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1. 发明申请

US20210318279A1 SENSOR AND SENSOR MODULE 有权
公开(公告)号：US20210318279A1
公开(公告)日：2021-10-14
申请号：US17176878
申请日：2021-02-16
申请人： KABUSHIKI KAISHA TOSHIBA
发明人： Yosuke AKIMOTO , Hiroki KUDO , Hiroaki YAMAZAKI , Kentaro NAKAJIMA , Kohei SUZUKI
IPC分类号： G01N33/00 , G08C17/02
摘要： According to one embodiment, a sensor includes a handhole part, and a sensor module. The handhole part includes an inner wall and a holder. The holder is located at the inner wall. The sensor module is provided in the handhole part. The sensor module includes a held part held by the holder, a housing connected with the held part, a sensor circuit provided in the housing and including a gas sensor element, and a battery configured to supply electrical power to the sensor circuit. A gap is between the inner wall and the housing and between the housing and a first member under the housing.

2. 发明申请

US20150262757A1 MEMS DEVICE 审中-公开
标题翻译： MEMS器件
公开(公告)号：US20150262757A1
公开(公告)日：2015-09-17
申请号：US14481565
申请日：2014-09-09
申请人： KABUSHIKI KAISHA TOSHIBA
发明人： Hiroaki YAMAZAKI
IPC分类号： H01G5/16
CPC分类号： H01G5/18 , B81B2201/0221
摘要： According to one embodiment, a MEMS device includes a lower electrode, a movable upper electrode having a portion facing the lower electrode, and a first member connected to the upper electrode. At least a part of a connecting portion of the upper electrode and the first member does not overlap the lower electrode when viewed from a direction vertical to a main surface of the lower electrode.
摘要翻译：根据一个实施例，MEMS器件包括下电极，具有面向下电极的部分的可移动上电极和连接到上电极的第一部件。当从垂直于下电极的主表面的方向观察时，上电极和第一构件的连接部分的至少一部分不与下电极重叠。

3. 发明申请

US20130286534A1 VARIABLE-CAPACITOR DEVICE AND DRIVING METHOD THEREOF 审中-公开
标题翻译：可变电容器件及其驱动方法
公开(公告)号：US20130286534A1
公开(公告)日：2013-10-31
申请号：US13838939
申请日：2013-03-15
申请人： KABUSHIKI KAISHA TOSHIBA
发明人： Tamio IKEHASHI , Hiroaki YAMAZAKI
IPC分类号： H01G5/04
CPC分类号： H01G5/04 , H01G5/18 , H01G5/38
摘要： According to one embodiment, a variable-capacitor device includes a first MEMS variable-capacitor element, and a second MEMS variable-capacitor element including one end series-connected to one end of the first MEMS variable-capacitor element. In a down-state, a first capacitance value of the first MEMS variable-capacitor element differs from a second capacitance value of the second MEMS variable-capacitor element.
摘要翻译：根据一个实施例，可变电容器装置包括第一MEMS可变电容器元件和包括与第一MEMS可变电容器元件的一端串联连接的一端的第二MEMS可变电容器元件。在下降状态下，第一MEMS可变电容器元件的第一电容值与第二MEMS可变电容器元件的第二电容值不同。

4. 发明申请

US20230077493A1 SENSOR 有权
公开(公告)号：US20230077493A1
公开(公告)日：2023-03-16
申请号：US17823629
申请日：2022-08-31
申请人： KABUSHIKI KAISHA TOSHIBA
发明人： Ping WANG , Hiroaki YAMAZAKI
IPC分类号： B81B3/00
摘要： According to one embodiment, a sensor includes a base, first and second detection units. The base includes first and second base regions. The first detection unit includes a first detection element including a first resistance member, a first conductive member, and a first insulating member. A part of the first insulating member is between the first resistance member and the first conductive member. A first gap is provided between the first base region and first detection element. The first detection element has a first area. The second detection unit includes a second detection element including a second resistance member, a second conductive member, and a second insulating member. A part of the second insulating member is between the second resistance member and the second conductive member. A second gap is provided between the second base region and second detection element. The second detection element has a second area.

5. 发明申请

US20220084767A1 MEMS ELEMENT AND ELECTRICAL CIRCUIT 有权
公开(公告)号：US20220084767A1
公开(公告)日：2022-03-17
申请号：US17186387
申请日：2021-02-26
申请人： KABUSHIKI KAISHA TOSHIBA
发明人： Hiroaki YAMAZAKI , Kei Masunishi
IPC分类号： H01H59/00 , H01H1/00
摘要： According to one embodiment, a MEMS element includes a first member, and an element part. The element part includes a first fixed electrode fixed to the first member, a first movable electrode facing the first fixed electrode, a first conductive member electrically connected to the first movable electrode, and a second conductive member electrically connected to the first movable electrode. The first movable electrode is supported by the first and second conductive members to be separated from the first fixed electrode. The first conductive member has a meandering structure. The second conductive member includes a first conductive region and a second conductive region. The second conductive region is between the first movable electrode and the first conductive region. A second width of the second conductive region along a second direction is less than a first width of the first conductive region along the second direction.

