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1. 发明授权

US08501300B2 Coated polymeric substrates having improved surface smoothness suitable for use in flexible electronic and opto-electronic devices 有权
标题翻译：涂覆的聚合物基材具有改善的表面光滑度，适用于柔性电子和光电子器件
公开(公告)号：US08501300B2
公开(公告)日：2013-08-06
申请号：US12640835
申请日：2009-12-17
申请人： Julian Neal Robinson , Robert William Eveson , Karl Rakos
发明人： Julian Neal Robinson , Robert William Eveson , Karl Rakos
IPC分类号： B32B3/00 , B32B27/06 , B32B27/08 , B32B27/20 , B32B27/36
CPC分类号： H01L51/0097 , C08J7/047 , C08J2367/02 , C08J2483/00 , C09D183/04 , H01L51/0002 , H01L51/52 , H05B33/14 , Y02E10/549 , Y02P70/521 , Y10S428/91 , Y10T428/1045 , Y10T428/1086 , Y10T428/1379 , Y10T428/24355 , Y10T428/24372 , Y10T428/24421 , Y10T428/25 , Y10T428/259 , Y10T428/26 , Y10T428/269 , Y10T428/31663 , Y10T428/31786 , C08L2666/54
摘要： A method of manufacture of a coated polymeric film which comprises performing in sequence the steps of: (i) forming a substrate layer comprising poly(ethylene naphthalate) having a thickness in a range from 50 μm to 250 μm; (ii) stretching the substrate layer in at least one direction; (iii) heat-setting the substrate layer under dimensional restraint at a tension in the range of about 19 to about 75 kg/m of film width, at a temperature above the glass transition temperature of the poly(ethylene naphthalate) but below the melting temperature thereof; (iv) heat-stabilizing the substrate layer under a tension of less than 5 kg/m of film width, and at a temperature above the glass transition temperature of the poly(ethylene naphthalate) but below the melting temperature thereof; and (v) disposing a coating layer on a surface of the substrate layer by a process comprising applying a planarizing coating composition thereto such that a surface of said coating layer exhibits an Ra value of less than 0.6 nm, and/or an Rq value of less than 0.8 nm; and wherein the coating layer has a dry thickness in a range from 1 μm to 20 μm and the number of surface peaks in the range 300 to 600 nm per 5 cm2 area (N(300-600)) of the film after coating is less than 50.
摘要翻译：一种制造涂覆的聚合物膜的方法，其包括以下步骤：（i）形成包含厚度在50μm至250μm之间的聚萘二甲酸乙二醇酯的基材层; （ii）在至少一个方向上拉伸基底层; （iii）在高于聚萘二甲酸乙二醇酯的玻璃化转变温度但低于熔融的玻璃化转变温度的温度下，以约19至约75kg / m 2的膜宽度的张力在尺寸限制下热定型基材层温度; （iv）在低于5kg / m 2膜宽的张力和高于聚萘二甲酸乙二醇酯的玻璃化转变温度但低于其熔融温度的温度下对基材层进行热稳定化; 和（v）通过包括在其上施加平坦化涂料组合物使得所述涂层的表面呈现小于0.6nm的Ra值和/或Rq值的方法在基材层的表面上设置涂层小于0.8nm; 并且其中所述涂层的干燥厚度为1μm至20μm，并且涂布后的膜的每5cm2面积（N（300-600））在300-600nm范围内的表面峰数量（N（300-600））较小超过50。

