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1. 发明授权

US10996408B2 Optical device including buried optical waveguides and output couplers 有权
公开(公告)号：US10996408B2
公开(公告)日：2021-05-04
申请号：US16517159
申请日：2019-07-19
申请人： Intel Corporation
发明人： John Heck , Harel Frish , Reece DeFrees , George A. Ghiurcan , Hari Mahalingam , Pegah Seddighian
IPC分类号： G02B6/42 , G02B6/12 , G02B6/122
摘要： Embodiments of the present disclosure are directed toward techniques and configurations for an optical coupler including an optical waveguide to guide light to an optical fiber. In embodiments, the optical waveguide includes a tapered segment to propagate the received light to the optical fiber. In embodiments, the tapered segment is buried below a surface of a semiconductor substrate to transition the received light within the semiconductor substrate from a first optical mode to a second optical mode to reduce a loss of light during propagation of the received light from the optical waveguide to the optical fiber. In embodiments, the surface of the semiconductor substrate comprises a bottom planar surface of a silicon photonic chip that includes at least one or more of passive or active photonic components. Other embodiments may be described and/or claimed.

2. 发明申请

US20190041582A1 POLYMER OPTICAL COUPLER 审中-公开
公开(公告)号：US20190041582A1
公开(公告)日：2019-02-07
申请号：US15980103
申请日：2018-05-15
申请人： Intel Corporation
发明人： John Heck , Hari Mahalingam
IPC分类号： G02B6/30
摘要： Embodiments may relate to a polymer optical coupler. The polymer optical coupler may include a first portion at least partially coupled to a face of a silicon waveguide. The polymer optical coupler may further include a second portion of the polymer optical coupler that is adjacent to the first portion and which may have a width that is less than a width of the second portion opposite the first portion. Other embodiments may be described and/or claimed.

3. 发明授权

US09575341B2 Solid state LIDAR circuit with waveguides tunable to separate phase offsets 有权
标题翻译：具有波导的固态LIDAR电路可调谐以分离相位偏移
公开(公告)号：US09575341B2
公开(公告)日：2017-02-21
申请号：US14318604
申请日：2014-06-28
申请人： Intel Corporation
发明人： John Heck , Jonathan K Doylend , David N Hutchison , Haisheng Rong , Jacob B Sendowski
IPC分类号： G02F1/13 , G01S17/42 , G01S17/89 , G01S7/481 , G02B6/12 , G01S17/10 , G01S17/32
CPC分类号： G02F1/1326 , G01S7/4817 , G01S17/10 , G01S17/325 , G01S17/42 , G01S17/89 , G02B6/12004 , G02B2006/12061 , G02B2006/12147 , G02F1/292
摘要： A solid state photonics circuit having a liquid crystal (LC) layer for beam steering. The LC layer can provide tuning of an array of waveguides by controlling the application of voltage to the liquid crystal. The application of voltage to the liquid crystal can be controlled to perform beam steering with the light signal based on different tuning in each of the waveguides of the array. The waveguides are disposed in a substrate having an oxide or other insulating layer with an opening. The opening in the oxide layer exposes a portion of a path of the array of waveguides. The waveguides are exposed to the liquid crystal through the oxide opening, which allows the voltage changes to the liquid crystal to tune the optical signals in the waveguides.
摘要翻译：一种具有用于光束转向的液晶（LC）层的固态光子电路。 LC层可以通过控制对液晶的电压施加来提供波导阵列的调谐。可以控制对液晶的电压施加，使用基于在阵列的每个波导中的不同调谐的光信号进行光束转向。波导设置在具有开口的氧化物或其它绝缘层的基板中。氧化物层中的开口暴露波导阵列的路径的一部分。波导通过氧化物开口暴露于液晶，这允许液晶的电压改变以调谐波导中的光信号。

