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1. 发明申请

US20120287435A1 AUTOMATIC DILUTION FOR MULTIPLE ANGLE LIGHT SCATTERING (MALS) INSTRUMENT 审中-公开
标题翻译：多角度散射（MALS）仪器的自动曝光
公开(公告)号：US20120287435A1
公开(公告)日：2012-11-15
申请号：US13106779
申请日：2011-05-12
申请人： John A. Adams , Steven Stephenson
发明人： John A. Adams , Steven Stephenson
IPC分类号： G01N21/00
CPC分类号： G01N21/51 , G01N1/38 , G01N15/1429 , G01N2021/4707
摘要： A method for detecting and identifying a particle in a liquid, the system comprises controlling the provisioning of a water sample using a computer controlled metering pump; mixing the water sample with particle free filtered water to provide a diluted water sample when required; at the end of a measurement interval, determining a Total Counts Per Minute (TCPM) for the diluted water sample; determining an additional counts per minute from the sample (SCPM) for the diluted water sample; if the SCPM is greater then a Lower Optimum count Rate (LOCR) and less than a Upper Optimum Count Rate (UOCR), then setting a dilution ratio (DR); and correcting an events classification based on the DR.
摘要翻译：一种用于检测和识别液体中的颗粒的方法，所述系统包括使用计算机控制计量泵来控制供水样品; 将水样品与无颗粒过滤水混合，以便在需要时提供稀释的水样品; 在测量间隔结束时，确定稀释水样品的总计数（TCPM）; 从样品（SCPM）确定稀释水样品的每分钟附加计数; 如果SCPM大于较低最优计数率（LOCR），小于上最佳计数率（UOCR），则设置稀释比（DR）; 以及基于DR来校正事件分类。

2. 发明授权

US08085399B2 Systems and methods for a multiple angle light scattering (MALS) instrument having two-dimensional detector array 失效
标题翻译：具有二维检测器阵列的多角度散射（MALS）仪器的系统和方法
公开(公告)号：US08085399B2
公开(公告)日：2011-12-27
申请号：US12534780
申请日：2009-08-03
申请人： John A. Adams , Scott H. Bloom , Victor J. Chan , Kristina M. Crousore , Joseph S. Gottlieb , Oscar Hemberg , John J. Lyon , Brett A. Spivey
发明人： John A. Adams , Scott H. Bloom , Victor J. Chan , Kristina M. Crousore , Joseph S. Gottlieb , Oscar Hemberg , John J. Lyon , Brett A. Spivey
IPC分类号： G01N21/00
CPC分类号： G01N15/1459 , G01N15/1434 , G01N15/1463 , G01N15/147 , G01N15/1475 , G01N2015/0088
摘要： A particle detection system uses a reflective optic comprising a curved surface to detect high angle scattered light generated by a particle in a liquid medium, when a laser beam is incident on the particle. When the particles transit the laser beam, light is scattered in all directions and is described by MIE scattering theory for particles about the size of the wavelength of light and larger or Rayleigh Scattering when the particles are smaller than the wavelength of light. By using the reflective optic, the scattered light can be detected over angles that are greater than normally obtainable.
摘要翻译：当激光束入射到粒子上时，粒子检测系统使用包括弯曲表面的反射光学器件来检测由液体介质中的粒子产生的高角散射光。当粒子通过激光束时，光在所有方向上散射，并且当颗粒小于光的波长时，通过MIE散射理论对关于光的波长大小或Rayleigh散射的粒子的粒子进行描述。通过使用反射光学元件，可以在大于通常可获得的角度上检测散射光。

3. 发明授权

US07499581B2 Vision system to calculate a fluid volume in a container 有权
标题翻译：视觉系统来计算容器中的流体体积
公开(公告)号：US07499581B2
公开(公告)日：2009-03-03
申请号：US11055545
申请日：2005-02-10
申请人： Dennis Tribble , Abdul Wahid Khan , John A. Adams
发明人： Dennis Tribble , Abdul Wahid Khan , John A. Adams
IPC分类号： G06K9/00 , A61M5/00 , G01N21/49 , G01B11/22
CPC分类号： G06T7/0006 , A61M5/1684 , A61M5/31568 , A61M2205/3306 , A61M2205/3389 , B65B3/003 , B65B3/30 , G01B11/00 , G06F19/00 , G06T7/62 , G06T2207/30004
摘要： Broadly speaking the present invention is directed to a system for calculating a volume of fluid that is disposed within a container. The system includes (1) an imaging device that captures and stores an image of at least the volume of fluid in the container; (2) a background disposed behind the container so that at least the volume of fluid in the container is disposed in front of the background; and (3) a processor that performs at least one operation on the stored image to calculate the volume of the fluid within the container.
摘要翻译：概括地说，本发明涉及一种用于计算设置在容器内的流体体积的系统。该系统包括（1）成像装置，其捕获并存储容器中的至少一定体积的液体的图像; （2）设置在容器后面的背景，使得容器中的至少体积的流体被设置在背景的前面; 和（3）对存储的图像执行至少一个操作以计算容器内的流体的体积的处理器。