2. 发明授权

US08318289B2 Coated polymeric substrates having improved surface smoothness suitable for use in flexible electronic and opto-electronic devices 有权
标题翻译：涂覆的聚合物基材具有改善的表面光滑度，适用于柔性电子和光电子器件
公开(公告)号：US08318289B2
公开(公告)日：2012-11-27
申请号：US12640826
申请日：2009-12-17
申请人： Julian Neal Robinson , Robert William Eveson , Karl Rakos
发明人： Julian Neal Robinson , Robert William Eveson , Karl Rakos
IPC分类号： B32B27/06 , B32B27/18 , B32B27/28 , B32B27/36
CPC分类号： H01L51/0097 , C08J7/047 , C08J2367/02 , C08J2483/00 , C09D183/04 , H01L51/0002 , H01L51/52 , H05B33/14 , Y02E10/549 , Y02P70/521 , Y10S428/91 , Y10T428/1045 , Y10T428/1086 , Y10T428/1379 , Y10T428/24355 , Y10T428/24372 , Y10T428/24421 , Y10T428/25 , Y10T428/259 , Y10T428/26 , Y10T428/269 , Y10T428/31663 , Y10T428/31786 , C08L2666/54
摘要： A composite film comprising a heat-stabilised, heat-set, oriented poly(ethylene naphthalate) substrate, and a coating layer having a surface; wherein said substrate exhibits one or more of: (i) a shrinkage at 30 mins at 230° C. of less than 1%; and/or (ii) a residual dimensional change ΔLr measured at 25° C. before and after heating the substrate from 8° C. to 200° C. and then cooling to 8° C., of less than 0.75% of the original dimension; and/or (iii) a coefficient of linear thermal expansion (CLTE) within the temperature range from −40° C. to +100° C. of less than 40×10−6/° C.; and wherein the surface of said coating layer exhibits an Ra value of less than 0.6 nm, and/or an Rq value of less than 0.8 nm, the thickness of the substrate is between 50 and 250 μm and wherein the number of surface peaks in the range 300 to 600 nm per 5 cm2 area (N(300-600)) of the film is less than 50.
摘要翻译：一种复合膜，包括热稳定的，热定型的聚萘二甲酸乙二醇酯基材和具有表面的涂层; 其中所述基材表现出以下一种或多种：（i）在230℃下30分钟的收缩率小于1％; 和/或（ii）在将基材从8℃加热至200℃之前和之后在25℃下测量的残余尺寸变化＆Dgr; Lr，然后冷却至8℃，小于0.75％原始尺寸; 和/或（iii）在-40℃至+ 100℃的温度范围内的线性热膨胀系数（CLTE）小于40×10-6 /℃; 并且其中所述涂层的表面呈现小于0.6nm的Ra值和/或小于0.8nm的Rq值，所述基材的厚度为50-250μm，并且其中所述表面峰的数目为范围为300〜600nm / 5cm 2面积（N（300-600））的膜小于50。

3. 发明授权

US07641957B2 Coated polymeric substrates having improved surface smoothness suitable for use in flexible electronic and opto-electronic devices 有权
标题翻译：涂覆的聚合物基材具有改善的表面光滑度，适用于柔性电子和光电子器件
公开(公告)号：US07641957B2
公开(公告)日：2010-01-05
申请号：US10510084
申请日：2003-03-19
申请人： Julian Neal Robinson , Robert William Eveson , Karl Rakos
发明人： Julian Neal Robinson , Robert William Eveson , Karl Rakos
IPC分类号： B32B27/08 , B32B27/20 , B32B27/36 , B05D7/04 , B05D7/24
CPC分类号： H01L51/0097 , C08J7/047 , C08J2367/02 , C08J2483/00 , C09D183/04 , H01L51/0002 , H01L51/52 , H05B33/14 , Y02E10/549 , Y02P70/521 , Y10S428/91 , Y10T428/1045 , Y10T428/1086 , Y10T428/1379 , Y10T428/24355 , Y10T428/24372 , Y10T428/24421 , Y10T428/25 , Y10T428/259 , Y10T428/26 , Y10T428/269 , Y10T428/31663 , Y10T428/31786 , C08L2666/54
摘要： The use of a coating composition comprising: (a) from about 5 to about 50 weight percent solids, the solids comprising from about 10 to about 70 weight percent silica and from about 90 to about 30 weight percent of a partially polymerized organic silanol of the general formula RSi(OH)3, wherein R is selected from methyl and up to about 40% of a group selected from the group consisting of vinyl, phenyl, gamma-glycidoxypropyl, and gamma-methacryloxypropyl, and (b) from about 95 to about 50 weight percent solvent, the solvent comprising from about 10 to about 90 weight percent water and from about 90 to about 10 weight percent lower aliphatic alcohol, wherein the coating composition has a pH of from about 3.0 to about 8.0, for the purpose of improving the surface smoothness of a polymeric substrate, particularly a heat-stabilised, heat-set, oriented polyester substrate, and use of said coated substrate in the manufacture of an electronic or optoelectronic device containing a conjugated conductive polymer.
摘要翻译：涂料组合物的用途包括：（a）约5至约50重量％的固体，固体包含约10至约70重量％的二氧化硅和约90至约30重量％的部分聚合的有机硅烷醇通式RSi（OH）3，其中R选自甲基和至多约40％的选自乙烯基，苯基，γ-缩水甘油氧基丙基和γ-甲基丙烯酰氧基丙基的基团，和（b）约95至约50重量％的溶剂，溶剂包含约10至约90重量％的水和约90至约10重量％的低级脂族醇，其中涂料组合物的pH为约3.0至约8.0，用于提高聚合物基材，特别是热稳定的热定型聚酯基材的表面光滑度，以及使用所述涂覆的基材制造含有共轭共聚物的电子或光电装置导电聚合物。

