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    • 10. 发明申请
    • Solid state image pickup device
    • 固态图像拾取装置
    • US20050051860A1
    • 2005-03-10
    • US10851416
    • 2004-05-24
    • Yutaka TakeuchiMasako SatoMariko Nakamura
    • Yutaka TakeuchiMasako SatoMariko Nakamura
    • H01L27/146H01L31/0232
    • H01L27/14843H01L27/14621H01L27/14623H01L27/14627H01L27/1463H01L27/14812
    • A solid state image pickup device includes: a semiconductor substrate defining light receiving areas; pixels formed in the light receiving areas, each pixel including a high and a low sensitivity photoelectric conversion element; a light shielding film formed above the light receiving areas and having an opening above each pixel, the opening exposing at least a partial area of the high and the low sensitivity photoelectric conversion element; an on-chip micro lens formed above each opening, the on-chip micro lens converging incidence light; and an inner lens formed between the light shielding film and the on-chip micro lens and above the opening, the inner lens being disposed so that the inner lens receives light converged by the on-chip micro lens, excluding a portion of the light, and further converges the received light to make the portion of the light propagate toward the opening without passing through the inner lens.
    • 固态图像拾取装置包括:限定光接收区域的半导体衬底; 像素形成在光接收区域中,每个像素包括高灵敏度和低灵敏度光电转换元件; 形成在所述光接收区域上方并且在每个像素上方具有开口的遮光膜,所述开口暴露所述高和低灵敏度光电转换元件的至少一部分区域; 在每个开口上形成的片上微透镜,片上微透镜会聚入射光; 以及形成在所述遮光膜和所述片上微透镜之间并且在所述开口之上的内透镜,所述内透镜被设置为使得所述内透镜接收除了一部分光之外的片上微透镜会聚的光, 并且进一步收敛所接收的光以使光的一部分朝向开口传播而不通过内透镜。