4. 发明授权

US07176809B2 Environmental data recorder for micro-well plate 失效
标题翻译：微孔板环境数据记录仪
公开(公告)号：US07176809B2
公开(公告)日：2007-02-13
申请号：US10769537
申请日：2004-01-30
申请人： Brian L. Ganz , John A. Adams , Joseph Gottlieb , John Andrew Moulds , Jason Kovach
发明人： Brian L. Ganz , John A. Adams , Joseph Gottlieb , John Andrew Moulds , Jason Kovach
IPC分类号： H04Q9/00 , G08C19/22 , B65B43/42 , B67C3/00 , G08C19/06 , C12M1/00 , C12M1/40 , G01N31/00 , B65D85/00 , B65D85/30
CPC分类号： G01D9/005
摘要： An environmental data recorder for recording environmental factors acting on micro-well plates. The environmental data recorder has sensors for sensing environmental factors and it has a microcontroller programmed to receive and process inputs from the sensors. The sensors and microcontroller are housed in a recorder housing unit. The recording housing unit has exterior dimensions that are approximately equal to the exterior dimensions of the micro-well plates enabling the recorder housing unit to be handled by the same robotic device handling the micro-well plates. In a preferred embodiment, the environmental data recorder's sensors are a temperature sensor, a humidity sensor and an accelerometer.
摘要翻译：用于记录作用于微孔板的环境因素的环境数据记录仪。环境数据记录器具有用于感测环境因素的传感器，并且具有被编程为接收和处理来自传感器的输入的微控制器。传感器和微控制器安装在记录器外壳单元中。记录壳体单元的外部尺寸大致等于微孔板的外部尺寸，使得记录器壳体单元能够由处理微孔板的相同的机器人装置来处理。在优选实施例中，环境数据记录器的传感器是温度传感器，湿度传感器和加速度计。

5. 发明授权

US06361646B1 Method and apparatus for endpoint detection for chemical mechanical polishing 有权
标题翻译：用于化学机械抛光的端点检测的方法和装置
公开(公告)号：US06361646B1
公开(公告)日：2002-03-26
申请号：US09271729
申请日：1999-03-18
申请人： Thomas Frederick Allen Bibby, Jr. , John A. Adams , Robert A. Eaton
发明人： Thomas Frederick Allen Bibby, Jr. , John A. Adams , Robert A. Eaton
IPC分类号： C23F104
CPC分类号： B24B37/013 , B24B49/12 , B24D7/12 , H01L21/30625
摘要： An apparatus to generate an endpoint signal to control the polishing of thin films on a semiconductor wafer surface includes a through-hole in a polish pad, a light source, a fiber optic cable, a light sensor, and a computer. A pad assembly includes the polish pad, a pad backer, and a pad backing plate. The pad backer includes a pinhole and a canal that holds the fiber optic cable. The pad backer holds the polish pad so that the through-hole is coincident with the pinhole opening. A wafer chuck holds a semiconductor wafer so that the surface to be polished is against the polish pad. The light source provides light within a predetermined bandwidth. The fiber optic cable propagates the light through the through-hole opening to illuminate the surface as the pad assembly orbits and the chuck rotates. The light sensor receives reflected light from the surface through the fiber optic cable and generates reflected spectral data. The computer receives the reflected spectral data and calculates an endpoint signal. For metal film polishing, the endpoint signal is based upon the intensities of two individual wavelength bands. For dielectric film polishing, the endpoint signal is based upon fitting of the reflected spectrum to an optical reflectance model to determine remaining film thickness. The computer compares the endpoint signal to predetermined criteria and stops the polishing process when the endpoint signal meets the predetermined criteria.
摘要翻译：用于产生端点信号以控制半导体晶片表面上的薄膜抛光的装置包括抛光垫，光源，光纤电缆，光传感器和计算机中的通孔。衬垫组件包括抛光垫，垫衬垫和衬垫背板。垫衬垫包括一个针孔和一个保持光缆的运河。垫垫支撑抛光垫，使得通孔与针孔开口重合。晶片卡盘夹持半导体晶片，使得待抛光的表面抵靠抛光垫。光源在预定带宽内提供光。光纤电缆通过通孔开口传播光线，以便当焊盘组件轨道运动并且卡盘旋转时照亮表面。光传感器通过光纤电缆接收来自表面的反射光，并产生反射的光谱数据。计算机接收反射光谱数据并计算端点信号。对于金属膜抛光，端点信号基于两个单独波长带的强度。对于介电膜抛光，端点信号基于将反射光谱拟合到光学反射率模型以确定剩余的膜厚度。计算机将端点信号与预定标准进行比较，并且当端点信号满足预定标准时停止抛光过程。