4. 发明授权

US08803268B2 Vertical mirror in a silicon photonic circuit 有权
标题翻译：硅光子电路中的垂直镜
公开(公告)号：US08803268B2
公开(公告)日：2014-08-12
申请号：US13871083
申请日：2013-04-26
申请人： Intel Corporation
发明人： John Heck , Ansheng Liu , Michael T. Morse , Haisheng Rong
IPC分类号： H01L27/14
CPC分类号： H01L31/02327 , G02B6/4214
摘要： A vertical total internal reflection (TIR) mirror and fabrication thereof is made by creating a re-entrant profile using crystallographic silicon etching. Starting with an SOI wafer, a deep silicon etch is used to expose the buried oxide layer, which is then wet-etched (in HF), opening the bottom surface of the Si device layer. This bottom silicon surface is then exposed so that in a crystallographic etch, the resulting shape is a re-entrant trapezoid with facets These facets can be used in conjunction with planar silicon waveguides to reflect the light upwards based on the TIR principle. Alternately, light can be coupled into the silicon waveguides from above the wafer for such purposes as wafer level testing.
摘要翻译：垂直全内反射（TIR）镜及其制造是通过使用晶体硅蚀刻创建入门轮廓而制成的。从SOI晶片开始，使用深硅蚀刻来暴露掩埋氧化物层，然后将其湿法蚀刻（在HF中），打开Si器件层的底表面。然后将该底部硅表面暴露，使得在晶体刻蚀中，所得到的形状是具有刻面的重入梯形。这些刻面可以与平面硅波导结合使用以基于TIR原理向上反射光。或者，光可以从晶片上方耦合到硅波导中，用于诸如晶片级测试的目的。

5. 发明申请

US20220413213A1 SILICON PHOTONIC INTEGRATED CIRCUITS ON SUBSTRATES WITH STRUCTURED INSULATORS 有权
公开(公告)号：US20220413213A1
公开(公告)日：2022-12-29
申请号：US17358912
申请日：2021-06-25
申请人： Intel Corporation
发明人： Harel Frish , John Heck , Randal Appleton , Stefan Meister , Haisheng Rong , Joshua Keener , Michael Favaro , Wesley Harrison , Hari Mahalingam , Sergei Sochava
IPC分类号： G02B6/12 , H01S5/026 , G02B6/122
摘要： Silicon photonic integrated circuit (PIC) on a multi-zone semiconductor on insulator (SOI) substrate having at least a first zone and a second zone. Various optical devices of the PIC may be located above certain substrate zones that are most suitable. A first length of a photonic waveguide structure comprises the crystalline silicon and is within the first zone, while a second length of the waveguide structure is within the second zone. Within a first zone, the crystalline silicon layer is spaced apart from an underlying substrate material by a first thickness of dielectric material. Within the second zone, the crystalline silicon layer is spaced apart from the underlying substrate material by a second thickness of the dielectric material.

6. 发明授权

US10914874B2 Metasurface devices for display and photonics devices 有权
公开(公告)号：US10914874B2
公开(公告)日：2021-02-09
申请号：US16793740
申请日：2020-02-18
申请人： Intel Corporation
发明人： Khaled Ahmed , John Heck , Ramon Cancel Olmo , Richmond Hicks , Olga Gorbounova
IPC分类号： G02B5/02 , G02B6/42 , G02B6/30
摘要： Disclosed herein are display and photonic devices utilizing metasurfaces. An optical device comprising an optical component and an optical transmission medium is disclosed. A waveguide couples the optical component and the optical transmission medium. A metasurface is disposed on an end of the waveguide and arranged to increase an optical coupling between the waveguide and the optical transmission medium. Additionally, a display comprising a number of light emitting elements and a metasurface for each of the light emitting elements. The metasurface arranged to eliminate screen door effect in virtual reality display systems.

7. 发明授权

US10466515B2 On-chip optical isolator 有权
公开(公告)号：US10466515B2
公开(公告)日：2019-11-05
申请号：US15071105
申请日：2016-03-15
申请人： Intel Corporation
发明人： John Heck , David N. Hutchison , Jie Sun , Haisheng Rong , Woosung Kim
IPC分类号： G02B6/13 , G02B6/12 , G02B6/27 , G02B6/293 , G02F1/095 , H01S5/00 , G02B6/132 , G02F1/00
摘要： Embodiments herein relate to photonic integrated circuits with an on-chip optical isolator. A photonic transmitter chip may include a laser and an on-chip isolator optically coupled with the laser that includes an optical waveguide having a section coupled with a magneto-optic liquid phase epitaxy grown garnet film. In some embodiments, a cladding may be coupled with the garnet film, the on-chip isolator may be arranged in a Mach-Zehnder interferometer configuration, the waveguide may include one or more polarization rotators, and/or the garnet film may be formed of a material from a rare-earth garnet family. Other embodiments may be described and/or claimed.