4. 发明申请

US20100159198A1 COATED POLYMERIC SUBSTRATES HAVING IMPROVED SURFACE SMOOTHNESS SUITABLE FOR USE IN FLEXIBLE ELECTRONIC AND OPTO-ELECTRONIC DEVICES 有权
标题翻译：具有适用于柔性电子和光电设备的改进表面光滑性的涂层聚合物基材
公开(公告)号：US20100159198A1
公开(公告)日：2010-06-24
申请号：US12640826
申请日：2009-12-17
申请人： Julian Neal Robinson , Robert William Eveson , Karl Rakos
发明人： Julian Neal Robinson , Robert William Eveson , Karl Rakos
IPC分类号： B32B3/00
CPC分类号： H01L51/0097 , C08J7/047 , C08J2367/02 , C08J2483/00 , C09D183/04 , H01L51/0002 , H01L51/52 , H05B33/14 , Y02E10/549 , Y02P70/521 , Y10S428/91 , Y10T428/1045 , Y10T428/1086 , Y10T428/1379 , Y10T428/24355 , Y10T428/24372 , Y10T428/24421 , Y10T428/25 , Y10T428/259 , Y10T428/26 , Y10T428/269 , Y10T428/31663 , Y10T428/31786 , C08L2666/54
摘要： The use of a coating composition comprising:(a) from about 5 to about 50 weight percent solids, the solids comprising from about 10 to about 70 weight percent silica and from about 90 to about 30 weight percent of a partially polymerized organic silanol of the general formula RSi(OH)3, wherein R is selected from methyl and up to about 40% of a group selected from the group consisting of vinyl, phenyl, gamma-glycidoxypropyl, and gamma-methacryloxypropyl, and (b) from about 95 to about 50 weight percent solvent, the solvent comprising from about to about 90 weight percent water and from about 90 to about 10 weight percent lower aliphatic alcohol, wherein the coating composition has a pH of from about 3.0 to about 8.0, for the purpose of improving the surface smoothness of a polymeric substrate, particularly a heat-stabilised, heat-set, oriented polyester substrate, and use of said coated substrate in the manufacture of an electronic or opto-electronic device containing a conjugated conductive polymer.
摘要翻译：涂料组合物的用途包括：（a）约5至约50重量％的固体，固体包含约10至约70重量％的二氧化硅和约90至约30重量％的部分聚合的有机硅烷醇通式RSi（OH）3，其中R选自甲基和至多约40％的选自乙烯基，苯基，γ-缩水甘油氧基丙基和γ-甲基丙烯酰氧基丙基的基团，和（b）约95至约50重量％的溶剂，溶剂包含约90重量％的水和约90至约10重量％的低级脂族醇，其中涂料组合物的pH为约3.0至约8.0，为了改善聚合物基材的表面光滑度，特别是热稳定的热定型聚酯基材的表面光滑度，以及所述涂覆的基材在制造包含共轭凝胶的电子或光电装置中的用途高分子聚合物

