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    • 5. 发明授权
    • DLC film and method for forming the same
    • DLC膜及其形成方法
    • US07466491B2
    • 2008-12-16
    • US11660036
    • 2005-07-06
    • Takashi MatsuuraKazuhiko OdaToshihiko Ushiro
    • Takashi MatsuuraKazuhiko OdaToshihiko Ushiro
    • G02B3/00
    • G02B5/1857G02B3/0087
    • The present invention provides a DLC film that functions as an optical element and that can easily be miniaturized or integrated, and a method for forming the DLC film. A DLC film that has a refractive index varying continuously in at least one width direction from the center O of the DLC film. More specifically, a DLC film in which the refractive index decreases continuously in at least one width direction from the center O of the DLC film, and thereby the DLC film functions as a convex lens. A DLC film in which the refractive index increases continuously in at least one width direction from the center of the DLC film, and thereby the DLC film functions as a concave lens. A DLC film that has a refractive index varying continuously in the thickness direction. In addition, a method for forming a DLC film, including irradiating the DLC film with an energy beam to change the refractive index of the DLC film continuously in at least one width direction from the center of the DLC film and/or the thickness direction.
    • 本发明提供了用作光学元件并且可以容易地小型化或集成的DLC膜以及用于形成DLC膜的方法。 具有从DLC膜的中心O至少一个宽度方向连续变化的折射率的DLC膜。 更具体地说,其中折射率从DLC膜的中心O在至少一个宽度方向上连续降低的DLC膜,从而DLC膜用作凸透镜。 DLC膜的折射率在距离DLC膜的中心的至少一个宽度方向上连续增加,从而DLC膜用作凹透镜。 折射率在厚度方向连续变化的DLC膜。 另外,用于形成DLC膜的方法包括用能量束照射DLC膜,以从DLC膜的中心和/或厚度方向在至少一个宽度方向连续地改变DLC膜的折射率。
    • 10. 发明申请
    • Solid-state imaging device and production method thereof
    • 固态成像装置及其制造方法
    • US20090115011A1
    • 2009-05-07
    • US11921102
    • 2006-07-13
    • Toshihiko UshiroKazuhiko OdaTakashi Matsuura
    • Toshihiko UshiroKazuhiko OdaTakashi Matsuura
    • H01L31/0232G02B5/32H01L21/77
    • H01L27/14627H01L27/14621
    • A solid-state imaging device includes a plurality of photodiode regions arranged in an array, a non-transparent border region existing around each photodiode region, and a microlens array including a plurality of microlenses arranged in an array corresponding to the plurality of photodiode regions; wherein each microlens functions to converge incident light advancing straight toward the non-transparent border region around the corresponding photodiode region into that photodiode region, and the microlens array is formed using a transparent diamond-like carbon (DLC) film, the DLC film including a region where its refractive index is modulated corresponding to each microlens, and a light-converging effect being caused when light flux passes through the region where the refractive index was modulated.
    • 固态成像装置包括以阵列排列的多个光电二极管区域,存在于每个光电二极管区域周围的不透明边界区域,以及包括以与多个光电二极管区域对应的阵列排列的多个微透镜的微透镜阵列; 其特征在于,每个微透镜用于使入射到所述光电二极管区域的相应光电二极管区域周围的非透明边界区域的直线前进的会聚光,并使用透明金刚石碳(DLC)膜形成所述微透镜阵列,所述DLC膜包括 区域,其折射率对应于每个微透镜调制,并且当光束通过折射率被调制的区域时产生聚光效应。