8. 发明申请

US20190121036A1 REFLOW COMPATIBLE OPTICAL PACKAGING 审中-公开
公开(公告)号：US20190121036A1
公开(公告)日：2019-04-25
申请号：US16225248
申请日：2018-12-19
申请人： Intel Corporation
发明人： John Heck , Hari Mahalingam , Paul Yu , Kumar Satya Harinadh Potluri
IPC分类号： G02B6/42
摘要： In various embodiments, optical fibers may be placed into V-shaped grooves in a substrate. A lid may then be placed on top of the optical fibers to hold them accurately in place, and the lid may be attached to the substrate using a reflow solder technique. Epoxy may then be applied as a strain relief. Because the V-shaped grooves and optical waveguides are manufactured with precision on the same substrate, precise alignment between these two may be achieved. Because the epoxy is applied after reflow, the epoxy may not be exposed to reflow temperatures, which might otherwise cause the epoxy to distort during the cure process.

9. 发明申请

US20160195397A1 OPTO-MECHANICAL INERTIAL SENSOR 有权
标题翻译：光机械惯性传感器
公开(公告)号：US20160195397A1
公开(公告)日：2016-07-07
申请号：US14106158
申请日：2013-12-13
申请人： Intel Corporation
发明人： Suraj Bramhavar , David N. Hutchison , John Heck
IPC分类号： G01C19/72 , G01C19/56 , G01D5/353
CPC分类号： G01C19/722 , G01C19/56 , G01C19/5719 , G01D5/35374 , G01P15/093 , G01P2015/084 , G02B6/4225
摘要： Embodiments of the present disclosure are directed towards a micro-electromechanical system (MEMS) sensing apparatus, including a laser arrangement configured to generate a light beam, a first waveguide configured to receive and output the light beam, and a second waveguide aligned endface to endface with the first waveguide. The second waveguide may be configured to receive at least a portion of the light beam from the first waveguide via optical coupling through the aligned endfaces. Either the first or second waveguide may be configured to be moveable in response to an inertial change of the apparatus, wherein movement of the first or second waveguide causes a corresponding change in light intensity of the portion of the light beam, the change in light intensity indicating a measure of the inertial change. Other embodiments may be described and/or claimed.
摘要翻译：本公开的实施例涉及一种微机电系统（MEMS）感测装置，其包括被配置为产生光束的激光装置，被配置为接收和输出光束的第一波导，以及将端面与端面对准的第二波导与第一波导。第二波导可以被配置为通过经由对准的端面的光耦合来接收来自第一波导的光束的至少一部分。第一或第二波导可以被配置为响应于设备的惯性变化而可移动，其中第一或第二波导的移动导致光束部分的光强度的相应变化，光强度的变化表明惯性变化的度量。可以描述和/或要求保护其他实施例。

10. 发明授权

US09285391B2 Optomechanical inertial sensor 有权
标题翻译：光机械惯性传感器
公开(公告)号：US09285391B2
公开(公告)日：2016-03-15
申请号：US14106259
申请日：2013-12-13
申请人： Intel Corporation
发明人： David N. Hutchison , John Heck
IPC分类号： G01B9/02 , G01P15/093 , G01C19/56 , G01P15/08
CPC分类号： G01P15/093 , G01B9/02023 , G01C19/56 , G01C19/5712 , G01C19/5733 , G01C19/5776 , G01P2015/0848
摘要： Embodiments of the present disclosure are directed towards techniques and configurations for MEMS sensing device configured to determine inertial change applied to the device. In one instance, the device may comprise a laser arrangement configured to generate a light beam, and a waveguide configured to split the light beam into two portions. The waveguide may include two arms through which the respective portions of the light beam may respectively pass, and disposed substantially parallel with each other and joined together around their respective ends to recombine the portions into a light beam. One of the arms may be deformable. A deformation of the arm may result in a change of an optical path length of a portion of the light beam traveling through the arm, causing a detectable change in light intensity of the recombined light beam outputted by the waveguide. Other embodiments may be described and/or claimed.
摘要翻译：本公开的实施例涉及用于确定施加到该装置的惯性变化的MEMS感测装置的技术和配置。在一个实例中，该装置可以包括被配置为产生光束的激光装置和被配置为将光束分成两部分的波导。波导可以包括两个臂，光束的各个部分可以分别通过该臂，并且基本上彼此平行地设置并且在其各自的端部处连接在一起，以将这些部分重新组合成光束。其中一个臂可以是可变形的。臂的变形可能导致穿过臂的光束的一部分的光路长度的变化，导致由波导输出的复合光束的光强度的可检测变化。可以描述和/或要求保护其他实施例。

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