一III族元素和 第二组III元素和第一分级层中的第一组III元素和第二组III元素的浓度逐渐变化。
    • 5. 发明申请
    • HIGH ELECTRON MOBILITY TRANSISTOR
    • 高电子移动晶体管
    • US20160233326A1
    • 2016-08-11
    • US15133207
    • 2016-04-19
    • EPISTAR CORPORATIONHUGA OPTOTECH Inc.
    • Hsein-chin CHIUChien-Kai TUNGHeng-Kuang LINChih-Wei YANGHsiang-Chun WANG
    • H01L29/778H01L29/417H01L29/15H01L29/20H01L29/205
    • H01L29/7784H01L29/157H01L29/2003H01L29/205H01L29/41758H01L29/42316H01L29/7787
    • A high electron mobility transistor comprises a substrate, an epitaxial stack arranged above the substrate and having a first region and a second region surrounding the first region, a matrix electrode structure arranged in the first region. The matrix electrode comprises a plurality of first electrodes arranged on the epitaxial stack, a plurality of second electrodes arranged on the epitaxial stack and adjacent to the plurality of first electrodes, a plurality of third electrodes arranged adjacent to the plurality of first electrodes and second electrodes. One of the plurality of first electrodes comprises a first side, a second side, a third side and a fourth side. The first side and the third side are opposite sides, and the second side and the fourth side are opposite sides. Two of the plurality of second electrodes are arranged on the first side and the third side, and two of the plurality of third electrodes are arranged on the second side and the fourth side.
    • 高电子迁移率晶体管包括衬底,布置在衬底上方并且具有围绕第一区域的第一区域和第二区域的外延层,布置在第一区域中的矩阵电极结构。 矩阵电极包括布置在外延堆叠上的多个第一电极,布置在外延堆叠上并与多个第一电极相邻的多个第二电极,与多个第一电极和第二电极相邻布置的多个第三电极 。 多个第一电极中的一个包括第一侧,第二侧,第三侧和第四侧。 第一侧和第三侧是相对侧,第二侧和第四侧是相对的两侧。 多个第二电极中的两个布置在第一侧和第三侧上,并且多个第三电极中的两个布置在第二侧和第四侧上。