5. 发明申请

US20100154886A1 COATED POLYMERIC SUBSTRATES HAVING IMPROVED SURFACE SMOOTHNESS SUITABLE FOR USE IN FLEXIBLE ELECTRONIC AND OPTO-ELECTRONIC DEVICES 有权
标题翻译：具有适用于柔性电子和光电设备的改进表面光滑性的涂层聚合物基材
公开(公告)号：US20100154886A1
公开(公告)日：2010-06-24
申请号：US12640835
申请日：2009-12-17
申请人： Julian Neal Robinson , Robert William Eveson , Karl Rakos
发明人： Julian Neal Robinson , Robert William Eveson , Karl Rakos
IPC分类号： H01L31/0216 , B05D3/12 , B05D5/12 , C08G63/13
CPC分类号： H01L51/0097 , C08J7/047 , C08J2367/02 , C08J2483/00 , C09D183/04 , H01L51/0002 , H01L51/52 , H05B33/14 , Y02E10/549 , Y02P70/521 , Y10S428/91 , Y10T428/1045 , Y10T428/1086 , Y10T428/1379 , Y10T428/24355 , Y10T428/24372 , Y10T428/24421 , Y10T428/25 , Y10T428/259 , Y10T428/26 , Y10T428/269 , Y10T428/31663 , Y10T428/31786 , C08L2666/54
摘要： The use of a coating composition comprising: (a) from about 5 to about 50 weight percent solids, the solids comprising from about 10 to about 70 weight percent silica and from about 90 to about 30 weight percent of a partially polymerized organic silanol of the general formula RSi(OH)3, wherein R is selected from methyl and up to about 40% of a group selected from the group consisting of vinyl, phenyl, gamma-glycidoxypropyl, and gamma-methacryloxypropyl, and (b) from about 95 to about 50 weight percent solvent, the solvent comprising from about 10 to about 90 weight percent water and from about 90 to about 10 weight percent lower aliphatic alcohol, wherein the coating composition has a pH of from about 3.0 to about 8.0, for the purpose of improving the surface smoothness of a polymeric substrate, particularly a heat-stabilised, heat-set, oriented polyester substrate, and use of said coated substrate in the manufacture of an electronic or opto-electronic device containing a conjugated conductive polymer.
摘要翻译：涂料组合物的用途包括：（a）约5至约50重量％的固体，固体包含约10至约70重量％的二氧化硅和约90至约30重量％的部分聚合的有机硅烷醇通式RSi（OH）3，其中R选自甲基和至多约40％的选自乙烯基，苯基，γ-缩水甘油氧基丙基和γ-甲基丙烯酰氧基丙基的基团，和（b）约95至约50重量％的溶剂，溶剂包含约10至约90重量％的水和约90至约10重量％的低级脂族醇，其中涂料组合物的pH为约3.0至约8.0，用于提高聚合物基材，特别是热稳定的热定型聚酯基材的表面光滑度，以及使用所述涂覆的基材在制造含有共轭C的电子或光电装置导电聚合物。

6. 发明申请

US20110081530A1 Anti-Microbial Polymeric Film and Method of Manufacture of Said Film 审中-公开
标题翻译：抗微生物聚合物薄膜和所述薄膜的制造方法
公开(公告)号：US20110081530A1
公开(公告)日：2011-04-07
申请号：US12997496
申请日：2009-06-10
申请人： Julian Neal Robinson , Robert W. Eveson , Karl Rakos , David Brown , Jackie Symonds , Debbie A. Stephenson
发明人： Julian Neal Robinson , Robert W. Eveson , Karl Rakos , David Brown , Jackie Symonds , Debbie A. Stephenson
IPC分类号： B32B7/02 , B29C55/04 , B05D3/02 , B29C55/14
CPC分类号： B29C55/026 , B29C55/023 , B29C71/0009 , Y10T428/24942
摘要： A method of manufacture of an anti-microbial polymeric film comprising coextruding a polymeric substrate layer comprising a first layer of a first polymeric material and a second layer of a second polymeric material wherein the crystalline melting temperature (TM2) of said second polymeric material is lower than the crystalline melting temperature (TM1) of the first polymeric material; stretching the coextruded substrate in a first direction; optionally stretching the substrate layer in a second, orthogonal direction; disposing on the surface of the polymeric second layer a composition comprising a particulate antimicrobial compound and a liquid vehicle, and preferably also a surfactant; and heat-setting the stretched film at a temperature above the crystalline melting temperature (TM2) of the second polymeric material but below the crystalline melting temperature (TM1) of the first polymeric material; wherein the composition is applied to the polymeric second layer after the coextrusion step but before the heat-setting step; such that in the final film said second layer comprises said anti-microbial compound in an amount of from about 1 to about 80% by weight of said polymeric material of the second layer is described. Anti-microbial films are also described.
摘要翻译：一种制造抗微生物聚合物膜的方法，包括将包含第一聚合物材料的第一层和第二聚合物材料的第二层的聚合物基底层共挤出，其中所述第二聚合物材料的结晶熔融温度（TM2）较低比第一聚合物材料的结晶熔融温度（TM1）高; 在第一方向上拉伸所述共挤出的基材; 任选地在第二正交方向上拉伸基底层; 在聚合物第二层的表面上设置包含颗粒状抗微生物化合物和液体载体的组合物，优选还包括表面活性剂; 以及在高于第二聚合物材料的结晶熔化温度（TM2）但低于第一聚合物材料的结晶熔融温度（TM1）的温度下热定型拉伸膜; 其中所述组合物在共挤出步骤之后但在热定形步骤之前施加到聚合物第二层; 使得在最终膜中所述第二层包含所述抗微生物化合物的量为所述第二层聚合物材料的约1至约80重量％。还描述了抗微生物膜。