6. 发明授权

US06184139B2 Oscillating orbital polisher and method 有权
标题翻译：振荡轨道抛光机和方法
公开(公告)号：US06184139B2
公开(公告)日：2001-02-06
申请号：US09153993
申请日：1998-09-17
申请人： John A. Adams , Everett D. Smith , Stephen C. Schultz
发明人： John A. Adams , Everett D. Smith , Stephen C. Schultz
IPC分类号： H01L21302
CPC分类号： B24B37/042 , B24B23/03 , Y10S977/888
摘要： A method and apparatus for improving uniformity of the rate of removal of material from the surface of a semiconductor substrate by chemical mechanical polishing. In accordance with the invention, the semiconductor substrate is subjected to a combination of polishing motions, including orbital motion, and at least one additional polishing motion selected from rotational, oscillating, sweeping, and linear polishing motions. The invention also provides an improved method for conditioning polishing pads to provide more uniform conditioning and to extend their useful life span.
摘要翻译：一种用于通过化学机械抛光改善材料从半导体衬底的表面去除速率的均匀性的方法和装置。根据本发明，半导体衬底经受包括轨道运动在内的抛光运动和从旋转，摆动，扫掠和线性抛光运动中选择的至少一个附加抛光运动的组合。本发明还提供了一种用于调节抛光垫以提供更均匀调节并延长其使用寿命的改进方法。

7. 发明授权

US6121152A Method and apparatus for planarization of metallized semiconductor wafers using a bipolar electrode assembly 失效
标题翻译：使用双极电极组件平坦化金属化半导体晶片的方法和装置
公开(公告)号：US6121152A
公开(公告)日：2000-09-19
申请号：US96309
申请日：1998-06-11
申请人： John A. Adams , Gerald A. Krulik , Everett D. Smith
发明人： John A. Adams , Gerald A. Krulik , Everett D. Smith
IPC分类号： B23H5/08 , C25F3/16 , H01L21/321 , H01L21/302
CPC分类号： B23H5/08 , C25F3/16 , H01L21/32115 , Y10S438/977
摘要： Planarization of metal interconnections in semiconductor wafer manufacturing is performed by providing relative motion between a bipolar electrode assembly scanned and a single metallized surface of a semiconductor wafer without necessary physical contact with the wafer or direct electrical connection thereto.
摘要翻译：在半导体晶片制造中的金属互连的平面化是通过提供扫描的双极电极组件和半导体晶片的单个金属化表面之间的相对运动来进行的，而不需要与晶片的物理接触或与其直接电连接。

8. 发明授权

US5876685A Separation and purification of fluoride from industrial wastes 失效
标题翻译：从工业废物中分离和纯化氟化物
公开(公告)号：US5876685A
公开(公告)日：1999-03-02
申请号：US707907
申请日：1996-09-11
申请人： Gerald A. Krulik , John A. Adams , Dieter Dornisch , David W. Persichini , Christopher S. Blatt
发明人： Gerald A. Krulik , John A. Adams , Dieter Dornisch , David W. Persichini , Christopher S. Blatt
IPC分类号： B01D15/04 , C01B7/19 , C02F1/04 , C02F1/42 , C02F1/58 , C02F1/60 , C02F1/66 , C02F9/00
CPC分类号： C02F9/00 , C01B7/191 , C01B7/196 , C02F1/583 , C02F1/60 , C02F1/04 , C02F1/42 , C02F1/66 , C02F2101/14 , C02F2103/346
摘要： A method for the removal and purification of substantially all of the fluoride ions contained in a solution containing greater than 10 parts per million (ppm) fluoride ion, a mixture of other anions, silicon in the form of a fluorosilicic acid, silicic acid, silicates, or silicon tetrafluoride, and optionally also containing complex metal fluorides, to produce an ultrapure hydrofluoric acid, comprising the steps of (a) adjusting the pH of the solution to an alkaline pH to hydrolyze the fluorosilicic acid and any complex metal fluorides; (b) removing the fluoride ions and other anions from the solution by passing the solution through an ion exchange resin, where the ion exchange resin is adapted to adsorb substantially all of the fluoride passed over the ion exchange resin; (c) displacing the fluoride ions and other anions bound to the ion exchange resin, thereby forming a mixture of anions in an effluent emanating from resin; (d) optionally concentrating the effluent at a high pH and then lowering the pH; and (e) distilling the mixture of anions in the effluent from a sulfuric acid solution to generate ultrapure hydrofluoric acid. An apparatus useful for practicing the method is also disclosed.
摘要翻译：除去和纯化含有大于10ppm（ppm）氟离子，其它阴离子的混合物，氟硅酸形式的硅，硅酸，硅酸盐的溶液中所含的基本上所有的氟离子的方法，或四氟化硅，以及任选地还含有复合金属氟化物，以制备超纯氢氟酸，包括以下步骤：（a）将溶液的pH调节至碱性pH以水解氟硅酸和任何复合金属氟化物; （b）通过使溶液通过离子交换树脂从溶液中除去氟离子和其它阴离子，其中离子交换树脂适于吸附通过离子交换树脂的基本上所有的氟化物; （c）置换与离子交换树脂结合的氟离子和其它阴离子，从而在由树脂发出的流出物中形成阴离子的混合物; （d）任选地在高pH下浓缩流出物，然后降低pH值; 和（e）将来自硫酸溶液的流出物中的阴离子混合物蒸馏以产生超纯氢氟酸。还公开了一种用于实施该方法的装置。

