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    • 6. 发明授权
    • Material structures for front-end of the line integration of optical polarization splitters and rotators
    • 光学偏振分离器和旋转器的线路集成前端的材料结构
    • US08923665B2
    • 2014-12-30
    • US13835725
    • 2013-03-15
    • International Business Machines Corporation
    • Tymon BarwiczDouglas M. GillWilliam M. GreenMarwan H. KhaterYurii A. Vlasov
    • G02B6/12G02B6/126
    • G02B6/126
    • A polarization splitter and rotator of a wafer chip, an opto-electronic device and method of use is disclosed. The first waveguide of the wafer chip is configured to receive an optical signal from an optical device and propagate a transverse electric eigenstate of the received optical signal. The second waveguide is configured to receive a transverse magnetic eigenstate of the received optical signal from the first waveguide. The second waveguide includes a splitter end, a middle section and a rotator end, wherein the splitter end includes a layer of polycrystalline silicon, a layer of silicon oxide and a layer of silicon nitride, the rotated end includes a layer single crystal silicon, a layer silicon oxide and a layer of silicon nitride, and the middle section includes layers of single crystal silicon, silicon oxide polycrystalline silicon and silicon nitride.
    • 公开了一种晶片芯片的偏振分离器和旋转器,光电器件和使用方法。 晶片芯片的第一波导被配置为从光学装置接收光信号并传播所接收的光信号的横向电本质状态。 第二波导被配置为从第一波导接收接收的光信号的横向磁本征状态。 第二波导包括分流器端部,中间部分和旋转器端部,其中分流器端部包括多晶硅层,氧化硅层和氮化硅层,旋转端包括层单晶硅, 层状氧化硅和氮化硅层,中间部分包括单晶硅层,氧化硅多晶硅层和氮化硅层。