7. 发明申请

US20050238871A1 Coated polymeric substrates having improved surface smoothness suitable for use in flexible electronic and opto-electronic devices 有权
标题翻译：涂覆的聚合物基材具有改善的表面光滑度，适用于柔性电子和光电子器件
公开(公告)号：US20050238871A1
公开(公告)日：2005-10-27
申请号：US10510084
申请日：2003-03-19
申请人： Julian Robinson , Robert Eveson , Karl Rakos
发明人： Julian Robinson , Robert Eveson , Karl Rakos
IPC分类号： B05D7/04 , B05D7/24 , B32B9/00 , B32B27/36 , C08J7/04 , C09D7/12 , C09D183/04 , H01L51/00 , H01L51/40 , H01L51/52 , H05B33/14 , B32B5/16
CPC分类号： H01L51/0097 , C08J7/047 , C08J2367/02 , C08J2483/00 , C09D183/04 , H01L51/0002 , H01L51/52 , H05B33/14 , Y02E10/549 , Y02P70/521 , Y10S428/91 , Y10T428/1045 , Y10T428/1086 , Y10T428/1379 , Y10T428/24355 , Y10T428/24372 , Y10T428/24421 , Y10T428/25 , Y10T428/259 , Y10T428/26 , Y10T428/269 , Y10T428/31663 , Y10T428/31786 , C08L2666/54
摘要： The use of a coating composition comprising: (a) from about 5 to about 50 weight percent solids, the solids comprising from about 10 to about 70 weight percent silica and from about 90 to about 30 weight percent of a partially polymerized organic silanol of the general formula RSi(OH)3, wherein R is selected from methyl and up to about 40% of a group selected from the group consisting of vinyl, phenyl, gamma-glycidoxypropyl, and gamma-methacryloxypropyl, and (b) from about 95 to about 50 weight percent solvent, the solvent comprising from about 10 to about 90 weight percent water and from about 90 to about 10 weight percent lower aliphatic alcohol, wherein the coating composition has a pH of from about 3.0 to about 8.0, for the purpose of improving the surface smoothness of a polymeric substrate, particularly a heat-stabilised, heat-set, oriented polyester substrate, and use of said coated substrate in the manufacture of an electronic or optoelectronic device containing a conjugated conductive polymer.
摘要翻译：涂料组合物的用途包括：（a）约5至约50重量％的固体，固体包含约10至约70重量％的二氧化硅和约90至约30重量％的部分聚合的有机硅烷醇通式RSi（OH）3 N，其中R选自甲基和至多约40％的选自乙烯基，苯基，γ-缩水甘油氧基丙基和γ-甲基丙烯酰氧基丙基的基团，以及（b）约95至约50重量％的溶剂，所述溶剂包含约10至约90重量％的水和约90至约10重量％的低级脂族醇，其中所述涂料组合物的pH为约3.0至约为8.0，用于改善聚合物基材，特别是热稳定的热定型聚酯基材的表面光滑度，以及使用所述涂覆的基材制备含有共聚物的电子或光电装置共轭导电聚合物。

8. 发明授权

US10106706B2 Film comprising a strippable sacrificial layer for reduction of surface defects in a substrate 有权
公开(公告)号：US10106706B2
公开(公告)日：2018-10-23
申请号：US14005738
申请日：2012-03-13
申请人： Robert Eveson , Karl Rakos , Damian Peter Tuffin , Dominic Hoy
发明人： Robert Eveson , Karl Rakos , Damian Peter Tuffin , Dominic Hoy
IPC分类号： B32B7/04 , B32B7/06 , B32B27/08 , B32B27/30 , B32B27/36 , B32B37/15 , B32B38/10 , C08L33/02 , C08F20/04 , C08F20/06 , C08F22/02 , G02B1/10 , C09J7/02 , C09J7/40
摘要： A coextruded biaxially oriented composite film comprising a polyester substrate layer and disposed on one or both surfaces thereof a strippable sacrificial layer, wherein said strippable sacrificial layer comprises an ethylene-methacrylic acid (EMAA) copolymer.

