专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明申请

US20230115486A1 Charged Particle Beam System and Control Method Therefor 有权
公开(公告)号：US20230115486A1
公开(公告)日：2023-04-13
申请号：US17964516
申请日：2022-10-12
申请人： JEOL Ltd.
发明人： Takeshi Kaneko , Isamu Ishikawa , Eiji Okunishi
IPC分类号： H01J37/04 , H01J37/26 , H01J37/20
摘要： Provided is a charged particle beam system capable of preventing the data acquisition time from increasing. A control method for the system is also provided. The charged particle beam system includes: a beam blanker for blanking a charged particle beam; a sample stage on which a sample is tiltably held and thus can assume a tilt angle; a blanking controller for controlling the blanking of the charged particle beam and causing a pulsed beam having a duty ratio to be directed at the sample; and a tilt controller for controlling the tilt angle of the sample. The blanking controller sets the duty ratio of the pulsed beam based on the tilt angle of the sample.

2. 发明申请

US20140374594A1 Detector and Charged Particle Beam Instrument 有权
标题翻译：检测器和带电粒子束仪器
公开(公告)号：US20140374594A1
公开(公告)日：2014-12-25
申请号：US14307551
申请日：2014-06-18
申请人： JEOL Ltd.
发明人： Takeshi Kaneko
IPC分类号： G01T1/20
CPC分类号： G01T1/2008 , H01J37/244 , H01J37/28 , H01J2237/2443
摘要： A detector (100) is used to detect a charged particle beam (EB), and includes a first light emission portion (10) for converting the charged particle beam into light, a second light emission portion (20) for converting the charged particle beam transmitted through the first light emission portion (10) into light, and a light detector (30) for detecting the light produced by the first light emission portion (10) and the light produced by the second light emission portion (20). The first light emission portion (10) is a powdered scintillator. The second light emission portion (20) is a single crystal scintillator.
摘要翻译：检测器（100）用于检测带电粒子束（EB），并且包括用于将带电粒子束转换成光的第一发光部分（10），用于转换带电粒子束的第二发光部分（20）通过第一发光部分（10）透射的光;以及用于检测由第一发光部分（10）产生的光和由第二发光部分（20）产生的光的光检测器（30）。第一光发射部分（10）是粉末闪烁体。第二发光部（20）是单晶闪烁体。

3. 发明申请

US20220328280A1 Electron Microscope and Specimen Contamination Prevention Method 有权
公开(公告)号：US20220328280A1
公开(公告)日：2022-10-13
申请号：US17718976
申请日：2022-04-12
申请人： JEOL Ltd.
发明人： Takeshi Kaneko , Norihiro Okoshi , Yu Jimbo , Sang Tae Park
IPC分类号： H01J37/22 , H01J37/28 , H01J37/244
摘要： A contamination prevention irradiation device includes a generation unit and a mirror unit. The generation unit generates a laser beam. The mirror unit has a mirror surface for reflecting a laser beam. The laser beam reflected on the mirror surface is applied to a specimen disposed inside an objective lens. The laser beam is composed of a pulse train. Once a laser beam is applied to the specimen before observation of the specimen, deposition of contaminants on the specimen can be prevented for a predetermined subsequent period.

4. 发明授权

US09029768B2 Detector and charged particle beam instrument 有权
标题翻译：检测器和带电粒子束仪
公开(公告)号：US09029768B2
公开(公告)日：2015-05-12
申请号：US14307551
申请日：2014-06-18
申请人： JEOL Ltd.
发明人： Takeshi Kaneko
IPC分类号： G01N23/00 , G21K7/00 , G01T1/20
CPC分类号： G01T1/2008 , H01J37/244 , H01J37/28 , H01J2237/2443
摘要： A detector (100) is used to detect a charged particle beam (EB), and includes a first light emission portion (10) for converting the charged particle beam into light, a second light emission portion (20) for converting the charged particle beam transmitted through the first light emission portion (10) into light, and a light detector (30) for detecting the light produced by the first light emission portion (10) and the light produced by the second light emission portion (20). The first light emission portion (10) is a powdered scintillator. The second light emission portion (20) is a single crystal scintillator.
摘要翻译：检测器（100）用于检测带电粒子束（EB），并且包括用于将带电粒子束转换成光的第一发光部分（10），用于转换带电粒子束的第二发光部分（20）通过第一发光部分（10）透射的光;以及用于检测由第一发光部分（10）产生的光和由第二发光部分（20）产生的光的光检测器（30）。第一光发射部分（10）是粉末闪烁体。第二发光部（20）是单晶闪烁体。

5. 发明申请

US20220216030A1 Sample Loading Method and Charged Particle Beam Apparatus 有权
公开(公告)号：US20220216030A1
公开(公告)日：2022-07-07
申请号：US17570077
申请日：2022-01-06
申请人： JEOL Ltd.
发明人： Tomoyuki Naganuma , Naoki Fujimoto , Takeshi Kaneko
IPC分类号： H01J37/20
摘要： Provided is a sample loading method of loading a cooled sample into a sample exchange chamber of a charged particle beam apparatus includes: attaching the sample container in which a sample and liquid nitrogen are accommodated to the sample exchange chamber via a gate valve; evacuating a space between a liquid surface of the liquid nitrogen and the gate valve in a state in which the gate valve is closed; discharging the liquid nitrogen in the sample container after the space between the liquid surface of the liquid nitrogen and the gate valve has been evacuated; evacuating a space in the sample container after the liquid nitrogen in the sample container has been discharged; and opening the gate valve after the space in the sample container has been evacuated.

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式