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1. 发明授权

US06801561B2 Laser system and method for spectral narrowing through wavefront correction 失效
标题翻译：激光系统和通过波前校正进行光谱窄化的方法
公开(公告)号：US06801561B2
公开(公告)日：2004-10-05
申请号：US09960875
申请日：2001-09-21
申请人： Juergen Kleinschmidt
发明人： Juergen Kleinschmidt
IPC分类号： H01S3223
CPC分类号： H01S3/225 , H01S3/1055 , H01S3/106
摘要： An excimer or molecular fluorine laser system a wavefront compensating optic within its resonator for adjusting the curvature of the wavefront of the beam for compensating wavefront distortions and thereby enhancing the spectral purity of the beam. The wavefront compensating optic may be a plate, such as a null lens. One or both surfaces of the null lens may be adjustable and/or have an adjustable curvature for controlling the wavefront distortion compensation. A multi-compartment enclosure may be included having at least one optical component of the line-narrowing unit within each compartment. An atmosphere within at least one compartment is preferably controlled for controlling the spectral purity of the beam by controlling an amount of wavefront distortion compensation. The wavefront compensating optic may be sealably disposed between adjacent compartments.
摘要翻译：准分子或分子氟激光系统在其谐振器内的波前补偿光学器件，用于调整波束的波前的曲率以补偿波前失真，从而增强光束的光谱纯度。波前补偿光学元件可以是板，例如零透镜。零透镜的一个或两个表面可以是可调节的和/或具有用于控制波前失真补偿的可调曲率。可以包括多隔室外壳，其具有每个隔室内的线条变窄单元的至少一个光学部件。优选地控制至少一个室内的气氛，以通过控制波前失真补偿量来控制光束的光谱纯度。波前补偿光学元件可以密封地设置在相邻的隔室之间。

2. 发明授权

US06785315B1 Mobile tactical high energy laser weapon system and method for generating a high energy laser beam 失效
标题翻译：移动战术高能激光武器系统和产生高能激光束的方法
公开(公告)号：US06785315B1
公开(公告)日：2004-08-31
申请号：US09962629
申请日：2001-09-24
申请人： Dale L. Hook , Josef Shwartz , Jeffery L. Sollee , Ethan W. Brigham , Milton H. Gran
发明人： Dale L. Hook , Josef Shwartz , Jeffery L. Sollee , Ethan W. Brigham , Milton H. Gran
IPC分类号： H01S3223
CPC分类号： F41H13/0062 , H01S3/095
摘要： A laser weapon system using a high energy deuterium fluoride (DF) or hydrogen fluoride (HF) laser, for which all necessary reactants and other materials are carried on an easily movable vehicle. Reactant gases are stored mixed with a diluent gas, such as helium, for ease of handling and to provide nearly ideal gas behavior. Cooling water for the laser is also employed in a high pressure steam generator that uses diesel fuel and oxygen to produce heat. Apart from a fluorine generator, the system uses only four storage tanks for reactant gases.
摘要翻译：使用高能氘氟化物（DF）或氟化氢（HF）激光的激光武器系统，其中所有必需的反应物和其它材料都携带在容易移动的车辆上。将反应物气体与诸如氦气之类的稀释气体混合，便于处理并提供几乎理想的气体行为。用于激光的冷却水也用于使用柴油和氧气产生热量的高压蒸汽发生器。除氟发生器外，该系统仅使用四个储罐作为反应气体。

3. 发明授权

US06678304B2 Laser correction method and apparatus 失效
标题翻译：激光校正方法及装置
公开(公告)号：US06678304B2
公开(公告)日：2004-01-13
申请号：US09934429
申请日：2001-08-21
申请人： Yukio Morishige
发明人： Yukio Morishige
IPC分类号： H01S3223
CPC分类号： B23K26/1438 , B23K26/142 , B23K26/1462 , G03F1/72
摘要： A laser correction apparatus irradiates a laser upward onto a defect on a photomask formed on the bottom surface thereof. The particles generated by the laser irradiation is removed by blowing a gas to the space between the bottom surface of the substrate and a window port. The window port has a top flat surface having a central opening and an inner wall having a top portion of a funnel shape and a bottom portion of a cylindrical shape. The gas introduced to the space passes the central opening, forms a spiral flow while increasing the diameter thereof, and is exhausted from gas outlet ports formed on the cylindrical portion.
摘要翻译：激光校正装置将激光向上照射到形成在其底面上的光掩模上的缺陷。通过将气体吹送到基板的底表面和窗口之间的空间来去除由激光照射产生的颗粒。窗口具有具有中心开口的顶部平坦表面和具有漏斗形状的顶部部分和圆筒形状的底部部分的内壁。引入空间的气体通过中心开口，同时增加其直径而形成螺旋流，并且从形成在圆筒形部分上的气体出口端口排出。

