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    • 4. 发明授权
    • Semiconductor device having a dual-damascene gate and manufacturing method thereof
    • 具有双镶嵌栅极的半导体器件及其制造方法
    • US07256096B2
    • 2007-08-14
    • US11024629
    • 2004-12-30
    • Jung Gyu Kim
    • Jung Gyu Kim
    • H01L21/336
    • H01L29/6659H01L21/2652H01L29/42376H01L29/665H01L29/66545H01L29/7833
    • A method of manufacturing a semiconductor device having a dual-damascene gate including forming LDD regions by forming a gate oxide film on a semiconductor substrate, and by implanting lowly-concentrated impurities in the semiconductor substrate in accordance with a predetermined LDD pattern, and forming a nitride film on the gate oxide film, and forming a wide nitride film in accordance with the wide nitride pattern. The method also includes forming a narrow nitride film by a narrow etching process on the wide nitride film in accordance with a predetermined narrow nitride film pattern, forming a dual-damascene gate by depositing a polysilicon layer on an exposed entire surface and smoothing the deposited polysilicon layer to a top surface of the nitride film, and forming a gate electrode by removing a predetermined region of the polysilicon layer. The method further includes forming a sidewall nitride film on the gate electrode by etching the exposed nitride film in accordance with a nitride film pattern, and forming source/drain regions by performing an ion implantation process on the source/drain regions.
    • 一种制造具有双镶嵌栅极的半导体器件的方法,包括通过在半导体衬底上形成栅极氧化膜形成LDD区,并且根据预定的LDD图案在半导体衬底中注入低浓度的杂质,并形成 氮化物膜,并且根据宽氮化物图案形成宽的氮化物膜。 该方法还包括通过狭窄的蚀刻工艺在宽氮化物膜上根据预定的窄氮化物膜图案形成窄的氮化物膜,通过在暴露的整个表面上沉积多晶硅层并平滑沉积的多晶硅来形成双镶嵌栅极 层到氮化膜的顶表面,并且通过去除多晶硅层的预定区域来形成栅电极。 该方法还包括通过根据氮化物膜图案蚀刻暴露的氮化物膜而在栅极上形成侧壁氮化物膜,以及通过在源极/漏极区域上执行离子注入工艺来形成源极/漏极区域。
    • 5. 发明申请
    • UBIQUITOUS SENSOR NETWORK-BASED SYSTEM AND METHOD FOR AUTOMATICALLY MANAGING FOOD SANITATION
    • 无线传感器网络系统及自动管理食品卫生方法
    • US20100135211A1
    • 2010-06-03
    • US12600020
    • 2008-05-08
    • Jae Ill ParkJung Gyu KimByung Rak Son
    • Jae Ill ParkJung Gyu KimByung Rak Son
    • H04W40/00G08B21/00
    • H04L12/2825H04L12/2827H04L2012/285
    • The present invention relates to a ubiquitous sensor network-based system and method for automatically managing food sanitation. The system includes at least one sensor node (100) configured to measure and store sensing information, compare measured values with preset values, and generate a warning message. A sink node (200) mediates between the sensor node and a management server (400) and between the mobile terminal and the management server. A mobile terminal (300) reads food information using an RFID reader or a barcode reader, transmits the food information, measures and stores sensing information, compares the measured values with preset values, and generates a warning message. The management server (400) generates a control command, transmits the control command to the sensor node or the mobile terminal, and notifies a manager of an urgent situation and a location of the kitchen appliance if received data is a warning message.
    • 本发明涉及一种无所不在的传感器网络系统和自动管理食品卫生的方法。 该系统包括被配置为测量和存储感测信息的至少一个传感器节点(100),将测量值与预设值进行比较,并产生警告消息。 宿节点(200)在传感器节点和管理服务器(400)之间以及移动终端和管理服务器之间进行中介。 移动终端(300)使用RFID读取器或条形码读取器读取食品信息,发送食品信息,测量和存储感测信息,将测量值与预设值进行比较,并产生警告消息。 管理服务器(400)生成控制命令,将控制命令发送到传感器节点或移动终端,并且如果接收到的数据是警告消息,则向管理者通知厨房用具的紧急情况和位置。
    • 6. 发明授权
    • Ubiquitous sensor network-based system and method for automatically managing food sanitation
    • 无处不在的基于传感器网络的系统和方法,用于自动管理食品卫生
    • US08258943B2
    • 2012-09-04
    • US12600020
    • 2008-05-08
    • Jae Ill ParkJung Gyu KimByung Rak Son
    • Jae Ill ParkJung Gyu KimByung Rak Son
    • G08B1/08
    • H04L12/2825H04L12/2827H04L2012/285
    • The present invention relates to a ubiquitous sensor network-based system and method for automatically managing food sanitation. The system includes at least one sensor node (100) configured to measure and store sensing information, compare measured values with preset values, and generate a warning message. A sink node (200) mediates between the sensor node and a management server (400) and between the mobile terminal and the management server. A mobile terminal (300) reads food information using an RFID reader or a barcode reader, transmits the food information, measures and stores sensing information, compares the measured values with preset values, and generates a warning message. The management server (400) generates a control command, transmits the control command to the sensor node or the mobile terminal, and notifies a manager of an urgent situation and a location of the kitchen appliance if received data is a warning message.
    • 本发明涉及一种无所不在的传感器网络系统和自动管理食品卫生的方法。 该系统包括被配置为测量和存储感测信息的至少一个传感器节点(100),将测量值与预设值进行比较,并产生警告消息。 宿节点(200)在传感器节点和管理服务器(400)之间以及移动终端和管理服务器之间进行中介。 移动终端(300)使用RFID读取器或条形码读取器读取食品信息,发送食品信息,测量和存储感测信息,将测量值与预设值进行比较,并产生警告消息。 管理服务器(400)生成控制命令,将控制命令发送到传感器节点或移动终端,并且如果接收到的数据是警告消息,则向管理者通知厨房用具的紧急情况和位置。