6. 发明申请

US20210318282A1 SENSOR AND SENSOR MODULE 有权
公开(公告)号：US20210318282A1
公开(公告)日：2021-10-14
申请号：US17176799
申请日：2021-02-16
申请人： KABUSHIKI KAISHA TOSHIBA
发明人： Yosuke AKIMOTO , Hiroki KUDO , Hiroaki YAMAZAKI
IPC分类号： G01N33/00
摘要： According to one embodiment, a sensor includes a handhole part, a sensor module, and a holder. The handhole part includes an inner wall. The sensor module is provided in the handhole part. The sensor module includes a housing, a sensor circuit provided in the housing, the sensor circuit including a gas sensor element, and a battery configured to supply electrical power to the sensor circuit. The holder holds the sensor module so that a gap is formed between the inner wall and the housing and between the housing and a first member under the housing.

7. 发明申请

US20170074925A1 DEVICE AND INSPECTION METHOD OF THE SAME 审中-公开
标题翻译：其设备和检测方法
公开(公告)号：US20170074925A1
公开(公告)日：2017-03-16
申请号：US15067131
申请日：2016-03-10
申请人： KABUSHIKI KAISHA TOSHIBA
发明人： Hiroaki YAMAZAKI
IPC分类号： G01R31/28 , H05B3/00 , H01L41/09 , H01L41/053 , H01L41/08 , G01R31/26 , H05B1/02
CPC分类号： H01L41/09 , H05B1/023 , H05B3/0014 , H05B3/265
摘要： According to one embodiment, a device is disclosed. The device includes a substrate, an element provided on the substrate, and a film on the substrate. The film and the substrate constitute a cavity in which the element is housed. The device further includes a member capable of generating heat or deforming.
摘要翻译：根据一个实施例，公开了一种装置。该器件包括衬底，设置在衬底上的元件和衬底上的膜。膜和衬底构成容纳元件的空腔。该装置还包括能够产生热量或变形的构件。

8. 发明申请

US20140284188A1 MEMS DEVICE AND METHOD OF MANUFACTURING THE SAME 有权
标题翻译： MEMS器件及其制造方法
公开(公告)号：US20140284188A1
公开(公告)日：2014-09-25
申请号：US13966175
申请日：2013-08-13
申请人： KABUSHIKI KAISHA TOSHIBA
发明人： Hiroaki YAMAZAKI , Haruka KUBO
IPC分类号： B81B3/00 , B81C1/00 , H01H59/00
CPC分类号： B81B3/0086 , B81B2201/016 , H01G5/18 , H01H59/0009
摘要： According to one embodiment, a MEMS device comprises a first electrode provided on a support substrate, a second electrode opposed to the first electrode and movable in the direction it is opposed to the first electrode, and beam parts, each connected to those sides of the second electrode, which oppose to each other, and each supporting the second electrode. The second electrode has a slit extending parallel to the sides to which the beam parts are connected and opening at both the front and the back. Further, the second electrode has at least one bridge part extending over the slit, crossing the slit and made of a material different from that of the second electrode.
摘要翻译：根据一个实施例，MEMS器件包括设置在支撑衬底上的第一电极，与第一电极相对并且可在第一电极与第一电极相对的方向上移动的第二电极，以及每个连接到第一电极的那些侧的光束部分第二电极彼此相对，并且每个支撑第二电极。第二电极具有平行于侧面延伸的狭缝，梁部分连接到侧面并且在前后两者都开口。此外，第二电极具有至少一个在狭缝上延伸的桥接部分，该桥部分与狭缝交叉并且由不同于第二电极的材料制成。

9. 发明申请

US20130285163A1 MEMS ELEMENT AND METHOD OF MANUFACTURING THE SAME 有权
标题翻译： MEMS元件及其制造方法
公开(公告)号：US20130285163A1
公开(公告)日：2013-10-31
申请号：US13802520
申请日：2013-03-13
申请人： KABUSHIKI KAISHA TOSHIBA
发明人： Yuriko KATO , Hiroaki YAMAZAKI , Etsuji OGAWA , Takayuki MASUNAGA
IPC分类号： B81B3/00
CPC分类号： B81B3/0086 , B81B2201/0221 , H01G5/18
摘要： According to one embodiment, a MEMS element comprises a first electrode fixed on a substrate, and a second electrode arranged above the first electrode, facing the first electrode, and vertically movable. The second electrode includes a second opening portion that penetrates from an upper surface to a lower surface of the second electrode. The first electrode includes a first opening portion at a position corresponding to at least a part of the second opening portion, the first opening portion penetrating from an upper surface to a lower surface of the first electrode.
摘要翻译：根据一个实施例，MEMS元件包括固定在基板上的第一电极和布置在第一电极之上的面向第一电极并且可垂直移动的第二电极。第二电极包括从第二电极的上表面到下表面穿透的第二开口部分。第一电极包括在对应于第二开口部分的至少一部分的位置处的第一开口部分，第一开口部分从第一电极的上表面穿透到下表面。

10. 发明申请

US20230084037A1 SENSOR 有权
公开(公告)号：US20230084037A1
公开(公告)日：2023-03-16
申请号：US17665301
申请日：2022-02-04
申请人： KABUSHIKI KAISHA TOSHIBA
发明人： Hiroaki YAMAZAKI
IPC分类号： G01R15/18 , G01R19/00
摘要： According to one embodiment, a sensor includes a base, and a first structure body. The base includes semiconductor dement including the first dement electrode. The first structure body includes a first conductive member and a coil. The first conductive member is electrically connected with the first element electrode. The coil is provided around the first conductive member in a first plane crossing a first direction from the base to the first structure body.

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