4. 发明授权

US06665326B2 Light source device 失效
公开(公告)号：US06665326B2
公开(公告)日：2003-12-16
申请号：US09976144
申请日：2001-10-15
申请人： Haruhiko Kusunose
发明人： Haruhiko Kusunose
IPC分类号： H01S3223
CPC分类号： B82Y10/00 , G02B26/0816 , G03F7/70025 , G03F7/70033 , G03F7/70041 , G03F7/7005 , H01S3/225
摘要： Disclosed is a light source device capable of further enhancing an effective pulse rate. A light source device according to the present invention comprises: a plurality of light sources (1a to 1h) emitting radiation light; a rotating reflection body (2) having one or more reflection surfaces (2a) and emitting the radiation light emitted from the respective light sources (1a to 1h) along an optical path (L) common to the light sources; a position detecting device (5) detecting a position of the reflection surface (2a) of the rotating reflection body (2); a timing control circuit (6) generating a synchronization signal for driving the plurality of light sources in synchronization with the position of the rotating reflection body based on an output signal from the position detecting device; and a power supply circuit (7) sequentially pulse-driving the light sources based on an output signal from the timing control circuit.

5. 发明授权

US06834069B1 Molecular fluorine laser with intracavity polarization enhancer 失效
标题翻译：分子氟激光与腔内极化增强剂
公开(公告)号：US06834069B1
公开(公告)日：2004-12-21
申请号：US10162115
申请日：2002-06-03
申请人： Elko Bergmann , Frank Voss , Klaus Wolfgang Vogler
发明人： Elko Bergmann , Frank Voss , Klaus Wolfgang Vogler
IPC分类号： H01S3223
CPC分类号： G02B5/1838 , G02B5/1814 , H01S3/08004 , H01S3/08009 , H01S3/1055 , H01S3/225
摘要： A F2 laser includes a laser tube filled with a laser gas mixture at least including molecular fluorine for generating a spectral emission including multiple closely-spaced lines in a wavelength range between 157 nm and 158 nm, including a first line centered around 157.62 nm and a second line centered around 157.52 nm, multiple electrodes within the discharge chamber connected with a power supply circuit for energizing the molecular fluorine, a laser resonator including a line selection unit for selecting one of the first and second lines of the multiple closely spaced lines and for supressing the other of the first and second lines, for generating a narrow bandwidth VUV output beam, and at least one intracavity polarizing element. The narrow bandwidth VUV output beam is polarized at least 95%, and may be 98% or more.
摘要翻译： F2激光器包括填充有至少包括分子氟的激光气体混合物的激光管，用于产生包括在157nm和158nm之间的波长范围内的多个紧密间隔的线的光谱发射，包括以157.62nm为中心的第一线和第二行以157.52nm为中心，放电室内的多个电极与用于激励分子氟的电源电路连接，激光谐振器包括用于选择多个紧密间隔的线中的第一和第二线之一的线选择单元，抑制第一和第二行中的另一个，用于产生窄带宽VUV输出光束，以及至少一个腔内偏振元件。窄带宽VUV输出光束极化至少95％，可以是98％以上。

6. 发明授权

US06768761B2 Gas laser oscillator 有权
标题翻译：气体激光振荡器
公开(公告)号：US06768761B2
公开(公告)日：2004-07-27
申请号：US09795084
申请日：2001-03-01
申请人： Hitoshi Hongu , Hiroyuki Hayashikawa
发明人： Hitoshi Hongu , Hiroyuki Hayashikawa
IPC分类号： H01S3223
CPC分类号： H01S3/036
摘要： A gas laser oscillator comprising a laser gas pressure controller for controlling the pressure of laser gas in laser gas chamber to be constant, an electromagnetic valve for supplying laser gas into the laser gas chamber from a gas bottle so that the laser gas within the laser gas chamber is maintained constant, detection means for detecting that the cycle period of open/close actions of the electromagnetic valve became longer than a reference value, and an alarm display controller which issues an alarm. In a gas laser oscillator of the present invention, even such a micro vacuum leak that hardly ill-affects the laser output can be detected with ease while the gas laser oscillator is in operation. This makes it possible to apply an appropriate maintenance work beforehand on the vacuum seal. Thus, reliable gas laser oscillators can be offered in accordance with the present invention.
摘要翻译：气体激光振荡器包括用于控制激光气室中的激光气体的压力恒定的激光气体压力控制器，用于从气瓶向激光气体室供应激光气体的电磁阀，使激光气体内的激光气体检测装置，用于检测电磁阀的打开/关闭动作周期何时变得比参考值长;以及发出报警的报警显示控制器。在本发明的气体激光振荡器中，即使在气体激光振荡器工作的情况下也能够容易地检测出几乎不影响激光输出的这样的微真空泄漏。这样可以预先在真空密封上进行适当的维护工作。因此，可以根据本发明提供可靠的气体激光振荡器。

