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1. 发明授权

US11367592B2 Adaptive periodic waveform controller 有权
公开(公告)号：US11367592B2
公开(公告)日：2022-06-21
申请号：US16905377
申请日：2020-06-18
申请人： MKS Instruments, Inc.
发明人： Larry J. Fisk, II , Aaron T. Radomski , Jonathan W. Smyka
IPC分类号： H01J37/32
摘要： A repeating setpoint generator module selectively varies a setpoint for an output parameter according to a predetermined pattern that repeats during successive time intervals. A closed-loop module, during a first one of the time intervals, generates N closed-loop values based on N differences between (i) N values of the setpoint at N times during the first one of the time intervals and (ii) N measurements of the output parameter at the N times during the first one of the time intervals, respectively. An adjusting module, during the first one of the time intervals, generates N adjustment values based on N differences between (i) N values of the setpoint at the N times during a second one of the time intervals and (ii) N measurements of the output parameter at the N times during the second one of the time intervals, respectively.

2. 发明授权

US10727027B2 Adaptive periodic waveform controller 有权
公开(公告)号：US10727027B2
公开(公告)日：2020-07-28
申请号：US16273595
申请日：2019-02-12
申请人： MKS Instruments, Inc.
发明人： Larry J. Fisk, II , Aaron T. Radomski , Jonathan W. Smyka
IPC分类号： H01J37/32
摘要： A repeating setpoint generator module selectively varies a setpoint for an output parameter according to a predetermined pattern that repeats during successive time intervals. A closed-loop module, during a first one of the time intervals, generates N closed-loop values based on N differences between (i) N values of the setpoint at N times during the first one of the time intervals and (ii) N measurements of the output parameter at the N times during the first one of the time intervals, respectively. An adjusting module, during the first one of the time intervals, generates N adjustment values based on N differences between (i) N values of the setpoint at the N times during a second one of the time intervals and (ii) N measurements of the output parameter at the N times during the second one of the time intervals, respectively.

3. 发明授权

US10930470B2 Pulsed, bidirectional radio frequency source/load 有权
公开(公告)号：US10930470B2
公开(公告)日：2021-02-23
申请号：US16710412
申请日：2019-12-11
申请人： MKS Instruments, Inc.
发明人： Aaron T. Radomski , Ky Luu , Larry J. Fisk, II , Ross Reinhardt , Matthew G. Harrington , Amish Rughoonundon , Jesse N. Klein , Aaron M. Burry
IPC分类号： H05B33/00 , H01J37/32 , H01L21/3065 , H05H1/46
摘要： A radio frequency power system includes a master RF generator and an auxiliary RF generator, wherein each generator outputs a respective RF signal. The master RF generator also outputs a RF control signal to the auxiliary RF generator, and the RF signal output by the auxiliary RF generator varies in accordance with the RF control signal. The auxiliary RF generator receives sense signals indicative of an electrical characteristic of the respective RF signals output by the master RF generator and the auxiliary RF generator. The auxiliary RF generator determines a phase difference between the RF signals. The sensed electrical characteristics and the phase are used independently or cooperatively to control the phase and amplitude of the RF signal output by the auxiliary RF generator. The auxiliary generator includes an inductive clamp circuit that returns energy reflected energy back from a coupling network to a variable resistive load.