9. 发明授权

US5664990A Slurry recycling in CMP apparatus 失效
标题翻译： CMP设备中的浆料回收
公开(公告)号：US5664990A
公开(公告)日：1997-09-09
申请号：US681794
申请日：1996-07-29
申请人： John A. Adams , Gerald A. Krulik , C. Randall Harwood
发明人： John A. Adams , Gerald A. Krulik , C. Randall Harwood
IPC分类号： B24B37/04 , B24B55/03 , B24B57/00 , B24B1/00
CPC分类号： B24B57/02 , B24B37/04 , B24B55/03 , Y10S134/902
摘要： Recycled slurry is continuously blended with the slurry in use to provide a consistent polishing rate while consuming or discarding a small fraction of the slurry flowing continuously across the polishing pad. The slurry is recovered in a catch ring and fed to a recycle loop to blend the recovered slurry with fresh slurry, rejuvenating chemicals, or water; test the blend; filter the blend; and return the blend to the polishing pad. The volume returned to the pad slightly exceeds the volume recovered, causing the catch ring to overflow. Rinse water is recycled in the same fashion to keep the polishing pad wet between polishing cycles.
摘要翻译：再循环浆料与浆料在使用中连续混合以提供一致的抛光速率，同时消耗或丢弃连续流过抛光垫的少量浆料。将浆料回收到捕获环中并进料到循环回路中以将回收的浆料与新鲜浆料，再生化学品或水混合; 测试混合物; 过滤混合物; 并将混合物返回到抛光垫。返回到垫的体积稍微超过恢复的体积，导致卡环溢出。冲洗水以相同的方式回收，以保持抛光垫在抛光周期之间变湿。

10. 发明授权

US5583904A Continuous linear scan laminography system and method 失效
标题翻译：连续线性扫描系统和方法
公开(公告)号：US5583904A
公开(公告)日：1996-12-10
申请号：US419794
申请日：1995-04-11
申请人： John A. Adams
发明人： John A. Adams
IPC分类号： G01N23/04 , G03B42/02 , H04N7/18 , G01N23/00
CPC分类号： G01N23/046 , G01N2223/419
摘要： An improved laminography system that allows generation of high speed and high resolution X-ray laminographs by using a continuous scan method with two or more linear detectors and one or more collimated X-ray sources. Discrete X-ray images, with different viewing angles, are generated by each detector. The discrete X-ray images are then combined by a computer to generate laminographic images of different planes in the object under test, or analyzed in such a manner to derive useful data about the object under test. In one embodiment, the improved scanning laminography system does not require any motion of the source or detectors, but simply a coordinated linear motion of the object under test. Higher speed is achieved over conventional laminography systems due to the continuous nature of the scan, and due to the ability to generate any plane of data in the object under test without having to re image the object.
摘要翻译：一种改进的层析系统，其允许通过使用具有两个或更多个线性检测器和一个或多个准直X射线源的连续扫描方法产生高速和高分辨率X射线照相机。具有不同视角的离散X射线图像由每个检测器产生。然后将离散的X射线图像由计算机组合以产生被测物体中的不同平面的laminographic图像，或以这样的方式分析以得到关于被测物体的有用数据。在一个实施例中，改进的扫描层析系统不需要源或检测器的任何运动，而是简单地对被测物体的协调线性运动。由于扫描的连续性，并且由于在被测物体内产生任何数据平面的能力而不必对物体进行成像，因此与传统的层析系统相比，实现了更高的速度。

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