7. 发明授权

US06526084B1 Detection of F2-concentration for power stabilization of an F2-157 NM excimer laser by using red laser emission of F-atom 失效
标题翻译：通过使用F-atom的红色激光发射检测F2-157 NM准分子激光器的功率稳定的F2浓度
公开(公告)号：US06526084B1
公开(公告)日：2003-02-25
申请号：US09499907
申请日：2000-02-08
申请人： Frank Voss
发明人： Frank Voss
IPC分类号： H01S3223
CPC分类号： H01S3/225 , H01S3/036
摘要： An efficient and practical means and method is provided for monitoring the F2 concentration in an F2 excimer laser. The F2 concentration is monitored by measuring the concentration F atoms and more specifically by measuring the amount of red laser light emitted during discharge. The amount of red laser light emitted during discharge is a function of the concentration of F atoms because such red laser light is emitted by excited F atoms. There is also a relationship between the concentration of F atoms and the concentration of molecular F2 in the discharge chamber. Accordingly, the concentration of F2 gas may be monitored by measuring the amount of red laser light emitted during discharge.
摘要翻译：提供了一种用于监测F2准分子激光器中的F2浓度的有效和实用的手段和方法。通过测量浓度F原子，更具体地通过测量放电期间发射的红色激光的量来监测F2浓度。放电期间发射的红色激光的量是F原子的浓度的函数，因为这样的红色激光由激发的F原子发射。 F原子的浓度与放电室中的分子F2的浓度之间也存在关系。因此，可以通过测量放电期间发射的红色激光的量来监测F2气体的浓度。

8. 发明授权

US06763049B1 Very high repetition rate power supply system and method 失效
标题翻译：非常高的重复率电源系统和方法
公开(公告)号：US06763049B1
公开(公告)日：2004-07-13
申请号：US09595360
申请日：2000-06-15
申请人： George L. Bees
发明人： George L. Bees
IPC分类号： H01S3223
CPC分类号： H03K3/53 , H01S5/0428
摘要： A system and method for a power supply system that charges a capacitor, wherein the capacitor charge drives a pulse discharge driven system. The power supply system utilizes a main power supply and a resonant inductor and capacitor configuration to charge the capacitor to a specified, large percentage of a driving voltage that is required by the pulse system. A control module monitors the capacitor charge and disconnects the main power supply when the capacitor charge is within the specified percentage. The main power supply disconnect causes the inductor to discharge and similarly charge the capacitor in a more controlled manner. Once the control module measures the capacitor voltage at the full driving voltage, the control module commands a switch to separate the inductor from the capacitor. The control module similarly activates a small high voltage power supply that monitors the capacitor and replenishes any natural capacitor discharge that may occur in the time between the full capacitor charge and the capacitor discharge by the pulse discharge driven system. Once the pulse discharge driven system discharges the capacitor, the control module returns the power supply system to its initial state, wherein the main power supply and residual energy in the capacitor cooperate to efficiently charge the inductor and capacitor. The charging cycle continues repeatedly as a function of the pulse discharge driven system requirements.
摘要翻译：一种用于为电容器充电的电源系统的系统和方法，其中电容器充电驱动脉冲放电驱动系统。电源系统使用主电源和谐振电感器和电容器配置来将电容器充电到脉冲系统所需的驱动电压的特定大百分比。当电容器充电在指定的百分比范围内时，控制模块监视电容器充电并断开主电源。主电源断开导致电感放电，并以类似的方式对电容器充电。一旦控制模块在全驱动电压下测量电容器电压，则控制模块命令开关将电感器与电容器分开。控制模块类似地激活监视电容器的小型高压电源，并且补充由脉冲放电驱动系统在全电容器充电和电容器放电之间的时间内可能发生的任何天然电容器放电。一旦脉冲放电驱动系统放电电容器，控制模块将电源系统恢复到其初始状态，其中主电源和电容器中的剩余能量协调以有效地对电感器和电容器充电。充电周期作为脉冲放电驱动系统要求的函数重复继续。