4. 发明授权

US10546724B2 Pulsed, bidirectional radio frequency source/load 有权
公开(公告)号：US10546724B2
公开(公告)日：2020-01-28
申请号：US15974947
申请日：2018-05-09
申请人： MKS Instruments, Inc.
发明人： Aaron T. Radomski , Ky Luu , Larry J. Fisk, II , Ross Reinhardt , Matthew G. Harrington , Amish Rughoonundon , Jesse N. Klein , Aaron M. Burry
IPC分类号： H05B33/00 , H01J37/32 , H01L21/3065 , H05H1/46
摘要： A radio frequency power system includes a master RF generator and an auxiliary RF generator, wherein each generator outputs a respective RF signal. The master RF generator also outputs a RF control signal to the auxiliary RF generator, and the RF signal output by the auxiliary RF generator varies in accordance with the RF control signal. The auxiliary RF generator receives sense signals indicative of an electrical characteristic of the respective RF signals output by the master RF generator and the auxiliary RF generator. The auxiliary RF generator determines a phase difference between the RF signals. The sensed electrical characteristics and the phase are used independently or cooperatively to control the phase and amplitude of the RF signal output by the auxiliary RF generator. The auxiliary generator includes an inductive clamp circuit that returns energy reflected energy back from a coupling network to a variable resistive load.

5. 发明授权

US08736377B2 RF pulse edge shaping 有权
标题翻译： RF脉冲边缘整形
公开(公告)号：US08736377B2
公开(公告)日：2014-05-27
申请号：US13663574
申请日：2012-10-30
申请人： MKS Instruments, Inc.
发明人： Amish Rughoonundon , Larry J. Fisk, II , Aaron T. Radomski
IPC分类号： H03F3/04
CPC分类号： H03K4/026 , H03K5/00006
摘要： A radio frequency (RF) generation module includes a power control module that receives first and second desired amplitudes of an output of the RF generation module in first and second respective states, and that outputs, based on the first and second desired amplitudes, input power setpoints corresponding to a transition from the first state to the second state. A frequency control module receives the input power setpoints and outputs frequency setpoints corresponding to the input power setpoints. A pulse shaping module receives the input power setpoints, the frequency setpoints, and an indication of when to transition from the first state to the second state, and transitions the output of the RF generation module from the first state to the second state based on the input power setpoints, the frequency setpoints, and the indication.
摘要翻译：射频（RF）生成模块包括功率控制模块，其在第一和第二相应状态下接收RF产生模块的输出的第一和第二期望幅度，并且基于第一和第二期望幅度输出输入功率设定值对应于从第一状态到第二状态的转变。频率控制模块接收输入功率设定点并输出与输入功率设定值对应的频率设定值。脉冲整形模块接收输入功率设定点，频率设定点以及何时从第一状态转换到第二状态的指示，并且基于该第一状态将RF产生模块的输出从第一状态转换到第二状态输入功率设定值，频率设定值和指示。

6. 发明授权

US11536755B2 System and method for arc detection using a bias RF generator signal 有权
公开(公告)号：US11536755B2
公开(公告)日：2022-12-27
申请号：US16887346
申请日：2020-05-29
申请人： MKS Instruments, Inc.
发明人： Larry J. Fisk, II , Benjamin J. Gitlin , Mariusz Oldziej , Aaron M. Burry , Matthew G. Harrington , Aaron T. Radomski
IPC分类号： H01J37/32 , G01R29/02 , G01R23/16
摘要： An arc detector for a RF power supply system, where the RF power supply incudes a first RF power supply and a second RF power supply. A signal applied to a non-linear load varies in accordance with an output from one of the first RF power supply or the second RF power supply. The signal has a frequency. During an arc or arc condition in the non-linear load, the frequency of the signal changes, and if the frequency is outside of a selected range, an arc or arc condition is indicated. The frequency can be determined by digitizing the signal into a series of pulses and measuring a time or period between pulses.

7. 发明授权

US11158488B2 High speed synchronization of plasma source/bias power delivery 有权
公开(公告)号：US11158488B2
公开(公告)日：2021-10-26
申请号：US16452716
申请日：2019-06-26
申请人： MKS Instruments, Inc. , LAM RESEARCH CORPORATION
发明人： Aaron T. Radomski , Benjamin J. Gitlin , Larry J. Fisk, II , Mariusz Oldziej , Aaron M. Burry , Jonathan W. Smyka , Alexei Marakhtanov , Bing Ji , Felix Leib Kozakevich , John Holland , Ranadeep Bhowmick
IPC分类号： H01J37/32
摘要： A radio frequency (RF) generator system includes first and second RF power sources, each RF power source applying a respective RF signal and second RF signal to a load. The first RF signal is applied in accordance with the application of the second RF signal. The application of the first RF signal is synchronized to application of the second RF signal. The first RF signal may be amplitude modulated in synchronization with the second RF signal, and the amplitude modulation can include blanking of the first RF signal. A frequency offset may be applied to the first RF signal in synchronization with the second RF signal. A variable actuator associated with the first RF power source may be controlled in accordance with the second RF signal.

