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    • 7. 发明申请
    • Surface Shape Measurement Device and Surface Shape Measurement Method
    • US20220349699A1
    • 2022-11-03
    • US17272426
    • 2019-08-29
    • University of Hyogo
    • Kunihiro SATO
    • G01B9/02015G01B9/02G03H1/04
    • The present invention provides a surface shape measuring device and a surface shape measuring method which do not require a physical reference plane and can improve measurement accuracy without using a mechanical adjustment mechanism. The illumination light condensing point PQ and the reference light condensing point PL are arranged as mirror images of each other with respect to the virtual plane VP, and each data of the object light O, being a reflected light of the spherical wave illumination light Q, and the inline spherical wave reference light L is recorded on each hologram. On the virtual plane VP, the reconstructed object light hologram hV for measurement is generated, and the spherical wave optical hologram sV representing a spherical wave light emitted from the reference light condensing point PL is analytically generated. The height distribution of the surface to be measured of the object 4 is obtained from the phase distribution obtained by dividing the reconstructed object light hologram hV by the spherical wave light hologram sV. High-accuracy surface shape measurement without requiring a reference plane such as a glass substrate is realized by comparing the phase data of the reflected light acquired from the surface to be measured and the phase distribution on the plane cut surface of the spherical wave obtained analytically.