9. 发明授权

US06320892B1 Energy efficient lithography laser 失效
标题翻译：节能光刻激光
公开(公告)号：US06320892B1
公开(公告)日：2001-11-20
申请号：US09420297
申请日：1999-10-18
申请人： Gamaralalage G. Padmabandu , Palash P. Das , Tom A. Watson , Paolo Zambon
发明人： Gamaralalage G. Padmabandu , Palash P. Das , Tom A. Watson , Paolo Zambon
IPC分类号： H01S3223
CPC分类号： G03F7/70025 , G03F7/70041 , G03F7/70358 , G03F7/70558 , G03F7/70575 , H01S3/036 , H01S3/134 , H01S3/225 , H01S3/2251 , H01S3/2256
摘要： An excimer laser system with an automatic fluorine control system to permit precise control of the fluorine concentration within an F2 “sweet spot” in a gas discharge laser chamber. This is done with a computer control system which monitors laser parameters, determines &Dgr;E/&Dgr;V, the change of pulse energy with voltage, and automatically and precisely controls the fluorine concentration based on &Dgr;E/&Dgr;V without the need to actually measure the fluorine concentration. The present invention is especially useful in lithography environments in which photo resist having a wide range of sensitivity are used. The present invention permits operation of the laser at substantially maximum efficiency over a wide range of pulse energy outputs.
摘要翻译：一种具有自动氟控制系统的准分子激光系统，用于在气体放电激光室中精确控制F2“甜点”内的氟浓度。这是通过电脑控制系统进行的，该系统监视激光参数，确定DELTAE / DELTAV，脉冲能量随电压的变化，并且可以根据DELTAE / DELTAV自动精确控制氟浓度，而无需实际测量氟浓度。本发明在使用具有宽灵敏度范围的光刻胶的光刻环境中特别有用。本发明允许激光器在宽范围的脉冲能量输出上以基本最大的效率进行操作。

10. 发明授权

US06263007B1 Pulsed discharge gas laser having non-integral supply reservoir 失效
标题翻译：脉冲放电气体激光器具有非整体式电源储存器
公开(公告)号：US06263007B1
公开(公告)日：2001-07-17
申请号：US09200005
申请日：1998-11-25
申请人： Fuqian Tang
发明人： Fuqian Tang
IPC分类号： H01S3223
CPC分类号： H01S3/2232 , G03F7/70025 , H01S3/03 , H01S3/036 , H01S3/0407 , H01S3/041 , H01S3/076
摘要： A laser assembly, particularly one employing a gas lasing medium, has at least one lasing gas supply reservoir that is separate from the housing enclosure for the laser's optical cavity. A flexible or semi-flexible conduit supplies lasing gas from the reservoir to the optical cavity, so as to allow the laser per se and the gas reservoir to be manufactured separately and then connected by the tubing, thus simplifying the design and manufacturing process. The laser is preferably operated as a pulsed gas discharge laser that produces a continuous laser output. One or both of the laser's cavity mirrors may be coated with fine parallel lines which constrain the laser output to be linearly polarized. The lasing medium may have a stepwise or tapered structure, which provides for selection of the most desirable TEM00 mode. In addition, the lasing medium cavity may be cooled by a multiple cooling jacket structure to facilitate placement of the coolant inlet and outlet ports.
摘要翻译：激光组件，特别是采用气体激光介质的激光组件具有至少一个与用于激光器的光学腔的壳体外壳分离的激光气体供应储存器。柔性或半柔性导管将来自储存器的激光气体提供给光学腔，以允许激光器本身和气体储存器分开制造，然后通过管道连接，从而简化了设计和制造过程。激光器优选作为产生连续激光输出的脉冲气体放电激光器来操作。激光器的腔镜中的一个或两个可以涂覆有将激光输出限制为线性极化的细微平行线。激光介质可以具有逐步或锥形结构，其提供了选择最理想的TEM00模式。此外，激光介质腔可以通过多个冷却套管结构来冷却，以便于冷却剂入口和出口的放置。

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