8. 发明授权

US09136093B2 Synchronization of RF pulsing with RF metrology, processing, and control 有权
标题翻译： RF脉冲与RF测量，处理和控制的同步
公开(公告)号：US09136093B2
公开(公告)日：2015-09-15
申请号：US13761955
申请日：2013-02-07
申请人： MKS Instruments, Inc.
发明人： David J. Coumou , Larry J. Fisk, II , Aaron T. Radomski , Jaehyun Kim , Sang-Won Lee , Jonathan Smyka
IPC分类号： H01J37/32
CPC分类号： H01J37/32174 , H01J37/3299
摘要： A radio frequency (RF) system is disclosed. The RF system includes an RF sensor, an analog to digital converter (ADC) module, a processing module, and a synchronization module. The RF sensor measures a parameter of an RF output and generates an RF signal based on the parameter. The ADC module converts samples of the RF signal into digital values. The processing module generates processed values based on the digital values. The synchronization module outputs one of the processed values in response to a transition in the RF output.
摘要翻译：公开了射频（RF）系统。 RF系统包括RF传感器，模数转换器（ADC）模块，处理模块和同步模块。 RF传感器测量RF输出的参数，并根据参数产生RF信号。 ADC模块将RF信号的采样转换为数字值。处理模块基于数字值产生处理的值。响应于RF输出中的转换，同步模块输出其中一个处理值。

9. 发明授权

US10217609B2 Adaptive periodic waveform controller 有权
公开(公告)号：US10217609B2
公开(公告)日：2019-02-26
申请号：US16005761
申请日：2018-06-12
申请人： MKS Instruments, Inc.
发明人： Larry J. Fisk, II , Aaron T. Radomski , Jonathon W. Smyka
IPC分类号： H01J37/27 , H01J37/32
摘要： A repeating setpoint generator module selectively varies a setpoint for an output parameter according to a predetermined pattern that repeats during successive time intervals. A closed-loop module, during a first one of the time intervals, generates N closed-loop values based on N differences between (i) N values of the setpoint at N times during the first one of the time intervals and (ii) N measurements of the output parameter at the N times during the first one of the time intervals, respectively. An adjusting module, during the first one of the time intervals, generates N adjustment values based on N differences between (i) N values of the setpoint at the N times during a second one of the time intervals and (ii) N measurements of the output parameter at the N times during the second one of the time intervals, respectively.

10. 发明授权

US10049857B2 Adaptive periodic waveform controller 有权
公开(公告)号：US10049857B2
公开(公告)日：2018-08-14
申请号：US14953917
申请日：2015-11-30
申请人： MKS Instruments, Inc.
发明人： Larry J. Fisk, II , Aaron T. Radomski , Jonathan Smyka
IPC分类号： H01J37/32
摘要： A repeating setpoint generator module selectively varies a setpoint for an output parameter according to a predetermined pattern that repeats during successive time intervals. A closed-loop module, during a first one of the time intervals, generates N closed-loop values based on N differences between (i) N values of the setpoint at N times during the first one of the time intervals and (ii) N measurements of the output parameter at the N times during the first one of the time intervals, respectively. An adjusting module, during the first one of the time intervals, generates N adjustment values based on N differences between (i) N values of the setpoint at the N times during a second one of the time intervals and (ii) N measurements of the output parameter at the N times during the second one of the time intervals, respectively.

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