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    • 7. 发明授权
    • Method and apparatus for in-situ endpoint detection using electrical sensors
    • 使用电传感器进行原位端点检测的方法和装置
    • US06515493B1
    • 2003-02-04
    • US09547579
    • 2000-04-12
    • John A. AdamsThomas F. A. Bibby, Jr.
    • John A. AdamsThomas F. A. Bibby, Jr.
    • G01R2708
    • B24B37/013B24B49/04B24B49/10G01B7/06G01B7/105
    • A method and apparatus for determining the endpoint of a planarization process during chemical mechanical planarization (CMP) and more specifically for determining endpoint of a planarization process for a thin metal film deposited on a wafer's surface and/or a method of altering the plating and deplating of the thin metal film during the planarization process. The apparatus includes one or more probes embedded in a working surface. The probes are in electrical communication with the thin film on the wafer's surface as it is planarized against the working surface. The probes measure the thickness of the thin metal film and/or induce a current in the thin metal film to adjust the plating and deplating that occurs during the planarization process.
    • 用于确定化学机械平面化(CMP)期间的平坦化工艺的终点的方法和装置,更具体地说,用于确定沉积在晶片表面上的薄金属膜的平坦化工艺的终点和/或改变电镀和脱镀方法 的平坦化过程中的金属薄膜。 该装置包括嵌入工作表面中的一个或多个探针。 当探针与工作表面平坦化时,晶片表面上的薄膜电连通。 探针测量薄金属膜的厚度和/或在薄金属膜中感应电流以调节在平坦化过程中发生的电镀和脱镀。
    • 10. 发明授权
    • Systems and methods for detecting normal levels of bacteria in water using a multiple angle light scattering (MALS) instrument
    • 使用多角度光散射(MALS)仪器检测水中细菌的正常水平的系统和方法
    • US08243272B2
    • 2012-08-14
    • US12868654
    • 2010-08-25
    • John A. Adams
    • John A. Adams
    • G01N21/00
    • G01N15/147G01N21/53G01N33/1893G01N2015/0088G01N2015/1477G01N2015/1497
    • A particle detection system uses a camera to produce a picture based on the scattered light generated by a particle in a liquid medium, when a laser beam is incident on the particle. These pictures are then automatically analyzed through the use of a processing system (e.g., a computer). The processing system is configured to record the forward scattering intensity (e.g., amplitude) and the picture of the scattered light rays to generate a classification of the particle causing the scattering. Count rate and trends of the classified particles are monitored to detect a change that is representative of the overall health safety of the water or by knowing the levels of bacteria in process water, such as Reverse Osmosis (RO) feed water, reject brine, and product water, the operator may better monitor the life and condition of the RO membrane.
    • 当激光束入射到粒子上时,粒子检测系统使用相机基于由液体介质中的粒子产生的散射光来产生图像。 然后通过使用处理系统(例如,计算机)自动分析这些图像。 处理系统被配置为记录散射光线的前向散射强度(例如振幅)和图像,以产生导致散射的粒子的分类。 监测分类颗粒的计数率和趋势,以检测代表水的整体健康安全性的变化或通过了解工艺用水中的细菌水平,例如反渗透(RO)给水,拒收盐水和 产品水,操作者可以更好地监测RO膜的使用寿命和状况。