9. 发明授权

US06468641B2 Backlit display composite film 有权
标题翻译：背光显示复合膜
公开(公告)号：US06468641B2
公开(公告)日：2002-10-22
申请号：US09805649
申请日：2001-03-14
申请人： Karl Rakos , Paul David Alan Mills , Moira Logan , Noel Stephen Brabbs
发明人： Karl Rakos , Paul David Alan Mills , Moira Logan , Noel Stephen Brabbs
IPC分类号： B32B702
CPC分类号： B32B27/08 , B32B27/36 , B32B2307/412 , B32B2309/105 , B41M5/502 , C08J7/047 , C08J2367/02 , Y10T428/24942 , Y10T428/2495 , Y10T428/252 , Y10T428/254 , Y10T428/259 , Y10T428/26 , Y10T428/31786 , Y10T428/31794
摘要： A composite film is described which consists of a primary unfilled polyester layer and a secondary polyester layer containing from 1 to 8% by weight, based on the weight of the secondary polyester layer, of finely divided silica particles having a volume weighted mean particle size diameter D[4,3] of from 2.3 to 6.2 micrometers. The composite film is used in backlit displays such as illuminated signboards and provides uniform light transmission while maintaining the same strength of illumination at all points over the area of the display.
摘要翻译：描述了一种复合膜，其由初级未填充聚酯层和次级聚酯层组成，所述第二聚酯层含有基于二次聚酯层重量的1至8重量％的具有体积加权平均粒度直径的细碎二氧化硅颗粒 D [4,3]为2.3至6.2微米。复合胶片用于诸如照明招牌的背光显示器中，并提供均匀的光透射，同时在显示器的区域上的所有点保持相同的照明强度。

10. 发明申请

US20150241210A1 METROLOGY METHOD 有权
标题翻译：计量方法
公开(公告)号：US20150241210A1
公开(公告)日：2015-08-27
申请号：US14429139
申请日：2013-09-19
申请人： Karl RAKOS
发明人： Karl Rakos
IPC分类号： G01B11/30 , G01B11/24
CPC分类号： G01B11/30 , G01B9/02032 , G01B9/02048 , G01B11/2441
摘要： An interferometric method for profiling the topography of a sample surface comprises: (i) a first interferometric profiling step at a first magnification M1 to produce a map comprising pixels with planar (X,Y)-coordinates corresponding to the area of the sample surface, (ii) identifying pixel(s) which meet or exceed a Cut-Off Threshold, and meet or exceed a parameter NNAP; (iii) identifying pixel(s) for which no z-coordinate has been recorded; (iv) generating a Low Magnification Frame File (LMFF) which comprises the (X,Y) coordinates of the pixels derived from steps (ii) and (iii); (v) a second interferometric profiling step at a second magnification M2, wherein M2>M1, wherein only selected regions of the sample surface are analysed, said selected regions comprising the features associated with the (X,Y)-coordinates of the pixels in the Low Magnification Frame File; and further comprising a step selected from: (vi) analysing the output of the second interferometric profiling step to differentiate between an intrinsic defect and an extrinsic defect; (vii) assessing whether said sample surface meets one or more quality control standard(s) and/or one or more target property or properties; and (viii) assessing whether said sample surface is suitable as a surface for subsequent coating.
摘要翻译：用于对样品表面的形貌进行分析的干涉测量方法包括：（i）在第一放大率M1处的第一干涉测量步骤，以产生包括对应于样品表面的面积的平面（X，Y） - 坐标的像素的图，（ii）识别符合或超过切断阈值的像素，并且满足或超过参数NNAP; （iii）识别没有记录z坐标的像素; （iv）产生包括从步骤（ii）和（iii）导出的像素的（X，Y）坐标的低放大帧文件（LMFF）; （v）在第二放大率M2处的第二干涉测量步骤，其中M2> M1，其中仅分析样品表面的选定区域，所述选择的区域包括与所述像素的（X，Y）坐标相关联的特征低放大帧文件; 并且还包括选自以下的步骤：（vi）分析所述第二干涉测量步骤的输出以区分本征缺陷和非本征缺陷; （vii）评估所述样品表面是否满足一种或多种质量控制标准和/或一种或多种目标性质或性质; 和（viii）评估所述样品表面是否适合作为后续涂层的表面。

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